CN110335838A - Transmitting device, transmission chamber and the method for preventing manipulator from corroding - Google Patents
Transmitting device, transmission chamber and the method for preventing manipulator from corroding Download PDFInfo
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- CN110335838A CN110335838A CN201910604844.XA CN201910604844A CN110335838A CN 110335838 A CN110335838 A CN 110335838A CN 201910604844 A CN201910604844 A CN 201910604844A CN 110335838 A CN110335838 A CN 110335838A
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- Prior art keywords
- manipulator
- gas
- gas circuit
- transmission chamber
- transmitting device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention provides a kind of transmitting device, transmission chamber and the method for preventing manipulator from corroding.The transmitting device includes conveying gas circuit, and the outlet side of the conveying gas circuit is arranged in the transmission chamber on the outer surface of manipulator, or is located near the manipulator, to pass through output protection gas, and forms gas blanket around the manipulator.Effective anticorrosion ability can be played to the indoor manipulator of transmission cavity using the present invention, allow some key components and parts to become that part is used for a long time from wearing detail, do not need to regularly replace, reduce the maintenance cost of board.And conveying gas circuit is added, it will not influence the normal use of board substantially, more convenient to the transformation of existing board, cost is relatively low.
Description
Technical field
The present invention relates to IC manufacturing fields, and in particular, to a kind of transmitting device, transmission chamber and prevents machinery
The method of hand corrosion.
Background technique
In the manufacturing process of integrated circuit, wafer need to need by multiple technical process in different chambers into
Row circulation, wherein transmission chamber is mainly used for by wafer transfer to processing chamber to carry out technological reaction, again by wafer after technique
It is transferred in other processing chambers or loading chamaer.It is previous when wafer is transferred to another chamber being connected from a chamber
Product in chamber or remain in crystal column surface, the gas that participates in technological reaction can be diffused into wafer with manipulator and be turned
In the chamber moved on to.Especially manual manipulation wafer when, required when taking piece every time open chamber lid, such air
In steam will be with taking the process of piece to enter in the chamber that wafer is transferred to, if there are chlorine or brominations in chamber
The acid process gas such as hydrogen after these process gas are brought in the chamber that wafer is transferred to, are reacted with the steam in air
Product can corrode the indoor some components of chamber that wafer is transferred to, such as guide rail, the lead screw of manipulator.
In the prior art, in order to enhance the anticorrosive properties of components in transmission chamber, it will usually anti-in component surface plating
Corrosion resistant coating, since these components will take into account the factors such as hardness and workability in selection, erosion shield this
Part would generally select plating metal coating.
But for integrated circuit industry, extra metal may cause metallic pollution to entire technology chain, thus shadow
Ring product quality.
Summary of the invention
The present invention is directed at least solve one of the technical problems existing in the prior art, a kind of transmitting device, biography are proposed
Defeated chamber and the method for preventing manipulator from corroding.
A kind of transmitting device, including manipulator and conveying gas circuit are provided to achieve the purpose of the present invention；
The manipulator is used for transmission wafer；
The outlet side of the conveying gas circuit is arranged on the outer surface of the manipulator, or positioned at the attached of the manipulator
Closely, to pass through output protection gas, to form gas blanket around the manipulator.
Optionally, the manipulator is manipulator；
The conveying gas circuit includes multiple ventholes and main road, wherein the outlet side of multiple ventholes is distributed in institute
It states on the outer surface of at least side of manipulator；The main road is connect with the inlet end of each venthole, the main road
Inlet end is connect with gas source.
Optionally, the manipulator includes mechanical arm and is disposed below, for driving the mechanical arm movement
Driving device, wherein multiple ventholes are respectively distributed to two of the mechanical arm and the driving device opposite to each other
On a surface.
