CN202726714U - Grinding polishing disk with circulation water cooling device - Google Patents
Grinding polishing disk with circulation water cooling device Download PDFInfo
- Publication number
- CN202726714U CN202726714U CN 201220327441 CN201220327441U CN202726714U CN 202726714 U CN202726714 U CN 202726714U CN 201220327441 CN201220327441 CN 201220327441 CN 201220327441 U CN201220327441 U CN 201220327441U CN 202726714 U CN202726714 U CN 202726714U
- Authority
- CN
- China
- Prior art keywords
- groove
- water inlet
- backwater
- water
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Abstract
The utility model relates to a grinding polishing disk with a circulation water cooling device. A shaft sleeve is fixedly installed in a machine frame face plate, a spindle is bridged in the shaft sleeve in a rotating mode, a water inlet pipeline installation hole is arranged in the spindle, a lower cooling disk is fixed at the upper end of the spindle, an upper cooling disk is fixed on the lower cooling disk, a grinding polishing disk body is fixed on the upper cooling disk, a water inlet lower groove and a water return lower groove which are arranged spirally are arranged on an upper end face of the lower cooling disk, a water inlet upper groove and a water return upper groove which are spirally arranged are positioned on a lower end face of the upper cooling disk, and the water inlet upper groove and the water return upper groove are arranged at interval. The grinding polishing disk with the circulation water cooling device is simple in structure. A cooling circuit of the grinding polishing disk doesn't pass through the surface of the grinding polishing disk, cooling liquid cannot sweep grinding fluid away, and accordingly good cooling effects can be achieved. Thus, rate of finished products and efficiency of part processing can be improved.
Description
Technical field
The utility model relates to the grinding and polishing device technical field, especially relates to a kind of grinding and polishing dish with water-circulating cooling device.
Background technology
In the crisp fritter part processes such as grinding and polishing wafer, the local contact area of grinding and polishing dish and workpiece tends to occur high temperature, sometimes even can reach several Baidu.Not only can the burn surface of part of local high temperature forms affected layer, and can cause the local deformation of part, and then affects its surface figure accuracy.
Existing polisher lapper cooling fluid is by coolant pump sucking-off from tank for coolant, deliver to lathe front cooling fluid control handle through plastic tube, be divided into two-way, one route plastic tube enters the balance staff centre bore from the lathe bed inner chamber and wears axle and go out, be connected on the pipe joint of cylinder pressure head, by the ejection of pressure head bulb endoporus, be upper interior spray; Another route plastic tube passes upper and lower lathe bed, and main shaft lower end pipe joint is sprayed simultaneously by a plurality of apertures on inner hole of spindle and the mill and to be lower endoporus.On the free abrasive polisher lapper, this up and down type of cooling of interior spray can't be used, because continue the grinding and polishing abrasive material that the cooling fluid of ejection can wash away free state simultaneously, the grinding and polishing process can't be carried out.Therefore, the free abrasive polisher lapper that ratio of precision is higher on the market generally all requires to use in being furnished with the environment of air-conditioning system, but air-conditioning system can only guarantee extraneous temperature constant, and is helpless to the localized hyperthermia district on abrasive disk and the workpiece contact-making surface.
Summary of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art, thereby a kind of grinding and polishing dish with water-circulating cooling device that abrasive material improves part processed finished products rate and efficient that can't wash away when the grinding and polishing dish is cooled off is provided.
The technical scheme that provides according to the utility model, described grinding and polishing dish with water-circulating cooling device, in framework panel, be installed with axle sleeve, rotating turret is provided with main shaft in axle sleeve, in main shaft, offer the inlet channel installing hole, be fixed with lower cooler pan in the upper end of main shaft, be fixed with cooler pan at lower cooler pan, be fixed with the grinding and polishing dish at upper cooler pan, offer in the shape of a spiral under the water inlet that arranges groove under the groove and backwater in the upper surface of lower cooler pan, groove is set in distance under the lower groove of water inlet and the backwater, and the head end section of groove joins under the terminal part of the lower groove of water inlet and the backwater; Offer in the shape of a spiral in the water inlet that arranges groove on the groove and backwater in the lower surface of upper cooler pan, in the water inlet on groove and the backwater groove be set in distance, in the water inlet on the terminal part of groove and the backwater head end section of groove join, the lower groove of water inlet cooperates the complete cooling inlet opening of formation with the upper groove of water inlet, under the backwater groove cooperate with groove on the backwater formation complete cool back the water hole.
Described inlet channel installing hole is axially offered along main shaft, and the epimere of inlet channel installing hole is truncated cone-shaped, and the hypomere of inlet channel installing hole is cylindrical.
Under the described water inlet under groove, the backwater in groove, the water inlet on groove and the backwater cross sectional shape of groove be the identical semicircle of diameter.
