CN203132941U - Chromium-based quartz crystal microbalance sensor - Google Patents
Chromium-based quartz crystal microbalance sensor Download PDFInfo
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- CN203132941U CN203132941U CN 201320090048 CN201320090048U CN203132941U CN 203132941 U CN203132941 U CN 203132941U CN 201320090048 CN201320090048 CN 201320090048 CN 201320090048 U CN201320090048 U CN 201320090048U CN 203132941 U CN203132941 U CN 203132941U
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- quartz crystal
- chromium
- crystal microbalance
- microbalance sensor
- rete
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Abstract
The utility model provides a chromium-based quartz crystal microbalance sensor which comprises a quartz crystal sheet (1), wherein a chromium-plated film layer (2) is arranged on the surface of the quartz crystal sheet (1); a gold-plated film layer (3) is arranged on the surface of the chromium-plated film layer (2); and therefore, the chromium-based quartz crystal microbalance sensor is formed. The chromium-based quartz crystal microbalance sensor has the advantages of simplicity in manufacturing, convenience in use, high sensitivity, high corrosion resistance and high stability and is superior to the conventional quartz crystal microbalance sensor.
Description
Technical field
The utility model belongs to the sensing detection technical field, relates to a kind of chromium base quartz crystal microbalance sensor.
Background technology
QCM (Quartz Crystal Microbalance) (Quartz crystal microbalance, QCM) be a kind of novel sensing measurement technology, it is to utilize relation in direct ratio between the material mass of the variation of quartz-crystal resonance frequency and crystalline electrode surface deposition, but the mass change of detecting electrode surface n g even pg level and the viscosity of solution, density, impedance, the isoparametric variation of specific inductive capacity,, response quick, easy and simple to handle and cheap characteristics highly sensitive because having are widely used in the detection of materials such as atmosphere pollution, biomolecule.
The core component of quartz crystal microbalance sensor is the installing and using of metal electrode on the quartz crystal slice, more general electrode material has gold (Au) at present, smooth because of quartz crystal slice, adhesion is little, usually between electrode material and quartz crystal slice, add plating layer of metal aluminium (Al) during installation earlier, with the adhesion of intensifier electrode material on quartz crystal slice, therefore, the metal aluminium lamination that adds plating has a very important role to the making of quartz crystal microbalance sensor.Yet aluminium metal coating has good chemical stability in most of inorganic salts and organic acid, but is soluble in dilute sulfuric acid, nitric acid, NaOH, the potassium hydroxide solution, and its application is restricted; Crome metal (Cr) then has good acidproof, alkaline-resisting superiority, and chromium is a kind of high strength, low-quality metal, has very high resistance to corrosion, even be in the also difficult oxidation of red-hot state in air.
Summary of the invention
The purpose of this utility model is to provide a kind of quartz crystal microbalance sensor, and electrode material adopts chromium fund film.
For addressing the above problem, the utility model adopts following technical scheme:
A kind of chromium base quartz crystal microbalance sensor, this sensor comprises a quartz crystal slice, and described quartz crystal slice surface is the chromium plating rete, and described chromium plating film surface is gold-plated rete, forms a kind of chromium base quartz crystal microbalance sensor.
It should be noted that and adopt vacuum coating and mask platemaking technology, control metal coating thickness and size easily.Quartz crystal microbalance sensor described in the utility model, chromium plating thicknesses of layers are 1 ~ 50 nm, and gold-plated thicknesses of layers is 20 ~ 400 nm, and quartz crystal slice is AT cut type quartz crystal, and its fundamental frequency is 4 ~ 50 MHz.Because base material is crome metal, intensity and corrosion resistance are good, and prepared quartz crystal microbalance sensor chemical property is stable, the frequency stability height.
Therefore, the beneficial effects of the utility model are, described chromium base quartz crystal microbalance sensor has advantages such as making simple, easy to use, highly sensitive, corrosion resistivity and good stability, is better than traditional quartz crystal microbalance sensor.
Description of drawings
Fig. 1 is chromium fund film quartz crystal microbalance sensor diagrammatic cross-section.
Among Fig. 1,1. quartz crystal slice, 2. chromium plating rete, 3. gold-plated rete.
Embodiment
Below in conjunction with accompanying drawing the present utility model is further described:
As shown in Figure 1, a kind of chromium base quartz crystal microbalance sensor, this sensor comprise that an AT cut type, fundamental frequency are the quartz crystal slice 1 of 8.0 MHz, utilize vacuum coating technology at the chromium rete 2 of described quartz crystal slice 1 surface plating 20 nm thickness; Golden membranous layer at described chromium plating rete 2 surface platings 180 nm thickness forms a kind of chromium fund film quartz crystal microbalance sensor.Because base material is crome metal, intensity and corrosion resistance are good, compare with traditional Al (20nm)/Au (180nm) coating, and the chemical property of Cr (20nm)/Au (180nm) coating is stable, frequency stability height, but widespread use.
Claims (2)
1. chromium base quartz crystal microbalance sensor, it is characterized in that: this sensor comprises a quartz crystal slice (1), described quartz crystal slice (1) surface is chromium plating rete (2), and described chromium plating rete (2) surface is gold-plated rete (3), forms a kind of chromium base quartz crystal microbalance sensor.
2. quartz crystal microbalance sensor according to claim 1 is characterized in that described chromium plating rete (2) thickness is 1 ~ 50 nm.
3. quartz crystal microbalance sensor according to claim 1 is characterized in that described gold-plated rete (3) thickness is 20 ~ 400 nm.
4. quartz crystal microbalance sensor according to claim 1 is characterized in that described quartz crystal slice (1) is AT cut type quartz crystal, and its fundamental frequency is 4 ~ 50 MHz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320090048 CN203132941U (en) | 2013-02-28 | 2013-02-28 | Chromium-based quartz crystal microbalance sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320090048 CN203132941U (en) | 2013-02-28 | 2013-02-28 | Chromium-based quartz crystal microbalance sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203132941U true CN203132941U (en) | 2013-08-14 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320090048 Expired - Fee Related CN203132941U (en) | 2013-02-28 | 2013-02-28 | Chromium-based quartz crystal microbalance sensor |
Country Status (1)
| Country | Link |
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| CN (1) | CN203132941U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104198323A (en) * | 2013-09-03 | 2014-12-10 | 北京至感科技有限公司 | Highly sensitive acid sensor |
| CN104198320A (en) * | 2013-08-29 | 2014-12-10 | 北京至感科技有限公司 | Handheld fast reaction iron content monitor |
| CN105300827A (en) * | 2015-11-02 | 2016-02-03 | 北京至感传感器技术研究院有限公司 | Online detection device of acid value of liquid oil |
| CN110129734A (en) * | 2018-02-08 | 2019-08-16 | 嘉兴晶控电子有限公司 | Crystal-vibration-chip coating process |
-
2013
- 2013-02-28 CN CN 201320090048 patent/CN203132941U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104198320A (en) * | 2013-08-29 | 2014-12-10 | 北京至感科技有限公司 | Handheld fast reaction iron content monitor |
| CN104198320B (en) * | 2013-08-29 | 2016-08-24 | 北京至感传感器技术研究院有限公司 | A kind of hand-held fast reaction iron instrument |
| CN104198323A (en) * | 2013-09-03 | 2014-12-10 | 北京至感科技有限公司 | Highly sensitive acid sensor |
| CN105300827A (en) * | 2015-11-02 | 2016-02-03 | 北京至感传感器技术研究院有限公司 | Online detection device of acid value of liquid oil |
| CN110129734A (en) * | 2018-02-08 | 2019-08-16 | 嘉兴晶控电子有限公司 | Crystal-vibration-chip coating process |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130814 Termination date: 20140228 |