CN203405345U - Chlorosilane liquid sampling device - Google Patents
Chlorosilane liquid sampling device Download PDFInfo
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- CN203405345U CN203405345U CN201220645601.4U CN201220645601U CN203405345U CN 203405345 U CN203405345 U CN 203405345U CN 201220645601 U CN201220645601 U CN 201220645601U CN 203405345 U CN203405345 U CN 203405345U
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- pipeline
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- sampling
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Abstract
The utility model discloses a chlorosilane liquid sampling device. Pipeline layout is implemented in a manner that a nitrogen gas inlet pipeline is divided into a nitrogen gas protection pipeline and a nitrogen gas purging pipeline, the nitrogen gas protection pipeline is communicated with a nitrogen gas protection cover, the nitrogen gas purging pipeline is communicated with a medium cooling device and a medium inlet pipeline respectively, a medium outlet pipeline and a blow-off pipeline are communicated with the medium cooling device and a medium sampling pipeline respectively, the medium sampling pipeline is communicated with the nitrogen gas protection cover through a double-needle-base sampling device, and a gas exhaust pipeline is communicated with the nitrogen gas protection cover through the double-needle-base sampling device. The pipeline layout of the sampling device is based on the physical and chemical characteristics of chlorosilane materials, so that under the condition that the whole operation process is in an inactive state, the corrosion and pollution caused by the fact that chlorosilane is in contact with air are alleviated as far as possible, the device can run stably and safely for a long time, and the influence on the sampling analysis result of samples caused by substances generated by chlorosilane reaction is avoided.
Description
Technical field
The utility model relates to production of polysilicon feedstock analysis sampling equipment, refers in particular to a kind of chlorosilane liquid produced sampling equipment.
Background technology
The liquid sampling equipment that polycrystalline silicon producing device is used is at present comparatively ripe, substantially can meet the sampling requirement of chlorosilane under the various conditions of process units, and also comprise the subsidiary functions such as medium cooling pressure release, cabinet heating, and this improves sampling condition.But from using and the angle of regular job, that current sampling equipment still exists is perishable, the drawback of obstruction.Chlorosilane medium wants raw material to have lower, the easy vaporization of boiling point, meet and in water resultant of reaction, have hydrogen chloride and hydrogen and the perishable feature such as inflammable and explosive as production of polysilicon upper, even if run into air (containing moisture content in air), also can react.There is the drawback of pipeline hydrops in the layout of fluid sampling device at present, and general nitrogen replacement is also difficult for reaching the requirement of protective device.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of chlorosilane liquid produced sampling equipment; the line arrangement of this sampling equipment is more reasonable; supporting corresponding operation steps can reduce chlorosilane and contact corrosion and the pollution causing with air; guarantee the safe handling steady in a long-term of equipment energy; it has not only solved system pipeline hydrops problem from line arrangement aspect; and by the nitrogen protection measure under dormant state, the substantially corrosion of abatement apparatus sample tap.
The technical problems to be solved in the utility model is realized by following scheme: a kind of chlorosilane liquid produced sampling equipment, comprise nitrogen air inlet pipeline, blowoff line, gas exhaust piping, it is characterized in that: described nitrogen air inlet pipeline is divided into nitrogen protection pipeline and nitrogen blowing pipeline by threeway, nitrogen protection pipeline is through the logical nitrogen protecting cover of air valve, nitrogen blowing pipeline leads to respectively medium cooling device and medium inlet road through blow down valve, and media outlet pipeline and blowoff line are respectively through reverse flow valve and the logical medium cooling device of dirt discharging valve; Media outlet pipeline and blowoff line are connected sample valve and medium sampling line successively through reverse flow valve and dirt discharging valve respectively, and medium sampling line is through the logical nitrogen protecting cover of double needle seat sampler, and gas exhaust piping is through the logical nitrogen protecting cover of double needle seat sampler.
The utility model also comprises following scheme: described medium inlet road is connected through sample valve, tensimeter and nitrogen blowing pipeline successively.Between described nitrogen protection pipeline and nitrogen protecting cover for thread seal is connected; it between nitrogen protection pipeline and air valve, is bayonet joint; between nitrogen protecting cover and double needle seat sampler for thread seal is connected; between gas exhaust piping and double needle seat sampler, be bayonet joint, all the other pipelines are connected to threeway butt joint type and connect.
