CN205246535U - Online sampling test system of infrared spectrum suitable for high -purity raw and other materials for optic fibre - Google Patents

Online sampling test system of infrared spectrum suitable for high -purity raw and other materials for optic fibre Download PDF

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Publication number
CN205246535U
CN205246535U CN201521064072.9U CN201521064072U CN205246535U CN 205246535 U CN205246535 U CN 205246535U CN 201521064072 U CN201521064072 U CN 201521064072U CN 205246535 U CN205246535 U CN 205246535U
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pipeline
valve
vacuum
gas
infrared
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莫杰
武鑫萍
袁琴
王铁艳
毛威
刘顺凯
纪淼
赵强
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YUNNAN CHIHONG INTERNATIONAL GERMANIUM INDUSTRY Co.,Ltd.
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Grinm Guojing Advanced Materials Co Ltd
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Abstract

The utility model discloses an online sampling test system of infrared spectrum suitable for high -purity raw and other materials for optic fibre. This online sampling test system includes infrared spectrum appearance, control system, sampling system, gas purging system, vacuum system, tail gas system, pressure detection system and discharging system. The utility model discloses a directly butt joint of infrared detection and production facility, the reflection promptly and accurately of messenger's testing result the quality level of the product in the production process, the qualities of product in the production process are improved the control level, and carry out the accurate control through the operation of DCS control system in to the sample process, and realized the system combination of sample preparation work with the infrared detection flow, improved the promptness, ageing of testing result. Simultaneously the utility model has the advantages of safe and reliable, flexible operation, extensively applicable, not only can be used for high -purity for the optic fibre infrared on -line measuring of raw and other materials, the final product quality control of the product that also can be used to to roll off the production line surveys.

