CN108188921A - Water circle device and grinding device - Google Patents
Water circle device and grinding device Download PDFInfo
- Publication number
- CN108188921A CN108188921A CN201810198225.0A CN201810198225A CN108188921A CN 108188921 A CN108188921 A CN 108188921A CN 201810198225 A CN201810198225 A CN 201810198225A CN 108188921 A CN108188921 A CN 108188921A
- Authority
- CN
- China
- Prior art keywords
- cooler pan
- apopore
- central shaft
- inlet opening
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
- B24B55/03—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant designed as a complete equipment for feeding or clarifying coolant
Abstract
The present invention provides a kind of water circle device and grinding devices, are related to grinding technology field.The water circle device includes central shaft and cooler pan, central shaft is internally provided with through-hole, cooler pan is coaxial set on the top of central shaft, cooler pan is equipped with the second inlet opening and the second apopore, the bottom end of central shaft slidably connects adjusting block, adjusting block is equipped with the first inlet opening and the first apopore, and water inlet pipe and outlet pipe are equipped in the through-hole of central shaft；The grinding device includes grinding plate, driving device and above-mentioned water circle device, the top surface of cooler pan is equipped with bosh, bosh is communicated between the second inlet opening and the second apopore, and grinding plate is set on the top of cooler pan, and driving device is used to drive central shaft along its axle center rotation.Adjusting block can adjust the tensional state of water inlet pipe and outlet pipe in through-hole in the water circle device, reduce its winding and give a discount, it is ensured that water route is unimpeded in water circle device.
Description
Technical field
The present invention relates to grinding technology field more particularly to a kind of water circle devices and grinding device.
Background technology
Wafer is the important component in semiconductor devices, and wafer needs to grind its surface using grinding device after being formed
Mill processing.In process of lapping, crystal column surface there are when crackle, edge damage or surface irregularity, due to grinding unbalance stress make by meeting
It is excessive that heat is generated into part, and then leads to stress concentration and temperature is excessively high wafer is caused to damage, therefore during actual grinding,
It needs constantly to inject cooling water into grinding device, grinding device is cooled down.
In existing grinding device, including central shaft, for the cooler pan that carries cooling water and for carrying lapping liquid
Grinding plate, wherein, set on the top of central shaft, cooler pan is located at the bottom of grinding plate, cold for cooler pan and grinding plate
But the cooling water on disk contacts with grinding plate bottom and grinding plate is cooled down, so as to the progress such as wafer towards processed products
Cooling.In order to realize the cycle of cooling water, generally water inlet pipe and water outlet are worn in the through-hole that is internally provided with of central shaft, through-hole
Pipe, one end of water inlet pipe are connected with the inlet opening on cooler pan, and the other end is connected with external water supply installation；One end of outlet pipe with
Apopore connection on cooler pan, the other end discharge cooling water.Due to central shaft bottom end to the connection distance between cooler pan
It is changeless, when causing water inlet pipe, water outlet length of tube longer, is easily wound in central shaft, is bent and gives a discount, thus causes
Water route is blocked, and influences the processing quality of grinding device.
That is, the water inlet pipe and outlet pipe in existing water circle device easily wind in central shaft, are bent and give a discount, and lead
Water route obstruction is caused, influences cooling effect.
Invention content
The purpose of the present invention is to provide a kind of water circle device and grinding device, to solve water in the prior art
Water inlet pipe and outlet pipe in circulator easily wind in central shaft, are bent and give a discount, and water route is caused to be blocked, and influence to cool down
The technical issues of effect.
Water circle device provided by the invention, including central shaft and cooler pan, the inside of the central shaft is set along its axial direction
There are through-hole, the detachable top for being fixedly arranged on the central shaft of the cooler pan, and setting coaxial with the central shaft, it is described cold
But disk is equipped with the second inlet opening and the second apopore, and second inlet opening and second apopore penetrate through the cooling
The top and bottom of disk；The bottom end of the central shaft slidably connects adjusting block, and the adjusting block can be along the central shaft
Slide axially adjusting, and the adjusting block is equipped with the first inlet opening and the first apopore, is equipped in the through-hole of the central shaft
Water inlet pipe and outlet pipe, the water inlet pipe are communicated between first inlet opening and second inlet opening, the outlet pipe
It is communicated between first apopore and second apopore.
Further, locking device is further included, the bottom terminal ends of the central shaft are installed with lead along its axial direction, described
Adjusting block is equipped with pilot hole, and in the pilot hole, the locking device is used to lead to described for the lead sliding plug
The depth being inserted into the pilot hole to column is locked.
