CN203305391U - Diamond fret saw cutting equipment - Google Patents
Diamond fret saw cutting equipment Download PDFInfo
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- CN203305391U CN203305391U CN2013203499633U CN201320349963U CN203305391U CN 203305391 U CN203305391 U CN 203305391U CN 2013203499633 U CN2013203499633 U CN 2013203499633U CN 201320349963 U CN201320349963 U CN 201320349963U CN 203305391 U CN203305391 U CN 203305391U
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- cutting
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- crystal ingot
- cutting equipment
- diamond fretsaw
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Abstract
The utility model discloses diamond fret saw cutting equipment. An annular diamond fret saw is used for cutting a crystal ingot workpiece. The annular diamond fret saw is wound on a plurality of horizontal guiding wheels and is tensioned by a tensioning mechanism. The annular diamond fret saw is driven by a driving wheel of one of the guiding wheels to operate at high speed. The annular diamond fret saw is driven by a lifting mechanism to carry out downward moving to cut the crystal ingot workpiece and upward tool retracting. When the annular diamond fret saw carries out cutting, the crystal ingot workpiece is driven by a rotating mechanism to rotate in a single direction around a shaft of the crystal ingot workpiece and goes in and out of a cutting zone through a horizontal feeding mechanism. The annular diamond fret saw has high line speed, when the workpiece rotates continuously in the single direction, point contacting type cutting is carried out between the diamond fret saw and the crystal ingot workpiece, diamond particles can be easily pressed into cut materials, and accordingly cutting efficiency about ten times of that of common diamond line cutting is achieved.
Description
(1) technical field:
The utility model relates to the cutting equipment to single crystal silicon, sapphire crystal and crisp and hard material, specifically a kind of diamond fretsaw cutting equipment.
(2) background technology:
Silicon and sapphire crystal are widely used in backing material, and along with going deep into of application, the crystal diameter of making is increasing, and prior art can have been produced 400 millimeters of diameters or larger silicon or sapphire crystal ingot.At first crystal ingot passes through and removes cutting of head and afterbody after producing, and then crystal ingot is cut into to wafer in order to purposes such as making chips.
The conventional method that crystal ingot is cut has following several, cuts both ways.
1, use band-saw diamond to cut crystal ingot.
Because band-saw diamond itself is intrinsic, make the wider and cutting surfaces of saw kerf stay obvious cut channel, and these cut channels must grind off through other operations processing.
2, adopt the diamond inner circle saw blade to cut crystal ingot.
But along with the increase of crystal ingot diameter, inner circle saw blade must be that three times of crystal ingot diameter could cut off crystal ingot fully, and the saw blade diameter increases, and thickness also can increase, and saw blade swings also can be increased, and causes the joint-cutting cut surface emersion wave Slippage that broadens.
3, the application free abrasive wire saw cuts crystal ingot.
This technology be by the steel wire winding of several hundred kilometers on wheel shaft, during cutting, carborundum or boron carbide abrasive material suspension are poured on steel wire.Greatest problem is the disconnection of steel wire, and thread-changing also expends a large amount of time; Along with the increase of crystal ingot diameter, power suffered when steel wire passes whole crystal ingot will increase, and steel wire diameter increases thereupon, and joint-cutting also can broaden; Free abrasive has cut whole crystal ingot to be needed for a long time, and even tens hours, and to environment.
4, use diamond wire to cut crystal ingot.Use high-intensity steel wire to do matrix material, diamond uniform ground is thereon fixed, and the granularity of diamond particles is at 20 microns～120 microns, but due to the restriction of technology itself, cutting speed is still lower.
(3) utility model content:
For the deficiencies in the prior art, the purpose of this utility model be to provide a kind of rapidly and efficiently, diamond fretsaw cutting equipment that cut quality is good.
The utility model diamond fretsaw cutting equipment, the workbench that comprises annular diamond fretsaw, scroll saw travelling mechanism and scroll saw feed arrangement and carrying crystal ingot workpiece, unlike the prior art be that described scroll saw travelling mechanism comprises horizontally disposed some guide wheels and strainer, one of them guide wheel is made as driving wheel, and described annular diamond fretsaw is that annular diamond wire is surrounded on guide wheel and by the strainer tensioning; Described scroll saw feed arrangement comprises and drives the elevating mechanism that the scroll saw travelling mechanism moves up and down along column or vertical guide rail; Described crystal ingot workpiece rotating mechanism clamping, described rotating mechanism is located on workbench, and described workbench is located on horizontal guide rail and is connected horizontal feed mechanism.