Description

One is applicable to the raw-material infrared spectrum of high-purity optical fiber and samples online detection system
Technical field
The utility model relates to one and is applicable to the raw-material infrared spectrum of high-purity optical fiber and samples online detection system,Belong to spectral detection analysis technical field.
Background technology
The absorption vibration of the hydroxide ion that optical fiber causes due to the hydrogen containing foreign in raw material in manufacture process, causesOptical fiber absorbs energy and causes thus decay under specific 1383nm resonant frequency, becomes Silica optical fiberThe main contributor that in finished product, transmission consumes. Therefore fiber optic materials (comprises GeCl4、SiCl4、POCl3Deng) to containingThe content of hydrogen impurity compound (OH, CH, HCl) has high requirement.
Infra-red sepectrometry is one of effective ways that compound carried out qualitative or quantitative analysis. In infrared spectrum,Hydrogen containing foreign compound is subject to the transmitance of the absworption peak producing after Infrared irradiation and its concentration within the specific limitsMeet Lambert-Beer's law, therefore, by the infrared suction of hydrogen containing foreign in ft-ir measurement optical fiber raw materialReceive peak transmitance, the hydrogen-containing compound impurity content indirectly characterizing in optical fiber raw material becomes at present mensuration both at home and abroadThe common method of the hydrogen containing foreign compounds content in optical fiber raw material.
Fiber optic materials, because its purity requirement is high, therefore should do one's utmost to eliminate air to product in sampling testing processImpact. For realizing this purpose, cause traditional infrared sampling flowsheet all very loaded down with trivial details, while causing preparation of samplesBetween longer, thereby affected the promptness, ageing of testing result.
Patent documentation CN104236973A discloses and has processed, got a kind of early stage for detection of industrial germanium tetrachlorideSampling device and method, by using nitrogen to carry out purge to the germanium tetrachloride sample in sample treatment bottle, remove sampleIn free chlorine and hydrogen chloride gas, thereby improve the accuracy of infrared detection. But its sampling flowsheet is very complicated, sampleThe process of product processing is extremely loaded down with trivial details. Meanwhile, the processing bottle of the glass material of its use is deposited in the process of purging with nitrogen gasIn the danger of breaking, the security of sampling process is poor.
Utility model content
The purpose of this utility model is to provide one to be applicable to the raw-material infrared spectrum of high-purity optical fiber and gets onlineSample detection system, carries out system combination by this system by preparation of samples work and infrared detection flow process, can be significantlyDegree improves the promptness, ageing of testing result.
For achieving the above object, the utility model is by the following technical solutions:
One is applicable to the raw-material infrared spectrum of high-purity optical fiber and samples online detection system, comprises infrared spectrumInstrument, control system, sampler, gas purging system, vacuum system, exhaust system, pressure detecting system,And material drain system;
Described infrared spectrometer passes through a pipeline and triple valve Bonding pressure detection system and exhaust system, and by anotherOne pipeline is connected sampler and gas purging system with triple valve; Also connect material drain system by another pipeline;
Described control system is by equipment touch screen and DCS (DistributedControlSystem, distributed controlSystem) system composition, the wherein operation of the each system of DCS system group control and closing;
Described sampler comprises fluid sample pipeline and is arranged on by-pass valve control and the quality on fluid sample pipelineFlowmeter; Before sampling, set quantity of sampling quantity according to the volume of the sample cell of infrared spectrometer by DCS system;In sampling process, by mass flowmenter, the amount that flows into the fluid sample in sample cell is measured; Work as liquid-likeWhen product amount reaches the quantity that DCS system sets in advance, closing control valve;
Described gas purging system comprises purging pipeline and is arranged on the ultimate filter, the purging that purge on pipelinePipeline pressure control valve, safety valve, purging conduit pipe pneumatically microleak valve, purging pipeline check valve and the control of purging pipelineValve processed; Described gas purging system is adjusted the pressure of purge gas by purging pipeline pressure-regulating valve, meanwhile,Under the effect of purging conduit pipe pneumatically microleak valve, make to purge the pipe interior moment in slight positive pressure state, avoid ambient atmosThereby entering pipeline causes sample to be polluted; Purge the switching of pipeline control valve by the control of DCS system, whenWhen control system breaks down, can discharge unnecessary pressure by safety-valve, protection sampler safety;
Described vacuum system comprise vacuum pipe and be arranged on vacuum pipe pressure-regulating valve on vacuum pipe,The pneumatic microleak valve of vacuum pipe, vacuum pipe check valve, vacuum pipe control valve, vacuum generator and tail gas absorbTower; By the switching of DCS system control vacuum pipe control valve, and adjust by vacuum pipe pressure-regulating valveThe pressure of vacuum pipe supply gas, and then the size of the negative pressure of control vacuum generator generation;