Further, the lead is three, circumferential uniformly arrangement of three leads along the central shaft, institute
It is also three that it is corresponding to the lead, which to state pilot hole,.
Further, the bottom of the adjusting block is connected with rotary joint, and the rotary joint includes connecting portion and rotation
Portion, the connecting portion are fixed in the bottom of the adjusting block, and the rotation section is articulated in the bottom of the connecting portion, the rotation
Portion is equipped with third inlet opening and third apopore, and the third inlet opening is connected with first inlet opening, and the third goes out
Water hole is connected with first apopore.
It is another object of the present invention to provide a kind of grinding device, including grinding plate, driving device and above-mentioned water
Circulator, the top surface of the water circle device cooler pan are equipped with bosh, one end of the bosh and described the
Two inlet openings connect, and the other end is connected with second apopore, and the grinding plate is detachable to be fixedly arranged on the cooler pan
Top, the cooling water in the bosh cools down the grinding plate；The driving device is used to drive
The central shaft is along its axle center rotation.
Further, the bosh include archimedes spiral groove, the input end of the archimedes spiral groove with
The second inlet opening connection on the cooler pan, the port of export connect, and described second with the second apopore on the cooler pan
Inlet opening is located at the axis of the cooler pan, and second apopore is located at the position that the cooler pan leans on proximal edge.
Further, the archimedes spiral groove includes the first helical flute and the second helical flute, first helical flute
Input end connected with the second inlet opening on the cooler pan by straight-line groove, first helical flute with described second water inlet
First annular installing zone is formed between hole；The port of export of second helical flute connects with the second apopore on the cooler pan
Logical, the port of export of first helical flute is connected with the input end of second helical flute also by straight-line groove, first spiral shell
The second annular installing zone is formed between wire casing and second helical flute.
Further, the bottom of the cooler pan is equipped with groove, and the groove is set on second inlet opening and described the
Between two apopores, one section of outlet pipe between second apopore and second inlet opening is embedded in the groove
It is interior.
Further, it is detachable affixed by threaded fastener between the cooler pan and the grinding plate, it is described
Cooler pan and the grinding plate are equipped with corresponding threaded hole, and annular is additionally provided on the cooler pan or the grinding plate
Seal groove, the seal groove is arranged concentrically with the threaded hole, and is inlaid with sealing element in the seal groove.
Further, the waterproof cover of tubular is covered with outside the cooler pan.
Water circle device and grinding device of the present invention have the beneficial effect that：
Water circle device and grinding device provided by the invention, wherein, water circle device includes being used to support in transmission
Mandrel, for carry cooling water cooler pan, for convey the water inlet pipe of cooling water, outlet pipe and for fixed water inlet pipe, go out
Water pipe end can simultaneously adjust the adjusting block of distance between its relatively cool disk；Wherein, grinding device includes carrying grinding
Grinding plate that liquid is ground towards processed products and for driving central shaft and driving cooler pan and grinding plate rotates
Driving device, grinding plate are fixedly arranged on the top of cooler pan, and the cooling water on cooler pan in bosh carries out grinding plate
It cools.
During assembling, the tube body that both ends length is slightly longer than center shaft length is cut, two tube bodies are arranged in the through-hole of central shaft
Inside, wherein between second inlet opening that cooling bath is connected to as water inlet pipe and the first inlet opening of adjusting block, it is another
Root is connected to as outlet pipe between the second apopore of cooling bath and the second apopore of adjusting block, specifically, can be
One inlet opening, the second inlet opening, the first apopore and the second apopore are equipped with quick connector, water inlet pipe and outlet pipe and are inserted with fast
Connector connects, and after the completion of connection, along the position for being adjusted axially adjusting block of central shaft, makes water inlet pipe and water outlet pipe part in stretching shape
State, e.g., outlet pipe and water inlet length of tube it is longer when, since one end of outlet pipe and water inlet pipe is fixed on adjusting block, adjusting block
The position for being directed away from central shaft is slided, and distance becomes larger between adjusting block and cooler pan, and water inlet pipe and outlet pipe are accordingly stretched；
After the completion of the position of adjusting block is adjusted, external water supply installation is connected with the first inlet opening on adjusting block, and the on adjusting block
It is connected on one apopore with drainpipe, water supply installation supplies water, and cooling water is from water supply installation followed by the first inlet opening, water inlet
Pipe is flowed into the bosh on cooler pan behind the second inlet opening, and cooling water is contacted with grinding plate, to grinding plate and then right
Processed product on grinding plate cools down, and the cooling water after heat absorption flows successively from the water outlet of bosh
After the second apopore, outlet pipe, the first apopore and drainpipe, grinding device is discharged, completes cooling water to grinding plate
And processed product cools.
