CN104084885B - A kind of circulation cooling mechanism of grinding and polishing dish - Google Patents
A kind of circulation cooling mechanism of grinding and polishing dish Download PDFInfo
- Publication number
- CN104084885B CN104084885B CN201410335256.8A CN201410335256A CN104084885B CN 104084885 B CN104084885 B CN 104084885B CN 201410335256 A CN201410335256 A CN 201410335256A CN 104084885 B CN104084885 B CN 104084885B
- Authority
- CN
- China
- Prior art keywords
- ring
- rotational axis
- grinding
- centre rotational
- rotating shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention discloses a kind of circulation cooling mechanism of grinding and polishing dish, comprise centre rotational axis and gap and be set in empty set rotating shaft on centre rotational axis, sealing device is provided with in the gap of described empty set rotating shaft and centre rotational axis, described sealing device is provided with mutual disconnected intake antrum and water chamber, described centre rotational axis is provided with the first inlet channel and the first water outlet that are connected with swivel joint, described empty set rotating shaft is provided with the second inlet channel and the second water outlet that are communicated with grinding and polishing dish, described first inlet channel is communicated with the second water outlet with the second inlet channel with water chamber respectively by intake antrum with the first water outlet.The present invention can realize cooling the active cycle of grinding and polishing dish card, taking away in time, realizing the accurate control of temperature, can improve grinding, polishing precision and efficiency by producing a large amount of heats during polishing, adapts to the requirement of different materials processing.
Description
Technical field
The invention belongs to grinding, polishing grinding equipment, be specifically related to a kind of circulation cooling mechanism of grinding and polishing dish.
Background technology
In equipment at present for grinding, grinding and polishing, the type of cooling of its lower grinding and polishing dish is divided into active cooling and passive cooling two class.
The form of passive cooling as shown in Figure 1, there is the rotary parts such as centre rotational axis 1, pallet A and grinding and polishing dish B in its underdrive parts, for realizing the spinning movement requirement of these equipment underdrive parts, be provided with multistage empty set rotating shaft 2, realized the different rotary requirement of difference in functionality parts by the rotating shaft that driven by motor is different.Due to the existence of empty set rotating shaft 2 and being separated of spinning movement, cooling water cannot deliver to grinding and polishing PanBChu by empty set rotating shaft 2, the active cooling of lower grinding and polishing dish is made to be difficult to realize, the lower grinding and polishing dish of this type of polishing grinding equipment all adopts the passive type of cooling for a long time, namely by heat when outer abrasive liquid and the work of air indirect transfer, the operating temperature of grinding and polishing dish is made to be difficult to control, uncontrollable the causing of grinding and polishing temperature is difficult to reach work pieces process requirement when processing special parts, percent defective, part processing cost is high, inefficiency.
Summary of the invention
The object of the invention is for prior art Problems existing, a kind of circulation cooling mechanism of grinding and polishing dish is provided, to realize carrying out active cooling to grinding and polishing dish in the complicated occasion of multilayer empty set rotating shaft existence, realize the controllable of grinding and polishing temperature, improve machining accuracy and the working (machining) efficiency of workpiece, reduce work pieces process cost.
Technical scheme of the present invention is achieved in that
The circulation cooling mechanism of grinding and polishing dish, comprise centre rotational axis and gap and be set in empty set rotating shaft on centre rotational axis, sealing device is provided with in the gap of described empty set rotating shaft and centre rotational axis, described sealing device is provided with mutual disconnected intake antrum and water chamber, described centre rotational axis is provided with the first inlet channel and the first water outlet that are connected with swivel joint, described empty set rotating shaft is provided with the second inlet channel and the second water outlet that are communicated with grinding and polishing dish, described first inlet channel is communicated with the second water outlet with the second inlet channel with water chamber respectively by intake antrum with the first water outlet.
Described sealing device comprises the tubular rotating ring and end cap of establishing opening, described moving ring sleeve is on centre rotational axis and sealing is fixed on empty set rotating shaft, described end cap to be enclosed within centre rotational axis and to be fixed on the closure of openings of rotating ring on empty set rotating shaft, graphite-seal ring is equipped with in one end of described rotating ring and in the end cap being located at the rotating ring other end, on the centre rotational axis being positioned at described rotating ring, sealing is fixed with stationary ring, described stationary ring forms the sealing ring with central rotation sealing respectively by spring assembly and silicon carbide sealed ring with the graphite grazing loop contacts be located on rotating ring and end cap, being provided with backbone sealing ring between described rotating ring and stationary ring by the compartition between rotating ring and stationary ring is described intake antrum and water chamber.
All sealing ring is installed between described stationary ring and centre rotational axis and between described rotating ring and empty set rotating shaft.
Beneficial effect of the present invention:
The present invention is by being arranged at the sealing cooling water channel between multilayer empty set rotating shaft, realize cooling water from the gap passed through between centre rotational axis and empty set rotating shaft, arrive and need the cold grinding and polishing Pan Chu gone, realize cooling the active cycle of grinding and polishing dish card, take away producing a large amount of heats during polishing in time, realize the accurate control of temperature, grinding, polishing precision and efficiency can be improved, adapt to the requirement of different materials processing.
