CN109751511B - Pipeline protection device and method - Google Patents
Pipeline protection device and method Download PDFInfo
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- CN109751511B CN109751511B CN201711084850.4A CN201711084850A CN109751511B CN 109751511 B CN109751511 B CN 109751511B CN 201711084850 A CN201711084850 A CN 201711084850A CN 109751511 B CN109751511 B CN 109751511B
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Abstract
The invention provides a pipeline protection device and a pipeline protection method. The pipeline protection device includes: a gas source for providing gas for injection into the gas inlet system; a plug assembly that closes the orifices of the second and third air inlet lines when the second and third air inlet lines are disconnected, and via which the air supply is connected with the third air inlet line; and the pneumatic valve assembly is used for controlling the on-off between the air source and the second air inlet pipeline and controlling the on-off between the air source and the third air inlet pipeline when the second air inlet pipeline is separated from the third air inlet pipeline. The invention avoids the pipeline corrosion caused by machine maintenance, is beneficial to controlling the metal pollution of the cavity and prolongs the service life of the pipeline; in addition, the invention avoids the air inlet pipeline from being exposed to the atmosphere in the open cavity maintenance, reduces the risk of particle generation and reduces the loop time of the machine.
Description
Technical Field
The invention relates to the field of semiconductor integrated circuit manufacturing, in particular to a pipeline protection device and a pipeline protection method.
Background
Etchers are indispensable equipment in the manufacturing process of Integrated Circuits (ICs). When the etching machine carries out wafer processing, in order to guarantee the yield of wafer, carry out strict control to the metal pollution of granule in the technological process and board, in order to guarantee to the granule control of board, need regularly open the chamber and maintain, change the wearing parts, daily troubleshooting also can open the chamber operation. As the reaction chamber is exposed to the atmosphere, the gas inlet line is also exposed to the atmosphere for a long time, and although the reaction chamber is purged during the opening process, a part of the gas, such as HBr, remains. The residual gas also reacts with moisture in the air to produce condensate, and exposure of the pipeline to the air also adsorbs particles in the air, resulting in a source of contaminating particles. HBr and steam combine to produce corrosive substance, corrode the pipeline, lead to metal pollution such as Fe, Cr to rise sharply, close the chamber after still need carry out long-time inlet line and sweep, this operation has prolonged the loop time of board.
Figure 1 shows a schematic diagram of a typical etcher gas inlet system in the prior art. As shown in fig. 1, the air intake system includes an air tank 1, a first air intake pipeline 2, a proportional valve 3, a second air intake pipeline 4, and a third air intake pipeline 5, which are connected in sequence. The proportional valve 3 divides the intake air of the first intake pipeline 2 into two paths of gas with a certain proportion, that is, the first intake pipeline 2 comprises one pipeline, and the second intake pipeline 4 and the third intake pipeline 5 both comprise two pipelines. The second air inlet line 4 and the third air inlet line 5 are detachably connected, in particular, by two connecting blocks which are screwed and can be separated.
The process gas is mixed and flows out from the gas box 1, flows through the first gas inlet pipeline 2, is divided into two paths of gas with a certain proportion through the proportional valve 3, enters the upper electrode system 6 through the second gas inlet pipeline 4 and the third gas inlet pipeline 5, then enters the reaction cavity 7, is ionized under the action of radio frequency, generates plasma, and generates a physical and chemical reaction with the surface of a wafer to finish the etching of a pattern.
In the mass production of semiconductors, the chamber needs to be periodically maintained, the worn parts need to be replaced, the chamber opening operation can be performed during troubleshooting, as shown in fig. 2, the fixing screws of the connecting blocks of the second air inlet pipeline 4 and the third air inlet pipeline 5 are loosened during the chamber opening, the upper electrode system 6 is separated from the reaction chamber 7, and the internal operation of the chamber can be performed. The third air inlet pipeline 5 is installed on the upper power stage system 6, so that the third air inlet pipeline 5 is separated from the second air inlet pipeline 4, the third air inlet pipeline 5 belongs to an upper air inlet pipeline system, and the air tank 1, the first air inlet pipeline 2, the proportional valve 3 and the second air inlet pipeline 4 are kept still and belong to a lower air inlet pipeline system. The two sections of air inlet pipelines are directly exposed to the atmospheric environment in the cavity opening maintenance process, the longer the cavity opening time is, the more the pipeline corrosion is caused, the greater the risk of generating particles is, long-term pipeline purging is needed after PM is finished, sometimes even the whole section of pipeline needs to be replaced, the loop time of a machine table is greatly prolonged, and the service life of the air inlet pipeline can be shortened due to corrosion; in addition, as the wafer process is developed and the efficiency is improved, a higher requirement is placed on the particle control of the machine, so that there is a need for an apparatus and a method capable of reducing the time of exposing the air inlet pipeline to the atmosphere during the open-cavity maintenance, and reducing the corrosion of the pipeline and the formation of particles.