The utility model is simple in structure, its grinding and polishing dish cooling circuit is without the abrasive disk surface, cooling fluid can not wash away lapping liquid, therefore can not affect free grinding and polishing process, the cooling fluid that the grinding and polishing of flowing through is tried to get to the heart of a matter can in time be taken away the heat that each zone of abrasive disk is gathered, play good cooling effect, thereby improve part processed finished products rate and efficient.
Description of drawings
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the structural representation of upper cooler pan in the utility model.
The specific embodiment
The utility model is described in further detail below in conjunction with concrete drawings and Examples.
As shown in the figure: this is with the grinding and polishing dish of water-circulating cooling device, in framework panel 1, be installed with axle sleeve 2, be provided with main shaft 3 at axle sleeve 2 interior rotating turrets, in main shaft 3, offer inlet channel installing hole 11, be fixed with lower cooler pan 4 in the upper end of main shaft 3, be fixed with cooler pan 5 at lower cooler pan 4, be fixed with grinding and polishing dish 6 at upper cooler pan 5, offer in the shape of a spiral under the water inlet that arranges groove 8 under the groove 7 and backwater in the upper surface of lower cooler pan 4, groove 8 is set in distance under the lower groove 7 of water inlet and the backwater, and the head end section of groove 8 joins under the terminal part of the lower groove 7 of water inlet and the backwater; Offer in the shape of a spiral in the water inlet that arranges groove 10 on the groove 9 and backwater in the lower surface of upper cooler pan 5, in the water inlet on groove 9 and the backwater groove 10 be set in distance, in the water inlet on the terminal part of groove 9 and the backwater head end section of groove 10 join, the lower groove 7 of water inlet cooperates the complete cooling inlet opening of formation with the upper groove 9 of water inlet, under the backwater groove 8 cooperate with groove 10 on the backwater formation complete cool back the water hole.
Described inlet channel installing hole 11 is axially offered along main shaft 3, and the epimere of inlet channel installing hole 11 is truncated cone-shaped, and the hypomere of inlet channel installing hole 11 is cylindrical.
Under the described water inlet under groove 7, the backwater in groove 8, the water inlet on groove 9 and the backwater cross sectional shape of groove 10 be the identical semicircle of diameter.
During use, be fixed with spindle sprocket 13 in the bottom of main shaft 3, be installed into waterpipe 12 in inlet channel installing hole 11, the water side of inlet channel 12 joins with the head end section of cooling inlet opening, and the water that cools back the terminal part outflow in water hole enters in the inlet channel installing hole 11 also discharges.
During work, cooling water passes into the head end section of cooling inlet opening from inlet channel 12, cooling water adds the amount of heat that produces man-hour with grinding and polishing dish 6 and absorbs after cooling off the inlet opening, cooling back the water hole circulation, and from cooling back the terminal part outflow in water hole, through inlet channel installing hole 11 outflows of main shaft 3.
Claims (3)
1. grinding and polishing dish with water-circulating cooling device, in framework panel (1), be installed with axle sleeve (2), rotating turret is provided with main shaft (3) in axle sleeve (2), in main shaft (3), offer inlet channel installing hole (11), be fixed with lower cooler pan (4) in the upper end of main shaft (3), be fixed with upper cooler pan (5) at lower cooler pan (4), be fixed with grinding and polishing dish (6) at upper cooler pan (5), it is characterized in that: offer in the shape of a spiral under the water inlet that arranges groove (8) under the groove (7) and backwater in the upper surface of lower cooler pan (4), groove (8) is set in distance under the lower groove (7) of water inlet and the backwater, and the head end section of groove (8) joins under the terminal part of the lower groove (7) of water inlet and the backwater; Offer in the shape of a spiral in the water inlet that arranges groove (10) on the groove (9) and backwater in the lower surface of upper cooler pan (5), groove (10) is set in distance on groove in the water inlet (9) and the backwater, the head end section of groove (10) joins on the terminal part of groove in the water inlet (9) and the backwater, the lower groove (7) of water inlet cooperates the complete cooling inlet opening of formation with the upper groove (9) of water inlet, groove under the backwater (8) cooperate with groove (10) on the backwater formation complete cool back the water hole.
2. the grinding and polishing dish with water-circulating cooling device as claimed in claim 1, it is characterized in that: described inlet channel installing hole (11) axially offering along main shaft (3), and the epimere of inlet channel installing hole (11) is truncated cone-shaped, and the hypomere of inlet channel installing hole (11) is cylindrical.
