CN203705024U - Nanometer alumina based silver coated quartz crystal microbalance sensor - Google Patents
Nanometer alumina based silver coated quartz crystal microbalance sensor Download PDFInfo
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- CN203705024U CN203705024U CN201420090687.8U CN201420090687U CN203705024U CN 203705024 U CN203705024 U CN 203705024U CN 201420090687 U CN201420090687 U CN 201420090687U CN 203705024 U CN203705024 U CN 203705024U
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- quartz crystal
- crystal microbalance
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Abstract
The utility model provides a nanometer alumina based silver coated quartz crystal microbalance sensor. The sensor comprises a quartz crystal wafer (1), an aluminum laminated film (2) on the substrate of the quartz crystal wafer (1), a nanometer aluminium oxide film (3) on the surface of the aluminum laminated film (2), a silver film (4) on the surface of the nanometer aluminium oxide film (3), which form a quartz crystal microbalance sensor based on nanometer alumina based silver coated. Among them, the shape of nanometer aluminium oxide is spherical and the grain size of it is 1-50 nm. The effects and benefits of the utility model provided by the invention lie in the nanometer alumina based silver coated quartz crystal microbalance sensor has advantages of simple fabrication, low cost, high sensitivity, corrosion resistance, good stability and the like.
Description
Technical field
The utility model belongs to sensing detection technical field, relates to a kind of quartz crystal microbalance sensor based on nano oxidized aluminium base silverskin.
Background technology
QCM (Quartz Crystal Microbalance) (Quartz crystal microbalance, QCM) be a kind of novel sensing measurement technology, it is to utilize relation in direct ratio between the variation of quartz-crystal resonance frequency and the material mass of crystalline electrode surface deposition, can detecting electrode surface n g the even mass change of pg level and the viscosity of solution, density, impedance, the isoparametric variation of specific inductive capacity, highly sensitive because having, respond the detection that quick, easy and simple to handle and cheap feature is widely used in the material such as atmosphere pollution, biomolecule.
The core component of quartz crystal microbalance sensor is the installing and using of metal electrode on quartz crystal slice, more general electrode material has gold (Au) at present, because quartz crystal slice is smooth, adhesion is little, when installation, conventionally between electrode material and quartz crystal slice, first add plating layer of metal aluminium (Al), adhesion with intensifier electrode material on quartz crystal slice, therefore the metal aluminium lamination that, adds plating has a very important role to the making of quartz crystal microbalance sensor.But, the chemical stability that plain metal aluminium coat has had in most of inorganic salts and organic acid, but be soluble in dilute sulfuric acid, nitric acid, NaOH, potassium hydroxide solution, its application is restricted; Nano-aluminium oxide positively charged, has the electric property that good acid corrosion-resistant ability, high physical strength are become reconciled; And argent (Ag) cost ratio gold is cheap, and not reacting with dilute sulfuric acid, hydrochloric acid, alkali metal hydroxide, alkali carbonate etc., have good acidproof, alkaline resistance properties, is a kind of potential good electrode material.Therefore, the utility model substitutes gold with silver, on quartz crystal slice, after coating metal aluminium lamination, add plating one deck nano-aluminium oxide rete, plate again metallic silver layer, can not only intensifier electrode material and quartz crystal slice between adhesion, and there is good corrosion resistance and stability, also, by reducing the cost of manufacture of quartz crystal microbalance sensor, application surface is widened.
Summary of the invention
The purpose of this utility model is to provide a kind of nano oxidized aluminium base silverskin quartz crystal microbalance sensor, adds plating aluminium, nano-aluminium oxide and argent on quartz crystal slice, reduces golden use amount, can reduce the cost of manufacture of sensor.
For addressing the above problem, the utility model adopts following technical scheme:
A kind of nano oxidized aluminium base silverskin quartz crystal microbalance sensor, this sensor comprises a quartz crystal slice, described quartz crystal slice substrate is aluminium plating membrane, described aluminium plating membrane surface is nano-aluminium oxide rete, described nano-aluminium oxide film surface is silver-plated rete, thereby forms a kind of quartz crystal microbalance sensor based on nano oxidized aluminium base silverskin.