A kind of structure of described elevating mechanism comprises lifting motor, the elevating screw cooperatively interacted and lifting nut, described elevating screw is parallel to column or vertical guide rail setting, the elevating screw axle head connects the output shaft of lifting motor, described lifting nut is connected with the scroll saw travelling mechanism, the lifting nut that rotarily drives of elevating screw moves, and then drives scroll saw travelling mechanism integral elevating.
A kind of structure of described horizontal feed mechanism comprises feeding motor, the feed screw cooperatively interacted and feed nut, described feed screw is parallel to the horizontal guide rail setting, the feed screw axle head connects the output shaft of feeding motor, described feed nut is connected with workbench, the feed nut that rotarily drives of feed screw moves, and then drives workbench turnover cutting zone.
The driving of described driving wheel can be adopted pulley transmission mechanism or gear drive.
Described rotating mechanism is relatively coaxial chuck and the chuck arranged, and described chuck connects the output shaft of electric rotating machine by rotating disc, and the rotation of rotating disc drives the rotation of crystal ingot workpiece by chuck.
Gap between described chuck and rotating disc is adjustable 0.1mm～2mm, adjusts the angle of crystal ingot workpiece end face with this, thereby guarantees to using that certain crystal face of crystal ingot workpiece cuts as datum level.
Described strainer comprises regulating wheel and with the weight of counterweight counterweight, described weight is strained regulating wheel by bracing wire, and described stay thimble is around on the fixed pulley group.
Advantage of the present utility model:
1, the utility model adopts annular diamond fretsaw cutting, the annular diamond fretsaw is in motion, to the workpiece feeding, and cut workpiece on cutting working platform around self axial-rotation, during cutting, annular diamond fretsaw and workpiece is in always and contacts cutting, rather than straight line contact cutting, while particularly cutting crisp and hard material, can obtain very fast cutting efficiency and accuracy.
But 2, use monocrystal silicon or the large diameter sapphire crystal ingot of the utility model technology cutting diameter 300mm～400mm diameter, and the cutting seam is less than 1mm.3, the utility model can obtain faster cutting efficiency (annular diamond fretsaw has higher linear velocity, second about 30m ∕ second～40m ∕), have the approximately cutting efficiency of 10 times of common diamond wire saw, and the working method simple and fast, more effective saving cost.
(4) accompanying drawing explanation:
Fig. 1 is the fundamental diagram of the utility model cutting equipment.
Fig. 2 is the front view of a kind of embodiment of the utility model cutting equipment.
Fig. 3 is the side view of Fig. 2 embodiment.
Figure number sign: 1, diamond fretsaw; 2, crystal ingot workpiece; 3, guide wheel; 4, regulating wheel; 5, workbench; 6, vertical guide rail; 7, horizontal guide rail; 8, lifting motor; 9, elevating screw; 10, pulley transmission mechanism; 11, feeding motor; 12, feed screw; 13, feed nut; 14, chuck; 15, chuck; 16, electric rotating machine; 17, weight; 18, bracing wire; 19, rotating disc, 20, base; 21, crossbeam; 22, brace; 23, slide block; 24, truss; 25, crane.
(5) specific embodiment:
Below in conjunction with accompanying drawing, the technical solution of the utility model is described further.
The utility model diamond fretsaw cutting equipment, comprise that annular diamond fretsaw 1(is with electroplating or the mode of resin-coating is cemented in the ring like steel wire surface by diamond and forms diamond wire), workbench 5 and the horizontal feed mechanism of workbench, base 20 and the frame of scroll saw travelling mechanism and scroll saw feed arrangement, carrying crystal ingot workpiece 2.
Described frame consists of two vertical guide rails 6 and crossbeam 21, and described vertical guide rail 6 fixedly stands on base 20, and described crossbeam 21 is across on two vertical guide rails 6 and is fixing, and by brace 22 assist location; Two vertical guide rails 6 are combined with truss frame for connecting 24 between slide block 23, two slide blocks 23, a crane 25 are installed, as shown in Figure 2 and Figure 3 on described truss 24.