Principle of work of the present utility model: under dormant state: nitrogen enters minute two-way after system by nitrogen air inlet pipeline, leads up to air valve (normally open) and nitrogen protection pipeline, enters nitrogen protecting cover double needle seat sampler is protected; The left side syringe needle of nitrogen blowing pipeline, blow down valve, medium cooling device, sample valve, medium sampling line, double needle seat sampler of leading up to enters nitrogen protecting cover, and equipment body pipeline is protected; Two-way nitrogen is discharged system by right side syringe needle, the gas exhaust piping of double needle seat sampler.Sample valve, reverse flow valve, dirt discharging valve are always in closed condition.
Under recurrent state: medium enters system from medium inlet road by sample valve, along medium cooling device, reverse flow valve, media outlet pipeline, discharge system, carry out medium circulation.Blow down valve is always in closed condition.
During sampling: medium enters system from medium inlet road by sample valve; left side syringe needle along medium cooling device, sample valve, medium sampling line, double needle seat sampler enters sampling jar (before sampling, nitrogen protecting cover is taken off, change sampling jar).Blow down valve, reverse flow valve, dirt discharging valve are always in closed condition.
Purge step is as follows: close after sample valve and reverse flow valve, open successively dirt discharging valve, sample valve and blow down valve, nitrogen is leaded up to the left side syringe needle of sample valve, medium sampling line, double needle seat sampler and is blown in sampling jar remaining in intrasystem medium by scavenging pipeline, blow down valve, medium cooling device; Separately lead up in dirt discharging valve and blowoff line discharge system, with residual materials medium not in assurance system.After completing, purging closes dirt discharging valve.
Advantage of the present utility model: this chlorosilane liquid produced sampling equipment line arrangement mode is for the physics and chemistry characteristic of chlorosilane material, guarantee in whole operating process, dormant state situation, reduce as much as possible chlorosilane and contacted corrosion and the pollution causing with air, guarantee the safe handling steady in a long-term of equipment energy, and avoid impacting because of chlorosilane resultant of reaction confrontation sample sample analysis result.Because chlorosilane medium accumulating in sampling line avoided when the dormant state in sampling operation design; and sampling line after sampling process finishes always in nitrogen replacement guard mode; greatly reduced residual materials to the corrosion of equipment sample tap and pollution; add the protection of protective cover to sample tap equipment, general effect can better reach the requirement of chlorosilane liquid produced sampling.
Accompanying drawing explanation
Fig. 1 is this chlorosilane liquid produced sampling equipment piping arrangement.
Embodiment
As shown in Figure 1; the nitrogen air inlet pipeline 18 of this chlorosilane liquid produced sampling equipment is divided into nitrogen protection pipeline 16 and nitrogen blowing pipeline 1 by threeway; nitrogen protection pipeline 16 is through the logical nitrogen protecting cover 13 of air valve 17; nitrogen blowing pipeline 1 leads to respectively medium cooling device 15 and medium inlet road 4 through blow down valve 2, and medium inlet road 4 is connected with nitrogen blowing pipeline 1 through sample valve 5, tensimeter 3 successively.Media outlet pipeline 9 and blowoff line 11 are respectively through reverse flow valve 8 and the logical medium cooling device 15 of dirt discharging valve 10; Media outlet pipeline 9 and blowoff line 11 are connected sample valve 7 and medium sampling line 6 successively through reverse flow valve 8 and dirt discharging valve 10 respectively, and medium sampling line 6 is through the logical nitrogen protecting cover 13 of double needle seat sampler 14.Gas exhaust piping 12 is through the logical nitrogen protecting cover 13 of double needle seat sampler 14.
As shown in Figure 1; between nitrogen protection pipeline 16 and nitrogen protecting cover 13 for thread seal is connected; it between nitrogen protection pipeline 16 and air valve 17, is bayonet joint; between nitrogen protecting cover 13 and double needle seat sampler 14 for thread seal is connected; between gas exhaust piping 12 and double needle seat sampler 14, be bayonet joint, all the other pipelines are connected to threeway butt joint type and connect.