Adjusting block can carry out position adjusting along the axial of central shaft, be adjusted according to the length adjustment of water inlet pipe and outlet pipe
The distance between relatively cool disk of block so that it is guaranteed that water inlet pipe and outlet pipe are in tensional state in the through-hole of central shaft, subtracts
Few water inlet pipe and outlet pipe wind in the through-hole of central shaft since length is longer, are bent the occurrence of giving a discount, and then ensure
Water route is unimpeded in water circle device, it is ensured that cooling water assists the cooling in grinding device process of lapping, corresponding to improve grinding
The grinding quality of device.
Description of the drawings
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution of the prior art
Embodiment or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, in being described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, can also be obtained according to these attached drawings other attached drawings.
Fig. 1 is three dimensional structure diagram when driving device is equipped in grinding device provided in an embodiment of the present invention；
Fig. 2 is the schematic cross-sectional view in A-A directions when not installing driving device in Fig. 1；
Fig. 3 is the overlooking the structure diagram of cooler pan in grinding device provided in an embodiment of the present invention；
Fig. 4 is the present invention looks up structural representation of cooler pan in grinding device provided in an embodiment of the present invention；
Fig. 5 is the three dimensional structure diagram of adjusting block in grinding device provided in an embodiment of the present invention.
Icon：1- central shafts；2- cooler pans；3- adjusting blocks；4- rotary joints；5- grinding plates；6- driving dresses
It puts；7- waterproof covers；8- fixed seats；9- rotating disks；11- leads；The second inlet openings of 21-；The second apopores of 22-；
23- boshes；The first helical flutes of 231-；The second helical flutes of 232-；233- straight-line grooves；The first annular installing zones of 24-；
The annular installing zones of 25- second；26- grooves；The first inlet openings of 31-；The first apopores of 32-；33- pilot holes；51- waterproofs
Lid；91- terminal pads.
Specific embodiment
Technical scheme of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's all other embodiments obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that term " " center ", " on ", " under ", "left", "right", " vertical ",
The orientation or position relationship of the instructions such as " level ", " interior ", " outer " be based on orientation shown in the drawings or position relationship, merely to
Convenient for the description present invention and simplify description rather than instruction or imply signified device or element must have specific orientation,
With specific azimuth configuration and operation, therefore it is not considered as limiting the invention.In addition, term " first ", " second ",
" third " is only used for description purpose, and it is not intended that instruction or hint relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected or be integrally connected；It can
To be mechanical connection or be electrically connected；It can be directly connected, can also be indirectly connected by intermediary, Ke Yishi
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
The present embodiment provides a kind of water circle device, as Figure 2-Figure 5, including central shaft 1 and cooler pan 2, central shaft
1 inside is axially arranged with through-hole along it, the detachable top for being fixedly arranged on central shaft 1 of cooler pan 2, and coaxial with central shaft 1 sets
It puts, cooler pan 2 is equipped with the second inlet opening 21 and the second apopore 22, and the second inlet opening 21 and the second apopore 22 penetrate through cold
But the top and bottom of disk 2；The bottom end of central shaft 1 slidably connects adjusting block 3, and adjusting block 3 can be sliding along the axial direction of central shaft 1
Dynamic to adjust, adjusting block 3 is equipped with the first inlet opening 31 and the first apopore 32, be equipped in the through-hole of central shaft 1 water inlet pipe and
Outlet pipe, water inlet pipe are communicated between the first inlet opening 31 and the second inlet opening 21, and outlet pipe is communicated in 32 He of the first apopore
Between second apopore 22.
The present embodiment also provides a kind of grinding device, as depicted in figs. 1 and 2, including grinding plate 5, driving device 6 and on
State water circle device, the top surface of water circle device cooler pan 2 is equipped with bosh 23, one end of bosh 23 with second into
Water hole 21 connects, and the other end is connected with the second apopore 22, the detachable top for being fixedly arranged on cooler pan 2 of grinding plate 5, cooling
Cooling water in sink 23 cools down grinding plate 5；Driving device 6 is used to drive central shaft 1 along its axle center rotation.
Water circle device and grinding device provided in this embodiment, wherein, water circle device includes being used to support transmission
Central shaft 1, for carry cooling water cooler pan 2, for conveying the water inlet pipe of cooling water, outlet pipe and intake for fixed
Pipe, water outlet tube end can simultaneously adjust the adjusting block 3 of distance between its relatively cool disk 2；Wherein, grinding device includes holding
The grinding plate 5 and put down for driving central shaft 1 and driving cooler pan 2 and grind that load lapping liquid is ground towards processed products
The driving device 6 that platform 5 rotates, grinding plate 5 are fixedly arranged on the top of cooler pan 2, the cooling water on cooler pan 2 in bosh 23
Grinding plate 5 is cooled down.
During assembling, the tube body that both ends length is slightly longer than 1 length of central shaft is cut, two tube bodies are arranged in the logical of central shaft 1
Inside hole, wherein one as water inlet pipe be connected to the second inlet opening 21 of cooling bath and adjusting block 3 the first inlet opening 31 it
Between, between another the second apopore 22 that cooling bath is connected to as outlet pipe and the second apopore 22 of adjusting block 3, specifically
, quick connector can be equipped on the first inlet opening 31, the second inlet opening 21, the first apopore 32 and the second apopore 22,
Water inlet pipe and outlet pipe are connect with quick connector, after the completion of connection, along the position for being adjusted axially adjusting block 3 of central shaft 1, make into
Water pipe and water outlet pipe part are in tensional state, e.g., when outlet pipe and longer water inlet length of tube, due to one end of outlet pipe and water inlet pipe
It is fixed on adjusting block 3, the position that adjusting block 3 is directed away from central shaft 1 is slided, and distance becomes between adjusting block 3 and cooler pan 2
Greatly, water inlet pipe and outlet pipe are accordingly stretched；After the completion of the position of adjusting block 3 is adjusted, on external water supply installation and adjusting block 3
First inlet opening 31 connects, and is connected on the first apopore 32 on adjusting block 3 with drainpipe, and water supply installation supplies water, cooling water
From water supply installation followed by the bosh 23 behind the first inlet opening 31, water inlet pipe, the second inlet opening 21 on inflow cooler pan 2
Interior, cooling water is contacted with grinding plate 5, and cooling drop is carried out to grinding plate 5 and then to the processed product on grinding plate 5
Temperature, the cooling water after heat absorption is from the water outlet of bosh 23 followed by the second apopore 22, outlet pipe, the first water outlet
Behind hole 32 and drainpipe, grinding device is discharged, cooling water is completed and cools to grinding plate 5 and processed product.
Adjusting block 3 can carry out position adjusting along the axial of central shaft 1, according to water inlet pipe and the length adjustment tune of outlet pipe
The distance between 3 relatively cool disk 2 of locking nub, so that it is guaranteed that water inlet pipe and outlet pipe are in the through-hole of central shaft 1 stretches shape
State reduces water inlet pipe and outlet pipe and is wound in the through-hole of central shaft 1 since length is longer, is bent the occurrence of giving a discount, into
And ensure the unimpeded of water route in water circle device, it is ensured that cooling water assists the cooling in grinding device process of lapping, accordingly carries
The grinding quality of high grinding device.
In order to improve the connection sealing between cooler pan 2 and grinding plate 5, it is close annular can be equipped on cooler pan 2
Sealing groove, annular seal groove and cooler pan 2 are concentric, and are slightly less than the diameter of cooler pan 2, and sealing ring is inlaid in seal groove, cooling
When disk 2 links together with grinding plate 5, sealing ring is ground platform 5 and squeezes, so as to reduce outside the cooling water on cooler pan 2
The occurrence of splashing.
Specifically, as shown in Figure 1, driving device 6 can include driving motor, driving pulley, driven pulley and V-belt,
Wherein, the output shaft of driving pulley and driving motor is affixed, and driven pulley is sheathed on central shaft 1, and V-belt is connected to actively
Between belt wheel and driven pulley, the output shaft rotation of driving motor drives driven pulley and central shaft 1 to carry out together by V-belt
The driving that driving device 6 rotates central shaft 1 is completed in step rotation.
In the present embodiment, water circle device can also include locking device, and the bottom terminal ends of central shaft 1 are axial fixed along it
Have a lead 11, adjusting block 3 is equipped with pilot hole 33,11 sliding plug of lead in pilot hole 33, locking device for pair
The depth that lead 11 is inserted into pilot hole 33 is locked.Lead 11 is set on the bottom terminal ends of central shaft 1, adjusting block
3 is mating by pilot hole 33 and lead 11, and when initial, locking device releasing orientation, pilot hole 33 can be along lead
11 slide, and realize being adjusted axially along central shaft 1 of adjusting block 3, after the completion of being adjusted when position of the adjusting block 3 on lead 11,
Setting locking device locks adjusting block 3 and lead 11, and adjusting block 3 can not be oppositely oriented column 11 and slide again, complete to lead
It is locked to the position of block, so as to reduce in process of lapping, adjusting block 3 is slided along lead 11, leads to water inlet pipe and water outlet
Pipe, which loosens, to be wound, the occurrence of leading to the cooling of water route occlusive effects process of lapping.