Described exhaust system comprises exhaust pipe and is arranged on by-pass valve control, the pipeline check valve on exhaust pipeAnd tail gas absorber, on the pipeline between tail gas absorber and pipeline check valve, be connected vacuum generator, thereby make trueDo-nothing system is realized and being connected of infrared spectrometer by exhaust pipe;
Described pressure detecting system comprises pressure detecting pipeline control valve and corrosion-preventive pressure sensor; Before sampling, pass throughVacuum generator makes system in negative pressure state, when corrosion-preventive pressure sensor record system pressure stable after, close, there is not any variation if record system pressure in exhaust pipe control valve, can decision-making system within a certain period of timeIn sealing state;
Blowing pipeline control valve and receiving bottle that described material drain system comprises blowing pipeline and is connected with blowing pipeline;After sample detection, open blowing pipeline control valve by DCS system, use nitrogen or argon gas by sampleFluid sample in pond is pressed in receiving bottle, purges pipeline control valve and tail gas afterwards by the control of DCS systemPipeline control valve is alternately opened and is closed, and again system is purged.
In the utility model, use DCS system accurately to control the operation in sampling process, and pass throughEquipment touch screen is the current running status of display system intuitively, can touch at equipment according to the characteristic of different samples simultaneouslyOn control screen, flexibly operating parameter is adjusted. Purge the switching of pipeline control valve by the control of DCS system,In the time that control system breaks down, can discharge unnecessary pressure by safety-valve, protection sampler safety. GrindStudy carefully discovery, vacuum system and gas purging system are combined, purge pipeline control valve by the control of DCS systemAlternately open and close with exhaust pipe control valve, it purges effect and is better than single gas purging.
In the utility model, described infrared spectrometer is placed in the detection of the constant temperature and humidity of isolating with external environmentIn, avoid the interference of external environment factor (air humidity varies, variation of ambient temperature etc.) to testing result.The pond body material of the sample cell of described infrared spectrometer is stainless steel, and the Infrared Lens using is infrared germanium listOne in wafer, KBr, zinc sulphide.
Described vacuum generator is venturi-type vacuum generator, uses high pure nitrogen or argon gas as Venturi tubeThe supply gas of formula vacuum generator, in the time that gas flows in pipeline, can make vacuum occur according to Venturi effectIn device, produce negative pressure. In described vacuum pipe, the supply pressure of mobile gas is 0.05Mpa-0.4Mpa, civilian moundIn the maximum vacuum of generation of tube type vacuum generator be 715Torr-750Torr (holder, pressure unit, 1 holder(Torr)=133.322 handkerchiefs (Pa)).
Described gas purging system is used high pure nitrogen or argon gas as system purge gas, and the pressure of purge gas is excellentElect 0.05Mpa-0.3Mpa as.
Contrast traditional infrared sample detection method, infrared online sampling detection system described in the utility model canThe beneficial effect of realizing is:
1, the utility model has been realized infrared detection and has been docked with the direct of production equipment, makes testing result promptly and accuratelyReflection the quality level of product in production process. According to testing result, can adjust in time production technologyWhole, improve the level of control of product quality in production process.
2, by DCS control system, the operation in sampling process is accurately controlled, realized preparation of samples workThe system combination of work and infrared detection flow process, operating parameter can directly be adjusted on equipment touch screen, has avoidedLoaded down with trivial details manual operation, shortens the preparation of samples time, has improved the promptness, ageing of testing result.
3, by corrosion-preventive pressure sensor, system pressure is detected, can effectively avoid due to system leakCause spectrometer to be polluted, improved the security of sampling testing process.
4, described sample cell is fixedly mounted in the sample bin of infrared spectrometer, and is placed in perseverance together with spectrometerIn the detection of constant temperature and humidity, avoid external environment factor (air humidity varies, variation of ambient temperature etc.) to inspectionSurvey the interference of result.
Brief description of the drawings
Fig. 1 is the equipment schematic of sampling detection system of the present utility model.
Fig. 2 is the process chart of sample detection method of the present utility model.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail, but and does not mean thatTo the restriction of the utility model protection domain.