Optionally, the main road includes the first gas circuit and the second gas circuit, wherein first gas circuit is to be arranged in the drive
The first gas passage of the inside of dynamic device, the first gas passage be distributed in the driving device it is each it is described go out
Stomata connection, the inlet end of the first gas passage are connect with the gas source；
Second gas circuit includes the flexible conduit being located at outside the mechanical arm and is arranged in the mechanical arm
Second gas channel, the second gas channel is connected to each venthole being distributed in the mechanical arm；Institute
The both ends for stating flexible conduit are connected to the first gas passage and the second gas channel respectively.
Optionally, the conveying gas circuit is located at more air inlet pipe of at least side of the manipulator, for described in
Manipulator exports the protective gas.
Optionally, the conveying gas circuit further includes main road tracheae, and the main road tracheae is connect with each air inlet pipe, and
The inlet end of the main road tracheae is connect with gas source.
Optionally, the protective gas includes inert gas or nitrogen.
A kind of transmission chamber is provided to achieve the purpose of the present invention, including above-mentioned transmitting device.
It optionally, further include detection unit, control unit and the on-off switch being arranged in the conveying gas circuit, wherein
Chamber is begun to speak or closed to the detection unit for detecting the transmission chamber, and when beginning to speak or closing chamber to the control
Unit sends feedback signal；
Described control unit is described logical used in opening or closing when receiving about the feedback signal for beginning to speak or closing chamber
It disconnects and closing.
A kind of method for preventing manipulator from corroding is provided to achieve the purpose of the present invention, and the manipulator is to be arranged upper
The manipulator in transmission chamber stated, which comprises
When opening the transmission chamber, it is passed through the protective gas from the conveying gas circuit, described
Gas blanket is formed around manipulator.
Optionally, further includes:
When closing the transmission chamber, stopping is passed through the protective gas.
The invention has the following advantages:
Transmitting device provided by the invention can be defeated by protective gas by the conveying gas circuit of setting conveying protective gas
It send to transmission chamber, the flowing for the protective gas being passed through has dispelled the steam in transmission cavity room atmosphere, and in manipulator
Surrounding forms gas blanket, so that the contact of corrosive gas with manipulator in transmission chamber has effectively been isolated, to transmission
The indoor manipulator of chamber plays effective anticorrosion ability, and some key components and parts is allowed to become to make for a long time from wearing detail
It with part, does not need to regularly replace, reduces the maintenance cost of board.And conveying gas circuit is added, it will not influence board substantially
Normal use, more convenient to the transformation of existing board, cost is relatively low.
Detailed description of the invention
Fig. 1 is a kind of main view schematic diagram of transmitting device provided in an embodiment of the present invention；
Fig. 2 is a kind of schematic view of the front view of mechanical arm provided in an embodiment of the present invention；
Fig. 3 is a kind of schematic view of the front view of driving device provided in an embodiment of the present invention；
Fig. 4 is the inside schematic view of the front view of another transmitting device provided in an embodiment of the present invention；
Fig. 5 is the view structural schematic diagram of another transmitting device provided in an embodiment of the present invention.
Specific embodiment
To make those skilled in the art more fully understand technical solution of the present invention, come with reference to the accompanying drawing to the present invention
Transmitting device, transmission chamber and the method for preventing manipulator from corroding of offer are described in detail.
The present embodiment provides a kind of transmitting device, which includes manipulator and conveying gas circuit, and manipulator is for passing
Defeated wafer, the outlet side for conveying gas circuit are arranged on the outer surface of manipulator, or are located near manipulator, to by defeated
Protective gas out, and gas blanket is formed around manipulator.Wherein, manipulator can be the indoor component of transmission cavity
It is also possible to multiple components, can be specifically set according to the equipment situation of transmission chamber, the present embodiment does not do specific limit to this
It is fixed.