The information disclosed in this background section is only for enhancement of understanding of the general background of the invention and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person skilled in the art.
Disclosure of Invention
The invention aims to provide a pipeline protection device and a pipeline protection method, which are used for solving the problems that a process pipeline is exposed to the atmosphere for a long time when cavity opening maintenance is carried out in the prior art, so that the pipeline is easily corroded, and the loop time of a machine table is prolonged.
According to one aspect of the invention, a pipeline protection device is provided for preventing pipeline corrosion during maintenance of an air intake system, wherein the air intake system comprises an air tank, a first air intake pipeline, a proportional valve, a second air intake pipeline and a third air intake pipeline which are connected in sequence, and the second air intake pipeline and the third air intake pipeline are detachably connected. The pipeline protection device includes:
a gas source for providing gas for injection into the gas inlet system;
a plug assembly that closes the orifices of the second and third air inlet lines when the second and third air inlet lines are disconnected, and via which the air supply is connected with the third air inlet line;
and the pneumatic valve assembly is used for controlling the on-off between the air source and the second air inlet pipeline and controlling the on-off between the air source and the third air inlet pipeline when the second air inlet pipeline is separated from the third air inlet pipeline.
Preferably, the block assembly comprises a second intake line block and a third intake line block, closing the mouths of the second intake line and the third intake line, respectively, when the second intake line is separated from the third intake line,
wherein the gas source is connected to the third gas inlet line via the third gas inlet line block.
Preferably, the pneumatic valve assembly comprises:
the first pneumatic valve is arranged between the air source and the second air inlet pipeline and used for controlling the connection and disconnection between the air source and the second air inlet pipeline;
and the second pneumatic valve is arranged between the air source and the third air inlet pipeline block and used for controlling the on-off of the air source and the third air inlet pipeline when the second air inlet pipeline is separated from the third air inlet pipeline.
Preferably, the pipeline protection device still includes the adjusting part that admits air, the adjusting part that admits air includes air-vent valve, manometer, current-limiting gasket, the pressure-vent valve is used for adjusting the gas pressure who comes from the air supply, the manometer is used for showing the gas pressure value, the current-limiting gasket is used for damming the gas that comes from the air supply.
Preferably, the line protection device further comprises:
the dry pump is used for vacuumizing the second air inlet pipeline;
and the third pneumatic valve is used for controlling the vacuumizing operation of the dry pump.
Preferably, a heater is wrapped around the outer end of the third gas inlet pipe for regulating the temperature of the gas in the third gas inlet pipe.
According to another aspect of the present invention, a pipeline protection method is provided, which prevents corrosion of a pipeline during maintenance of an intake system using the above pipeline protection device. The pipeline protection method comprises the following steps:
opening the first pneumatic valve prior to performing an open chamber operation;
when the cavity opening operation is carried out, the second air inlet pipeline block is used for closing the pipe orifice of the second air inlet pipeline, the third air inlet pipeline block is used for closing the pipe orifice of the third air inlet pipeline, the first pneumatic valve is closed, and the second pneumatic valve is opened;
when the cavity closing operation is carried out, the first pneumatic valve is opened, the second pneumatic valve is closed, the second air inlet pipeline block and the third air inlet pipeline block are disassembled, and the second air inlet pipeline and the third air inlet pipeline are connected together;
after completion of the closing operation, the first pneumatic valve is closed.
Preferably, the line protection method further comprises maintaining the first and second pneumatic valves in a closed state while the machine is operating.
Preferably, the pipeline protection method further comprises:
keeping the third pneumatic valve in a closed state when the machine platform runs and before the cavity opening operation is carried out;
when the cavity opening operation is carried out, the third pneumatic valve is opened, and the second air inlet pipeline is vacuumized by the dry pump;
and closing the third pneumatic valve when cavity closing operation is carried out.
Preferably, the pipeline protection method further comprises:
and the pressure regulating valve is used for regulating the gas pressure from the gas source, the pressure gauge is used for displaying the value of the gas pressure, and the flow limiting gasket is used for intercepting the gas from the gas source.
Preferably, the pipeline protection method further comprises:
and controlling and adjusting the temperature of the gas in the third gas inlet pipeline by using the heater.
According to the invention, the pipeline protection device is added in the air inlet system, so that the pipeline in the air inlet system is kept at the positive pressure of the air source gas when the cavity opening maintenance is carried out, the atmosphere is prevented from entering the pipeline, and the risk of particle generation is reduced; after the cavity is opened, the pipeline is closed by the block assembly, and the pipeline is continuously blown by gas source gas, so that the pipeline is prevented from contacting the atmosphere, the process attachment is favorably cleared, the pipeline corrosion caused by machine maintenance is avoided, the control of metal pollution of a cavity is favorably realized, and the service life of the pipeline is prolonged.
The method of the present invention has other features and advantages which will be apparent from or are set forth in detail in the accompanying drawings and the following detailed description, which are incorporated herein, and which together serve to explain certain principles of the invention.
Drawings
The above and other objects, features and advantages of the present invention will become more apparent by describing in more detail exemplary embodiments thereof with reference to the attached drawings, in which like reference numerals generally represent like parts.
FIG. 1 shows a schematic diagram of a typical etcher gas inlet system in the prior art;
FIG. 2 shows a schematic view of the air induction system of FIG. 1 in an open chamber operation;
FIG. 3 shows a schematic view of an air intake system employing a line protection device according to an exemplary embodiment of the present invention, in an open chamber operation;
FIG. 4 shows a schematic view of an air induction system employing a line protection device according to an exemplary embodiment of the present invention after performing a chamber closing operation;
FIG. 5 shows a block diagram of a second inlet line block;
fig. 6 shows a block diagram of a third inlet line block.
Description of the main reference numerals:
1-an air box, 2-a first air inlet pipeline, 3-a proportional valve, 4-a second air inlet pipeline, 5-a third air inlet pipeline, 6-an upper electrode system and 7-a reaction cavity;
101-gas box, 102-first gas inlet line, 103-proportional valve, 104-second gas inlet line, 105-third gas inlet line, 106-upper electrode system, 107-chamber, 111-first gas inlet bypass, 112-first pneumatic valve, 113-second gas inlet bypass, 114-second pneumatic valve, 115-second gas inlet line block, 116-third gas inlet line block, 117-dry pump, 118-third pneumatic valve, 119-pressure regulating valve, 120-pressure gauge, 121-flow limiting gasket, 122-heater, 123-third gas inlet bypass.
Detailed Description
The invention will be described in more detail below with reference to the accompanying drawings. While the preferred embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
Fig. 3 and 4 are schematic views illustrating an intake system to which a line protection apparatus according to an exemplary embodiment of the present invention is applied, when performing an open chamber operation and after performing a closed chamber operation, respectively, and the line protection apparatus according to an exemplary embodiment of the present invention will be described in detail with reference to fig. 3 and 4.
As shown in fig. 3 and 4, the intake system includes an air tank 101, a first intake pipe 102, a proportional valve 103, a second intake pipe 104, and a third intake pipe 105, which are connected in this order. The proportional valve 103 divides the intake air of the first intake pipeline 102 into two paths of gas with a certain proportion, that is, the first intake pipeline 102 includes one path, and the second intake pipeline 104 and the third intake pipeline 105 both include two paths. The second air intake line 104 and the third air intake line 105 are detachably connected, and in particular, can be connected by two connecting blocks that are connected by screws and are separable.
The process gas is mixed and flows out from the gas box 101, flows through the first gas inlet pipeline 102, is divided into two paths of gas with a certain proportion through the proportional valve 103, enters the upper electrode system 106 through the second gas inlet pipeline 104 and the third gas inlet pipeline 105, then enters the chamber 107, is ionized under the action of radio frequency, generates plasma, and generates a physical and chemical reaction with the surface of the wafer to finish the etching of the pattern.
A line protection device according to an exemplary embodiment of the present invention generally includes a gas source, a blockout assembly, and a pneumatic valve assembly. Wherein the gas source is used for providing gas for injecting into the gas inlet system; when the second air inlet pipeline 104 is separated from the third air inlet pipeline 105, the blocking block assembly closes the orifices of the second air inlet pipeline 104 and the third air inlet pipeline 105, and the air source is connected with the third air inlet pipeline 105 through the blocking block assembly; and the pneumatic valve assembly is used for controlling the on-off between the air source and the second air inlet pipeline 104 and controlling the on-off between the air source and the third air inlet pipeline 105 when the second air inlet pipeline 104 is separated from the third air inlet pipeline 105.