As shown in Figure 1, infrared spectrum of the present utility model samples online detection system and comprises equipment touch screen 1, DCSSystem 2, vacuum pipe 3, gas purging pipeline 4, fluid sample pipeline 5, ultimate filter 6, purging pipelinePressure-regulating valve 7, safety valve 8, purging conduit pipe pneumatically microleak valve 9, purging pipeline check valve 10, purging pipelineControl valve 11, threeway 1, threeway 2 13, mass flowmenter 14, fluid sample pipeline control valve 15, sampleProduct pond 16, infrared spectrometer 17, computer 18, pressure detecting pipeline 19, pressure detecting pipeline control valve 20,Corrosion-preventive pressure sensor 21, exhaust pipe control valve 22, exhaust pipe check valve 23, exhaust pipe 24, trueVacant duct pressure-regulating valve 25, the pneumatic microleak valve 26 of vacuum pipe, vacuum pipe check valve 27, vacuum pipe controlValve 28 processed, venturi-type vacuum generator 29, tail gas absorber 30, blowing pipeline 31, blowing pipe controlValve 32, receiving bottle 33.
Wherein, sample cell 16 fixed in position in the sample bin of infrared spectrometer 17 inside, the pond of sample cell 16Body is stainless steel, is welded with up and down three stainless steel pipes at pond body, wherein, and the blowing pipeline 31 of bottomConnect successively blowing pipeline control valve 32 and receiving bottle 33. In two pipelines that weld on top, sample channel is logicalCrossing threeway 12 is connected with fluid sample pipeline 5 with purging pipeline 4; Exhaust pipe is by threeway 13 and pressure inspectionTest tube road 19 is connected with exhaust pipe 24.
On described gas purging pipeline 4, be connected with ultimate filter 6, purge pipeline pressure-regulating valve 7, safetyValve 8, purging conduit pipe pneumatically microleak valve 9, purging pipeline check valve 10, purging pipeline control valve 11 and threeway12. Use high pure nitrogen or argon gas as system purge gas, control by purging pipeline control valve 11.Meanwhile, purging under the effect of conduit pipe pneumatically microleak valve 9, make the pipe interior moment in slight positive pressure state, avoidThe outside air system of entering pollutes. Safety valve 8 in the time that DCS system 2 breaks down to samplerCarry out pressure release.
On fluid sample pipeline 5, be connected with mass flowmenter 14 and fluid sample pipeline control valve 15. Pass through qualityFlowmeter 14 measures the amount that flows into the fluid sample in sample cell, when fluid sample amount reaches DCS system2 set quantity time, closing liquid sample pipe control valve 15.
On pressure detecting pipeline 19, be connected with pressure detecting pipeline control valve 20 and corrosion-preventive pressure sensor 21.Before sampling, by corrosion-preventive pressure sensor 21 measuring system pressure, judge that whether system is in sealing state.
On vacuum pipe 3, be connected with vacuum pipe pressure-regulating valve 25, the pneumatic microleak valve 26 of vacuum pipe, vacuumPipeline check valve 27, vacuum pipe control valve 28 and venturi-type vacuum generator 29 and tail gas absorber 30.On exhaust pipe 24, be connected with exhaust pipe control valve 22 and exhaust pipe check valve 23 true with venturi-typeEmpty generator 29 is connected, thereby venturi-type vacuum generator 29 is realized and sample by exhaust pipe 24The connection in pond 16. Use high pure nitrogen or argon gas as the supply gas of venturi-type vacuum generator, pass throughMobile the making of gas produces negative pressure in venturi-type vacuum generator 29, and raising system purges efficiency.
All control valves in system are all controlled its on off operating mode by DCS system 2.
Equipment touch screen 1 samples the running status of detection system and operating parameter (as system pressure number for showingValue, valve on off operating mode etc.), handled easily personnel understand the running status of system in time.
As shown in Figure 2, for adopting online sampling detection system of the present utility model to sample the technological process detectingFigure, based on processing step wherein, completes following examples.
Embodiment 1
The online sampling of germanium tetrachloride intermediate products detects, and mode of operation is as follows:
First, fluid sample pipeline 5 is connected with the sample tap of germanium tetrachloride equipment for purifying, and opens vacuum tubeRoad control valve 28, regulates the flow of the supply gas in vacuum pipe 3 by vacuum pipe pressure-regulating valve 25,Making the maximum vacuum that venturi-type vacuum generator 29 produces is 720Torr. Open successively afterwards exhaust pipeControl valve 22 and purging pipeline control valve 11, and purge pipelines by purging pipeline pressure-regulating valve 7 adjustments of gasThe pressure of the purge gas in 4 is to 0.05Mpa. Control and purge pipeline control valve 11 and tail by DCS system 2Feed channel control valve 22 is alternately opened and is closed, and the each 2s of setup control valve make-and-break time, alternately opens with two valvesClose 1 time as a sweeping process, under the acting in conjunction of bleeding in gas purging and vacuum system, system is carried outPurge for 50 times.
After system purges, shut-down purge pipeline control valve 11, and keep exhaust pipe control valve 22 and vacuumPipeline control valve 28, in open mode, regulates the confession in vacuum pipe 3 by vacuum pipe pressure-regulating valve 25The flow of giving gas, making the maximum vacuum that venturi-type vacuum generator 29 produces is 730Torr. Open pressurePower detects pipeline control valve 20, by corrosion-preventive pressure sensor 21, system pressure is detected. Wait to record and beAfter system pressure stability, close exhaust pipe control valve 22 and vacuum pipe control valve 28, system is carried out to pressure testing.If system pressure remains unchanged in 5min, think that system sealing is good, can proceed follow-up behaviourDo.