Specifically, locking hole can be equipped on adjusting block 3, locking hole is penetrated through with pilot hole 33, and the axis of locking hole
Place straight line and straight line intersection where the axis of pilot hole 33；Locking device includes fastener, and lead 11 is inserted into pilot hole 33
When interior depth determines, fastener matching is inserted into locking hole, and abut locking with lead 11.When initial, locking member is in
Releasing orientation, adjusting block 3 is oppositely oriented after the completion of the position adjusting of column 11, locking member is coordinated and is screwed in locking hole, until lock
Tight part is abutted with the side wall of the lead 11 in pilot hole 33, and completion adjusting block 3 is locked with lead 11；Specifically,
Locking member can be the threaded fasteners such as bolt, screw, jackscrew, or other components that can be locked.
Specifically, in the present embodiment, as shown in Figure 1 and Figure 5, lead 11 can be three, and three leads 11 are in
The circumferential uniformly arrangement of mandrel 1, pilot hole 33 corresponding to lead 11 is also three.Three pilot holes 33 on adjusting block 3 divide
It is not matched one by one with three leads 11 on central shaft 1, three leads 11 are three positions to the sliding path of adjusting block 3
Be oriented to, so as to improve adjusting block 3 along central shaft 1 be adjusted axially when with the concentricity of central shaft 1, reduce due to adjusting block 3
The generation that position deviation leads to water inlet pipe and winding occurs for outlet pipe occurs；In addition, three leads 11 simultaneously with adjusting
Block 3 connects, and can also improve the degree of being connected firmly of adjusting block 3 and central shaft 1.
In the present embodiment, as depicted in figs. 1 and 2, rotary joint 4 can also be connected in the bottom of adjusting block 3, rotation connects
First 4 include connecting portion and rotation section, and connecting portion is fixed in the bottom of adjusting block 3, and rotation section is articulated in the bottom of connecting portion, rotation
Portion is equipped with third inlet opening and third apopore, and third inlet opening is connected with the first inlet opening 31, third apopore and first
Apopore 32 connects.For the ease of the connection of water supply installation, drainpipe and adjusting block 3, rotation is connected in the bottom of adjusting block 3
Connector 4, wherein, the connecting portion and adjusting block 3 of rotary joint 4 are affixed, and connecting portion is articulated on connecting portion, being capable of opposing connections
Rotation during connection, can rotate the rotation section of rotary joint 4, adjust third inlet opening and third on 4 connecting portion of rotary joint and go out
The angle in water hole, can be angularly corresponding with water supply installation or drainpipe, preferably links together, and reduces the dress that supplies water
The connecting tube put and the bending of drainpipe, it is unimpeded so as to improve the water route of water circle device；In addition, the connecting portion of rotary joint 4
When being rotated synchronously with adjusting block 3 with central shaft 1, the rotation section of rotary joint 4 can be fixed, so as to reduce rotation section rotation
The occurrence of water supply installation or drainpipe connected to it is caused to be detached from, and then ensure the normal stream in water circle device water route
It is logical.
In the present embodiment, as shown in figure 3, bosh 23 can include archimedes spiral groove, archimedes spiral groove
Input end connected with the second inlet opening 21 on cooler pan 2, the port of export is connected with the second apopore 22 on cooler pan 2, and
Second inlet opening 21 is located at the axis of cooler pan 2, and the second apopore 22 is located at the position that cooler pan 2 leans on proximal edge.Cooling water
Slot 23 uses archimedes spiral groove form, both ensure that the single channel of bosh 23, reduces flow in bosh 23
Interior somewhere meet phase resistance the occurrence of；Further, since the constant speed feature of Archimedes spiral, into the cooling of bosh 23
Water flow is flowed into from the input end of bosh 23 at 2 center of cooler pan, and slowly rotation expands, until flowing to 2 edge of cooler pan
The port of export, can constant speed uniformly flow, grinding plate 5 can contact cooling from center to edge with cooling water, improve
Cooling water reduces the occurrence of processed product hot-spot is damaged to the cooling uniformity of grinding plate 5.