The valve of this chlorosilane liquid produced sampling equipment is all used unidirectional stop valve or ball valve, increases detachable nitrogen protecting cover 13 on double needle seat sampler 14, and sample tap is placed in to inside, and logical nitrogen protection, prevents the corrosion of the residual medium of sample tap.When chlorosilane media fluid samples and realize sampling process and dormant state, material is replaced nitrogen protection, does not contact with outside air, after sampling is replaced, does not accumulate material in pipeline.Material, nitrogen blowing trend are upper entering and lower leaving, and pipeline trend does not arrange high point, in order to avoid affect material, according to gravity, flows downward.
Claims (3)
1. a chlorosilane liquid produced sampling equipment, comprise nitrogen air inlet pipeline, blowoff line, gas exhaust piping, it is characterized in that: described nitrogen air inlet pipeline is divided into nitrogen protection pipeline and nitrogen blowing pipeline by threeway, nitrogen protection pipeline is through the logical nitrogen protecting cover of air valve, nitrogen blowing pipeline leads to respectively medium cooling device and medium inlet road through blow down valve, and media outlet pipeline and blowoff line are respectively through reverse flow valve and the logical medium cooling device of dirt discharging valve; Media outlet pipeline and blowoff line are connected sample valve and medium sampling line successively through reverse flow valve and dirt discharging valve respectively, and medium sampling line is through the logical nitrogen protecting cover of double needle seat sampler, and gas exhaust piping is through the logical nitrogen protecting cover of double needle seat sampler.
2. a kind of chlorosilane liquid produced sampling equipment according to claim 1, is characterized in that: described medium inlet road is connected through sample valve, tensimeter and nitrogen blowing pipeline successively.
3. a kind of chlorosilane liquid produced sampling equipment according to claim 1; it is characterized in that: between described nitrogen protection pipeline and nitrogen protecting cover for thread seal is connected; it between nitrogen protection pipeline and air valve, is bayonet joint; between nitrogen protecting cover and double needle seat sampler for thread seal is connected; between gas exhaust piping and double needle seat sampler, be bayonet joint, all the other pipelines are connected to threeway butt joint type and connect.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220645601.4U CN203405345U (en) | 2012-11-30 | 2012-11-30 | Chlorosilane liquid sampling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220645601.4U CN203405345U (en) | 2012-11-30 | 2012-11-30 | Chlorosilane liquid sampling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203405345U true CN203405345U (en) | 2014-01-22 |
Family
ID=49941275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201220645601.4U Expired - Fee Related CN203405345U (en) | 2012-11-30 | 2012-11-30 | Chlorosilane liquid sampling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203405345U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104006987A (en) * | 2014-05-13 | 2014-08-27 | 江苏爵格工业设备有限公司 | Closed sampling device |
| CN106908285A (en) * | 2017-04-06 | 2017-06-30 | 洛阳中硅高科技有限公司 | On-line period device |
| CN107101850A (en) * | 2017-04-06 | 2017-08-29 | 洛阳中硅高科技有限公司 | On-line period method |
| CN109100176A (en) * | 2018-08-21 | 2018-12-28 | 江苏信泰化工装备有限公司 | A kind of sampling system |
| CN109751511A (en) * | 2017-11-07 | 2019-05-14 | 北京北方华创微电子装备有限公司 | A kind of pipeline protective device and method |
-
2012
- 2012-11-30 CN CN201220645601.4U patent/CN203405345U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104006987A (en) * | 2014-05-13 | 2014-08-27 | 江苏爵格工业设备有限公司 | Closed sampling device |
| CN106908285A (en) * | 2017-04-06 | 2017-06-30 | 洛阳中硅高科技有限公司 | On-line period device |
| CN107101850A (en) * | 2017-04-06 | 2017-08-29 | 洛阳中硅高科技有限公司 | On-line period method |
| CN109751511A (en) * | 2017-11-07 | 2019-05-14 | 北京北方华创微电子装备有限公司 | A kind of pipeline protective device and method |
| CN109100176A (en) * | 2018-08-21 | 2018-12-28 | 江苏信泰化工装备有限公司 | A kind of sampling system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140122 Termination date: 20211130 |
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| CF01 | Termination of patent right due to non-payment of annual fee |