Transmitting device provided in this embodiment can be by protective gas by the conveying gas circuit of setting conveying protective gas
It is delivered in transmission chamber, the flowing for the protective gas being passed through has dispelled the steam in transmission cavity room atmosphere, and in manipulator
Around form gas blanket, so that the contact of corrosive gas with manipulator in transmission chamber has effectively been isolated, to biography
The defeated indoor manipulator of chamber plays effective anticorrosion ability, allows some key components and parts of manipulator from wearing detail
Become that part is used for a long time, does not need to regularly replace, reduce the maintenance cost of board.And conveying gas circuit is added, substantially will not
The normal use of board is influenced, more convenient to the transformation of existing board, cost is relatively low.
In a specific embodiment, such as Fig. 1-Fig. 3, conveying gas circuit includes multiple ventholes 101 and main road, wherein more
The outlet side of a venthole 101 is distributed on the outer surface of at least side of manipulator 1；Main road and each venthole 101 into
The connection of gas end, the inlet end of main road extends to the outside of transmission chamber, and connect with gas source.Here gas source and hereafter can be
Original configuration on board is also possible to individually from external world's access, and the present embodiment comparison is not specifically limited.Manipulator 1 is
The main operation component of transmission chamber, contacts more with the indoor air of chamber, will seriously affect working efficiency after corrosion, by outlet
The outlet side in hole 101 is distributed on the outer surface of manipulator 1, and the protective gas that outlet side sprays can be in the appearance of manipulator 1
Face quickly forms gas shield film, not only increases the protective effect to manipulator 1, also without in order to ensure in the outer of manipulator
Surface is capable of forming protective film and each position of transmission chamber is made all to be passed through protective gas, saves a large amount of protective gas,
It shortens protective gas and is passed through the time.Specifically, the outlet side of main road may be provided at the inside of manipulator 1, and can be from machinery
The end surface of hand 1 internally gradually extends, until the opposite side end opposite with starting point, the outlet side of multiple ventholes 101
It can be distributed on the outer surface of the other side of manipulator 1.
More specifically, manipulator 1 may include mechanical arm 11 and be disposed below, it is mobile for driving manipulator arm 11
Driving device 12, wherein multiple ventholes 101 are respectively distributed to relative to each other two of mechanical arm 11 and driving device 12
On surface.In the present embodiment, mechanical arm 11 can pass through some movements between mechanical arm 11 and driving device 12
Component is connect with driving device 12, so, multiple ventholes 101 are respectively distributed to mechanical arm 11 and driving device 12 phase each other
Pair two surfaces on, not only may be implemented to the conveying of the protective gas of mechanical arm 11 and driving device 12, moreover it is possible to will protect
Gas is delivered to the outer surface of the moving component between mechanical arm 11 and driving device 12, to realize to entire manipulator
1 gas shield.
Further, as shown in Figure 1-Figure 3, main road includes the first gas circuit and the second gas circuit, wherein the first gas circuit is setting
First gas passage 111 in the inside of driving device 12, first gas passage 111 be distributed in it is each in driving device 12
Venthole 101 is connected to, and the inlet end of first gas passage 111 extends to the outside of transmission chamber, and connect with gas source；Second gas
Road includes flexible conduit outside the mechanical arm 11 and the second gas channel 121 that is arranged in mechanical arm 11, and second
Gas passage 121 is connected to each venthole 101 being distributed in mechanical arm 11；The both ends of flexible conduit respectively with the first gas
Body channel 111 is connected to second gas channel 121.In this way, protective gas is passed through respectively by the first gas circuit and the second gas circuit
Driving device 12 and mechanical arm 11, then protective gas is delivered to respectively by driving device 12 and manipulator by venthole 101
Arm 11 had not only realized the effect that protective gas is conveyed to driving device 12 and mechanical arm 11, but also to save transmission cavity indoor
Operating space prevents extra pipeline from causing to hinder to the operation of manipulator 1.It should be noted that except through flexible hose
13 access protective gas except mechanical arm 11 from driving device 12, extraneous protective gas directly can also be passed through second
Gas passage 121 is passed through mechanical arm 11, i.e. the present embodiment is not done specifically to by the mode of protective gas access mechanical arm 11
It limits.Wherein, flexible hose 13 can also be changed to other sealing pipelines for transmitting gas, and the present embodiment, which does not also do this, to be had
Body limits.
