CN203705291U - Quartz crystal microbalance sensor based on nano-alumina palladium film - Google Patents
Quartz crystal microbalance sensor based on nano-alumina palladium film Download PDFInfo
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- CN203705291U CN203705291U CN201420090688.2U CN201420090688U CN203705291U CN 203705291 U CN203705291 U CN 203705291U CN 201420090688 U CN201420090688 U CN 201420090688U CN 203705291 U CN203705291 U CN 203705291U
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Abstract
The utility model provides a quartz crystal microbalance sensor based on a nano-alumina palladium film. The sensor comprises a quartz crystal wafer (1), wherein the base of the quartz crystal wafer (1) is an aluminized film layer (2), a nano aluminum oxide film layer (3) is arranged on the surface of the aluminized film layer (2), a palladium plated film layer (4) is arranged on the surface of the nano aluminum oxide film layer (3), and accordingly, the quartz crystal microbalance sensor based on the nano-alumina palladium film is formed; and the shape of nano aluminum oxide is spherical, and the particle size of the nano aluminum oxide ranges from 1 nm to 50 nm. The quartz crystal microbalance sensor has the effects, the benefits and the advantages of simplicity in manufacture, low cost, high sensitivity, corrosion resistance, good stability and the like.
Description
Technical field
The utility model belongs to sensing detection technical field, relates to a kind of quartz crystal microbalance sensor based on nano oxidized aluminium base palladium film.
Background technology
QCM (Quartz Crystal Microbalance) (Quartz crystal microbalance, QCM) be a kind of novel sensing measurement technology, it is to utilize relation in direct ratio between the variation of quartz-crystal resonance frequency and the material mass of crystalline electrode surface deposition, can detecting electrode surface n g the even mass change of pg level and the viscosity of solution, density, impedance, the isoparametric variation of specific inductive capacity, highly sensitive because having, respond the detection that quick, easy and simple to handle and cheap feature is widely used in the material such as atmosphere pollution, biomolecule.
The core component of quartz crystal microbalance sensor is the installing and using of metal electrode on quartz crystal slice, more general electrode material has gold (Au) at present, because quartz crystal slice is smooth, adhesion is little, when installation, conventionally between electrode material and quartz crystal slice, first add plating layer of metal aluminium (Al), adhesion with intensifier electrode material on quartz crystal slice, therefore the metal aluminium lamination that, adds plating has a very important role to the making of quartz crystal microbalance sensor.But, the chemical stability that plain metal aluminium coat has had in most of inorganic salts and organic acid, but be soluble in dilute sulfuric acid, nitric acid, NaOH, potassium hydroxide solution, its application is restricted; Nano-aluminium oxide positively charged, has the electric property that good acid corrosion-resistant ability, high physical strength are become reconciled; And Metal Palladium (Pd) cost ratio gold is cheap, can hydrofluoric acid resistant, the erosion of phosphoric acid, perchloric acid, hydrochloric acid and sulfuric acid vapor, be a kind ofly can resist mercaptan erosion action, than the metal material of golden superior performance.Therefore, the utility model substitutes gold by Metal Palladium, on quartz crystal slice, after coating metal aluminium lamination, add plating one deck nano-aluminium oxide rete, plate again Metal Palladium layer, can not only intensifier electrode material and quartz crystal slice between adhesion, and there is good corrosion resistance and stability, also, by reducing the cost of manufacture of quartz crystal microbalance sensor, application surface is widened.
Summary of the invention
The purpose of this utility model is to provide a kind of nano oxidized aluminium base palladium film quartz crystal microbalance sensor, adds plating aluminium and nano-aluminium oxide on quartz crystal slice, reduces the use amount of noble metal, can reduce the cost of manufacture of sensor.
For addressing the above problem, the utility model adopts following technical scheme:
A kind of nano oxidized aluminium base palladium film quartz crystal microbalance sensor, this sensor comprises a quartz crystal slice, described quartz crystal slice substrate is aluminium plating membrane, described aluminium plating membrane surface is nano-aluminium oxide rete, described nano-aluminium oxide film surface is palladium plated film layer, thereby forms a kind of quartz crystal microbalance sensor based on nano oxidized aluminium base palladium film.
It should be noted that and adopt vacuum coating and mask plate technology, easily control metal coating thickness and size.Nano oxidized aluminium base palladium film quartz crystal microbalance sensor described in the utility model, aluminium plating membrane thickness is 1 ~ 100 nm, and nano-aluminium oxide thicknesses of layers is 1 ~ 100 nm, and palladium plated film layer thickness is 20 ~ 200 nm; Wherein, being shaped as of nano-aluminium oxide is spherical, and the particle diameter of nano-aluminium oxide is 1 ~ 50 nm; And quartz crystal slice is AT cut type quartz crystal, and its fundamental frequency is 4 ~ 80 MHz.And because film material is metallic aluminium, nano-aluminium oxide and Metal Palladium, add the adhesion between aluminium lamination, nano-aluminium oxide layer and Metal Palladium energy intensifier electrode material and the quartz crystal slice of plating, make whole film strength and stability good, frequency stability is high.In addition, the in the situation that of control electrode material thickness, between quartz crystal slice and Metal Palladium, add plating aluminium, effectively reduce the thickness of Metal Palladium layer, reduce the use amount of noble metal, thereby reduced the production cost of whole quartz crystal microbalance sensor.
The beneficial effects of the utility model are, described nano oxidized aluminium base palladium film quartz crystal microbalance sensor has advantages such as making simple, with low cost, highly sensitive, corrosion resistivity and good stability.
Accompanying drawing explanation
Fig. 1 is the diagrammatic cross-section of nano oxidized aluminium base palladium film quartz crystal microbalance sensor.
In Fig. 1,1. quartz crystal slice, 2. aluminium plating membrane, 3. nano-aluminium oxide rete, 4. palladium plated film layer.
Embodiment
Below in conjunction with accompanying drawing, the present utility model is further described:
As shown in Figure 1, a kind of nano oxidized aluminium base palladium film quartz crystal microbalance sensor, this sensor comprises that an AT cut type, fundamental frequency are the quartz crystal slice 1 of 8.0 MHz, utilize the aluminum membranous layer 2 of vacuum coating technology at described quartz crystal slice 1 substrate surface plating 30 nm thickness, at the nano-aluminium oxide rete 3 of described aluminium plating membrane 2 surface-assembled 40 nm thickness, at the Metal Palladium rete 4 of described nano-aluminium oxide rete 3 plated surface 30 nm thickness, thereby form a kind of quartz crystal microbalance sensor based on nano oxidized aluminium base palladium film; Wherein, being shaped as of nano-aluminium oxide is spherical, and the particle diameter of nano-aluminium oxide is 25 nm.
Because film material is metallic aluminium, nano-aluminium oxide and Metal Palladium, intensity and corrosion resistance are good, stable chemical nature, and frequency stability is high, and greatly reduced the use amount of noble metal and reduced the production cost of whole quartz crystal microbalance sensor, there is wide application prospect.
Claims (6)
1. a nano oxidized aluminium base palladium film quartz crystal microbalance sensor, it is characterized in that: this sensor comprises a quartz crystal slice (1), described quartz crystal slice (1) substrate is aluminium plating membrane (2), described aluminium plating membrane (2) surface is nano-aluminium oxide rete (3), described nano-aluminium oxide rete (3) surface is palladium plated film layer (4), forms a kind of quartz crystal microbalance sensor based on nano oxidized aluminium base palladium film.
2. quartz crystal microbalance sensor according to claim 1, is characterized in that described aluminium plating membrane (2) thickness is 1 ~ 100 nm.
3. quartz crystal microbalance sensor according to claim 1, is characterized in that described nano-aluminium oxide rete (3) thickness is 1 ~ 100 nm.
4. quartz crystal microbalance sensor according to claim 3, is characterized in that being shaped as of described nano-aluminium oxide is spherical, and the particle diameter of nano-aluminium oxide is 1 ~ 50 nm.
5. quartz crystal microbalance sensor according to claim 1, is characterized in that described palladium plated film layer (4) thickness is 20 ~ 200 nm.
6. quartz crystal microbalance sensor according to claim 1, is characterized in that described quartz crystal slice (1) is AT cut type quartz crystal, and its fundamental frequency is 4 ~ 80 MHz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420090688.2U CN203705291U (en) | 2014-03-03 | 2014-03-03 | Quartz crystal microbalance sensor based on nano-alumina palladium film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420090688.2U CN203705291U (en) | 2014-03-03 | 2014-03-03 | Quartz crystal microbalance sensor based on nano-alumina palladium film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203705291U true CN203705291U (en) | 2014-07-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420090688.2U Expired - Fee Related CN203705291U (en) | 2014-03-03 | 2014-03-03 | Quartz crystal microbalance sensor based on nano-alumina palladium film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203705291U (en) |
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2014
- 2014-03-03 CN CN201420090688.2U patent/CN203705291U/en not_active Expired - Fee Related
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140709 Termination date: 20150303 |
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| EXPY | Termination of patent right or utility model |