CN108188921B - Water circulation device and grinding device - Google Patents
Water circulation device and grinding device Download PDFInfo
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- CN108188921B CN108188921B CN201810198225.0A CN201810198225A CN108188921B CN 108188921 B CN108188921 B CN 108188921B CN 201810198225 A CN201810198225 A CN 201810198225A CN 108188921 B CN108188921 B CN 108188921B
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- water
- hole
- cooling
- central shaft
- water inlet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
- B24B55/03—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant designed as a complete equipment for feeding or clarifying coolant
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention provides a water circulation device and a grinding device, and relates to the technical field of grinding processing. The water circulation device comprises a central shaft and a cooling disc, wherein a through hole is formed in the central shaft, the cooling disc is coaxially arranged at the top end of the central shaft, a second water inlet hole and a second water outlet hole are formed in the cooling disc, the bottom end of the central shaft is connected with an adjusting block in a sliding mode, a first water inlet hole and a first water outlet hole are formed in the adjusting block, and a water inlet pipe and a water outlet pipe penetrate through the through hole of the central shaft; the grinding device comprises a grinding platform, a driving device and the water circulation device, wherein a cooling water tank is arranged on the top surface of the cooling disc and communicated between the second water inlet hole and the second water outlet hole, the grinding platform is arranged at the top of the cooling disc, and the driving device is used for driving the central shaft to rotate along the axis of the central shaft. The adjusting block in the water circulation device can adjust the stretching state of the water inlet pipe and the water outlet pipe in the through hole, reduce the winding and folding of the water inlet pipe and the water outlet pipe, and ensure the smoothness of a water path in the water circulation device.
Description
Technical Field
The invention relates to the technical field of grinding processing, in particular to a water circulation device and a grinding device.
Background
Wafers are important parts of semiconductor devices, and after the wafers are formed, the surfaces of the wafers need to be polished by a polishing apparatus. In the process of grinding, when cracks, broken edges or uneven surfaces exist on the surface of the wafer, local generated heat is excessive due to uneven grinding stress, so that stress concentration and overhigh temperature cause wafer damage, and therefore in the actual grinding process, cooling water needs to be continuously injected into a grinding device to cool the grinding device.
Among the current grinder, including the center pin, be used for bearing the cooling disc of cooling water and be used for bearing the grinding platform of lapping liquid, wherein, the top of center pin is all located to cooling disc and grinding platform, and the cooling disc is located grinding platform's bottom, and the cooling water on the cooling disc cools off grinding platform with grinding platform bottom contact to treat the product wafer of processing etc. and cool off. In order to realize the circulation of cooling water, a through hole is generally arranged in the central shaft, a water inlet pipe and a water outlet pipe are arranged in the through hole in a penetrating manner, one end of the water inlet pipe is communicated with a water inlet hole on the cooling disc, and the other end of the water inlet pipe is communicated with an external water supply device; one end of the water outlet pipe is communicated with the water outlet hole on the cooling disc, and the other end of the water outlet pipe discharges cooling water. Because the connecting distance between the bottom end of the central shaft and the cooling disc is fixed and unchangeable, the water inlet pipe and the water outlet pipe are easy to wind and bend and fold in the central shaft when the lengths of the water inlet pipe and the water outlet pipe are longer, and therefore the water path is blocked, and the processing quality of the grinding device is influenced.
That is, the water inlet pipe and the water outlet pipe in the existing water circulation device are easy to wind, bend and fold in the central shaft, so that the water path is blocked, and the cooling effect is affected.
Disclosure of Invention
The invention aims to provide a water circulating device and a grinding device, and aims to solve the technical problems that a water inlet pipe and a water outlet pipe in the water circulating device in the prior art are easy to wind, bend and fold in a central shaft, so that a water path is blocked, and the cooling effect is influenced.
The invention provides a water circulation device, which comprises a central shaft and a cooling disc, wherein a through hole is formed in the central shaft along the axial direction of the central shaft, the cooling disc is detachably and fixedly arranged at the top end of the central shaft and is coaxially arranged with the central shaft, a second water inlet hole and a second water outlet hole are formed in the cooling disc, and the second water inlet hole and the second water outlet hole are both communicated with the top surface and the bottom surface of the cooling disc; the bottom sliding connection of center pin has the regulating block, the regulating block can be followed the endwise slip of center pin is adjusted, be equipped with first inlet opening and first apopore on the regulating block, wear to be equipped with inlet tube and outlet pipe in the through-hole of center pin, the inlet tube communicate in first inlet opening with between the second inlet opening, the outlet pipe communicate in first apopore with between the second apopore.