3. the grinding and polishing dish with water-circulating cooling device as claimed in claim 1 is characterized in that: under groove under the described water inlet (7), the backwater in groove (8), the water inlet on groove (9) and the backwater cross sectional shape of groove (10) be the identical semicircle of diameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220327441 CN202726714U (en) | 2012-07-06 | 2012-07-06 | Grinding polishing disk with circulation water cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220327441 CN202726714U (en) | 2012-07-06 | 2012-07-06 | Grinding polishing disk with circulation water cooling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202726714U true CN202726714U (en) | 2013-02-13 |
Family
ID=47652458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220327441 Expired - Lifetime CN202726714U (en) | 2012-07-06 | 2012-07-06 | Grinding polishing disk with circulation water cooling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202726714U (en) |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103894920A (en) * | 2014-03-26 | 2014-07-02 | 广东工业大学 | Lower plate driving structure of plane grinder |
| CN104084885A (en) * | 2014-07-15 | 2014-10-08 | 宇环数控机床股份有限公司 | Circulating cooling structure for grinding and polishing disc |
| CN104084877A (en) * | 2014-06-24 | 2014-10-08 | 北京微纳精密机械有限公司 | Spiral cooling structure of polishing disk of annular polishing machine |
| CN104647229A (en) * | 2015-03-12 | 2015-05-27 | 山东科技大学 | Hollow self-cooled millstone and cooling method |
| CN105150106A (en) * | 2015-09-21 | 2015-12-16 | 上海工程技术大学 | Cooling device and cooling method for double-sided chemical mechanical grinding and polishing of wafers |
| CN107097151A (en) * | 2017-07-04 | 2017-08-29 | 大连桑姆泰克工业部件有限公司 | Polishing fluid pipe-line system and upper lower burrs grinding mechanism |
| CN107243780A (en) * | 2017-04-27 | 2017-10-13 | 上海佑戈金属科技有限公司 | Prepare the mirror ultrafinish method of high reflectance, low surface roughness aluminium alloy plate |
| CN107471116A (en) * | 2017-07-28 | 2017-12-15 | 义乌市台荣超硬制品有限公司 | A kind of interannular feedwater wheel structure |
| CN108188921A (en) * | 2018-03-09 | 2018-06-22 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Water circle device and grinding device |
| CN109015343A (en) * | 2017-06-08 | 2018-12-18 | 创技股份有限公司 | Grinding device |
| CN109202696A (en) * | 2018-09-10 | 2019-01-15 | 台山市远鹏研磨科技有限公司 | A kind of thinned pad of Diamond Ceramics |
| CN109227351A (en) * | 2018-11-07 | 2019-01-18 | 安徽格楠机械有限公司 | A kind of navigate for rocket balances the grinder of saddle |
| CN111230741A (en) * | 2020-03-17 | 2020-06-05 | 西安奕斯伟硅片技术有限公司 | Polishing disk cooling structure, polishing disk and polishing machine |
| CN111843832A (en) * | 2020-07-30 | 2020-10-30 | 赣州市业润自动化设备有限公司 | Water-cooled grinding head for chemical mechanical grinding |
| CN113172531A (en) * | 2021-04-16 | 2021-07-27 | 泉州芸台科技有限公司 | Steel cutting machine |
| CN113400186A (en) * | 2021-07-20 | 2021-09-17 | 深圳市科源信科技有限公司 | Quartz crystal wafer grinding frame |
| CN114473848A (en) * | 2022-01-27 | 2022-05-13 | 北京烁科精微电子装备有限公司 | Burnishing device with cooling function |
| CN117047658A (en) * | 2023-08-30 | 2023-11-14 | 苏州博宏源机械制造有限公司 | Upper and lower disc cooling structure of double-sided polishing machine |
-
2012
- 2012-07-06 CN CN 201220327441 patent/CN202726714U/en not_active Expired - Lifetime
Cited By (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103894920A (en) * | 2014-03-26 | 2014-07-02 | 广东工业大学 | Lower plate driving structure of plane grinder |
| CN104084877A (en) * | 2014-06-24 | 2014-10-08 | 北京微纳精密机械有限公司 | Spiral cooling structure of polishing disk of annular polishing machine |
| CN104084885B (en) * | 2014-07-15 | 2016-04-13 | 宇环数控机床股份有限公司 | A kind of circulation cooling mechanism of grinding and polishing dish |
| CN104084885A (en) * | 2014-07-15 | 2014-10-08 | 宇环数控机床股份有限公司 | Circulating cooling structure for grinding and polishing disc |
| CN104647229A (en) * | 2015-03-12 | 2015-05-27 | 山东科技大学 | Hollow self-cooled millstone and cooling method |
| CN105150106B (en) * | 2015-09-21 | 2017-05-17 | 上海工程技术大学 | Cooling device and cooling method for double-sided chemical mechanical grinding and polishing of wafers |
