CN203382845U - Vacuum sealing structure of crucible platform lifting device for pseudo-single crystal ingot furnace - Google Patents
Vacuum sealing structure of crucible platform lifting device for pseudo-single crystal ingot furnace Download PDFInfo
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- CN203382845U CN203382845U CN201320463146.0U CN201320463146U CN203382845U CN 203382845 U CN203382845 U CN 203382845U CN 201320463146 U CN201320463146 U CN 201320463146U CN 203382845 U CN203382845 U CN 203382845U
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Abstract
The utility model relates to a vacuum sealing structure of a crucible platform lifting device for a pseudo-single crystal ingot furnace. The vacuum sealing structure comprises a furnace shell, a mobile stand column and a supporting seat, wherein a vacuum sealing rubber ring, a backup ring, an asphalt felt and a pressure cover are arranged in the supporting seat, and cooling water flows in the furnace shell. The vacuum sealing structure is reasonable, the mobile stand column of the crucible platform lifting device can keep the sealing of the furnace in the motion, so as not to enable air to enter the interior of the equipment, the production technique requirement can be met, and the demand that the vacuum is needed to be kept inside the ingot furnace in production can be met.
Description
Technical field
The utility model belongs to accurate single-crystal ingot casting furnace technical field, particularly the vacuum seal structure of accurate single-crystal ingot casting furnace crucible platform lifting device.
Background technology
Accurate monocrystalline adopts induction type method casting crystalline to obtain on accurate single-crystal ingot casting furnace, then passes through evolution, section link, the quasi-monocrystalline silicon with high-conversion rate that can produce.Its main technique is to increase seed crystal by the bottom at accurate single-crystal ingot casting furnace quartz crucible, and under vacuum and protective atmosphere state, adopts accurately sectional temperature-controlledly, and while guaranteeing the thawing of silicon material, the seed crystal partial melting, grow monocrystalline thus.Technique possesses the advantage of polycrystalline silicon ingot casting high production, high-quality, less energy-consumption.The accurate monocrystalline dislocation of output is in allowed band, and photoelectric transformation efficiency is apparently higher than polysilicon.This mode by ingot casting forms the technology of silicon single crystal, and its power consumption is only many 5% than common polysilicon, and the quality of the silicon single crystal of producing approaches pulling of silicon single crystal.This technology is exactly the cost with polysilicon, the technology of manufacture order crystal silicon.
Accurate monocrystalline volume production deciding factor:
(1) feasible technological line, do not have feasible technological line in theory if produce accurate monocrystalline, and accurate monocrystalline product can only be in laboratory stage;
(2) reasonably thermal field design;
(3) precisely seed crystal melts operating device;
(4) in crystallisation process, the dynamic temperature difference is controlled;
(5) low production cost.
For above (4), (5) bar, former polycrystalline silicon ingot or purifying furnace is that upper thermal insulator, upper heating element, side heating element move up and down, and its sealing is sealed by the metal solder corrugated tube.Need to realize moving up and down of crucible platform in accurate single-crystal ingot casting furnace, and the crucible platform hoisting appliance is positioned at the outside of furnace shell, moving-member is again through thermal insulator and body of heater, its temperature distortion also can exert an influence to reliable movement, must consider the vacuum-sealing in whole moving process, to guarantee the vacuum requirement of equipment.
The utility model content
The purpose of this utility model is to provide a kind of vacuum seal structure of accurate single-crystal ingot casting furnace crucible platform lifting device, to meet the inner requirement that keeps vacuum state of body of heater aborning.
For achieving the above object, the utility model adopts following scheme:
A kind of vacuum seal structure of accurate single-crystal ingot casting furnace crucible platform lifting device, comprise furnace shell, mobile column, supporting seat, is provided with vacuum-sealing rubber ring, packing ring, malthoid, gland in supporting seat.
Described supporting seat is arranged on the furnace shell bottom, mobile column is placed in the supporting seat inside of hollow, the lower end of supporting seat is provided with counterbore, be provided with two vacuum-sealing rubber rings in counterbore and between mobile column, be provided with packing ring between the outer ring of two vacuum-sealing rubber rings, be provided with malthoid between the inner ring of two vacuum-sealing rubber rings, the counterbore end is provided with gland.
In described furnace shell, circulation has water coolant, is used for to the mobile column cooling, with protection vacuum-sealing rubber ring.