In another specific embodiment, as shown in Figure 4 and Figure 5, conveying gas circuit may include being arranged in transmission chamber,
And it is located at more air inlet pipe 2 of at least side of manipulator 1, it is used for towards 1 output protection gas of manipulator.That is conveying gas circuit can
It is direct by way of towards 1 output protection gas of manipulator to be more air inlet pipe 2 for being arranged separately in 1 outside of manipulator
Protective gas is delivered to the outer surface of manipulator 1, processes relatively simple, conveniently, is conducive to operation, and manufacturing cost is lower.
Further, conveying gas circuit can also include main road tracheae, and main road tracheae is connect with each air inlet pipe 2, and main road
The inlet end of tracheae extends to the outside of transmission chamber, and connect with gas source.In this way, the biggish main road of a diameter can be first passed through
Tracheae introduces protective gas in transmission chamber, then protective gas dispersion is delivered to transmission chamber by more air inlet pipe 2
Everywhere, the arrangement that can suitably reduce air inlet pipe 2 keeps the pipeline structure of all conveying gases more succinct, is easy arrangement.
Preferably, protective gas may include inert gas or nitrogen.Nitrogen is in etching apparatus, as factory service end
Argoshield is the gas of each etching apparatus user indispensability, takes more convenient, and cost is relatively low；And inert gas is more steady
It is fixed, it is not easy to be chemically reacted with the indoor other generations of transmission cavity, will not usually introduce new impurity, more securely and reliably.
As another technical solution, it is based on the identical inventive concept of above-mentioned transmitting device, the present embodiment also provides one kind
Transmission chamber, the transmission chamber include above-mentioned transmitting device.The working theory and processing of the transmission chamber application transport device
It is consistent with above-mentioned transmitting device, it also can be realized the beneficial effect that above-mentioned transmitting device can be realized, details are not described herein.
In a specific embodiment, which can also include that detection unit, control unit and setting are conveying
On-off switch in gas circuit, wherein chamber is begun to speak or closed to detection unit for detecting transmission chamber, and when beginning to speak or closing chamber to control
Unit processed sends feedback signal；Control unit opens or closes logical used in when receiving about the feedback signal for beginning to speak or closing chamber
It disconnects and closing.In this way, sending feedback signal of beginning to speak to control unit, control is single when detection device detects that transmission chamber is begun to speak
Member can open the on-off switch conveyed in gas circuit after receiving the feedback signal of beginning to speak, and protection gas is passed through into transmission chamber
Body.When detection device detects transmission chamber closed chamber, closed chamber feedback signal is sent to control unit, control unit receives this
The power-on switch in conveying gas circuit can be closed after closed chamber feedback signal, stopped being passed through for protective gas, can be effectively reduced guarantor
Protect the waste of gas.
As another technical solution, based on the above embodiment identical inventive concept, the embodiment of the present invention also provides one
The method that kind prevents manipulator from corroding, which is the manipulator being arranged in above-mentioned transmission chamber, and this method includes following
Step:
When opening transmission chamber, it is passed through protective gas from conveying gas circuit, to form gas blanket around manipulator.
Specifically, method for preventing manipulator from corroding further include: when closing transmission chamber, stopping is passed through protection gas
Body.
The method provided in this embodiment for preventing manipulator from corroding can be incited somebody to action by conveying the conveying gas circuit of protective gas
Protective gas is delivered in transmission chamber, and the flowing for the protective gas being passed through has dispelled the steam in transmission cavity room atmosphere, and
Gas blanket is formed around manipulator, is connect so that corrosive gas effectively be isolated with manipulator in transmission chamber
Touching, plays effective anticorrosion ability to the indoor manipulator of transmission cavity, allows some key components and parts from wearing detail
Become that part is used for a long time, does not need to regularly replace, reduce the maintenance cost of board.And conveying gas circuit is added, substantially will not
The normal use of board is influenced, more convenient to the transformation of existing board, cost is relatively low.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses
Mode, however the present invention is not limited thereto.For those skilled in the art, essence of the invention is not being departed from
In the case where mind and essence, various changes and modifications can be made therein, these variations and modifications are also considered as protection scope of the present invention.
Claims (11)
1. a kind of transmitting device, which is characterized in that including manipulator and conveying gas circuit；
The manipulator is used for transmission wafer；
The outlet side of the conveying gas circuit is arranged on the outer surface of the manipulator, or is located near the manipulator,
To pass through output protection gas, to form gas blanket around the manipulator.
2. transmitting device according to claim 1, which is characterized in that the conveying gas circuit includes multiple ventholes and master
Road, wherein the outlet side of multiple ventholes is distributed on the outer surface of at least side of the manipulator；The main road with
The inlet end of each venthole connects, and the inlet end of the main road is connect with gas source.
3. transmitting device according to claim 2, which is characterized in that the manipulator includes mechanical arm and is located under it
Side, the driving device for driving the mechanical arm mobile, wherein multiple ventholes are respectively distributed to the manipulator
On two surfaces of arm and the driving device opposite to each other.
4. transmitting device according to claim 3, which is characterized in that the main road includes the first gas circuit and the second gas circuit,
Wherein, first gas circuit is that the first gas passage of the inside of the driving device is arranged in, the first gas passage with
The each venthole connection being distributed in the driving device, the inlet end of the first gas passage and the gas source connect
It connects；
Second gas circuit include flexible conduit outside the mechanical arm and be arranged in the mechanical arm the
Two gas passages, the second gas channel are connected to each venthole being distributed in the mechanical arm；It is described soft
The both ends of property pipeline are connected to the first gas passage and the second gas channel respectively.
5. transmitting device according to claim 1, which is characterized in that the conveying gas circuit is located at the manipulator at least
More air inlet pipe of side, for exporting the protective gas towards the manipulator.
6. transmitting device according to claim 5, which is characterized in that the conveying gas circuit further includes main road tracheae, described
Main road tracheae is connect with each air inlet pipe, and the inlet end of the main road tracheae is connect with gas source.
7. transmission chamber according to claim 1, which is characterized in that the protective gas includes inert gas or nitrogen
Gas.
8. a kind of transmission chamber, which is characterized in that including the described in any item transmitting devices of claim 1-7.
9. transmission chamber according to claim 8, which is characterized in that further include that detection unit, control unit and setting exist
On-off switch in the conveying gas circuit, wherein
Chamber is begun to speak or closed to the detection unit for detecting the transmission chamber, and when beginning to speak or closing chamber to described control unit
Send feedback signal；
Described control unit opens or closes the on-off and opens used in when receiving about the feedback signal for beginning to speak or closing chamber
It closes.
10. a kind of method for preventing manipulator from corroding, which is characterized in that the manipulator is setting described in the claim 8 or 9
Transmission chamber in manipulator, which comprises
When opening the transmission chamber, it is passed through the protective gas from the conveying gas circuit, with the shape around the manipulator
At gas blanket.
11. according to the method described in claim 10, it is characterized by further comprising:
When closing the transmission chamber, stopping is passed through the protective gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910604844.XA CN110335838B (en) | 2019-07-05 | 2019-07-05 | Transmission device, transmission chamber and method for preventing corrosion of mechanical arm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910604844.XA CN110335838B (en) | 2019-07-05 | 2019-07-05 | Transmission device, transmission chamber and method for preventing corrosion of mechanical arm |
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| Publication Number | Publication Date |
|---|---|
| CN110335838A true CN110335838A (en) | 2019-10-15 |
| CN110335838B CN110335838B (en) | 2021-08-13 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111554595A (en) * | 2020-05-11 | 2020-08-18 | 上海果纳半导体技术有限公司 | Semiconductor chip preparation device |
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| CN110335838B (en) | 2021-08-13 |
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