CN203203893U - Ti-based palladium membrane microbalance sensor - Google Patents
Ti-based palladium membrane microbalance sensor Download PDFInfo
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- CN203203893U CN203203893U CN 201320238367 CN201320238367U CN203203893U CN 203203893 U CN203203893 U CN 203203893U CN 201320238367 CN201320238367 CN 201320238367 CN 201320238367 U CN201320238367 U CN 201320238367U CN 203203893 U CN203203893 U CN 203203893U
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- quartz crystal
- microbalance sensor
- palladium
- microbalance
- sensor
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Abstract
The utility model provides a Ti-based palladium membrane microbalance sensor. The sensor comprises a quartz crystal piece (1), wherein the surface of the quartz crystal piece (1) is a titanium-plated membrane layer (2), the surface of the titanium-plated membrane layer (2) is a palladium-plated membrane layer (3), and therefore the Ti-based palladium membrane microbalance sensor is formed. The Ti-based palladium membrane microbalance sensor has the advantages of being easy to manufacture, convenient to use, high in sensibility and good in corrosion-resistance and stability, and is superior to a traditional quartz crystal microbalance sensor.
Description
Technical field
The utility model belongs to the sensing detection technical field, relates to a kind of titanium base palladium film microbalance sensor.
Background technology
QCM (Quartz Crystal Microbalance) (Quartz crystal microbalance, QCM) as micro-mass sensor have advantages of simple in structure, cost is low, vibration Q value is large, highly sensitive, measuring accuracy can reach nanogram magnitude even pik magnitude, be widely used in the fields such as chemistry, physics, biology, medical science and Surface Science, in order to the mensuration of the physical quantitys such as the detection of the measurement of the constituent analysis of carrying out gas, liquid, little quality, film thickness and viscosity, specific inductive capacity, temperature.
The core component of quartz crystal microbalance sensor is the installing and using of metal electrode on the quartz crystal slice, more general electrode material has gold (Au) at present, smooth because of quartz crystal slice, adhesion is little, usually between electrode material and quartz crystal slice, add first plating layer of metal aluminium (Al) during installation, with the adhesion of intensifier electrode material on quartz crystal slice, therefore, the metal aluminium lamination that adds plating has a very important role to the making of quartz crystal microbalance sensor.Yet aluminium metal coating has good chemical stability in most of inorganic salts and organic acid, but is soluble in dilute sulfuric acid, nitric acid, NaOH, the potassium hydroxide solution, and its application is restricted; Titanium (Ti) then is a kind of high strength, low-quality metal, has very strong acidproof, alkaline-resisting and resistance to corrosion; And palladium (Pd) can hydrofluoric acid resistant, the erosion of phosphoric acid, perchloric acid, hydrochloric acid and sulfuric acid vapor, be a kind ofly can resist the mercaptan erosion action, than the metal material of golden superior performance.
Summary of the invention
The purpose of this utility model is to provide a kind of novel microbalance sensor, and electrode material adopts titanium base palladium film.
For addressing the above problem, the utility model adopts following technical scheme: a kind of titanium base palladium film microbalance sensor, this sensor comprises a quartz crystal slice, described quartz crystal slice surface is the titanizing rete, described titanizing film surface is the palladium plated film layer, forms a kind of titanium base palladium film microbalance sensor.
It should be noted that and adopt vacuum coating and mask plate technology, easily control metal coating thickness and size.Microbalance sensor described in the utility model, titanizing thicknesses of layers are 1 ~ 50 nm, and the palladium plated film layer thickness is 20 ~ 400 nm, and quartz crystal slice is AT cut type quartz crystal, and its fundamental frequency is 4 ~ 50 MHz.Because base material is Titanium, is coated with palladium on it, intensity and acid and alkali-resistance and good, the prepared microbalance sensor stable chemical nature of anti-mercaptan corrosive nature, frequency stability is high.
Therefore, the beneficial effects of the utility model are, described titanium base palladium film microbalance sensor has advantages such as making simple, easy to use, highly sensitive, corrosion resistivity and good stability, is better than traditional quartz crystal microbalance sensor.
Description of drawings
Fig. 1 is titanium base palladium film microbalance sensor diagrammatic cross-section.
Among Fig. 1,1. quartz crystal slice, 2. titanizing rete, 3. palladium plated film layer.
Embodiment
Below in conjunction with accompanying drawing the present utility model is further described:
As shown in Figure 1, a kind of titanium base palladium film microbalance sensor, this sensor comprises that an AT cut type, fundamental frequency are the quartz crystal slice 1 of 8.0 MHz, utilizes vacuum coating technology at the titanium film layer 2 of described quartz crystal slice 1 plated surface 25 nm thickness; At the palladium rete of described titanizing rete 2 plated surfaces 175 nm thickness, form a kind of titanium base palladium film microbalance sensor.Because base material is Titanium, be coated with palladium on it, the erosion of energy hydrofluoric acid resistant, phosphoric acid, perchloric acid, hydrochloric acid and sulfuric acid vapor, anti-mercaptan corrosive nature is good, compare with traditional Al (25nm)/Au (175nm) coating, the stable chemical nature of Ti (25nm)/Pd (175nm) coating, frequency stability is high, can be widely used in the mensuration of chemical composition and physical index.
Claims (2)
1. titanium base palladium film microbalance sensor, it is characterized in that: this sensor comprises a quartz crystal slice (1), described quartz crystal slice (1) surface is titanizing rete (2), described titanizing rete (2) surface is palladium plated film layer (3), forms a kind of titanium base palladium film microbalance sensor.
2. microbalance sensor according to claim 1 is characterized in that described titanizing rete (2) thickness is 1 ~ 50 nm.
3. microbalance sensor according to claim 1 is characterized in that described palladium plated film layer (3) thickness is 20 ~ 400 nm.
4. microbalance sensor according to claim 1 is characterized in that described quartz crystal slice (1) is AT cut type quartz crystal, and its fundamental frequency is 4 ~ 50 MHz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320238367 CN203203893U (en) | 2013-05-06 | 2013-05-06 | Ti-based palladium membrane microbalance sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320238367 CN203203893U (en) | 2013-05-06 | 2013-05-06 | Ti-based palladium membrane microbalance sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203203893U true CN203203893U (en) | 2013-09-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320238367 Expired - Fee Related CN203203893U (en) | 2013-05-06 | 2013-05-06 | Ti-based palladium membrane microbalance sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203203893U (en) |
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2013
- 2013-05-06 CN CN 201320238367 patent/CN203203893U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130918 Termination date: 20140506 |