CN203203669U - Ti-based platinum film microbalance sensor - Google Patents
Ti-based platinum film microbalance sensor Download PDFInfo
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- CN203203669U CN203203669U CN 201320232818 CN201320232818U CN203203669U CN 203203669 U CN203203669 U CN 203203669U CN 201320232818 CN201320232818 CN 201320232818 CN 201320232818 U CN201320232818 U CN 201320232818U CN 203203669 U CN203203669 U CN 203203669U
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- microbalance sensor
- quartz crystal
- platinum film
- microbalance
- based platinum
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Abstract
The utility model provides a Ti-based platinum film microbalance sensor. The Ti-based platinum film microbalance sensor includes a quartz crystal plate (1). A ti-coated film layer (2) is arranged on the surface of the quartz crystal plate (1). A platinum-coated film layer (3) is arranged on the surface of the ti-coated film layer (2). Therefore, the Ti-based platinum film microbalance sensor is formed. The utility model has beneficial effects that the Ti-based platinum film microbalance sensor has advantages of simple production, convenient usage, high flexibility, good corrosion resistance, good stability and the like. The Ti-based platinum film microbalance sensor is superior to a traditional quartz crystal microbalance sensor.
Description
Technical field
The utility model belongs to the sensing detection technical field, relates to a kind of titanium base platinum film microbalance sensor.
Background technology
QCM (Quartz Crystal Microbalance) (Quartz crystal microbalance, QCM) has advantage simple in structure, that cost is low, vibration Q value is big, highly sensitive, measuring accuracy can reach nanogram magnitude even pik magnitude as micro-mass sensor, be widely used in the fields such as chemistry, physics, biology, medical science and Surface Science, in order to the mensuration of physical quantitys such as the detection of the measurement of the constituent analysis of carrying out gas, liquid, little quality, film thickness and viscosity, specific inductive capacity, temperature.
The core component of quartz crystal microbalance sensor is the installing and using of metal electrode on the quartz crystal slice, more general electrode material has gold (Au) at present, smooth because of quartz crystal slice, adhesion is little, usually between electrode material and quartz crystal slice, add plating layer of metal aluminium (Al) during installation earlier, with the adhesion of intensifier electrode material on quartz crystal slice, therefore, the metal aluminium lamination that adds plating has a very important role to the making of quartz crystal microbalance sensor.Yet aluminium metal coating has good chemical stability in most of inorganic salts and organic acid, but is soluble in dilute sulfuric acid, nitric acid, NaOH, the potassium hydroxide solution, and its application is restricted; Titanium (Ti) then is a kind of high strength, low-quality metal, has very strong acidproof, alkaline-resisting and resistance to corrosion; And platinum (Pt) be a kind ofly can resist the mercaptan erosion action, than acidproof, the alkaline-resisting metal material of golden superior performance.
Summary of the invention
The purpose of this utility model is to provide a kind of novel microbalance sensor, and electrode material adopts titanium base platinum film.
For addressing the above problem, the utility model adopts following technical scheme: a kind of titanium base platinum film microbalance sensor, this sensor comprises a quartz crystal slice, described quartz crystal slice surface is the titanizing rete, described titanizing film surface is the platinum plating rete, forms a kind of titanium base platinum film microbalance sensor.
It should be noted that and adopt vacuum coating and mask platemaking technology, control metal coating thickness and size easily.Microbalance sensor described in the utility model, titanizing thicknesses of layers are 1 ~ 50 nm, and the platinum plating thicknesses of layers is 20 ~ 400 nm, and quartz crystal slice is AT cut type quartz crystal, and its fundamental frequency is 4 ~ 50 MHz.Because base material is Titanium, is coated with platinum on it, intensity and acid and alkali-resistance and anti-mercaptan corrosive nature are good, and prepared microbalance sensor chemical property is stable, the frequency stability height.
Therefore, the beneficial effects of the utility model are, described titanium base platinum film microbalance sensor has advantages such as making simple, easy to use, highly sensitive, corrosion resistivity and good stability, is better than traditional quartz crystal microbalance sensor.
Description of drawings
Fig. 1 is titanium base platinum film microbalance sensor diagrammatic cross-section.
Among Fig. 1,1. quartz crystal slice, 2. titanizing rete, 3. platinum plating rete.
Embodiment
Below in conjunction with accompanying drawing the present utility model is further described:
As shown in Figure 1, a kind of titanium base platinum film microbalance sensor, this sensor comprise that an AT cut type, fundamental frequency are the quartz crystal slice 1 of 8.0 MHz, utilize vacuum coating technology at the titanium film layer 2 of described quartz crystal slice 1 surface plating 25 nm thickness; Platinum film layer at described titanizing rete 2 surface platings 175 nm thickness forms a kind of titanium base platinum film microbalance sensor.Because base material is Titanium, be coated with platinum on it, intensity and acid and alkali-resistance and anti-mercaptan corrosive nature are good, compare with traditional Al (25nm)/Au (175nm) coating, the chemical property of Ti (25nm)/Pt (175nm) coating is stable, the frequency stability height can be widely used in the mensuration of chemical constitution and physical index.
Claims (2)
1. titanium base platinum film microbalance sensor, it is characterized in that: this sensor comprises a quartz crystal slice (1), described quartz crystal slice (1) surface is titanizing rete (2), and described titanizing rete (2) surface is platinum plating rete (3), forms a kind of titanium base platinum film microbalance sensor.
2. microbalance sensor according to claim 1 is characterized in that described titanizing rete (2) thickness is 1 ~ 50 nm.
3. microbalance sensor according to claim 1 is characterized in that described platinum plating rete (3) thickness is 20 ~ 400 nm.
4. microbalance sensor according to claim 1 is characterized in that described quartz crystal slice (1) is AT cut type quartz crystal, and its fundamental frequency is 4 ~ 50 MHz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320232818 CN203203669U (en) | 2013-05-03 | 2013-05-03 | Ti-based platinum film microbalance sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320232818 CN203203669U (en) | 2013-05-03 | 2013-05-03 | Ti-based platinum film microbalance sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203203669U true CN203203669U (en) | 2013-09-18 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320232818 Expired - Fee Related CN203203669U (en) | 2013-05-03 | 2013-05-03 | Ti-based platinum film microbalance sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203203669U (en) |
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2013
- 2013-05-03 CN CN 201320232818 patent/CN203203669U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130918 Termination date: 20140503 |