The gas source may be a nitrogen gas source or other inert gas that does not react with the original gas in the pipeline.
Specifically, the source gas may be injected into the intake system by adding a first intake bypass 111; by branching the first intake bypass 111 into the second intake bypass 113 and the third intake bypass 123, the source gas can be injected into the second intake line 104 and the third intake line 105, respectively. Specifically, one end of the second intake bypass 113 and the third intake bypass 123 are connected to the first intake bypass 111 at the same time, and the other end is connected to the first intake pipe 102 and the third intake pipe block 116, respectively.
By adding the pipeline protection device in the air inlet system, the pipeline in the air inlet system can be kept at the positive pressure of air source gas during open cavity maintenance, so that atmosphere is prevented from entering the pipeline; when the second air inlet pipeline is separated from the third air inlet pipeline, the air inlet pipeline is sealed through the plug assembly, the air source gas is used for continuously purging the pipeline, the pipeline is prevented from contacting the atmosphere, the process attachment is favorably cleared, the pipeline corrosion caused by machine maintenance is avoided, the control of cavity metal pollution is favorably realized, and the service life of the pipeline is prolonged.
In one example, the blockout assembly includes a second air intake line blockout 115 and a third air intake line blockout 116 that close the mouths of the second air intake line 104 and the third air intake line 105, respectively, when the second air intake line 115 is disconnected from the third air intake line 116. Wherein the gas source is connected to the third gas inlet line 105 via the third gas inlet line block 116.
The second intake pipe block 115 may be constructed as shown in fig. 5, with two holes for connection to the connection block of the second intake pipe 104.
The third air inlet line block 116 is detachable from the air supply and can be configured as shown in fig. 6, with two holes at the two ends for connection to the connection block of the third air inlet line 105 and a hollow boss in the middle for connection to the hose and maintaining air communication.
When the machine is running, the second air inlet pipeline block 115 and the third air inlet pipeline block 116 can be placed at fixed positions beside the machine and used continuously for next maintenance.
In one example, the pneumatic valve assembly includes: the first pneumatic valve 112 is arranged between the air source and the second air inlet pipeline 104 and is used for controlling the on-off between the air source and the second air inlet pipeline 104, namely, the first pneumatic valve 112 can be arranged on the second air inlet bypass 113; and a second pneumatic valve 114, disposed between the air source and the third air inlet line block 116, for controlling the on/off of the air source and the third air inlet line 105 when the second air inlet line 104 is separated from the third air inlet line 105, that is, the second pneumatic valve 114 may be disposed on the third air inlet bypass 123.
In one example, the line protection device further comprises an intake air regulating assembly connected to the air supply, i.e., the first intake bypass 111, for regulating intake air pressure.
Specifically, the intake air regulating assembly may include a pressure regulating valve 119, a pressure gauge 120, and a flow restricting gasket 121. Wherein the pressure regulating valve 119 is used for regulating the pressure of the gas from the gas source, i.e. the gas pressure in the first gas inlet bypass 111, for example, the pressure of the gas can be controlled to 5-30psig, the pressure gauge 120 is used for displaying the pressure value of the gas, and the flow restricting gasket 121 is used for intercepting the gas from the gas source, i.e. intercepting the gas in the first gas inlet bypass 111.
In one example, the line protection device further includes a dry pump 117, a third pneumatic valve 118. The dry pump 117 is used for evacuating said second inlet line and the third pneumatic valve 118 is used for controlling the evacuation operation of the dry pump 117. Specifically, the dry pump 117 is connected to the second intake line via the proportional valve 103, and a third pneumatic valve 118 is provided on the connection line of the dry pump 117 to the second intake line 104.
The bypass of the dry pump is added in the air inlet system, so that the pipeline can be vacuumized in the machine maintenance process, the air inlet pipeline is prevented from contacting the atmosphere, and the corrosion of the pipeline is further reduced.
In one example, a heater 122 is wrapped around the outer end of the third gas inlet line 105 for regulating the temperature of the gas in the third gas inlet line 105.
The temperature of the gas inlet can be adjusted according to the process requirements, the pipeline can be heated when the cavity is opened for maintenance, and condensation of particles is avoided. For example, when the cavity is opened for maintenance, the air inlet pipeline is purged and the pipeline is heated at the same time, the temperature can be 30-60 ℃, the pipeline purging effect can be increased, and the cleaning of process attachments is facilitated.