After pressure detecting is qualified, detect pipeline control valve 20 by DCS system 2 closing presures, open liquid simultaneouslyBody sample pipe control valve 15 and exhaust pipe control valve 22, make germanium tetrachloride intermediate products by liquid-like QCRoad 5 flows in sample cell 16. Simultaneously by mass flowmenter 14 to flowing into fluid sample in sample cell 16Amount is measured, in the time that fluid sample amount reaches the quantity that DCS system 2 sets, and closing liquid sample successivelyPipeline control valve 15 and exhaust pipe control valve 22.
After sampling, by infrared spectrometer 17, the fluid sample in sample cell 16 is carried out to infrared scan detection,And the infrared spectrum obtaining after scanning is stored in computer 18.
After Sample Scan detects, open successively blowing pipeline control valve 32 and purge pipeline control valve 11, logicalCross high pure nitrogen or argon gas the fluid sample in sample cell 16 is passed through to blowing pipeline 31 force feeds to receiving bottle 33.
After treating the fluid sample force feed in sample cell 16, close blowing pipeline control valve 32, open successively trueVacant duct control valve 28, exhaust pipe control valve 22 and purging pipeline control valve 11. Control by DCS system 2System purges pipeline control valve 11 and exhaust pipe control valve 22 is alternately opened and closed, and again system is carried out 50 timesPurge.
Use sampling detection system described in the utility model to carry out the germanium tetrachloride intermediate products in production processThe infrared detection result obtaining after online sampling detects is as follows:
Wave number (impurity component) Infrared transmittivity %
3610±2cm-1(GeCl3OH) 98.62
2970~2925cm-1(CH) 99.83
2860~2830cm-1(HCl) 99.66
2336±2cm-1(CO2) 99.24
2272±2cm-1 99.69
2000~1400cm-1 98.85
1173±2cm-1 99.58
Embodiment 2
The sampling of silicon tetrachloride finished products detects, and mode of operation is as follows:
First, fluid sample pipeline 5 is connected with the discharging opening of silicon tetrachloride finished products container, and opens trueVacant duct control valve 28, regulates the stream of the supply gas in vacuum pipe 3 by vacuum pipe pressure-regulating valve 25Amount, making the maximum vacuum that venturi-type vacuum generator 29 produces is 725Torr. Open successively afterwards tail gasPipeline control valve 22 and purging pipeline control valve 11, and purge by purging pipeline pressure-regulating valve 7 adjustments of gasThe pressure of the purge gas in pipeline 4 is to 0.08Mpa. Control and purge pipeline control valve 11 by DCS system 2Alternately open and close with exhaust pipe control valve 22, the each 1.5s of setup control valve make-and-break time, hands over two valvesClose 1 time as a sweeping process for opening, under the acting in conjunction of bleeding in gas purging and vacuum system to beingSystem carries out 50 times and purges.
After system purges, shut-down purge pipeline control valve 11, and keep exhaust pipe control valve 22 and vacuumPipeline control valve 28, in open mode, regulates the confession in vacuum pipe 3 by vacuum pipe pressure-regulating valve 25The flow of giving gas, making the maximum vacuum that venturi-type vacuum generator 29 produces is 740Torr. Open pressurePower detects pipeline control valve 20, by corrosion-preventive pressure sensor 21, system pressure is detected. Wait to record and beAfter system pressure stability, close exhaust pipe control valve 22 and vacuum pipe control valve 28, system is carried out to pressure testing.If system pressure remains unchanged in 5min, think that system sealing is good, can proceed follow-up behaviourDo.
After pressure detecting is qualified, detect pipeline control valve 20 by DCS system 2 closing presures, open liquid simultaneouslyBody sample pipe control valve 15 and exhaust pipe control valve 22 are pressed silicon tetrachloride finished products in product containerEnter to sample cell 16. By mass flowmenter 14, the amount that flows into the fluid sample in sample cell 16 is entered simultaneouslyRow metering, in the time that fluid sample amount reaches the quantity that DCS system 2 sets, closing liquid sample pipe successivelyControl valve 15 and exhaust pipe control valve 22.
After sampling, by infrared spectrometer 17, the fluid sample in sample cell 16 is carried out to infrared scan detection,And the infrared spectrum obtaining after scanning is stored in computer 18.
After Sample Scan detects, open successively blowing pipeline control valve 32 and purge pipeline control valve 11, logicalCross high pure nitrogen or argon gas the fluid sample in sample cell 16 is passed through to blowing pipeline 31 force feeds to receiving bottle 33.
After treating the fluid sample force feed in sample cell 16, close blowing pipeline control valve 32, open successively trueVacant duct control valve 28, exhaust pipe control valve 22 and purging pipeline control valve 11. Control by DCS system 2System purges pipeline control valve 11 and exhaust pipe control valve 22 is alternately opened and closed, and again system is carried out 50 timesPurge.
Use sampling detection system described in the utility model to sample the silicon tetrachloride finished products in containerThe infrared detection result obtaining after detection is as follows:
Wave number (impurity component) Infrared transmittivity %
3666cm-1(SiCl3OH) 99.42
3100~3020cm-1(Aromatic-CH) Do not find absworption peak
2970~2925cm-1(Aliphatic-CH) 99.30
2860~2830cm-1(HCl) 99.78
2338cm-1(CO2) 99.55
2295cm-1(Si(NCO)4) Do not find absworption peak
2257cm-1(SiHCl3) 99.00
2023cm-1(Si(CH3)Cl3) 98.61
1540cm-1(Si2OCl6) 99.51

Claims (6)

1. be applicable to the raw-material infrared spectrum of high-purity optical fiber and sample online a detection system, it is characterized in that,Comprise infrared spectrometer, control system, sampler, gas purging system, vacuum system, exhaust system, pressureForce detection system and material drain system;
Described infrared spectrometer passes through a pipeline and triple valve Bonding pressure detection system and exhaust system, and by anotherOne pipeline is connected sampler and gas purging system with triple valve; Also connect material drain system by another pipeline;
Described control system is made up of equipment touch screen and DCS system, wherein DCS system group control each systemMove and close;
Described sampler comprises fluid sample pipeline and is arranged on by-pass valve control and the quality on fluid sample pipelineFlowmeter;
Described gas purging system comprises purging pipeline and is arranged on the ultimate filter, the purging that purge on pipelinePipeline pressure control valve, safety valve, purging conduit pipe pneumatically microleak valve, purging pipeline check valve and the control of purging pipelineValve processed;
Described vacuum system comprise vacuum pipe and be arranged on vacuum pipe pressure-regulating valve on vacuum pipe,The pneumatic microleak valve of vacuum pipe, vacuum pipe check valve, vacuum pipe control valve, vacuum generator and tail gas absorbTower;
Described exhaust system comprises exhaust pipe and is arranged on by-pass valve control, the pipeline check valve on exhaust pipeAnd tail gas absorber, on the pipeline between tail gas absorber and pipeline check valve, be connected vacuum generator, thereby make trueDo-nothing system is realized and being connected of infrared spectrometer by exhaust pipe;
Described pressure detecting system comprises pressure detecting pipeline control valve and corrosion-preventive pressure sensor;
Blowing pipeline control valve and receiving bottle that described material drain system comprises blowing pipeline and is connected with blowing pipeline.
2. infrared spectrum according to claim 1 samples detection system online, it is characterized in that, described redExternal spectrum instrument be placed in and the detection of the constant temperature and humidity of external environment isolation in.
3. infrared spectrum according to claim 1 samples detection system online, it is characterized in that, described redThe pond body material of the sample cell of external spectrum instrument is stainless steel, the Infrared Lens using be infrared single germanium wafer,One in KBr, zinc sulphide.
4. infrared spectrum according to claim 1 samples detection system online, it is characterized in that, described trueEmpty generator is venturi-type vacuum generator, uses high pure nitrogen or argon gas to occur as venturi-type vacuumThe supply gas of device.
5. infrared spectrum according to claim 4 samples detection system online, it is characterized in that, described trueIn vacant duct, the supply pressure of mobile gas is 0.05Mpa-0.4Mpa, the product of venturi-type vacuum generatorRaw maximum vacuum is 715Torr-750Torr.
6. infrared spectrum according to claim 1 samples detection system online, described gas purging system withHigh pure nitrogen or argon gas are as purge gas, and the pressure of purge gas is 0.05Mpa-0.3Mpa.
CN201521064072.9U 2015-12-18 2015-12-18 Online sampling test system of infrared spectrum suitable for high -purity raw and other materials for optic fibre Active CN205246535U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106568775A (en) * 2016-10-24 2017-04-19 洛阳中硅高科技有限公司 Online detection apparatus of tetrachlorosilane for optical fibers
CN106896080A (en) * 2015-12-18 2017-06-27 有研国晶辉新材料有限公司 A kind of infrared spectrum on-line period detecting system and detection method suitable for high-purity optical fiber raw material

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106896080A (en) * 2015-12-18 2017-06-27 有研国晶辉新材料有限公司 A kind of infrared spectrum on-line period detecting system and detection method suitable for high-purity optical fiber raw material
CN106568775A (en) * 2016-10-24 2017-04-19 洛阳中硅高科技有限公司 Online detection apparatus of tetrachlorosilane for optical fibers

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GR01 Patent grant
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Effective date of registration: 20211217

Address after: 655099 second floor of Chihong company office building, Qujing Economic and Technological Development Zone, Qujing City, Yunnan Province

Patentee after: YUNNAN CHIHONG INTERNATIONAL GERMANIUM INDUSTRY Co.,Ltd.

Address before: 065201 Department 2, General Research Institute, Yanjiao Development Zone, Sanhe City, Langfang City, Hebei Province

Patentee before: GRINM GUOJING ADVANCED MATERIALS Co.,Ltd.