The adjusting block is provided with a guide hole, the guide column is inserted into the guide hole in a sliding mode, and the locking device is used for locking and fixing the depth of the guide column inserted into the guide hole.
Furthermore, the guide posts are three, the three guide posts are uniformly distributed along the circumferential direction of the central shaft, and the guide holes correspond to the three guide posts.
Further, the bottom rigid coupling of regulating block has rotary joint, rotary joint includes connecting portion and rotation portion, the connecting portion rigid coupling in the bottom of regulating block, rotation portion pin joint in the bottom of connecting portion, be equipped with third inlet hole and third apopore in the rotation portion, the third inlet hole with first inlet hole intercommunication, the third apopore with first apopore intercommunication.
Another objective of the present invention is to provide a grinding apparatus, which includes a grinding platform, a driving apparatus and the above water circulation apparatus, wherein a cooling water tank is disposed on the top surface of a cooling plate of the water circulation apparatus, one end of the cooling water tank is communicated with the second water inlet, the other end of the cooling water tank is communicated with the second water outlet, the grinding platform is detachably fixed on the top of the cooling plate, and the cooling water in the cooling water tank cools the grinding platform; the driving device is used for driving the central shaft to rotate along the axis of the central shaft.
Furthermore, the cooling water tank comprises an Archimedes spiral groove, an inlet end of the Archimedes spiral groove is communicated with a second water inlet hole in the cooling plate, an outlet end of the Archimedes spiral groove is communicated with a second water outlet hole in the cooling plate, the second water inlet hole is located on the axis of the cooling plate, and the second water outlet hole is located at the position, close to the edge, of the cooling plate.
Furthermore, the Archimedes spiral groove comprises a first spiral groove and a second spiral groove, the inlet end of the first spiral groove is communicated with a second water inlet hole on the cooling plate through a straight groove, and a first annular mounting area is formed between the first spiral groove and the second water inlet hole; the outlet end of the second spiral groove is communicated with a second water outlet hole in the cooling disc, the outlet end of the first spiral groove is communicated with the inlet end of the second spiral groove through a linear groove, and a second annular installation area is formed between the first spiral groove and the second spiral groove.
Furthermore, the bottom of cooling plate is equipped with the recess, the recess is located the second inlet opening with between the second apopore, the second apopore with one section between the second inlet opening the outlet pipe inlay in the recess.
Further, the cooling dish with through the detachable rigid coupling of threaded fastener between the grinding platform, the cooling dish with be equipped with corresponding screw hole on the grinding platform, the cooling dish or still be equipped with annular seal groove on the grinding platform, the seal groove with the screw hole sets up with one heart, just inlay in the seal groove and have the sealing member.
Furthermore, a cylindrical waterproof cover is arranged on the outer cover of the cooling disc.
The water circulation device and the grinding device have the beneficial effects that:
the invention provides a water circulation device and a grinding device, wherein the water circulation device comprises a central shaft for supporting transmission, a cooling disc for bearing cooling water, a water inlet pipe and a water outlet pipe for conveying the cooling water, and an adjusting block for fixing the end parts of the water inlet pipe and the water outlet pipe and adjusting the distance between the water inlet pipe and the water outlet pipe and the adjusting block relative to the cooling disc; wherein, grinder is including being used for bearing the weight of the lapping platform that the product of treating processing ground and being used for the drive center pin and drive cooling disc and lapping platform pivoted drive arrangement, and lapping platform sets firmly in the top of cooling disc, and the cooling water in the cooling trough cools off the cooling to lapping platform on the cooling disc.
When the device is assembled, pipe bodies with the length of two ends slightly longer than that of the central shaft are cut, the two pipe bodies are arranged in the through hole of the central shaft in a penetrating way, one of the pipe bodies is used as a water inlet pipe and connected between the second water inlet hole of the cooling tank and the first water inlet hole of the adjusting block, the other pipe body is used as a water outlet pipe and connected between the second water outlet hole of the cooling tank and the second water outlet hole of the adjusting block, particularly, quick-plugging joints can be arranged on the first water inlet hole, the second water inlet hole, the first water outlet hole and the second water outlet hole, the water inlet pipe and the water outlet pipe are connected with the quick-plugging joints, after the connection is completed, the position of the adjusting block is adjusted along the axial direction of the central shaft, so that the water inlet pipe and the water outlet pipe are in a stretching state, for example, when the lengths of the, the water inlet pipe and the water outlet pipe are correspondingly stretched; after the position control of regulating block is accomplished, first inlet opening intercommunication on outside water supply installation and the regulating block, and communicate with the drain pipe on the first apopore on the regulating block, water supply installation supplies water, the cooling water flows through first inlet opening in proper order from water supply installation, the inlet tube, flow in the cooling trough on the cooling plate behind the second inlet opening, the cooling water contacts with grinding platform, to grinding platform and then to grinding the product of treating processing on the platform and cool down, the cooling water after the heat absorption flows through the second apopore from the play water end of cooling trough in proper order, the outlet pipe, behind first apopore and the drain pipe, by discharge grinder, accomplish the cooling of cooling water to grinding platform and product of treating processing.
The regulating block can carry out position control along the axial of center pin, according to the distance between the relative cooling pan of length adjustment regulating block of inlet tube and outlet pipe, thereby ensure that inlet tube and outlet pipe are in tensile state in the through-hole of center pin, reduce inlet tube and outlet pipe because length is longer twines in the through-hole of center pin, the emergence of the crooked condition of breaking over, and then ensure the unblocked in water route among the water circulating device, ensure that the cooling water is supplementary to the cooling of grinding device grinding in-process, correspondingly improve grinder's grinding quality.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic three-dimensional structure diagram of a polishing apparatus provided in an embodiment of the present invention, in which a driving device is installed;
FIG. 2 is a schematic sectional view in the direction of A-A of FIG. 1 without the driving device;
FIG. 3 is a schematic top view of a cooling plate of a polishing apparatus according to an embodiment of the present invention;
FIG. 4 is a schematic bottom view of a cooling plate of a polishing apparatus according to an embodiment of the present invention;
fig. 5 is a schematic three-dimensional structure diagram of an adjusting block in the polishing apparatus according to an embodiment of the present invention.
Icon: 1-a central axis; 2-a cooling plate; 3-a regulating block; 4-a rotary joint; 5-grinding the platform; 6-a drive device; 7-a waterproof cover; 8, a fixed seat; 9-rotating the disc; 11-a guide post; 21-a second water inlet hole; 22-a second water outlet; 23-a cooling water tank; 231-first helical groove; 232-a second spiral groove; 233-linear grooves; 24-a first annular mounting zone; 25-a second annular mounting zone; 26-a groove; 31-a first water inlet hole; 32-a first water outlet; 33-a pilot hole; 51-a waterproof cover; 91-connecting disc.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The embodiment provides a water circulation device, as shown in fig. 2-5, which includes a central shaft 1 and a cooling plate 2, wherein a through hole is formed in the central shaft 1 along an axial direction thereof, the cooling plate 2 is detachably fixed on a top end of the central shaft 1 and is coaxially arranged with the central shaft 1, a second water inlet 21 and a second water outlet 22 are formed in the cooling plate 2, and both the second water inlet 21 and the second water outlet 22 penetrate through a top surface and a bottom surface of the cooling plate 2; the bottom sliding connection of center pin 1 has regulating block 3, and regulating block 3 can be adjusted along the axial sliding of center pin 1, is equipped with first inlet opening 31 and first apopore 32 on the regulating block 3, wears to be equipped with inlet tube and outlet pipe in the through-hole of center pin 1, and the inlet tube communicates between first inlet opening 31 and second inlet opening 21, and the outlet pipe communicates between first apopore 32 and second apopore 22.
The embodiment further provides a grinding device, as shown in fig. 1 and fig. 2, which includes a grinding platform 5, a driving device 6 and the above-mentioned water circulation device, wherein a cooling water tank 23 is disposed on the top surface of the cooling plate 2 of the water circulation device, one end of the cooling water tank 23 is communicated with the second water inlet 21, the other end is communicated with the second water outlet 22, the grinding platform 5 is detachably fixed on the top of the cooling plate 2, and cooling water in the cooling water tank 23 cools the grinding platform 5; the driving device 6 is used for driving the central shaft 1 to rotate along the axial center thereof.
The water circulation device and the grinding device provided by the embodiment comprise a central shaft 1 for supporting transmission, a cooling disc 2 for bearing cooling water, a water inlet pipe and a water outlet pipe for conveying the cooling water, and an adjusting block 3 for fixing the end parts of the water inlet pipe and the water outlet pipe and adjusting the distance between the water inlet pipe and the water outlet pipe and the adjusting block and the distance between the water inlet pipe and the water outlet pipe and; wherein, grinder is including being used for bearing the weight of lapping liquid and treating the grinding platform 5 that the product ground and being used for drive center pin 1 and drive cooling disc 2 and grinding platform 5 pivoted drive arrangement 6, and grinding platform 5 sets firmly in the top of cooling disc 2, and the cooling water in the cooling trough 23 carries out cooling to grinding platform 5 on the cooling disc 2.