The invention also provides a pipeline protection method, which prevents the pipeline from being corroded in the maintenance process of the air inlet system by using the pipeline protection device. The pipeline protection method may include:
before the chamber opening operation is performed, the first pneumatic valve 112 is opened to fill the process line with a gas, such as nitrogen, to create a positive pressure of the gas in the line;
when the cavity opening operation is performed, the second air inlet pipeline 104 is separated from the third air inlet pipeline 105, the second air inlet pipeline 104 is blocked by the second air inlet pipeline blocking block 115, the third air inlet pipeline 105 is blocked by the third air inlet pipeline blocking block 116, the first pneumatic valve 112 is closed, the second pneumatic valve 114 is opened, the purging of gas is kept in the third air inlet pipeline 105, and the atmosphere is prevented from contacting the pipelines;
in the closing operation, the first pneumatic valve 112 is opened, the second pneumatic valve 114 is closed, the second intake line block 115 and the third intake line block 116 are removed, and the second intake line 104 and the third intake line 105 are connected together. Opening the first pneumatic valve 112 to open the pipeline and ventilate, and simultaneously keeping the air supply to continuously supply air to ensure that the pipeline keeps positive pressure to the outside so as to avoid the entrance of atmosphere;
after the closing operation is completed, the first pneumatic valve 112 is closed, and the chamber is restored. At this time, the second air intake line 104 and the third air intake line 105 are connected to complete the process air intake, and both the first pneumatic valve 112 and the second pneumatic valve 114 are in a closed state.
In one example, the first and second pneumatic valves 112, 114 are maintained in a closed state while the machine is operating.
In one example, the pipeline protection method further comprises:
maintaining the third pneumatic valve 118 in a closed state while the machine is running and prior to performing an open cavity operation;
when the cavity opening operation is carried out, the third pneumatic valve 118 is opened, and the dry pump 117 vacuumizes the second air inlet pipeline 104, so that the pipeline is prevented from contacting with the atmosphere, and the corrosion of the pipeline is further reduced;
when the closing operation is performed, the third pneumatic valve 118 is closed.
In one example, the pipeline protection method further comprises:
the pressure of the gas from the gas source is regulated by the pressure regulating valve 119, i.e., the pressure of the gas in the first inlet bypass 111 is regulated, which may be controlled, for example, at 5-30psig, the pressure gauge 120 indicates the value of the gas pressure, and the gas from the gas source is intercepted by the restriction gasket 121.
In one example, the pipeline protection method further comprises:
regulating the temperature of the gas in the third gas inlet line with a heater control.
The temperature of the gas inlet can be adjusted according to the process requirements, the pipeline can be heated when the cavity is opened for maintenance, and condensation of particles is avoided. For example, when the cavity is opened for maintenance, the air inlet pipeline is purged and the pipeline is heated at the same time, the temperature can be 30-60 ℃, the pipeline purging effect can be increased, and the cleaning of process attachments is facilitated.
Having described embodiments of the present invention, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen in order to best explain the principles of the embodiments, the practical application, or improvements made to the technology in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.
Claims (11)
1. The utility model provides a pipeline protection device for prevent the pipeline corrosion in air intake system maintenance process, air intake system is including the gas tank, first air inlet pipeline, proportional valve, second air inlet pipeline, the third air inlet pipeline that connect gradually, wherein second air inlet pipeline and third air inlet pipeline are for dismantling the connection, its characterized in that, pipeline protection device includes:
a gas source for providing gas for injection into the gas inlet system;
a plug assembly that closes the orifices of the second and third air inlet lines when the second and third air inlet lines are disconnected, and via which the air supply is connected with the third air inlet line;
and the pneumatic valve assembly is used for controlling the on-off between the air source and the second air inlet pipeline and controlling the on-off between the air source and the third air inlet pipeline when the second air inlet pipeline is separated from the third air inlet pipeline.
2. The line protection device of claim 1, wherein the block assembly includes a second air inlet line block and a third air inlet line block that respectively close the mouths of the second air inlet line and the third air inlet line when the second air inlet line is separated from the third air inlet line,
wherein the gas source is connected to the third gas inlet line via the third gas inlet line block.
3. The line protection device of claim 2, wherein the pneumatic valve assembly comprises:
the first pneumatic valve is arranged between the air source and the second air inlet pipeline and used for controlling the connection and disconnection between the air source and the second air inlet pipeline;
and the second pneumatic valve is arranged between the air source and the third air inlet pipeline block and used for controlling the on-off of the air source and the third air inlet pipeline when the second air inlet pipeline is separated from the third air inlet pipeline.