Described scroll saw travelling mechanism is located on crane 25, comprises a horizontal regulating wheel 4 of left and right two horizontal guide wheels 3 and top centre, and one of them guide wheel 3 is made as driving wheel, is driven by pulley transmission mechanism 10 by motor; The diamond fretsaw 1 of ring seal is surrounded on left and right guide wheel 3 and regulating wheel 4, described regulating wheel 4 is by bracing wire 18 tensioning diamond fretsaw 1 upwards, described bracing wire 18 connects the weight 17(of a side by the counterweight counterweight by two fixed pulleys), as shown in Figure 1 and Figure 2.
Described scroll saw feed arrangement comprises the elevating mechanism consisted of lifting motor 8, the elevating screw 9 cooperatively interacted and lifting nut, two lifting motors 8 are installed on crossbeam 21, position is corresponding to each vertical guide rail 6, article two, elevating screw 9 is parallel to 6 settings of corresponding vertical guide rail, the top axle head of each elevating screw 9 connects the output shaft of corresponding lifting motor 8, described lifting nut is fixedly arranged on truss 24, as shown in Figure 2 and Figure 3.
Described workbench 5 is located on base 20 by horizontal guide rail 7, described horizontal guide rail 7 extends to the cutting zone of elevating mechanism bottom, feed screw 12 and feed nut 13 that the horizontal feed mechanism of workbench 5 comprises feeding motor 11, cooperatively interacts, described feed screw 12 is parallel to horizontal guide rail 7 and arranges, the axle head of feed screw 12 connects the output shaft of feeding motor 11, and described feed nut 13 is fixed on workbench 5; On workbench 5, install and drive the rotating mechanism that crystal ingot workpiece 2 horizontally rotates, described rotating mechanism is relatively coaxial chuck 14 and the chuck 15 arranged, described chuck 14 connects rotating disc 19, described rotating disc 19 connects the output shaft of electric rotating machine 16, the gap adjustment amount that has 0.1mm～2mm between chuck 14 and rotating disc 19, crystal ingot workpiece 2 one ends are clamped by chuck 14, and the other end sucks and makes it be in free state in chuck 15 places, as shown in Figure 3.
The course of work of the utility model diamond fretsaw cutting equipment:
1, cutting starts.
The driving wheel that pulley transmission mechanism 10 drives guide wheel 3 makes annular diamond fretsaw 1 all the time towards unidirectional motion, and to lower feeding cutting crystal ingot workpiece 2, diamond fretsaw 1 imposes suitable tensile force by regulating wheel 4 and keeps its even running under the drive of elevating mechanism.
Meanwhile, horizontal feed mechanism drives workbench 5 and enters cutting zone, and rotating mechanism drives crystal ingot workpiece 2 simultaneously around own level axle single direction rotation, and the traffic direction of annular diamond fretsaw 1 is axially vertical with crystal ingot workpiece 2.
2, cutting finishes.
Elevating mechanism drives upwards withdrawing of annular diamond fretsaw 1, and horizontal feed mechanism drives workbench 5 and exits cutting zone.
Claims (7)
1. diamond fretsaw cutting equipment, the workbench (5) that comprises annular diamond fretsaw (1), scroll saw travelling mechanism and scroll saw feed arrangement and carrying crystal ingot workpiece (2), it is characterized in that: described scroll saw travelling mechanism comprises horizontally disposed some guide wheels (3) and strainer, one of them guide wheel (3) is made as driving wheel, and described diamond fretsaw (1) is surrounded on guide wheel (3) and by the strainer tensioning for annular diamond wire; Described scroll saw feed arrangement comprises and drives the elevating mechanism that the scroll saw travelling mechanism moves up and down along column or vertical guide rail (6); Described crystal ingot workpiece (2) is used the rotating mechanism clamping, and it is upper that described rotating mechanism is located at workbench (5), and described workbench (5) is located at horizontal guide rail (7) and is gone up and connect horizontal feed mechanism.
2. diamond fretsaw cutting equipment according to claim 1, it is characterized in that: elevating screw (9) and lifting nut that described elevating mechanism comprises lifting motor (8), cooperatively interacts, described elevating screw (9) is parallel to column or vertical guide rail (6) arranges, elevating screw (9) axle head connects the output shaft of lifting motor (8), and described lifting nut is connected with the scroll saw travelling mechanism.
3. diamond fretsaw cutting equipment according to claim 1, it is characterized in that: feed screw (12) and feed nut (13) that described horizontal feed mechanism comprises feeding motor (11), cooperatively interacts, described feed screw (12) is parallel to horizontal guide rail (7) setting, feed screw (12) axle head connects the output shaft of feeding motor (11), and described feed nut (13) is connected with workbench (5).