During assembly, pipe bodies with two ends slightly longer than the central shaft 1 are cut, the two pipe bodies are arranged in the through hole of the central shaft 1 in a penetrating way, one of the pipe bodies is used as a water inlet pipe and connected between the second water inlet hole 21 of the cooling tank and the first water inlet hole 31 of the adjusting block 3, the other pipe body is used as a water outlet pipe and connected between the second water outlet hole 22 of the cooling tank and the second water outlet hole 22 of the adjusting block 3, concretely, quick-plugging connectors can be arranged on the first water inlet hole 31, the second water inlet hole 21, the first water outlet hole 32 and the second water outlet hole 22, the water inlet pipe and the water outlet pipe are connected with the quick-plugging connectors, after connection is completed, the position of the adjusting block 3 is adjusted along the axial direction of the central shaft 1, so that the water inlet pipe and the water outlet pipe are in a stretching state, for example, when the lengths of the water outlet, the distance between the adjusting block 3 and the cooling disc 2 is increased, and the water inlet pipe and the water outlet pipe are correspondingly stretched; after the position control of regulating block 3 is accomplished, outside water supply installation communicates with first inlet opening 31 on the regulating block 3, and communicate with the drain pipe on the first apopore 32 on the regulating block 3, water supply installation supplies water, cooling water flows through first inlet opening 31 in proper order from water supply installation, the inlet tube, flow into in the cooling trough 23 on the cooling plate 2 behind the second inlet opening 21, cooling water and grinding platform 5 contact, to grinding platform 5 and then cool off the product of treating processing on the grinding platform 5, the cooling water after the endotherm flows through second apopore 22 in proper order from the delivery end of cooling trough 23, the outlet pipe, behind first apopore 32 and the drain pipe, by discharge grinding device, accomplish the cooling of cooling water to grinding platform 5 and the product of treating processing.
The regulating block 3 can carry out position control along the axial of center pin 1, according to the distance between the relative cooling dish 2 of length adjustment regulating block 3 of inlet tube and outlet pipe, thereby ensure that inlet tube and outlet pipe are in tensile state in the through-hole of center pin 1, reduce inlet tube and outlet pipe because length is longer twined in the through-hole of center pin 1, the emergence of the condition is discounted in the bending, and then ensure the unblocked in water route among the water circulating device, ensure that the cooling water is supplementary to the cooling of grinding device grinding in-process, correspondingly improve grinding device's grinding quality.
In order to improve the connection sealing performance between the cooling disc 2 and the grinding platform 5, an annular sealing groove can be arranged on the cooling disc 2, the annular sealing groove is concentric with the cooling disc 2 and slightly smaller than the diameter of the cooling disc 2, a sealing ring is embedded in the sealing groove, and when the cooling disc 2 is connected with the grinding platform 5 together, the sealing ring is extruded by the grinding platform 5, so that the occurrence of the condition that cooling water on the cooling disc 2 splashes outwards is reduced.
Specifically, as shown in fig. 1, the driving device 6 may include a driving motor, a driving pulley, a driven pulley and a v-belt, wherein the driving pulley is fixedly connected to an output shaft of the driving motor, the driven pulley is sleeved on the central shaft 1, the v-belt is connected between the driving pulley and the driven pulley, the output shaft of the driving motor rotates, the driven pulley and the central shaft 1 are driven by the v-belt to synchronously rotate, and the driving device 6 drives the central shaft 1 to rotate.
In this embodiment, the water circulation device may further include a locking device, the bottom end of the central shaft 1 is fixedly provided with a guide post 11 along the axial direction thereof, the adjusting block 3 is provided with a guide hole 33, the guide post 11 is slidably inserted into the guide hole 33, and the locking device is used for locking and fixing the depth of the guide post 11 inserted into the guide hole 33. Guide post 11 locates center pin 1's bottom tip, regulating block 3 passes through guiding hole 33 and 11 cooperation of pegging graft of guide post, in the beginning, locking device unclamping the state, guiding hole 33 can be followed guide post 11 and slided, realize regulating block 3 along 1 axial regulation of center pin, after regulating block 3 position control on guide post 11 is accomplished, it locks regulating block 3 and guide post 11 to set up locking device, regulating block 3 can't slide relative guide post 11 again, accomplish the position locking of guide block, thereby reduce the grinding process, regulating block 3 takes place to slide along guide post 11, lead to inlet tube and outlet pipe pine take off to take place the winding, lead to the water route to block up the emergence that influences the grinding process cooling condition.
Specifically, a locking hole may be formed in the adjusting block 3, the locking hole is communicated with the guide hole 33, and a straight line where an axis of the locking hole is located intersects a straight line where an axis of the guide hole 33 is located; the locking device comprises a fastening piece, and when the depth of the guide post 11 inserted into the guide hole 33 is determined, the fastening piece is inserted into the locking hole in a matching mode and is abutted and locked with the guide post 11. Initially, the fastening piece is in a loosening state, after the position of the adjusting block 3 relative to the guide post 11 is adjusted, the fastening piece is screwed into the locking hole in a matching mode until the fastening piece is abutted against the side wall of the guide post 11 in the guide hole 33, and the adjusting block 3 and the guide post 11 are locked and fixed; specifically, the fastener may be a threaded fastener such as a bolt, a screw, a jackscrew, or other lockable components.
Specifically, in this embodiment, as shown in fig. 1 and 5, there may be three guide posts 11, three guide posts 11 are uniformly arranged along the circumferential direction of the central shaft 1, and there are three guide holes 33 corresponding to the guide posts 11. The three guide holes 33 on the adjusting block 3 are respectively matched with the three guide posts 11 on the central shaft 1 one by one, and the three guide posts 11 guide the sliding path of the adjusting block 3 at three positions, so that the concentricity between the adjusting block 3 and the central shaft 1 when the adjusting block 3 is axially adjusted along the central shaft 1 is improved, and the situation that the water inlet pipe and the water outlet pipe are wound due to position deviation of the adjusting block 3 is reduced; in addition, three guide posts 11 are connected with adjusting block 3 simultaneously, can also improve adjusting block 3 and center pin 1's firm in connection degree.
In this embodiment, as shown in fig. 1 and fig. 2, a rotary joint 4 may be further fixedly connected to the bottom of the adjusting block 3, the rotary joint 4 includes a connecting portion and a rotating portion, the connecting portion is fixedly connected to the bottom of the adjusting block 3, the rotating portion is pivotally connected to the bottom of the connecting portion, a third water inlet and a third water outlet are arranged on the rotating portion, the third water inlet is communicated with the first water inlet 31, and the third water outlet is communicated with the first water outlet 32. In order to facilitate the connection of the water supply device and the drain pipe with the adjusting block 3, the bottom of the adjusting block 3 is fixedly connected with a rotary joint 4, wherein a connecting part of the rotary joint 4 is fixedly connected with the adjusting block 3, and the rotary part is pivoted on the connecting part and can rotate relative to the connecting part; in addition, when the connecting portion of rotary joint 4 and regulating block 3 rotated along with center pin 1 in step, rotary joint 4's rotation portion can be the immobilized to reduce the rotation of rotation portion and lead to the emergence of rather than the water supply installation or the drain pipe condition of breaking away from of being connected, and then ensure the normal circulation in water circulating device water route.
In this embodiment, as shown in fig. 3, the cooling water tank 23 may include an archimedes spiral groove, an inlet end of the archimedes spiral groove is communicated with the second water inlet hole 21 on the cooling plate 2, an outlet end of the archimedes spiral groove is communicated with the second water outlet hole 22 on the cooling plate 2, the second water inlet hole 21 is located at the axis of the cooling plate 2, and the second water outlet hole 22 is located at a position of the cooling plate 2 close to the edge. The cooling water tank 23 adopts an Archimedes spiral groove form, so that the single channel property of the cooling water tank 23 is ensured, and the occurrence of the condition that water flows meet each other at a certain position in the cooling water tank 23 and are blocked is reduced; in addition, due to the constant-speed characteristic of the Archimedes spiral, the cooling water flow entering the cooling water tank 23 flows in from the inlet end of the cooling water tank 23 at the center of the cooling disc 2, slowly rotates and expands until the cooling water flows to the outlet end of the edge of the cooling disc 2, and can uniformly flow at a constant speed, the grinding platform 5 can be contacted with the cooling water from the center to the edge for cooling, the cooling uniformity of the grinding platform 5 by the cooling water is improved, and the occurrence of damage caused by local overheating of a product to be processed is reduced.
Specifically, in this embodiment, as shown in fig. 3, the archimedes spiral groove may include a first spiral groove 231 and a second spiral groove 232, an inlet end of the first spiral groove 231 is communicated with the second water inlet hole 21 on the cooling plate 2 through a straight groove 233, and a first annular installation area 24 is formed between the first spiral groove 231 and the second water inlet hole 21; the outlet end of the second spiral groove 232 is communicated with the second water outlet 22 on the cooling disc 2, the outlet end of the first spiral groove 231 is also communicated with the inlet end of the second spiral groove 232 through a linear groove 233, and a second annular mounting area 25 is formed between the first spiral groove 231 and the second spiral groove 232. The cooling disc 2 passes through the first annular mounting area 24 and the second annular mounting area 25 and other parts, for example, the grinding platform 5 positioned on the upper part of the cooling disc 2 is connected with the central shaft 1 positioned on the lower part of the cooling disc 2, if a threaded fastener is used for connection, threaded holes are formed in the first annular mounting area 24 and the second annular mounting area 25, the area where the threaded holes are located is not overlapped with the area of the cooling water tank 23, so that on the basis that the cooling water uniformly flows through the cooling water tank 23 at a constant speed and the cooling disc 2 is fixedly connected with other parts, the phenomenon that the cooling water leaks due to the arrangement of the threaded holes or the through holes when the cooling water tank 23 is overlapped with the mounting areas can be effectively reduced.