Specifically, in the present embodiment, as shown in figure 3, archimedes spiral groove can include the first helical flute 231 and second
Helical flute 232, the input end of the first helical flute 231 are connected with the second inlet opening 21 on cooler pan 2 by straight-line groove 233, the
First annular installing zone 24 is formed between one helical flute 231 and the second inlet opening 21；The port of export of second helical flute 232 and cooling
The second apopore 22 on disk 2 connects, and the input end of the port of export of the first helical flute 231 and the second helical flute 232 is also by straight
Wire casing 233 connects, and the second annular installing zone 25 is formed between the first helical flute 231 and the second helical flute 232.Cooler pan 2 passes through
The first annular annular installing zone 25 of installing zone 24 and second and other component, are such as located at grinding plate 5 and the position on 2 top of cooler pan
Connection between the central shaft 1 of 2 lower part of cooler pan, when such as being connected using threaded fastener, first annular installing zone 24 and the
Threaded hole is opened up on second ring installing zone 25, threaded hole region and the region of bosh 23 be not be overlapped, so as in reality
Existing cooling water steady uniform flow in bosh 23 cross and realize cooler pan 2 connect with other component it is fixed on the basis of,
When can effectively reduce bosh 23 and being overlapped with installing zone, since threaded hole or opening up for through-hole cause cooling water that leak occurs
The generation of phenomenon.
Specifically, multiple threaded holes can be circumferentially on cooler pan 2 in first annular installing zone 24 along it, the second annular
In installing zone 25 multiple counter sinks are circumferentially with along it.
In the present embodiment, as shown in figure 4, groove 26 can be equipped in the bottom of cooler pan 2, groove 26 is set on the second water inlet
Between 21 and second apopore 22 of hole, one section of outlet pipe between the second apopore 22 and the second inlet opening 21 is embedded in groove 26
It is interior.Since second inlet opening 21 is set at its axle center on cooler pan 2, the second apopore 22 is set to the edge of cooler pan 2, and
The through-hole of central shaft 1 and 2 coaxial connection of cooler pan, then water inlet pipe the second inlet opening 21 can be directly connected in through-hole, be discharged
Pipe needs the bent radial from the top of 1 through-hole of central shaft along cooler pan 2 to be connected with the second apopore 22, the section water outlet of bending
Pipe is embedded in groove 26, so as to reduce the part of 2 bottom of outlet pipe protrusion cooler pan, so as to reduce outlet pipe and cooler pan 2
The inconvenience of relative friction or interconnection between the component of bottom.
It is as shown in Figure 3 and Figure 4, detachable by threaded fastener between cooler pan 2 and grinding plate 5 in the present embodiment
Formula is affixed, and cooler pan 2 and grinding plate 5 are equipped with corresponding threaded hole, and annular is additionally provided on cooler pan 2 or grinding plate 5
Seal groove, seal groove is arranged concentrically with threaded hole, and sealing element is inlaid in seal groove.With threaded fastener from cooler pan 2
On threaded hole screw in, connect cooler pan 2 and grinding plate 5, then the seal groove of annular be equipped on the bottom surface of cooler pan 2, it is close
Sealing groove is arranged concentrically with threaded hole, and sealing element is inlaid in seal groove, and threaded fastener screws in threaded hole from threaded hole bottom
Interior, after screwing, the screw head of threaded fastener compresses sealing ring, and threaded hole is no longer connected with outside, is penetrated into so as to reduce cooling water
In threaded hole, to threaded fastener cause corrosion and so on；If the correspondingly, top of threaded fastener self-grind platform 5
Portion is screwed in threaded hole, then is equipped with seal groove in the top surface of grinding plate 5.
Specifically, sealing element can be the seal members such as sealing ring or gasket.
For the ease of the lifting of grinding plate 5, hole for hoist is typically provided at the center of grinding plate 5, in order to reduce grinding
Lapping liquid is penetrated into hole for hoist on platform 5 causes corrosion and damage to other component, as shown in Figure 1, can consolidate on grinding plate 5
Equipped with waterproof cover 51, grinding plate 5 is equipped with the seal groove concentric with hole for hoist, and sealing ring, waterproof cover are inlaid in seal groove
51 by threaded fastener when being connected on grinding plate 5, waterproof cover 51 compresses sealing ring, and hole for hoist no longer connects with external
It is logical, so as to reduce the occurrence of lapping liquid is penetrated into hole for hoist.
Specifically, in the present embodiment, as shown in Fig. 2, position that can be close to top on central shaft 1 is articulated with fixed seat
8, fixed seat 8 is used to match grafting with the mounting hole on board；The top of central shaft 1 is arranged with rotating disk 9, the top of central shaft 1
End end is connected with terminal pad 91, and the center of rotating disk 9 is equipped with embedding groove, and terminal pad 91 is embedded in embedding groove, and with inlaying
The slot bottom of slot is affixed, and cooler pan 2 is fixed in rotating disk 9.During installation, fixed seat 8 is sheathed on central shaft 1, and central shaft 1 passes through
Mounting hole on board, lower part and the mounting hole of fixed seat 8 coordinate grafting, and central shaft 1 is limited when rotating by fixed seat 8,
So as to improve the position precision of 1 rotation of central shaft；Terminal pad 91 here functions as the effect of connection central shaft 1 and rotary shaft,
Terminal pad 91 is connect with the top of central shaft 1, while is connect with the embedding groove slot bottom of rotating disk 9, so as to fulfill central shaft 1 and rotation
The connection of turntable 9, rotating disk 9 are connect with cooler pan 2, realize that central shaft 1 drives the synchronous rotation of cooler pan 2 and grinding plate 5,
The connectivity robustness and cooler pan 2 of enhancing cooler pan 2 and central shaft 1 are in the stability of 1 end of central shaft.
In the present embodiment, as depicted in figs. 1 and 2, the waterproof cover 7 of tubular can also be covered with outside cooler pan 2.Waterproof cover
7 set the component cover of 2 lower section of cooler pan 2 and cooler pan in the inner, so as to reduce the grinding on 2 top grinding plate 5 of cooler pan
Liquid splashes out, and with terminal pad 91, fixed seat 8, rotating disk 9 and other component contacts thereon, corrosion and damage is caused to each component
The occurrence of.
Finally it should be noted that：The above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although
The present invention is described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that：It still may be used
Either which part or all technical features are equal with modifying to the technical solution recorded in previous embodiment
It replaces；And these modifications or replacement, the model for technical solution of the embodiment of the present invention that it does not separate the essence of the corresponding technical solution
It encloses.
Claims (10)
1. a kind of water circle device, which is characterized in that including central shaft (1) and cooler pan (2), the inside of the central shaft (1)
Be axially arranged with through-hole along it, the detachable top for being fixedly arranged on the central shaft (1) of cooler pan (2), and with the center
Axis (1) coaxial setting, the cooler pan (2) are equipped with the second inlet opening (21) and the second apopore (22), second water inlet
Hole (21) and second apopore (22) penetrate through the top and bottom of the cooler pan (2)；
The bottom end of the central shaft (1) slidably connects adjusting block (3), and the adjusting block (3) can be along the central shaft (1)
Slide axially adjusting, and the adjusting block (3) is equipped with the first inlet opening (31) and the first apopore (32), the central shaft (1)
Through-hole in be equipped with water inlet pipe and outlet pipe, the water inlet pipe is communicated in first inlet opening (31) and second water inlet
Between hole (21), the outlet pipe is communicated between first apopore (32) and second apopore (22).
2. water circle device according to claim 1, which is characterized in that locking device is further included, the central shaft (1)
Bottom terminal ends are installed with lead (11) along its axial direction, and the adjusting block (3) is equipped with pilot hole (33), the lead (11)
In the pilot hole (33), the locking device is used to be inserted into the pilot hole (33) to the lead (11) for sliding plug
Interior depth is locked.
3. water circle device according to claim 2, which is characterized in that the lead (11) is three, described in three
Lead (11) is corresponding to the lead (11) along circumferential uniformly arrangement, the pilot hole (33) of the central shaft (1)
It is three.
4. water circle device according to any one of claim 1-3, which is characterized in that the bottom of the adjusting block (3)
Rotary joint (4) is connected with, the rotary joint (4) includes connecting portion and rotation section, and the connecting portion is fixed in the adjusting
The bottom of block (3), the rotation section are articulated in the bottom of the connecting portion, and the rotation section is equipped with third inlet opening and third
Apopore, the third inlet opening are connected with first inlet opening (31), the third apopore and first apopore
(32) it connects.
5. a kind of grinding device, which is characterized in that including any in grinding plate (5), driving device (6) and claim 1-4
Water circle device described in, the top surface of the water circle device cooler pan (2) are equipped with bosh (23), the cooling water
One end of slot (23) is connected with second inlet opening (21), and the other end is connected with second apopore (22), the grinding
The detachable top for being fixedly arranged on the cooler pan (2) of platform (5), the cooling water in the bosh (23) is to the grinding
Platform (5) cools down；The driving device (6) is for driving the central shaft (1) along its axle center rotation.
6. grinding device according to claim 5, which is characterized in that the bosh (23) is including Archimedes spiral
Slot, the input end of the archimedes spiral groove are connected with the second inlet opening (21) on the cooler pan (2), the port of export and institute
The second apopore (22) connection on cooler pan (2) is stated, and second inlet opening (21) is positioned at the axis of the cooler pan (2)
Place, second apopore (22) is positioned at the cooler pan (2) by the position of proximal edge.
7. grinding device according to claim 6, which is characterized in that the archimedes spiral groove includes the first helical flute
(231) it intakes with the second helical flute (232), input end and second on the cooler pan (2) of first helical flute (231)
Hole (21) is connected by straight-line groove (233), and first is formed between first helical flute (231) and second inlet opening (21)
Annular installing zone (24)；The port of export of second helical flute (232) connects with the second apopore (22) on the cooler pan (2)
Logical, the input end of the port of export of first helical flute (231) and second helical flute (232) is also by straight-line groove (233)
Connection forms the second annular installing zone (25) between first helical flute (231) and second helical flute (232).
8. grinding device according to claim 6, which is characterized in that the bottom of the cooler pan (2) is equipped with groove (26),
The groove (26) is between second inlet opening (21) and second apopore (22), second apopore (22)
One section of outlet pipe between second inlet opening (21) is embedded in the groove (26).
9. grinding device according to claim 5, which is characterized in that the cooler pan (2) and the grinding plate (5) it
Between it is detachable affixed by threaded fastener, the cooler pan (2) and the grinding plate (5) are equipped with corresponding screw thread
The seal groove of annular, the seal groove and the threaded hole are additionally provided on hole, the cooler pan (2) or the grinding plate (5)
It is arranged concentrically, and sealing element is inlaid in the seal groove.
10. grinding device according to claim 6, which is characterized in that the waterproof of tubular is covered with outside the cooler pan (2)
It covers (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810198225.0A CN108188921B (en) | 2018-03-09 | 2018-03-09 | Water circulation device and grinding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810198225.0A CN108188921B (en) | 2018-03-09 | 2018-03-09 | Water circulation device and grinding device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108188921A true CN108188921A (en) | 2018-06-22 |
| CN108188921B CN108188921B (en) | 2020-04-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810198225.0A Active CN108188921B (en) | 2018-03-09 | 2018-03-09 | Water circulation device and grinding device |
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| Country | Link |
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| CN (1) | CN108188921B (en) |
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| CN109202696A (en) * | 2018-09-10 | 2019-01-15 | 台山市远鹏研磨科技有限公司 | A kind of thinned pad of Diamond Ceramics |
| CN109397032A (en) * | 2018-12-30 | 2019-03-01 | 苏州富强科技有限公司 | A kind of 3D bend glass polishing mechanism |
| CN109571239A (en) * | 2018-12-25 | 2019-04-05 | 刘海 | A kind of lower grinding machine structure of Homogeneouslly-radiating dynamic lapping machine |
| CN109967174A (en) * | 2019-04-16 | 2019-07-05 | 东莞市琅菱机械有限公司 | It is a kind of with water guide set grinding rotor and including the grinder of the grinding rotor |
| CN111545295A (en) * | 2020-05-26 | 2020-08-18 | 河南锐鑫同创高新材料科技有限公司 | Silicon nitride is with quick crushing apparatus |
| CN113334244A (en) * | 2021-05-18 | 2021-09-03 | 长江存储科技有限责任公司 | Bearing device and grinding equipment |
| CN114473848A (en) * | 2022-01-27 | 2022-05-13 | 北京烁科精微电子装备有限公司 | Burnishing device with cooling function |
| CN114603468A (en) * | 2022-05-11 | 2022-06-10 | 徐州福凯欣智能科技有限公司 | Polishing machine tool for excavator rocker arm bracket |
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| CN111545295A (en) * | 2020-05-26 | 2020-08-18 | 河南锐鑫同创高新材料科技有限公司 | Silicon nitride is with quick crushing apparatus |
| CN113334244A (en) * | 2021-05-18 | 2021-09-03 | 长江存储科技有限责任公司 | Bearing device and grinding equipment |
| CN114473848A (en) * | 2022-01-27 | 2022-05-13 | 北京烁科精微电子装备有限公司 | Burnishing device with cooling function |
| CN114603468A (en) * | 2022-05-11 | 2022-06-10 | 徐州福凯欣智能科技有限公司 | Polishing machine tool for excavator rocker arm bracket |
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