It should be noted that and adopt vacuum coating and mask plate technology, easily control metal coating thickness and size.Nano oxidized aluminium base silverskin quartz crystal microbalance sensor described in the utility model, aluminium plating membrane thickness is 1 ~ 100 nm, and nano-aluminium oxide thicknesses of layers is 1 ~ 100 nm, and silver-plated thicknesses of layers is 20 ~ 200 nm; Wherein, being shaped as of nano-aluminium oxide is spherical, and the particle diameter of nano-aluminium oxide is 1 ~ 50 nm; And quartz crystal slice is AT cut type quartz crystal, and its fundamental frequency is 4 ~ 80 MHz.And because film material is metallic aluminium, nano-aluminium oxide and argent, add the adhesion between aluminium lamination, nano-aluminium oxide layer and argent energy intensifier electrode material and the quartz crystal slice of plating, make whole film strength and stability good, frequency stability is high.In addition, the in the situation that of control electrode material thickness, between quartz crystal slice and argent, add plating aluminium, effectively reduce the thickness of metallic silver layer, reduce the use amount of noble metal, thereby reduced the production cost of whole quartz crystal microbalance sensor.
The beneficial effects of the utility model are, described nano oxidized aluminium base silverskin quartz crystal microbalance sensor has advantages such as making simple, with low cost, highly sensitive, corrosion resistivity and good stability.
Brief description of the drawings
Fig. 1 is the diagrammatic cross-section of nano oxidized aluminium base silverskin quartz crystal microbalance sensor.
In Fig. 1,1. quartz crystal slice, 2. aluminium plating membrane, 3. nano-aluminium oxide rete, 4. silver-plated rete.
Embodiment
Below in conjunction with accompanying drawing, the present utility model is further described:
As shown in Figure 1, a kind of nano oxidized aluminium base silverskin quartz crystal microbalance sensor, this sensor comprises that an AT cut type, fundamental frequency are the quartz crystal slice 1 of 8.0 MHz, utilize the aluminum membranous layer 2 of vacuum coating technology at described quartz crystal slice 1 substrate surface plating 30 nm thickness, at the nano-aluminium oxide rete 3 of described aluminium plating membrane 2 surface-assembled 25 nm thickness, at the argent rete 4 of described nano-aluminium oxide rete 3 plated surface 30 nm thickness, thereby form a kind of quartz crystal microbalance sensor based on nano oxidized aluminium base silverskin; Wherein, being shaped as of nano-aluminium oxide is spherical, and the particle diameter of nano-aluminium oxide is 13 nm.
Because film material is metallic aluminium, nano-aluminium oxide and argent, intensity and corrosion resistance are good, stable chemical nature, and frequency stability is high, and greatly reduced the use amount of noble metal and reduced the production cost of whole quartz crystal microbalance sensor, there is wide application prospect.
Claims (6)
1. a nano oxidized aluminium base silverskin quartz crystal microbalance sensor, it is characterized in that: this sensor comprises a quartz crystal slice (1), described quartz crystal slice (1) substrate is aluminium plating membrane (2), described aluminium plating membrane (2) surface is nano-aluminium oxide rete (3), described nano-aluminium oxide rete (3) surface is silver-plated rete (4), forms a kind of quartz crystal microbalance sensor based on nano oxidized aluminium base silverskin.
2. quartz crystal microbalance sensor according to claim 1, is characterized in that described aluminium plating membrane (2) thickness is 1 ~ 100 nm.
3. quartz crystal microbalance sensor according to claim 1, is characterized in that described nano-aluminium oxide rete (3) thickness is 1 ~ 100 nm.
4. quartz crystal microbalance sensor according to claim 3, is characterized in that being shaped as of described nano-aluminium oxide is spherical, and the particle diameter of nano-aluminium oxide is 1 ~ 50 nm.
5. quartz crystal microbalance sensor according to claim 1, is characterized in that described silver-plated rete (4) thickness is 20 ~ 200 nm.
6. quartz crystal microbalance sensor according to claim 1, is characterized in that described quartz crystal slice (1) is AT cut type quartz crystal, and its fundamental frequency is 4 ~ 80 MHz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420090687.8U CN203705024U (en) | 2014-03-03 | 2014-03-03 | Nanometer alumina based silver coated quartz crystal microbalance sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420090687.8U CN203705024U (en) | 2014-03-03 | 2014-03-03 | Nanometer alumina based silver coated quartz crystal microbalance sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203705024U true CN203705024U (en) | 2014-07-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420090687.8U Expired - Fee Related CN203705024U (en) | 2014-03-03 | 2014-03-03 | Nanometer alumina based silver coated quartz crystal microbalance sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203705024U (en) |
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2014
- 2014-03-03 CN CN201420090687.8U patent/CN203705024U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140709 Termination date: 20150303 |
|
| EXPY | Termination of patent right or utility model |