Technical scheme of the present invention is further illustrated below in conjunction with accompanying drawing.
Accompanying drawing explanation
Fig. 1 is the passive cooling structure schematic diagram of existing lower grinding and polishing dish.
Fig. 2 is structural representation of the present invention.
Detailed description of the invention
See Fig. 2, the circulation cooling mechanism of grinding and polishing dish, comprise centre rotational axis 1 and gap and be set in empty set rotating shaft 2 on centre rotational axis 1, sealing device is provided with in described empty set rotating shaft 2 and the gap of centre rotational axis 1, described sealing device is provided with mutual disconnected intake antrum 15 and water chamber 13, described centre rotational axis 1 is provided with the first inlet channel 17 and the first water outlet 16 be connected with swivel joint (not shown), described empty set rotating shaft 2 is provided with the second inlet channel 11 and the second water outlet 12 be communicated with grinding and polishing dish (not shown), described first inlet channel 17 is communicated with the second water outlet 12 with the second inlet channel 11 with water chamber 13 respectively by intake antrum 15 with the first water outlet 16, described sealing device comprises the tubular rotating ring 10 and end cap 4 of establishing opening, described rotating ring 10 is enclosed within centre rotational axis 1 and sealing is fixed on empty set rotating shaft 2, described end cap 4 to be enclosed within centre rotational axis 1 and to be fixed on the closure of openings of rotating ring 10 on empty set rotating shaft 2, one end of described rotating ring 10 and be located at rotating ring 10 other end end cap 4 in be equipped with graphite-seal ring 5, on the centre rotational axis 1 being positioned at described rotating ring 10, sealing is fixed with stationary ring 14, described stationary ring 14 is provided with upper and lower two spring retainers 8, several springs 7 uniform on each spring retainer 8, described spring 7 contacts with silicon carbide sealed ring 6 and applies pressure to it, make silicon carbide sealed ring 6 respectively be arranged on rotating ring 10 and contact the sealing ring being formed and seal with centre rotational axis 1 with the graphite-seal ring 5 on end cap 4, being provided with backbone sealing ring 9 between described rotating ring 10 and stationary ring 14 is described intake antrum 15 and water chamber 13 by the compartition between rotating ring 10 and stationary ring 14, between described stationary ring 14 and centre rotational axis 1, sealing ring 19 is installed, between described rotating ring 10 and empty set rotating shaft 2, sealing ring 18 is installed.
Cooling water enters centre rotational axis 1 through swivel joint from the first inlet channel 17 be installed on centre rotational axis 1, then intake antrum 15 is arrived, enter in the second inlet channel 11 on empty set rotating shaft 2 by the intake antrum 15 of sealing, last cooling water arrives equipment needs the grinding and polishing dish of cooling etc. to need the position of cooling, cooling water returns the second water outlet 12 on empty set rotating shaft 2 after the completion of the heat exchange, and successively by water chamber 13, first water outlet 16 of sealing, finally enter cooling system through swivel joint and to have freezed a cool cycles.
Claims (3)
1. the circulation cooling mechanism of a grinding and polishing dish, comprise centre rotational axis and gap and be set in empty set rotating shaft on centre rotational axis, it is characterized in that being provided with sealing device in the gap of described empty set rotating shaft and centre rotational axis, described sealing device is provided with mutual disconnected intake antrum and water chamber, described centre rotational axis is provided with the first inlet channel and the first water outlet that are connected with swivel joint, described empty set rotating shaft is provided with the second inlet channel and the second water outlet that are communicated with grinding and polishing dish, described first inlet channel is communicated with the second water outlet with the second inlet channel with water chamber respectively by intake antrum with the first water outlet.
2. the circulation cooling mechanism of grinding and polishing dish according to claim 1, it is characterized in that described sealing device comprises the tubular rotating ring and end cap establishing opening, described moving ring sleeve is on centre rotational axis and sealing is fixed on empty set rotating shaft, described end cap to be enclosed within centre rotational axis and to be fixed on the closure of openings of rotating ring on empty set rotating shaft, graphite-seal ring is equipped with in one end of described rotating ring and in the end cap being located at the rotating ring other end, on the centre rotational axis being positioned at described rotating ring, sealing is fixed with stationary ring, described stationary ring forms the sealing ring with central rotation sealing respectively by spring assembly and silicon carbide sealed ring with the graphite grazing loop contacts be located on rotating ring and end cap, being provided with backbone sealing ring between described rotating ring and stationary ring by the compartition between rotating ring and stationary ring is described intake antrum and water chamber.
