CN205368131U - Optic fibre is with high -purity silicon tetrachloride's concentrated distribution system - Google Patents
Optic fibre is with high -purity silicon tetrachloride's concentrated distribution system Download PDFInfo
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- CN205368131U CN205368131U CN201521107621.6U CN201521107621U CN205368131U CN 205368131 U CN205368131 U CN 205368131U CN 201521107621 U CN201521107621 U CN 201521107621U CN 205368131 U CN205368131 U CN 205368131U
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- way valve
- pipeline
- valve
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- trunk line
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Abstract
The utility model relates to an optic fibre is with high -purity silicon tetrachloride's concentrated distribution system, including first trunk line, second trunk line and three -way valve V1~V10, a three -way valve V1 is installed on the top of first trunk line, and the bottom is through a two -port valve V6 and the butt joint of second trunk line, still be connected with three -way valve V2, three -way valve V3, three -way valve V4 and three -way valve V5 on the first trunk line, be connected with three -way valve V7, three -way valve V8 and three -way valve V9 on the second trunk line, the last two root canal ways that are connected with respectively of three -way valve V1~V10. The utility model discloses the valve of conveniently having realized sweeping, detected, blown operation such as clean switches over composite control, lets the silicon tetrachloride product flow in totally enclosed pipeline and carries, has avoided cleanness rotten with the contact reaction of air and that carry back pipeline, valve, has thoroughly solved secondary pollution, deviation and waste material pollution scheduling problem that traditional sampling bottle sample mode led to the fact.
Description
Technical field
This utility model relates to a kind of distribution system, is specifically related to the centralized distribution system of a kind of optical fiber high purity silicon tetrachloride, and it produces for high purity silicon tetrachloride, the concentration air-liquid distribution in Silicon chloride. detection and pouring process.
Background technology
Silicon chloride. belongs to hazardous chemical position eight class corrosives, has the physicochemical properties that it is special: for liquid under room temperature, boiling point 57.6 DEG C, highly volatile, meet water vigorous reaction, easily react with the moisture content in air, generate silicon dioxide and hydrogen chloride (salt acid mist).Therefore it has certain risk, in actual product tank switching, course of conveying, takes high pure nitrogen (more than 99.999%) to carry out binder, purging etc., it is to avoid with contacting of air more.
At present, common Silicon chloride. purifies and produces, and adopts rectification process, in process of production more, must assure that equipment, pipeline etc. seal No leakage, after handling, the Silicon chloride. that pipeline, valve etc. are remaining, it is necessary to process clean, otherwise after dismounting, residual liquid generates silica dioxide granule and salt acid mist with air reaction, staff is damaged, and contaminated environment, corrode common metal facilities and equipment；Remain in the SiO 2 powder etc. of tank body valve, also can cause particulate contaminant pollution etc. in successor uses.
If adopting tradition sampling method during detection high purity silicon tetrachloride, after product ingress of air, just reaction is rotten on the one hand, and sampling container etc. also can bring secondary pollution on the other hand, causes the inaccurate of accuracy of detection.
Therefore, for solving above-mentioned technical problem, the centralized distribution system of the optical fiber high purity silicon tetrachloride of a kind of innovation of necessary offer, to overcome described defect of the prior art.
Utility model content
For solving the problems referred to above, the purpose of this utility model is in that to provide the centralized distribution system of a kind of optical fiber high purity silicon tetrachloride, its isolation the contacting of Silicon chloride. product and air in purifying the link such as production, analytical control, fill, form a central controlled gas, liquid distribution control system, easily Silicon chloride. product is realized in hermetic pipeline pipeline blow off, analytical control, the operation such as purging clout.
For achieving the above object, the technical scheme that this utility model is taked is: the centralized distribution system of a kind of optical fiber high purity silicon tetrachloride, and it includes the first main pipeline, the second main pipeline and three-way valve V10；Wherein, the top of described first main pipeline is provided with a three-way valve V1, and bottom is by a two-port valve V6 and the docking of the second main pipeline；Described three-way valve V1 is connected to an a high pure nitrogen pipeline N1 and ordinary nitrogen pipeline N2；Described first main pipeline is also associated with three-way valve V2, three-way valve V3, three-way valve V4 and three-way valve V5；Described three-way valve V2 is connected to production line detection pipeline TI and production line detection pipeline T2；Described three-way valve V3 is connected to production line detection pipeline T3 and production line detection pipeline T4；Described three-way valve V4 is connected to storage-tank pipeline P1 and storage-tank pipeline P2；Described three-way valve V5 is connected to storage-tank pipeline P3 and storage-tank pipeline P4；Described second main pipeline is connected to three-way valve V7, three-way valve V8 and three-way valve V9；Described three-way valve V7 is connected to raw material detection pipe R1 and raw material detection pipe R2；Described three-way valve V8 is connected to raw material detection pipe R3 and raw material detection pipe R4；Described three-way valve V9 is connected to infrared on line analysis detection inlet duct F1 and infrared on line analysis detection inlet duct F3；Described three-way valve V10 is connected to infrared on line analysis detection outlet conduit F2, infrared on line analysis detection outlet conduit F4 and waste collection pipe W.
Compared with prior art, this utility model has the advantages that the centralized distribution system of optical fiber high purity silicon tetrachloride of the present utility model adopts multiple threeways, two-way valve and ducts, constitute the valve control system of an intercommunication, by the multiple different opening and closing compound modes of valve, can realize using nitrogen to purge detection pipeline, detection cell, valve etc., can also switch and make Silicon chloride. flow detection instrument detection cell, waste collection tank etc., pipeline after use nitrogen purging detects can also be switched, clout in valve etc., allow in whole process Silicon chloride. all in flowing conveying in hermetic pipeline, not ingress of air, avoid the haptoreaction with air to go bad and pipeline after conveying, the cleaning of valve, namely ensure that the accuracy that product analysis detects, also ensure that the quality of high purity silicon tetrachloride product.Additionally, valve group may be provided at from the position close to infrared detection instrument, it is convenient for handover operation when detecting, reduces the labor intensity analyzing testing staff, thoroughly solve the problems such as tradition sampling bottle the sampling mode secondary pollution, deviation and the waste entrainment that cause.
Accompanying drawing explanation
Fig. 1 is the structural representation of the centralized distribution system of optical fiber high purity silicon tetrachloride of the present utility model.
Fig. 2 is this utility model when utilizing high pure nitrogen scavenging pipeline, the flow schematic diagram of nitrogen.
Fig. 3 be this utility model to product of production line on-line checking time, the flow schematic diagram of Silicon chloride..
Fig. 4 is this utility model when raw material is detected, the flow schematic diagram of Silicon chloride. crude material.
Detailed description of the invention
Referring to shown in Figure of description 1 to accompanying drawing 4, this utility model is the centralized distribution system of a kind of optical fiber high purity silicon tetrachloride, and it is made up of several parts such as the first main pipeline I, the second main pipeline II and three-way valve V10.
Wherein, the top of described first main pipeline I is provided with a three-way valve V1, and bottom is by a two-port valve V6 and the second main pipeline II docking.Described three-way valve V1 is connected to an a high pure nitrogen pipeline N1 and ordinary nitrogen pipeline N2.Described first main pipeline is also associated with three-way valve V2, three-way valve V3, three-way valve V4 and three-way valve V5；Described three-way valve V2 is connected to production line detection pipeline TI and production line detection pipeline T2；Described three-way valve V3 is connected to production line detection pipeline T3 and production line detection pipeline T4；Described three-way valve V4 is connected to storage-tank pipeline P1 and storage-tank pipeline P2；Described three-way valve V5 is connected to storage-tank pipeline P3 and storage-tank pipeline P4.
Described second main pipeline II is connected to three-way valve V7, three-way valve V8 and three-way valve V9.Described three-way valve V7 is connected to raw material detection pipe R1 and raw material detection pipe R2；Described three-way valve V8 is connected to raw material detection pipe R3 and raw material detection pipe R4；Described three-way valve V9 is connected to infrared on line analysis detection inlet duct F1 and infrared on line analysis detection inlet duct F3；Described three-way valve V10 is connected to infrared on line analysis detection outlet conduit F2, infrared on line analysis detection outlet conduit F4 and waste collection pipe W.
Above-mentioned valve V1～V10, within the scope of the 3-5 rice of infrared detection instrument, can facilitate testing staff to switch over and operate, and reduces labor intensity, improves detection efficiency.
The centralized distribution system of optical fiber high purity silicon tetrachloride of the present utility model can allow various needs carry out the Silicon chloride. detected, and flow to detection cell in airtight pipeline environment.Because Silicon chloride. does not react with nitrogen, therefore carrying out the emptying of air in pipeline (purgings) and the remaining Silicon chloride. in pipeline after detecting blown off, all select the high pure nitrogen after liquid nitrogen vaporization or the ordinary purity nitrogen (dehydration) that nitrogen making machine group is produced.
In fig. 2, when using high pure nitrogen to purge, adjust the opening and closing assembled state of each valve, nitrogen is made to pass through three-way valve V1, two-port valve V6, three-way valve V9, detect inlet duct F1 through infrared on line analysis and flow to infrared on-line checking pond (not shown), outlet conduit F2 is detected then through infrared on line analysis, flow through three-way valve V10, (now nitrogen is all obstructed with other each pipelines to arrive waste collection tank eventually through waste collection pipe W, because nitrogen is room temperature on-condensible gas, the most at last by the exhaust pipe of waste collection tank, empty after entering tail gas leaching absorption tower).