| CN105150106A (en) * | 2015-09-21 | 2015-12-16 | 上海工程技术大学 | Cooling device and cooling method for double-sided chemical mechanical grinding and polishing of wafers |
| CN107243780A (en) * | 2017-04-27 | 2017-10-13 | 上海佑戈金属科技有限公司 | Prepare the mirror ultrafinish method of high reflectance, low surface roughness aluminium alloy plate |
| CN109015343B (en) * | 2017-06-08 | 2021-09-10 | 创技股份有限公司 | Grinding device |
| CN109015343A (en) * | 2017-06-08 | 2018-12-18 | 创技股份有限公司 | Grinding device |
| CN107097151A (en) * | 2017-07-04 | 2017-08-29 | 大连桑姆泰克工业部件有限公司 | Polishing fluid pipe-line system and upper lower burrs grinding mechanism |
| CN107097151B (en) * | 2017-07-04 | 2023-09-22 | 大连桑姆泰克工业部件有限公司 | Polishing solution pipeline system and upper disc and lower disc grinding mechanism |
| CN107471116A (en) * | 2017-07-28 | 2017-12-15 | 义乌市台荣超硬制品有限公司 | A kind of interannular feedwater wheel structure |
| CN107471116B (en) * | 2017-07-28 | 2019-02-05 | 义乌市台荣超硬制品有限公司 | A kind of interannular water supply wheel structure |
| CN108188921A (en) * | 2018-03-09 | 2018-06-22 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Water circle device and grinding device |
| CN109202696A (en) * | 2018-09-10 | 2019-01-15 | 台山市远鹏研磨科技有限公司 | A kind of thinned pad of Diamond Ceramics |
| CN109227351A (en) * | 2018-11-07 | 2019-01-18 | 安徽格楠机械有限公司 | A kind of navigate for rocket balances the grinder of saddle |
| CN109227351B (en) * | 2018-11-07 | 2024-04-19 | 安徽格楠机械有限公司 | Grinder for rocket navigation balance support |
| CN111230741A (en) * | 2020-03-17 | 2020-06-05 | 西安奕斯伟硅片技术有限公司 | Polishing disk cooling structure, polishing disk and polishing machine |
| CN111230741B (en) * | 2020-03-17 | 2021-09-14 | 西安奕斯伟硅片技术有限公司 | Polishing disk cooling structure, polishing disk and polishing machine |
| CN111843832A (en) * | 2020-07-30 | 2020-10-30 | 赣州市业润自动化设备有限公司 | Water-cooled grinding head for chemical mechanical grinding |
| CN111843832B (en) * | 2020-07-30 | 2021-09-07 | 广东汉岂工业技术研发有限公司 | Water-cooled grinding head for chemical mechanical grinding |
| CN113172531A (en) * | 2021-04-16 | 2021-07-27 | 泉州芸台科技有限公司 | Steel cutting machine |
| CN113400186A (en) * | 2021-07-20 | 2021-09-17 | 深圳市科源信科技有限公司 | Quartz crystal wafer grinding frame |
| CN114473848A (en) * | 2022-01-27 | 2022-05-13 | 北京烁科精微电子装备有限公司 | Burnishing device with cooling function |
| CN117047658A (en) * | 2023-08-30 | 2023-11-14 | 苏州博宏源机械制造有限公司 | Upper and lower disc cooling structure of double-sided polishing machine |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN202726714U (en) | Grinding polishing disk with circulation water cooling device | |
| CN101549484B (en) | A polishing disk with internal circulated cooling | |
| CN203156591U (en) | Temperature controlled grinding polishing disk | |
| CN103586754A (en) | Optical element polishing device | |
| CN207858537U (en) | A kind of shale samples burnishing device | |
| CN105945657A (en) | Multifunctional ultrasonic vibration grinding mechanism | |
| CN101767291A (en) | Low-temperature spraying system and technology of gear cutting equipment | |
| CN108145600A (en) | Grinding device | |
| CN206263793U (en) | Sander cooling device with radiating ribs | |
| CN101549475B (en) | Novel automatic oil spout type honing lever | |
| CN102729350A (en) | Cooling system on squaring machine for cutting wafers | |
| CN101966695A (en) | Upper polishing disk of polishing machine | |
| CN207448254U (en) | Carry the grinding wheel unit of coolant | |
| CN204171869U (en) | A kind of grinding cooling device of single-sided lapping machine | |
| CN205734395U (en) | A kind of valve grinding machine | |
| CN202825561U (en) | Circulating water cooling filter device | |
| CN103465157A (en) | Cooling and sealing structure of grinding polisher | |
| CN204639810U (en) | A kind of grinding machine of modified node method | |
| CN101972998A (en) | Lower polishing disk of polishing machine | |
| CN214723176U (en) | Grinding device | |
| CN109048483A (en) | A kind of internal coolant case of numerically-controlled machine tool | |
| CN202742211U (en) | Polishing machine with wet-type device | |
| CN203282333U (en) | Inner cooling grinding polishing device | |
| CN203887717U (en) | Resin binder grinding wheel | |
| CN206185640U (en) | A mechanism for optical flat burnishing machine cooling system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130213 |