Specifically, a plurality of threaded holes may be formed in the first annular mounting region 24 of the cooling plate 2 along the circumferential direction thereof, and a plurality of countersunk holes may be formed in the second annular mounting region 25 along the circumferential direction thereof.
In this embodiment, as shown in fig. 4, a groove 26 may be disposed at the bottom of the cooling plate 2, the groove 26 is disposed between the second water inlet hole 21 and the second water outlet hole 22, and a section of the water outlet pipe between the second water outlet hole 22 and the second water inlet hole 21 is embedded in the groove 26. Because the second inlet opening 21 sets up in its axle center department on cooling disc 2, the second apopore 22 sets up in the edge of cooling disc 2, and the through-hole of center pin 1 and cooling disc 2 coaxial coupling, then the inlet tube can lug connection second inlet opening 21 in the through-hole, the outlet pipe need follow the radial bending of cooling disc 2 from the top of the through-hole of center pin 1 and communicate with second apopore 22, this section outlet pipe of buckling inlays in recess 26, thereby reduce the part of outlet pipe protrusion cooling disc 2 bottom, thereby reduce the relative friction between the part of outlet pipe and cooling disc 2 bottom or interconnect's inconvenience.
In this embodiment, as shown in fig. 3 and 4, the cooling disc 2 and the grinding platform 5 are detachably and fixedly connected by a threaded fastener, corresponding threaded holes are formed in the cooling disc 2 and the grinding platform 5, an annular sealing groove is further formed in the cooling disc 2 or the grinding platform 5, the sealing groove and the threaded holes are concentrically arranged, and a sealing member is embedded in the sealing groove. The threaded fastener is screwed in from a threaded hole in the cooling disc 2 and is connected with the cooling disc 2 and the grinding platform 5, an annular sealing groove is formed in the bottom surface of the cooling disc 2 and is concentric with the threaded hole, a sealing element is embedded in the sealing groove, the threaded fastener is screwed in from the bottom of the threaded hole, after the threaded fastener is screwed, a screw head of the threaded fastener presses a sealing ring, and the threaded hole is not communicated with the outside, so that the situations that cooling water permeates into the threaded hole, the threaded fastener is corroded and the like are reduced; correspondingly, if the threaded fastener is screwed into the threaded hole from the top of the grinding platform 5, a sealing groove is formed on the top surface of the grinding platform 5.
Specifically, the sealing member may be a sealing member such as a gasket or a packing.
In order to facilitate the hoisting of the grinding platform 5, a hoisting hole is generally arranged at the center of the grinding platform 5, in order to reduce the corrosion damage to other components caused by the infiltration of the grinding fluid into the hoisting hole on the grinding platform 5, as shown in fig. 1, a waterproof cover 51 can be fixedly arranged on the grinding platform 5, a sealing groove concentric with the hoisting hole is arranged on the grinding platform 5, a sealing ring is embedded in the sealing groove, when the waterproof cover 51 is connected to the grinding platform 5 through a threaded fastener and the like, the sealing ring is pressed by the waterproof cover 51, the hoisting hole is not communicated with the outside any more, and therefore the occurrence of the condition that the grinding fluid infiltrates into.
Specifically, in this embodiment, as shown in fig. 2, a fixing seat 8 may be pivotally connected to a portion of the central shaft 1 near the top end, and the fixing seat 8 is used for matching with a fixing hole on the machine platform; the top cover of center pin 1 is equipped with rotary disk 9, and the top tip rigid coupling of center pin 1 has connection pad 91, and the center of rotary disk 9 is equipped with inlays the groove, and connection pad 91 inlays in inlaying the inslot, and with the tank bottom rigid coupling of inlaying the groove, and cooling disc 2 rigid coupling is on rotary disk 9. During installation, the fixing seat 8 is sleeved on the central shaft 1, the central shaft 1 penetrates through a fixing hole in a machine table, the lower part of the fixing seat 8 is matched and spliced with the fixing hole, and the central shaft 1 is limited by the fixing seat 8 when rotating, so that the position accuracy of the rotation of the central shaft 1 is improved; connection pad 91 plays the effect of connecting center pin 1 and rotation axis here, and connection pad 91 is connected with the top of center pin 1, is connected with the groove tank bottom of inlaying of rotary disk 9 simultaneously to realize being connected of center pin 1 and rotary disk 9, rotary disk 9 is connected with cooling disc 2, realizes that center pin 1 drives the synchronous rotation of cooling disc 2 and grinding platform 5, strengthens cooling disc 2 and the firm in connection nature of center pin 1 and the stability of cooling disc 2 at center pin 1 tip.