4. according to the described diamond fretsaw cutting equipment of any one in claim 1～3, it is characterized in that: the driving of described driving wheel is pulley transmission mechanism (10) or gear drive.
5. according to the described diamond fretsaw cutting equipment of any one in claim 1～3, it is characterized in that: described rotating mechanism is relatively coaxial chuck (14) and the chuck (15) arranged, and described chuck (14) connects the output shaft of electric rotating machine (16) by rotating disc (19).
6. diamond fretsaw cutting equipment according to claim 5, it is characterized in that: the gap between described chuck (14) and rotating disc (19) is adjustable 0.1mm～2mm.
7. according to the described diamond fretsaw cutting equipment of any one in claim 1～3, it is characterized in that: described strainer comprises regulating wheel (4) and with the weight (17) of counterweight counterweight, described weight (17) is by bracing wire (18) tension regulating wheel (4), and described bracing wire (18) is surrounded on the fixed pulley group.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203499633U CN203305391U (en) | 2013-06-19 | 2013-06-19 | Diamond fret saw cutting equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203499633U CN203305391U (en) | 2013-06-19 | 2013-06-19 | Diamond fret saw cutting equipment |
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| Publication Number | Publication Date |
|---|---|
| CN203305391U true CN203305391U (en) | 2013-11-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013203499633U Withdrawn - After Issue CN203305391U (en) | 2013-06-19 | 2013-06-19 | Diamond fret saw cutting equipment |
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| CN (1) | CN203305391U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103302754A (en) * | 2013-06-19 | 2013-09-18 | 中国有色桂林矿产地质研究院有限公司 | Diamond fretsaw cutting method and device |
| CN103786274A (en) * | 2014-01-23 | 2014-05-14 | 中国有色桂林矿产地质研究院有限公司 | Diamond fretsaw device for polycrystalline silicon ingot squaring |
| CN106112155A (en) * | 2016-08-12 | 2016-11-16 | 上海日进机床有限公司 | Workpiece level core-regulating mechanism and horizontal aligning method, workpiece intercept unit |
| CN111136335A (en) * | 2019-12-23 | 2020-05-12 | 中国有色桂林矿产地质研究院有限公司 | Fretsaw cutting device for forging hinge beam of cubic press and cutting method thereof |
| CN112191937A (en) * | 2020-08-21 | 2021-01-08 | 安徽华深铝业有限公司 | Stable form is multi-angle cutting machine for aluminium alloy production |
| CN113085039A (en) * | 2021-04-26 | 2021-07-09 | 曲靖阳光能源硅材料有限公司 | Numerical control wire saw cutting piece grinding machine |
-
2013
- 2013-06-19 CN CN2013203499633U patent/CN203305391U/en not_active Withdrawn - After Issue
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103302754A (en) * | 2013-06-19 | 2013-09-18 | 中国有色桂林矿产地质研究院有限公司 | Diamond fretsaw cutting method and device |
| CN103786274A (en) * | 2014-01-23 | 2014-05-14 | 中国有色桂林矿产地质研究院有限公司 | Diamond fretsaw device for polycrystalline silicon ingot squaring |
| CN106112155A (en) * | 2016-08-12 | 2016-11-16 | 上海日进机床有限公司 | Workpiece level core-regulating mechanism and horizontal aligning method, workpiece intercept unit |
| CN106112155B (en) * | 2016-08-12 | 2018-12-11 | 天通日进精密技术有限公司 | Workpiece horizontal aligning mechanism and horizontal aligning method, workpiece intercept unit |
| CN111136335A (en) * | 2019-12-23 | 2020-05-12 | 中国有色桂林矿产地质研究院有限公司 | Fretsaw cutting device for forging hinge beam of cubic press and cutting method thereof |
| CN112191937A (en) * | 2020-08-21 | 2021-01-08 | 安徽华深铝业有限公司 | Stable form is multi-angle cutting machine for aluminium alloy production |
| CN113085039A (en) * | 2021-04-26 | 2021-07-09 | 曲靖阳光能源硅材料有限公司 | Numerical control wire saw cutting piece grinding machine |
| CN113085039B (en) * | 2021-04-26 | 2022-02-22 | 曲靖阳光新能源股份有限公司 | Numerical control wire saw cutting piece grinding machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20131127 Effective date of abandoning: 20150211 |
|
| RGAV | Abandon patent right to avoid regrant |