4. The line protection device of claim 1, further comprising an inlet regulator assembly, the inlet regulator assembly comprising a pressure regulating valve for regulating the pressure of the gas from the gas source, a pressure gauge for displaying the pressure of the gas, and a flow restricting gasket for intercepting the gas from the gas source.
5. The line protection device of claim 1, further comprising:
the dry pump is used for vacuumizing the second air inlet pipeline;
and the third pneumatic valve is used for controlling the vacuumizing operation of the dry pump.
6. A pipeline protector according to claim 1 in which a heater is wrapped around the outer end of the third gas inlet pipeline for regulating the temperature of the gas in the third gas inlet pipeline.
7. A pipe protection method for preventing corrosion of a pipe during maintenance of an intake system using the pipe protection apparatus according to any one of claims 1 to 6, comprising:
opening a first pneumatic valve prior to performing an open chamber operation;
when the cavity opening operation is carried out, the second air inlet pipeline block is used for closing the pipe orifice of the second air inlet pipeline, the third air inlet pipeline block is used for closing the pipe orifice of the third air inlet pipeline, the first pneumatic valve is closed, and the second pneumatic valve is opened;
when the cavity closing operation is carried out, the first pneumatic valve is opened, the second pneumatic valve is closed, the second air inlet pipeline block and the third air inlet pipeline block are disassembled, and the second air inlet pipeline and the third air inlet pipeline are connected together;
after completion of the closing operation, the first pneumatic valve is closed.
8. The method of claim 7, further comprising maintaining the first and second pneumatic valves in a closed state while the machine is operating.
9. The line protection method of claim 7, further comprising:
keeping the third pneumatic valve in a closed state when the machine platform operates and before the cavity opening operation is carried out;
when the cavity opening operation is carried out, the third pneumatic valve is opened, and the second air inlet pipeline is vacuumized by using the dry pump;
and closing the third pneumatic valve when cavity closing operation is carried out.
10. The line protection method of claim 7, further comprising:
the pressure of the gas from the gas source is regulated by a pressure regulating valve, the value of the gas pressure is displayed by a pressure gauge, and the gas from the gas source is intercepted by a flow limiting gasket.
11. The line protection method of claim 7, further comprising:
regulating the temperature of the gas in the third gas inlet line with a heater control.
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| KR100699861B1 (en) * | 2005-01-19 | 2007-03-27 | 삼성전자주식회사 | Apparatus having 4-way valve for fabricating semiconductor device, method of controling valve and method of fabricating semiconductor device using the same |
| CN101509605B (en) * | 2009-03-09 | 2012-10-24 | 罗东晓 | Method for recovering relief gas in process for examining and repairing gas pipe network and device thereof |
| US20120047764A1 (en) * | 2010-08-24 | 2012-03-01 | David Campion | System and method for drying substrates |
| CN203405345U (en) * | 2012-11-30 | 2014-01-22 | 内蒙古神舟硅业有限责任公司 | Chlorosilane liquid sampling device |
| CN203389906U (en) * | 2013-07-03 | 2014-01-15 | 林德工程（杭州）有限公司 | Tool applicable to scavenging gas pipeline of industrial process device |
| CN203774267U (en) * | 2014-03-28 | 2014-08-13 | 中芯国际集成电路制造(北京)有限公司 | Blowing device |
| CN204005243U (en) * | 2014-08-15 | 2014-12-10 | 河北钢铁股份有限公司邯郸分公司 | A kind of combustion turbine nitrogen purges stabilizer |
| CN205368131U (en) * | 2015-12-26 | 2016-07-06 | 武汉新硅科技潜江有限公司 | Optic fibre is with high -purity silicon tetrachloride's concentrated distribution system |
| CN106098525B (en) * | 2016-07-06 | 2018-01-30 | 武汉华星光电技术有限公司 | Dry ecthing equipment |
| CN206276355U (en) * | 2016-12-22 | 2017-06-27 | 黄石福尔泰医药科技有限公司 | A kind of anti-material deposition blocking device |
| CN206363989U (en) * | 2017-01-17 | 2017-07-28 | 中芯国际集成电路制造（天津）有限公司 | Semiconductor equipment |
| CN106837489B (en) * | 2017-03-10 | 2018-12-14 | 江苏大学 | A kind of SCR supply spraying system crystallization prevention device and method |
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