This utility model when new clothes, or carry out relatively low purity raw material detection time, it is possible to use ordinary nitrogen purges, and can save certain high-purity liquid nitrogen cost.
In figure 3, carry out on-line checking for the Silicon chloride. product that production line is detected pipeline T2, after having carried out the nitrogen sparge tube road of Fig. 2, the air in pipeline and moisture content etc. are all blown off and is replaced into nitrogen.Then valve opening and closing assembled state is adjusted, make the Silicon chloride. product of production line, pipeline T2 is detected by production line, flow through three-way valve V2, two-port valve V6, three-way valve V9, detect inlet duct F1 through infrared on line analysis and flow to infrared on-line checking pond, detect outlet conduit F2 then through infrared on line analysis, flow through three-way valve V10, arrive waste collection tank eventually through waste collection pipe W.
Need flowing one fixed length time during detection, make the gas in pipeline, tube wall residual minim impurity, both pass through and fully wash away and replace.After detection, switch valve direction, repeat the purge operations in Fig. 2, the Silicon chloride. in pipeline is blown off, in order to other inspections.
In the diagram, the crude product Silicon chloride. detecting pipe R3 for raw material carries out infrared on line analysis detection, after carrying out Fig. 1 purging, adjusts valve and makes raw material flow to detection cell by direction in figure to detect, repeats Fig. 1 and purge after detection.
For reducing relatively low pure raw material, the pollution of high purity product signal piping being likely to, this utility model devises two-port valve V6, before opening raw material detection valve, is closed by two-port valve V6 and can stop raw material stream to top three-way valve V2-V5 etc..Raw material uses second special infrared detection pond, it is also possible to avoid the mixed probability caused to pollute.
Product in various products pots, presses out the process and method that carry out infrared on line analysis detection, similar with several graphic techniques above.
Above detailed description of the invention is only the preferred embodiment of this creation, not in order to limit this creation, and any amendment of making within all spirit in this creation and principle, equivalent replacement, improvement etc., should be included within the protection domain of this creation.
Claims (1)
1. the centralized distribution system of an optical fiber high purity silicon tetrachloride, it is characterised in that: include the first main pipeline, the second main pipeline and three-way valve V10；Wherein, the top of described first main pipeline is provided with a three-way valve V1, and bottom is by a two-port valve V6 and the docking of the second main pipeline；Described three-way valve V1 is connected to an a high pure nitrogen pipeline N1 and ordinary nitrogen pipeline N2；Described first main pipeline is also associated with three-way valve V2, three-way valve V3, three-way valve V4 and three-way valve V5；Described three-way valve V2 is connected to production line detection pipeline TI and production line detection pipeline T2；Described three-way valve V3 is connected to production line detection pipeline T3 and production line detection pipeline T4；Described three-way valve V4 is connected to storage-tank pipeline P1 and storage-tank pipeline P2；Described three-way valve V5 is connected to storage-tank pipeline P3 and storage-tank pipeline P4；Described second main pipeline is connected to three-way valve V7, three-way valve V8 and three-way valve V9；Described three-way valve V7 is connected to raw material detection pipe R1 and raw material detection pipe R2；Described three-way valve V8 is connected to raw material detection pipe R3 and raw material detection pipe R4；Described three-way valve V9 is connected to infrared on line analysis detection inlet duct F1 and infrared on line analysis detection inlet duct F3；Described three-way valve V10 is connected to infrared on line analysis detection outlet conduit F2, infrared on line analysis detection outlet conduit F4 and waste collection pipe W.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521107621.6U CN205368131U (en) | 2015-12-26 | 2015-12-26 | Optic fibre is with high -purity silicon tetrachloride's concentrated distribution system |
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| CN201521107621.6U CN205368131U (en) | 2015-12-26 | 2015-12-26 | Optic fibre is with high -purity silicon tetrachloride's concentrated distribution system |
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| CN205368131U true CN205368131U (en) | 2016-07-06 |
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| CN201521107621.6U Expired - Fee Related CN205368131U (en) | 2015-12-26 | 2015-12-26 | Optic fibre is with high -purity silicon tetrachloride's concentrated distribution system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109751511A (en) * | 2017-11-07 | 2019-05-14 | 北京北方华创微电子装备有限公司 | A kind of pipeline protective device and method |
-
2015
- 2015-12-26 CN CN201521107621.6U patent/CN205368131U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109751511A (en) * | 2017-11-07 | 2019-05-14 | 北京北方华创微电子装备有限公司 | A kind of pipeline protective device and method |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160706 Termination date: 20201226 |
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| CF01 | Termination of patent right due to non-payment of annual fee |