3. the circulation cooling mechanism of grinding and polishing dish according to claim 2, is characterized in that all being provided with sealing ring between described stationary ring and centre rotational axis and between described rotating ring and empty set rotating shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410335256.8A CN104084885B (en) | 2014-07-15 | 2014-07-15 | A kind of circulation cooling mechanism of grinding and polishing dish |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410335256.8A CN104084885B (en) | 2014-07-15 | 2014-07-15 | A kind of circulation cooling mechanism of grinding and polishing dish |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104084885A CN104084885A (en) | 2014-10-08 |
| CN104084885B true CN104084885B (en) | 2016-04-13 |
Family
ID=51632702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410335256.8A Active CN104084885B (en) | 2014-07-15 | 2014-07-15 | A kind of circulation cooling mechanism of grinding and polishing dish |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104084885B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106881660B (en) * | 2017-03-20 | 2023-07-18 | 东旭集团有限公司 | Rotary adjusting type upper shaft mechanism for single-sided polishing of large-size wafer |
| CN107671728A (en) * | 2017-11-15 | 2018-02-09 | 深圳赛贝尔自动化设备有限公司 | A kind of upper disk magnetism servo-electric motor water-cooling of polishing grinding machine |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0388972B1 (en) * | 1989-03-24 | 1996-01-10 | Sumitomo Electric Industries, Ltd. | Apparatus for grinding semiconductor wafer |
| JP2000084833A (en) * | 1998-09-11 | 2000-03-28 | Okamoto Machine Tool Works Ltd | Polishing machine and replacing method for polishing pad |
| CN201573110U (en) * | 2009-12-10 | 2010-09-08 | 中国电子科技集团公司第四十五研究所 | Polishing table device |
| CN202479972U (en) * | 2012-03-12 | 2012-10-10 | 东莞金研精密研磨机械制造有限公司 | Oil cooling system for grinding disc |
| CN202540147U (en) * | 2012-04-28 | 2012-11-21 | 浙江昀丰新能源科技有限公司 | Cooling device for single-sided grinding and polishing machine |
| CN202726714U (en) * | 2012-07-06 | 2013-02-13 | 元亮科技有限公司 | Grinding polishing disk with circulation water cooling device |
| CN203973400U (en) * | 2014-07-15 | 2014-12-03 | 宇环数控机床股份有限公司 | A kind of circulation cooling mechanism of grinding and polishing dish |
-
2014
- 2014-07-15 CN CN201410335256.8A patent/CN104084885B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0388972B1 (en) * | 1989-03-24 | 1996-01-10 | Sumitomo Electric Industries, Ltd. | Apparatus for grinding semiconductor wafer |
| JP2000084833A (en) * | 1998-09-11 | 2000-03-28 | Okamoto Machine Tool Works Ltd | Polishing machine and replacing method for polishing pad |
| CN201573110U (en) * | 2009-12-10 | 2010-09-08 | 中国电子科技集团公司第四十五研究所 | Polishing table device |
| CN202479972U (en) * | 2012-03-12 | 2012-10-10 | 东莞金研精密研磨机械制造有限公司 | Oil cooling system for grinding disc |
| CN202540147U (en) * | 2012-04-28 | 2012-11-21 | 浙江昀丰新能源科技有限公司 | Cooling device for single-sided grinding and polishing machine |
| CN202726714U (en) * | 2012-07-06 | 2013-02-13 | 元亮科技有限公司 | Grinding polishing disk with circulation water cooling device |
| CN203973400U (en) * | 2014-07-15 | 2014-12-03 | 宇环数控机床股份有限公司 | A kind of circulation cooling mechanism of grinding and polishing dish |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104084885A (en) | 2014-10-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104084885B (en) | A kind of circulation cooling mechanism of grinding and polishing dish | |
| CN203973400U (en) | A kind of circulation cooling mechanism of grinding and polishing dish | |
| CN209830025U (en) | A mould cooling device for hardware fitting production | |
| CN103817595A (en) | Upper disc device for double-faced precision grinding and polishing combined machine tool | |
| CN102310491A (en) | Rotary joint of solar monocrystalline silicon cutting machine and using method thereof | |
| CN115846670B (en) | Metal powder grinding device | |
| CN202531849U (en) | Mechanical sealing device for high-temperature corrugated tubes | |
| CN210346407U (en) | But rapid cooling's duck oil indirect heating equipment | |
| CN105013203A (en) | Film evaporator | |
| CN206944647U (en) | A kind of copper-iron alloy powder drying device | |
| CN103831712B (en) | A kind of lower wall device for two-sided accurate grinding, grinding building-block machine | |
| CN214159873U (en) | Ball mill is used in chromium nitride production | |
| CN214817106U (en) | Mechanical rheological polishing machine | |
| CN211216685U (en) | Rapid cooling system for polymerization reaction kettle | |
| CN203696732U (en) | Lower plate device for double-surface combined precise cutting and grinding machine tool | |
| CN112643523A (en) | Force flow polishing device for spherical parts with through holes | |
| CN203696734U (en) | Upper plate device for double-surface combined precise cutting and grinding machine tool | |
| CN110117153B (en) | 3D glass hot bending device and method thereof | |
| CN208313002U (en) | A kind of Novel saw blade sintering machine | |
| CN215239905U (en) | Metal sealing ring grinding device | |
| CN213119638U (en) | Cooling device is used in quartz capsule processing | |
| CN104647620A (en) | Multi-wire sawing machine spindle system | |
| CN215880240U (en) | Cooling device of vacuum chamber sealing device | |
| CN204961820U (en) | Two -way pump sending effect ring | |
| CN208688109U (en) | A kind of double conic rotary vacuum dryer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |