CN104084885A - Circulating cooling structure for grinding and polishing disc - Google Patents
Circulating cooling structure for grinding and polishing disc Download PDFInfo
- Publication number
- CN104084885A CN104084885A CN201410335256.8A CN201410335256A CN104084885A CN 104084885 A CN104084885 A CN 104084885A CN 201410335256 A CN201410335256 A CN 201410335256A CN 104084885 A CN104084885 A CN 104084885A
- Authority
- CN
- China
- Prior art keywords
- ring
- rotating shaft
- grinding
- rotational axis
- water outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 36
- 238000001816 cooling Methods 0.000 title claims abstract description 25
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 37
- 238000007789 sealing Methods 0.000 claims abstract description 33
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 4
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 229910002804 graphite Inorganic materials 0.000 claims description 2
- 239000010439 graphite Substances 0.000 claims description 2
- 238000009304 pastoral farming Methods 0.000 claims description 2
- 238000003754 machining Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract 1
- 239000000498 cooling water Substances 0.000 description 6
- 238000009987 spinning Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003913 materials processing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
The invention discloses a circulating cooling structure for a grinding and polishing disc. The circulating cooling structure comprises a central rotating shaft and a gap sleeve rotating shaft, wherein the central rotating shaft is sleeved with the gap sleeve rotating shaft in a gapped mode. A sealing device is arranged in the gap formed between the gap sleeve rotating shaft and the central rotating shaft. The sealing device is provided with a water inlet cavity and a water outlet cavity which is not communicated with the water inlet cavity. A first water inlet channel and a first water outlet channel which are connected with a rotating joint are arranged in the central rotating shaft. A second water inlet channel and a second water outlet channel which are communicated with the grinding and polishing disc are arranged on the gap sleeve rotating shaft. The first water inlet channel and the first water outlet channel are communicated with the second water inlet channel and the second water outlet channel through the water inlet cavity and the water outlet cavity respectively. According to the circulating cooling structure for the grinding and polishing disc, active circulating cooling of the disc face of the grinding and polishing disc can be achieved, a large amount of heat generated during polishing can be emitted out in time, accurate temperature control is achieved, grinding and polishing precision and efficiency can be improved, and the requirements for different material machining can be met.
Description
Technical field
The invention belongs to grinding, polishing grinding equipment, be specifically related to a kind of circulation cooling mechanism of grinding and polishing dish.
Background technology
For the equipment of grinding, grinding and polishing, the type of cooling of its lower grinding and polishing dish is divided into active cooling and passive cooling two classes at present.
Passive cooling form as shown in Figure 1, in its underdrive parts, there is the rotary parts such as centre rotational axis 1, pallet A and grinding and polishing dish B, for realizing the spinning movement requirement of these equipment underdrive parts, be provided with multistage empty set rotating shaft 2, realize the different rotary requirement of difference in functionality parts by the different rotating shaft of driven by motor.Due to the existence of empty set rotating shaft 2 and separating of spinning movement, cooling water cannot be delivered to grinding and polishing PanBChu by empty set rotating shaft 2, make the active cooling of lower grinding and polishing dish be difficult to realize, the lower grinding and polishing dish of this type of polishing grinding equipment all adopts the passive type of cooling for a long time, the heat during by outside lapping liquid and the work of air indirect transfer, make the operating temperature of grinding and polishing dish be difficult to control, uncontrollable the causing of grinding and polishing temperature is difficult to reach workpiece processing request in the time of the special parts of processing, percent defective, part processing cost is high, inefficiency.
Summary of the invention
The object of the invention is the problem existing for prior art, a kind of circulation cooling mechanism of grinding and polishing dish is provided, to realize in the complicated occasion existing at multilayer empty set rotating shaft, grinding and polishing dish is carried out to active cooling, realize the controllable of grinding and polishing temperature, improve machining accuracy and the working (machining) efficiency of workpiece, reduce workpiece processing cost.
Technical scheme of the present invention is achieved in that
The circulation cooling mechanism of grinding and polishing dish, comprise that centre rotational axis and gap are set in the empty set rotating shaft on centre rotational axis, in the gap of described empty set rotating shaft and centre rotational axis, be provided with sealing device, described sealing device is provided with mutual disconnected intake antrum and water chamber, described centre rotational axis is provided with the first inlet channel and the first water outlet that are connected with swivel joint, described empty set rotating shaft is provided with the second inlet channel and the second water outlet that are communicated with grinding and polishing dish, described the first inlet channel and the first water outlet are communicated with the second inlet channel and the second water outlet by intake antrum and water chamber respectively.
Described sealing device comprises tubular rotating ring and the end cap of establishing opening, described moving ring sleeve on centre rotational axis and sealing be fixed on empty set rotating shaft, described end cap is enclosed within on centre rotational axis and is fixed on empty set rotating shaft the closure of openings of rotating ring, in one end of described rotating ring and be located in the end cap of the rotating ring other end and be equipped with graphite-seal ring, be positioned at sealing on the centre rotational axis of described rotating ring and be fixed with stationary ring, described stationary ring by spring assembly and silicon carbide sealed ring respectively be located at graphite grazing loop contacts on rotating ring and end cap and form and the sealing ring of central rotation sealing, between described rotating ring and stationary ring, be provided with backbone sealing ring the space between rotating ring and stationary ring is divided into described intake antrum and water chamber.
Between described stationary ring and centre rotational axis and between described rotating ring and empty set rotating shaft, sealing ring is all installed.
Beneficial effect of the present invention:
The present invention is by being arranged at the sealing cooling water channel between multilayer empty set rotating shaft, realize cooling water from smooth gap through centre rotational axis and empty set rotating shaft, arrive and need the cold grinding and polishing Pan Chu going, realize cooling to the active cycle of grinding and polishing dish card, during by polishing, producing a large amount of heats takes away in time, realize the accurate control of temperature, can improve grinding, polishing precision and efficiency, adapt to the requirement of different materials processing.
Further illustrate technical scheme of the present invention below in conjunction with accompanying drawing.
Brief description of the drawings
Fig. 1 is the passive cooling structure schematic diagram of existing lower grinding and polishing dish.
Fig. 2 is structural representation of the present invention.
Detailed description of the invention
Referring to Fig. 2, the circulation cooling mechanism of grinding and polishing dish, comprise that centre rotational axis 1 and gap are set in the empty set rotating shaft 2 on centre rotational axis 1, in the gap of described empty set rotating shaft 2 and centre rotational axis 1, be provided with sealing device, described sealing device is provided with mutual disconnected intake antrum 15 and water chamber 13, described centre rotational axis 1 is provided with the first inlet channel 17 and the first water outlet 16 that are connected with swivel joint (not shown), described empty set rotating shaft 2 is provided with the second inlet channel 11 and the second water outlet 12 that are communicated with grinding and polishing dish (not shown), described the first inlet channel 17 and the first water outlet 16 are communicated with the second inlet channel 11 and the second water outlet 12 by intake antrum 15 and water chamber 13 respectively, described sealing device comprises tubular rotating ring 10 and the end cap 4 of establishing opening, described rotating ring 10 is enclosed within on centre rotational axis 1 and sealing is fixed on empty set rotating shaft 2, described end cap 4 is enclosed within on centre rotational axis 1 and is fixed on empty set rotating shaft 2 closure of openings of rotating ring 10, one end of described rotating ring 10 and be located in the end cap 4 of rotating ring 10 other ends and be equipped with graphite-seal ring 5, be positioned at sealing on the centre rotational axis 1 of described rotating ring 10 and be fixed with stationary ring 14, upper and lower two spring retainers 8 are installed on described stationary ring 14, uniform several springs 7 on each spring retainer 8, described spring 7 contacts and it is exerted pressure with silicon carbide sealed ring 6, make silicon carbide sealed ring 6 respectively be arranged on rotating ring 10 and contact with the graphite-seal ring 5 on end cap 4 and form the sealing ring sealing with centre rotational axis 1, between described rotating ring 10 and stationary ring 14, be provided with backbone sealing ring 9 space between rotating ring 10 and stationary ring 14 is divided into described intake antrum 15 and water chamber 13, between described stationary ring 14 and centre rotational axis 1, sealing ring 19 is installed, between described rotating ring 10 and empty set rotating shaft 2, sealing ring 18 is installed.
Cooling water enters centre rotational axis 1 through swivel joint from the first inlet channel 17 being installed on centre rotational axis 1, then arrive intake antrum 15, intake antrum 15 by sealing enters in the second inlet channel 11 on empty set rotating shaft 2, the grinding and polishing dish that finally cooling water arrival equipment need to be cooling etc. needs cooling position, cooling water returns to the second water outlet 12 on empty set rotating shaft 2 completing after heat exchange, and successively by water chamber 13, first water outlet 16 of sealing, finally enter the cooling system cool cycles of having freezed through swivel joint.
Claims (3)
1. the circulation cooling mechanism of a grinding and polishing dish, comprise that centre rotational axis and gap are set in the empty set rotating shaft on centre rotational axis, it is characterized in that being provided with sealing device in the gap of described empty set rotating shaft and centre rotational axis, described sealing device is provided with mutual disconnected intake antrum and water chamber, described centre rotational axis is provided with the first inlet channel and the first water outlet that are connected with swivel joint, described empty set rotating shaft is provided with the second inlet channel and the second water outlet that are communicated with grinding and polishing dish, described the first inlet channel and the first water outlet are communicated with the second inlet channel and the second water outlet by intake antrum and water chamber respectively.
2. the circulation cooling mechanism of grinding and polishing dish according to claim 1, it is characterized in that described sealing device comprises tubular rotating ring and the end cap of establishing opening, described moving ring sleeve on centre rotational axis and sealing be fixed on empty set rotating shaft, described end cap is enclosed within on centre rotational axis and is fixed on empty set rotating shaft the closure of openings of rotating ring, in one end of described rotating ring and be located in the end cap of the rotating ring other end and be equipped with graphite-seal ring, be positioned at sealing on the centre rotational axis of described rotating ring and be fixed with stationary ring, described stationary ring by spring assembly and silicon carbide sealed ring respectively be located at graphite grazing loop contacts on rotating ring and end cap and form and the sealing ring of central rotation sealing, between described rotating ring and stationary ring, be provided with backbone sealing ring the space between rotating ring and stationary ring is divided into described intake antrum and water chamber.
3. the circulation cooling mechanism of grinding and polishing dish according to claim 2, it is characterized in that between described stationary ring and centre rotational axis and described rotating ring and empty set rotating shaft between sealing ring is all installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410335256.8A CN104084885B (en) | 2014-07-15 | 2014-07-15 | A kind of circulation cooling mechanism of grinding and polishing dish |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410335256.8A CN104084885B (en) | 2014-07-15 | 2014-07-15 | A kind of circulation cooling mechanism of grinding and polishing dish |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104084885A true CN104084885A (en) | 2014-10-08 |
| CN104084885B CN104084885B (en) | 2016-04-13 |
Family
ID=51632702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410335256.8A Active CN104084885B (en) | 2014-07-15 | 2014-07-15 | A kind of circulation cooling mechanism of grinding and polishing dish |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104084885B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106881660A (en) * | 2017-03-20 | 2017-06-23 | 江苏吉星新材料有限公司 | Axis mechanism on a kind of rotating regulation type for large-sized wafer single-sided polishing |
| CN107671728A (en) * | 2017-11-15 | 2018-02-09 | 深圳赛贝尔自动化设备有限公司 | A kind of upper disk magnetism servo-electric motor water-cooling of polishing grinding machine |
| CN120395592A (en) * | 2025-07-03 | 2025-08-01 | 成都承奥科技有限公司 | A high-precision grinding and testing device for graphite ring processing and its use method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0388972B1 (en) * | 1989-03-24 | 1996-01-10 | Sumitomo Electric Industries, Ltd. | Apparatus for grinding semiconductor wafer |
| JP2000084833A (en) * | 1998-09-11 | 2000-03-28 | Okamoto Machine Tool Works Ltd | Polishing machine and replacing method for polishing pad |
| CN201573110U (en) * | 2009-12-10 | 2010-09-08 | 中国电子科技集团公司第四十五研究所 | Polishing table device |
| CN202479972U (en) * | 2012-03-12 | 2012-10-10 | 东莞金研精密研磨机械制造有限公司 | A disc oil cooling system |
| CN202540147U (en) * | 2012-04-28 | 2012-11-21 | 浙江昀丰新能源科技有限公司 | Cooling device for single-sided grinding and polishing machine |
| CN202726714U (en) * | 2012-07-06 | 2013-02-13 | 元亮科技有限公司 | Grinding polishing disk with circulation water cooling device |
| CN203973400U (en) * | 2014-07-15 | 2014-12-03 | 宇环数控机床股份有限公司 | A kind of circulation cooling mechanism of grinding and polishing dish |
-
2014
- 2014-07-15 CN CN201410335256.8A patent/CN104084885B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0388972B1 (en) * | 1989-03-24 | 1996-01-10 | Sumitomo Electric Industries, Ltd. | Apparatus for grinding semiconductor wafer |
| JP2000084833A (en) * | 1998-09-11 | 2000-03-28 | Okamoto Machine Tool Works Ltd | Polishing machine and replacing method for polishing pad |
| CN201573110U (en) * | 2009-12-10 | 2010-09-08 | 中国电子科技集团公司第四十五研究所 | Polishing table device |
| CN202479972U (en) * | 2012-03-12 | 2012-10-10 | 东莞金研精密研磨机械制造有限公司 | A disc oil cooling system |
| CN202540147U (en) * | 2012-04-28 | 2012-11-21 | 浙江昀丰新能源科技有限公司 | Cooling device for single-sided grinding and polishing machine |
| CN202726714U (en) * | 2012-07-06 | 2013-02-13 | 元亮科技有限公司 | Grinding polishing disk with circulation water cooling device |
| CN203973400U (en) * | 2014-07-15 | 2014-12-03 | 宇环数控机床股份有限公司 | A kind of circulation cooling mechanism of grinding and polishing dish |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106881660A (en) * | 2017-03-20 | 2017-06-23 | 江苏吉星新材料有限公司 | Axis mechanism on a kind of rotating regulation type for large-sized wafer single-sided polishing |
| CN106881660B (en) * | 2017-03-20 | 2023-07-18 | 东旭集团有限公司 | A rotary adjustment upper shaft mechanism for single-side polishing of large-sized wafers |
| CN107671728A (en) * | 2017-11-15 | 2018-02-09 | 深圳赛贝尔自动化设备有限公司 | A kind of upper disk magnetism servo-electric motor water-cooling of polishing grinding machine |
| CN120395592A (en) * | 2025-07-03 | 2025-08-01 | 成都承奥科技有限公司 | A high-precision grinding and testing device for graphite ring processing and its use method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104084885B (en) | 2016-04-13 |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |