CN203203892U - Chrome-base palladium film micro-balance sensor - Google Patents
Chrome-base palladium film micro-balance sensor Download PDFInfo
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- CN203203892U CN203203892U CN 201320232858 CN201320232858U CN203203892U CN 203203892 U CN203203892 U CN 203203892U CN 201320232858 CN201320232858 CN 201320232858 CN 201320232858 U CN201320232858 U CN 201320232858U CN 203203892 U CN203203892 U CN 203203892U
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- quartz crystal
- chrome
- palladium
- balance sensor
- palladium film
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Abstract
The utility model provides a chrome-base palladium film micro-balance sensor which comprises a quartz crystal sheet (1). A chrome plated film (2) is arranged on the surface of the quartz crystal sheet (1), a palladium plated film (3) is arranged on the surface of the chrome plated film (2), and the chrome-base palladium film micro-balance sensor is formed. The chrome-base palladium film micro-balance sensor has the advantages of being simple in manufacturing, convenient to use, high in sensitivity, good in corrosion resistance and stability and the like, and is better than a traditional quartz crystal micro-balance sensor.
Description
Technical field
The utility model belongs to the sensing detection technical field, relates to a kind of chromium base palladium film microbalance sensor.
Background technology
QCM (Quartz Crystal Microbalance) (Quartz crystal microbalance, QCM) has advantage simple in structure, that cost is low, vibration Q value is big, highly sensitive, measuring accuracy can reach nanogram magnitude even pik magnitude as micro-mass sensor, be widely used in the fields such as chemistry, physics, biology, medical science and Surface Science, in order to the mensuration of physical quantitys such as the detection of the measurement of the constituent analysis of carrying out gas, liquid, little quality, film thickness and viscosity, specific inductive capacity, temperature.
The core component of quartz crystal microbalance sensor is the installing and using of metal electrode on the quartz crystal slice, more general electrode material has gold (Au) at present, smooth because of quartz crystal slice, adhesion is little, usually between electrode material and quartz crystal slice, add plating layer of metal aluminium (Al) during installation earlier, with the adhesion of intensifier electrode material on quartz crystal slice, therefore, the metal aluminium lamination that adds plating has a very important role to the making of quartz crystal microbalance sensor.Yet aluminium metal coating has good chemical stability in most of inorganic salts and organic acid, but is soluble in dilute sulfuric acid, nitric acid, NaOH, the potassium hydroxide solution, and its application is restricted; Crome metal (Cr) then is a kind of high strength, low-quality metal, has very strong acidproof, alkaline-resisting and resistance to corrosion; And palladium (Pd) can hydrofluoric acid resistant, the erosion of phosphoric acid, perchloric acid, hydrochloric acid and sulfuric acid vapor, be a kind ofly can resist the mercaptan erosion action, than the metal material of golden superior performance.
Summary of the invention
The purpose of this utility model is to provide a kind of novel microbalance sensor, and electrode material adopts chromium base palladium film.
For addressing the above problem, the utility model adopts following technical scheme: a kind of chromium base palladium film microbalance sensor, this sensor comprises a quartz crystal slice, described quartz crystal slice surface is the chromium plating rete, described chromium plating film surface is the palladium plated film layer, forms a kind of chromium base palladium film microbalance sensor.
It should be noted that and adopt vacuum coating and mask platemaking technology, control metal coating thickness and size easily.Microbalance sensor described in the utility model, chromium plating thicknesses of layers are 1 ~ 50 nm, and the palladium plated film layer thickness is 20 ~ 400 nm, and quartz crystal slice is AT cut type quartz crystal, and its fundamental frequency is 4 ~ 50 MHz.Because base material is crome metal, is coated with palladium on it, intensity and acid and alkali-resistance and anti-mercaptan corrosive nature are good, and prepared microbalance sensor chemical property is stable, the frequency stability height.
Therefore, the beneficial effects of the utility model are, described chromium base palladium film microbalance sensor has advantages such as making simple, easy to use, highly sensitive, corrosion resistivity and good stability, is better than traditional quartz crystal microbalance sensor.
Description of drawings
Fig. 1 is chromium base palladium film microbalance sensor diagrammatic cross-section.
Among Fig. 1,1. quartz crystal slice, 2. chromium plating rete, 3. palladium plated film layer.
Embodiment
Below in conjunction with accompanying drawing the present utility model is further described:
As shown in Figure 1, a kind of chromium base palladium film microbalance sensor, this sensor comprises that an AT cut type, fundamental frequency are the quartz crystal slice 1 of 10.0 MHz, utilizes vacuum coating technology at the chromium rete 2 of described quartz crystal slice 1 surface plating 30 nm thickness; Palladium rete 3 at described chromium plating rete 2 surface platings 180 nm thickness forms a kind of chromium base palladium film microbalance sensor.Because base material is crome metal, be coated with palladium on it, the erosion of energy hydrofluoric acid resistant, phosphoric acid, perchloric acid, hydrochloric acid and sulfuric acid vapor, anti-mercaptan corrosive nature is good, compare with traditional Al (30nm)/Au (180nm) coating, the chemical property of Cr (30nm)/Pd (180nm) coating is stable, and the frequency stability height can be widely used in the mensuration of chemical constitution and physical index.
Claims (2)
1. chromium base palladium film microbalance sensor, it is characterized in that: this sensor comprises a quartz crystal slice (1), described quartz crystal slice (1) surface is chromium plating rete (2), and described chromium plating rete (2) surface is palladium plated film layer (3), forms a kind of chromium base palladium film microbalance sensor.
2. microbalance sensor according to claim 1 is characterized in that described chromium plating rete (2) thickness is 1 ~ 50 nm.
3. microbalance sensor according to claim 1 is characterized in that described palladium plated film layer (3) thickness is 20 ~ 400 nm.
4. microbalance sensor according to claim 1 is characterized in that described quartz crystal slice (1) is AT cut type quartz crystal, and its fundamental frequency is 4 ~ 50 MHz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320232858 CN203203892U (en) | 2013-05-03 | 2013-05-03 | Chrome-base palladium film micro-balance sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320232858 CN203203892U (en) | 2013-05-03 | 2013-05-03 | Chrome-base palladium film micro-balance sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203203892U true CN203203892U (en) | 2013-09-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320232858 Expired - Fee Related CN203203892U (en) | 2013-05-03 | 2013-05-03 | Chrome-base palladium film micro-balance sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203203892U (en) |
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2013
- 2013-05-03 CN CN 201320232858 patent/CN203203892U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130918 Termination date: 20140503 |