In the working process of ingot furnace, its crucible platform is supported by 3 ~ 4 mobile columns, and its band moving platform moves up and down in stove, in supporting seat, by gland and packing ring, the vacuum-sealing rubber ring is pressed between mobile column and supporting seat, guarantees that end face is air tight; Described vacuum-sealing rubber ring internal diameter is more smaller than mobile column external diameter, column can be wrapped up, and prevents axial gas leakage; Mobile column is because thermal conduction is higher to temperature, when mobile, in furnace shell, there is water coolant heat can be taken away, make the temperature of mobile column can meet the heatproof requirement of vacuum-sealing rubber ring at the supporting seat place, make its not damage, damage just can breakseal; Can guarantee thus not have when mobile column moves in the air access arrangement, body of heater inner sustain vacuum state, meet its manufacturing technique requirent.
The utility model is rational in infrastructure, makes the mobile column of crucible platform lifting device keep at the volley sealed state, has met the inner demand that keeps vacuum of ingot furnace aborning.
The accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Embodiment
Below in conjunction with embodiment and accompanying drawing thereof, the utility model is described in more detail:
As shown in Figure 1, a kind of vacuum seal structure of accurate single-crystal ingot casting furnace crucible platform lifting device, comprise mobile column 1, gland 2, vacuum-sealing rubber ring 3, packing ring 4, malthoid 5, furnace shell 6, supporting seat 7.
Described supporting seat 7 is arranged on furnace shell 6 bottoms, mobile column 1 is placed in supporting seat 7 inside of hollow, the lower end of supporting seat 7 is provided with counterbore, be provided with two vacuum-sealing rubber rings 3 in counterbore and between support post 1, be provided with packing ring 4 between the outer ring of two vacuum-sealing rubber rings 3, be provided with malthoid 5 between the inner ring of two vacuum-sealing rubber rings 3, the counterbore end is provided with gland 2.
The interior circulation of described furnace shell 6 has water coolant 61.
Above-described is only preferred implementation of the present utility model; it should be pointed out that for the person of ordinary skill of the art, under the prerequisite that does not break away from the utility model principle; can also make some modification and improvement, these also should be considered as belonging to protection domain of the present utility model.
Claims (2)
1. the vacuum seal structure of an accurate single-crystal ingot casting furnace crucible platform lifting device, comprise furnace shell, mobile column, supporting seat, it is characterized in that: be provided with vacuum-sealing rubber ring, packing ring, malthoid and gland in described supporting seat;
Described supporting seat is arranged on the furnace shell bottom, mobile column is placed in the supporting seat inside of hollow, the lower end of supporting seat is provided with counterbore, be provided with two vacuum-sealing rubber rings in counterbore and between mobile column, be provided with packing ring between the outer ring of two vacuum-sealing rubber rings, be provided with malthoid between the inner ring of two vacuum-sealing rubber rings, the counterbore end is provided with gland.
2. the vacuum seal structure of accurate single-crystal ingot casting furnace crucible platform lifting device according to claim 1, is characterized in that: in described furnace shell, circulate water coolant is arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320463146.0U CN203382845U (en) | 2013-07-31 | 2013-07-31 | Vacuum sealing structure of crucible platform lifting device for pseudo-single crystal ingot furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320463146.0U CN203382845U (en) | 2013-07-31 | 2013-07-31 | Vacuum sealing structure of crucible platform lifting device for pseudo-single crystal ingot furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203382845U true CN203382845U (en) | 2014-01-08 |
Family
ID=49871357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320463146.0U Expired - Lifetime CN203382845U (en) | 2013-07-31 | 2013-07-31 | Vacuum sealing structure of crucible platform lifting device for pseudo-single crystal ingot furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203382845U (en) |
-
2013
- 2013-07-31 CN CN201320463146.0U patent/CN203382845U/en not_active Expired - Lifetime
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Vacuum sealing structure of crucible platform lifting device for pseudo-single crystal ingot furnace Effective date of registration: 20181221 Granted publication date: 20140108 Pledgee: Anhui Huishang Metal Co.,Ltd. Pledgor: ANHUI DA SHENG NEW ENERGY EQUIPMENT Co.,Ltd. Registration number: 2018340000756 |
|
| PP01 | Preservation of patent right | ||
| PP01 | Preservation of patent right |
Effective date of registration: 20190627 Granted publication date: 20140108 |
|
| PD01 | Discharge of preservation of patent | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20201201 Granted publication date: 20140108 |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20201221 Address after: 230000 No. 1019 Fuyang North Road, Hefei, Anhui Province Patentee after: Anhui Huishang Metal Co.,Ltd. Address before: 237000 Yaoli street, Huoqiu County, Lu'an City, Anhui Province Patentee before: ANHUI DA SHENG NEW ENERGY EQUIPMENT Co.,Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140108 |