In the present embodiment, as shown in fig. 1 and 2, a cylindrical waterproof cover 7 may be provided outside the cooling pan 2. The waterproof cover 7 covers the cooling disc 2 and the components below the cooling disc 2 in the cooling disc, so that the splashing of the grinding liquid on the grinding platform 5 above the cooling disc 2 is reduced, and the grinding liquid is in contact with the connecting disc 91, the fixed seat 8, the rotating disc 9 and other components on the rotating disc, and the corrosion damage of each component is caused.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (9)
1. A water circulation device is characterized by comprising a central shaft (1) and a cooling disc (2), wherein a through hole is formed in the central shaft (1) along the axial direction of the central shaft, the cooling disc (2) is detachably and fixedly arranged at the top end of the central shaft (1) and is coaxially arranged with the central shaft (1), a second water inlet hole (21) and a second water outlet hole (22) are formed in the cooling disc (2), and the second water inlet hole (21) and the second water outlet hole (22) penetrate through the top surface and the bottom surface of the cooling disc (2);
the bottom end of the central shaft (1) is connected with an adjusting block (3) in a sliding mode, the adjusting block (3) can slide and adjust along the axial direction of the central shaft (1), a first water inlet hole (31) and a first water outlet hole (32) are formed in the adjusting block (3), a water inlet pipe and a water outlet pipe penetrate through a through hole of the central shaft (1), the water inlet pipe is communicated between the first water inlet hole (31) and the second water inlet hole (21), and the water outlet pipe is communicated between the first water outlet hole (32) and the second water outlet hole (22);
the water circulation device further comprises a locking device, a guide column (11) is fixedly arranged at the end part of the bottom end of the central shaft (1) along the axial direction of the central shaft, a guide hole (33) is formed in the adjusting block (3), the guide column (11) is inserted into the guide hole (33) in a sliding mode, and the locking device is used for locking and fixing the depth of the guide column (11) inserted into the guide hole (33).
2. The water circulation device as claimed in claim 1, wherein the number of the guide posts (11) is three, three guide posts (11) are uniformly arranged along the circumference of the central shaft (1), and the number of the guide holes (33) corresponding to the guide posts (11) is three.
3. The water circulation device as claimed in claim 1 or 2, wherein a rotary joint (4) is fixedly connected to the bottom of the adjusting block (3), the rotary joint (4) comprises a connecting portion and a rotating portion, the connecting portion is fixedly connected to the bottom of the adjusting block (3), the rotating portion is pivotally connected to the bottom of the connecting portion, a third water inlet hole and a third water outlet hole are formed in the rotating portion, the third water inlet hole is communicated with the first water inlet hole (31), and the third water outlet hole is communicated with the first water outlet hole (32).
4. A grinding device, characterized by comprising a grinding platform (5), a driving device (6) and the water circulation device of any one of claims 1 to 3, wherein a cooling water tank (23) is arranged on the top surface of the cooling disc (2) of the water circulation device, one end of the cooling water tank (23) is communicated with the second water inlet hole (21), the other end of the cooling water tank is communicated with the second water outlet hole (22), the grinding platform (5) is detachably and fixedly arranged on the top of the cooling disc (2), and cooling water in the cooling water tank (23) cools the grinding platform (5); the driving device (6) is used for driving the central shaft (1) to rotate along the axis of the central shaft.
5. A grinding device according to claim 4, characterized in that the cooling water tank (23) comprises an Archimedes spiral trough, the inlet end of which communicates with a second water inlet opening (21) in the cooling disc (2), the outlet end of which communicates with a second water outlet opening (22) in the cooling disc (2), and the second water inlet opening (21) is located at the axis of the cooling disc (2), the second water outlet opening (22) being located at the edge of the cooling disc (2).
6. The grinding device according to claim 5, characterized in that said Archimedes spiral grooves comprise a first spiral groove (231) and a second spiral groove (232), the inlet end of said first spiral groove (231) communicating with a second water inlet hole (21) on said cooling disc (2) through a rectilinear groove (233), said first spiral groove (231) and said second water inlet hole (21) forming a first annular mounting zone (24) therebetween; the outlet end of the second spiral groove (232) is communicated with a second water outlet hole (22) in the cooling disc (2), the outlet end of the first spiral groove (231) is communicated with the inlet end of the second spiral groove (232) through a straight line groove (233), and a second annular installation area (25) is formed between the first spiral groove (231) and the second spiral groove (232).
7. A grinding device according to claim 5, characterized in that the bottom of the cooling plate (2) is provided with a groove (26), the groove (26) is arranged between the second water inlet hole (21) and the second water outlet hole (22), and a section of the water outlet pipe between the second water inlet hole (22) and the second water inlet hole (21) is embedded in the groove (26).
8. The grinding device according to claim 4, characterized in that the cooling disc (2) is detachably fixed to the grinding platform (5) by a threaded fastener, corresponding threaded holes are formed in the cooling disc (2) and the grinding platform (5), an annular sealing groove is further formed in the cooling disc (2) or the grinding platform (5), the sealing groove and the threaded holes are concentrically arranged, and a sealing member is embedded in the sealing groove.
9. A grinding device according to claim 8, characterized in that the cooling disc (2) housing is provided with a cylindrical water shield (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201810198225.0A CN108188921B (en) | 2018-03-09 | 2018-03-09 | Water circulation device and grinding device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810198225.0A CN108188921B (en) | 2018-03-09 | 2018-03-09 | Water circulation device and grinding device |
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| CN108188921A CN108188921A (en) | 2018-06-22 |
| CN108188921B true CN108188921B (en) | 2020-04-28 |
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| CN109202696A (en) * | 2018-09-10 | 2019-01-15 | 台山市远鹏研磨科技有限公司 | A kind of thinned pad of Diamond Ceramics |
| CN109571239B (en) * | 2018-12-25 | 2024-03-29 | 刘海 | Lower mill mechanism of uniform heat dissipation dynamic mill |
| CN109397032A (en) * | 2018-12-30 | 2019-03-01 | 苏州富强科技有限公司 | A kind of 3D bend glass polishing mechanism |
| CN109967174A (en) * | 2019-04-16 | 2019-07-05 | 东莞市琅菱机械有限公司 | It is a kind of with water guide set grinding rotor and including the grinder of the grinding rotor |
| CN111545295A (en) * | 2020-05-26 | 2020-08-18 | 河南锐鑫同创高新材料科技有限公司 | Silicon nitride is with quick crushing apparatus |
| CN113334244B (en) * | 2021-05-18 | 2023-04-28 | 长江存储科技有限责任公司 | Bearing device and grinding equipment |
| CN114473848B (en) * | 2022-01-27 | 2023-06-20 | 北京晶亦精微科技股份有限公司 | Polishing device with cooling function |
| CN114603468A (en) * | 2022-05-11 | 2022-06-10 | 徐州福凯欣智能科技有限公司 | Polishing machine tool for excavator rocker arm bracket |
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| JP4059567B2 (en) * | 1998-06-30 | 2008-03-12 | 東京エレクトロン株式会社 | Sample polishing apparatus and chemical mechanical polishing method |
| US6358119B1 (en) * | 1999-06-21 | 2002-03-19 | Taiwan Semiconductor Manufacturing Company | Way to remove CU line damage after CU CMP |
| CN101549484B (en) * | 2009-05-07 | 2011-05-11 | 清华大学 | A polishing disk with internal circulated cooling |
| CN201573110U (en) * | 2009-12-10 | 2010-09-08 | 中国电子科技集团公司第四十五研究所 | Polishing table device |
| CN102335868A (en) * | 2010-07-16 | 2012-02-01 | 中芯国际集成电路制造(上海)有限公司 | chemical mechanical polishing device and method |
| CN102091994A (en) * | 2010-12-11 | 2011-06-15 | 昆明台兴精密机械有限责任公司 | Cooling device for spindle grinding disc of wafer single-side polishing machine |
| CN202726714U (en) * | 2012-07-06 | 2013-02-13 | 元亮科技有限公司 | Grinding polishing disk with circulation water cooling device |
| CN203887677U (en) * | 2014-03-26 | 2014-10-22 | 广东工业大学 | Lower plate driving structure of plane grinding machine |
| CN204094637U (en) * | 2014-09-29 | 2015-01-14 | 江苏中科晶元信息材料有限公司 | The cooling device of lower polishing disk in a kind of glazing machine for crystal plate |
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| CN206912927U (en) * | 2017-04-30 | 2018-01-23 | 佐技机电设备（上海）有限公司 | A kind of polishing cylinder with cooling device |
| CN107283289B (en) * | 2017-07-04 | 2024-05-28 | 孔满红 | Grinding polisher |
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