CN203299075U - Aluminum base quartz crystal microbalance sensor with three layers of metal films - Google Patents
Aluminum base quartz crystal microbalance sensor with three layers of metal films Download PDFInfo
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- CN203299075U CN203299075U CN2013203937479U CN201320393747U CN203299075U CN 203299075 U CN203299075 U CN 203299075U CN 2013203937479 U CN2013203937479 U CN 2013203937479U CN 201320393747 U CN201320393747 U CN 201320393747U CN 203299075 U CN203299075 U CN 203299075U
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- quartz crystal
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Abstract
The utility model provides an aluminum base quartz crystal microbalance sensor with three layers of metal films. The aluminum base quartz crystal microbalance sensor with the three layers of metal films comprises a quartz crystal piece (1); the substrate of the quartz crystal piece (1) is an aluminum plated film layer (2); the surface of the aluminum laminated film layer (2) is a titanizing film layer (3); the surface of the titanizing film layer (3) is a gold plated film layer (4); accordingly the aluminum base quartz crystal microbalance sensor with the three layers of metal films is formed. The aluminum base quartz crystal microbalance sensor with the three layers of metal films has the advantages of being simple in production, low in cost, high in sensitivity, good in corrosion resistance and stability and the like.
Description
Technical field
The utility model belongs to the sensing detection technical field, relates to a kind of quartz crystal microbalance sensor based on the aluminium-radical three-layer metal film.
Background technology
QCM (Quartz Crystal Microbalance) (Quartz crystal microbalance, QCM) be a kind of novel sensing measurement technology, it is to utilize relation in direct ratio between the material mass of the variation of quartz-crystal resonance frequency and crystalline electrode surface deposition, but the even mass change of pg level and the isoparametric variation of viscosity, density, impedance, specific inductive capacity of solution of detecting electrode surface n g,, response quick, easy and simple to handle and cheap characteristics highly sensitive because having are widely used in the detection of the materials such as atmosphere pollution, biomolecule.
The core component of quartz crystal microbalance sensor is the installing and using of metal electrode on quartz crystal slice, and more general electrode material be golden (Au) at present, and golden stable in properties but expensive is restricted its application; Yet Titanium (Ti) cost ratio gold is cheap, and with dilute sulfuric acid, hydrochloric acid, alkali metal hydroxide, alkali carbonate etc., does not react, and has good acidproof, alkaline resistance properties, is a kind of potential good electrode material.Therefore with titanium, substitute gold, namely after on quartz crystal slice, adding the plating aluminium lamination, plate titanium layer, then the plated with gold layer, add the aluminium lamination energy intensifier electrode material of plating and the adhesion between quartz crystal slice, and have stability.Owing to plating metallic aluminium and titanium, can effectively reduce the thickness of Gold plated Layer, reduce the use amount of gold, thereby reduce the cost of manufacture of whole quartz crystal microbalance sensor, make applications expanding.
Summary of the invention
The purpose of this utility model is to provide a kind of aluminium-radical three-layer metal film quartz crystal microbalance sensor, between quartz crystal slice and gold, adds plating aluminium and titanium, reduces the use amount of gold, can reduce the cost of sensor.
For addressing the above problem, the utility model adopts following technical scheme:
A kind of aluminium-radical three-layer metal film quartz crystal microbalance sensor, this sensor comprises a quartz crystal slice, described quartz crystal slice substrate is aluminium plating membrane, described aluminium plating membrane surface is the titanizing rete, described titanizing film surface is gold-plated rete, thereby forms a kind of quartz crystal microbalance sensor based on the aluminium-radical three-layer metal film.
It should be noted that and adopt vacuum coating and mask plate technology, easily control metal coating thickness and size.Aluminium-radical three-layer metal film quartz crystal microbalance sensor described in the utility model, aluminium plating membrane thickness is 1 ~ 50 nm, and the titanizing thicknesses of layers is 20 ~ 200 nm, and gold-plated thicknesses of layers is 20 ~ 200 nm, quartz crystal slice is AT cut type quartz crystal, and its fundamental frequency is 4 ~ 50 MHz.And because film material is metallic aluminium, titanium and gold, add the aluminium lamination energy intensifier electrode material of plating and the adhesion between quartz crystal slice, make whole film strength and stability good, frequency stability is high.In addition, in the situation that the control electrode material thickness adds plating aluminium and titanium between quartz crystal slice and gold, effectively reduced the thickness of Gold plated Layer, reduced golden use amount, thereby reduced the production cost of whole quartz crystal microbalance sensor.
The beneficial effects of the utility model are, described aluminium-radical three-layer metal film quartz crystal microbalance sensor has advantages such as making simple, with low cost, highly sensitive, corrosion resistivity and good stability.
The accompanying drawing explanation
Fig. 1 is the diagrammatic cross-section of aluminium-radical three-layer metal film quartz crystal microbalance sensor.
In Fig. 1,1. quartz crystal slice, 2. aluminium plating membrane, 3. titanizing rete, 4. gold-plated rete.
Embodiment
Below in conjunction with accompanying drawing, the present utility model is further described:
As shown in Figure 1, a kind of aluminium-radical three-layer metal film quartz crystal microbalance sensor, this sensor comprises that an AT cut type, fundamental frequency are the quartz crystal slice 1 of 8.0 MHz, utilize the aluminum membranous layer 2 of vacuum coating technology at described quartz crystal slice 1 substrate surface plating 20 nm thickness, titanium film layer 3 at described aluminium plating membrane 2 plated surface 130 nm thickness, at the golden membranous layer 4 of described titanizing rete 3 plated surface 50 nm thickness, thereby form a kind of quartz crystal microbalance sensor based on the aluminium-radical three-layer metal film.
Because film material is metallic aluminium, titanium and gold, intensity and corrosion resistance are good, stable chemical nature, and frequency stability is high, and has greatly reduced golden use amount and reduced the production cost of whole quartz crystal microbalance sensor, but widespread use.
Claims (5)
1. aluminium-radical three-layer metal film quartz crystal microbalance sensor, it is characterized in that: this sensor comprises a quartz crystal slice (1), described quartz crystal slice (1) substrate is aluminium plating membrane (2), described aluminium plating membrane (2) surface is titanizing rete (3), described titanizing rete (3) surface is gold-plated rete (4), forms a kind of quartz crystal microbalance sensor based on the aluminium-radical three-layer metal film.
2. quartz crystal microbalance sensor according to claim 1, is characterized in that described aluminium plating membrane (2) thickness is 1 ~ 50 nm.
3. quartz crystal microbalance sensor according to claim 1, is characterized in that described titanizing rete (3) thickness is 20 ~ 200 nm.
4. quartz crystal microbalance sensor according to claim 1, is characterized in that described gold-plated rete (4) thickness is 20 ~ 200 nm.
5. quartz crystal microbalance sensor according to claim 1, is characterized in that described quartz crystal slice (1) is AT cut type quartz crystal, and its fundamental frequency is 4 ~ 50 MHz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203937479U CN203299075U (en) | 2013-07-04 | 2013-07-04 | Aluminum base quartz crystal microbalance sensor with three layers of metal films |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203937479U CN203299075U (en) | 2013-07-04 | 2013-07-04 | Aluminum base quartz crystal microbalance sensor with three layers of metal films |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203299075U true CN203299075U (en) | 2013-11-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN2013203937479U Expired - Fee Related CN203299075U (en) | 2013-07-04 | 2013-07-04 | Aluminum base quartz crystal microbalance sensor with three layers of metal films |
Country Status (1)
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| CN (1) | CN203299075U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114351094A (en) * | 2021-12-20 | 2022-04-15 | 唐山万士和电子有限公司 | Production method of micro-balance quartz wafer with plating-enhanced graphite layer |
-
2013
- 2013-07-04 CN CN2013203937479U patent/CN203299075U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114351094A (en) * | 2021-12-20 | 2022-04-15 | 唐山万士和电子有限公司 | Production method of micro-balance quartz wafer with plating-enhanced graphite layer |
| CN114351094B (en) * | 2021-12-20 | 2023-08-04 | 唐山万士和电子有限公司 | Production method of plating graphite layer microbalance quartz wafer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131120 Termination date: 20140704 |
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| EXPY | Termination of patent right or utility model |