CN202825561U - Circulating water cooling filter device - Google Patents
Circulating water cooling filter device Download PDFInfo
- Publication number
- CN202825561U CN202825561U CN201220418384.5U CN201220418384U CN202825561U CN 202825561 U CN202825561 U CN 202825561U CN 201220418384 U CN201220418384 U CN 201220418384U CN 202825561 U CN202825561 U CN 202825561U
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- filter
- water
- circulating water
- water tank
- water cooling
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Abstract
The utility model relates to a circulating water cooling filter device. A water tank, a circulating water pump, a filter and a ball valve are fixed on a machine frame, a polishing solution inlet is formed on an upper cover body of the water tank, and a polishing solution outlet is formed at the bottom of the water tank. A solution inlet of the circulating water pump is connected with the polishing solution outlet by a pipeline, a solution outlet of the circulating water pump is connected with a solution inlet of the filter by a pipeline, the solution outlet of the filter is connected with a solution inlet of the ball valve by a pipeline, and a circulating water cooling mechanism is arranged in the water tank. The circulating water cooling filter device has the advantages that a circulating water cooling device and a filter device are adopted in the process of circulating utilization of polishing solution, heat and grinding particles are taken away in the process of machining, so that the polishing solution can be kept at constant temperature, and finish machining of the surface of workpieces is conducted. The circulating water cooling filter device is simple in structure and easy to achieve.
Description
Technical field
The utility model relates to semi-conducting material polishing technology field, especially relates to a kind of recirculated water cooling filter.
Background technology
Polissoir especially chemical-mechanical polisher is a kind of precise machining equipment, and the required relative motion of its polishing process is by the caused by relative motion between rubbing head and the polishing disk.Polished workpiece is placed in the rubbing head, polishing pad sticks on the polishing disk surface, by rubbing head workpiece is applied certain pressure, makes workpiece be pressed on pad interface, rely on the relative motion between workpiece and the polishing pad, and by means of the fine finishining of the realization of the abrasive particle in the polishing fluid to surface of the work.
In the polishing process, because the micro cutting effect of abrasive particle in the friction between workpiece and the polishing pad and the polishing fluid, will produce a large amount of heat, the polishing fluid temperature is raise, so in the recycling of polishing fluid, do not process the chemical action that to accelerate in the CMP process if it is not lowered the temperature, thereby the chemical action of causing and mechanical removal effect are unbalance, and suface processing quality is greatly affected.In addition, there is the grinding particle in the polishing fluid after processing, if do not process, these grinding particles also can scratch work piece surface in the process directly again utilizing.
Summary of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art, provides a kind of and takes away the heat that produces in the polishing process and grinding particle, guarantees the recycling recirculated water cooling filter of polishing fluid.
The technical scheme that provides according to the utility model, described recirculated water cooling filter, be fixed with water tank, water circulating pump, filter and ball valve in frame, upper cover body at water tank offers the polishing fluid entrance, offer the polishing fluid outlet in the bottom of water tank, the liquid inlet of described water circulating pump joins by pipeline and polishing fluid outlet, the liquid outlet of water circulating pump joins by the liquid inlet of pipe-and-filter, by the liquid inlet of pipeline connection ball valve, in water tank, be provided with circulating water mechanism on the liquid outlet of filter.
Described circulating water mechanism is by the spiral inner wall coiled of a cooling tube along water tank.
Bottom in frame is equipped with road wheel.
Pipeline between water circulating pump and filter is provided with joint for subsequent use.
The beneficial effects of the utility model are: utilize water-circulating cooling device and filter in the recycling process of polishing fluid, take away heat and grinding particle that polishing fluid produces in process, make polishing fluid can keep steady temperature that surface of the work is carried out fine finishining.The utility model is simple in structure, be easy to realize.
Description of drawings
Fig. 1 is front view of the present utility model.
Fig. 2 is top view of the present utility model.
The specific embodiment
The utility model is described in further detail below in conjunction with concrete drawings and Examples.
As shown in the figure: this recirculated water cooling filter, be fixed with water tank 2, water circulating pump 3, filter 4 and ball valve 5 in frame 1, upper cover body at water tank 2 offers polishing fluid entrance 6, offer polishing fluid outlet 7 in the bottom of water tank 2, the liquid inlet of described water circulating pump 3 joins by pipeline and polishing fluid outlet 7, the liquid outlet of water circulating pump 3 joins by the liquid inlet of pipe-and-filter 4, by the liquid inlet of pipeline connection ball valve 5, in water tank 2, be provided with circulating water mechanism on the liquid outlet of filter 4.
Described circulating water mechanism is by the spiral inner wall coiled of a cooling tube 8 along water tank 2.
In the bottom of frame 1 road wheel 9 is installed.
Pipeline between water circulating pump 3 and filter 4 is provided with joint 10 for subsequent use.
During work, the polishing fluid entrance 6 of polishing fluid after the processing on the upper cover body of water tank 2 flows into transparent water tank 2, be arranged at cooling tube 8 on water tank 2 inwalls and take away the waste heat of polishing fluid, polishing fluid is lowered the temperature, again through the effect of water circulating pump 3, polishing fluid flows out from the polishing fluid of transparent water tank 2 outlet 7, through water pipe inflow filter 4, the polishing fluid behind the grinding particle filtering can be utilized again surface of the work is carried out fine finishining.
Claims (4)
1. recirculated water cooling filter, it is characterized in that: be fixed with water tank (2) in frame (1), water circulating pump (3), filter (4) and ball valve (5), upper cover body at water tank (2) offers polishing fluid entrance (6), offer polishing fluid outlet (7) in the bottom of water tank (2), the liquid inlet of described water circulating pump (3) joins by pipeline and polishing fluid outlet (7), the liquid outlet of water circulating pump (3) joins by the liquid inlet of pipe-and-filter (4), by the liquid inlet of pipeline connection ball valve (5), in water tank (2), be provided with circulating water mechanism on the liquid outlet of filter (4).
2. recirculated water cooling filter as claimed in claim 1 is characterized in that: described circulating water mechanism is by the spiral inner wall coiled of a cooling tube (8) along water tank (2).
3. recirculated water cooling filter as claimed in claim 1, it is characterized in that: the bottom of described frame (1) is equipped with road wheel (9).
4. recirculated water cooling filter as claimed in claim 1, it is characterized in that: the pipeline between described water circulating pump (3) and the filter (4) is provided with joint for subsequent use (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220418384.5U CN202825561U (en) | 2012-08-23 | 2012-08-23 | Circulating water cooling filter device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220418384.5U CN202825561U (en) | 2012-08-23 | 2012-08-23 | Circulating water cooling filter device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202825561U true CN202825561U (en) | 2013-03-27 |
Family
ID=47937353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201220418384.5U Expired - Lifetime CN202825561U (en) | 2012-08-23 | 2012-08-23 | Circulating water cooling filter device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202825561U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106141927A (en) * | 2016-07-18 | 2016-11-23 | 益阳强大机械制造有限公司 | One clears off the supply of machine polishing fluid and reflux |
| CN108655950A (en) * | 2018-04-28 | 2018-10-16 | 湖南宇晶机器股份有限公司 | Magnetic material grinder sand liquid cooling but with filtration system |
| CN112223078A (en) * | 2020-12-10 | 2021-01-15 | 湖南高福星智能科技有限公司 | Polishing liquid intelligent supply type polishing machine tool |
-
2012
- 2012-08-23 CN CN201220418384.5U patent/CN202825561U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106141927A (en) * | 2016-07-18 | 2016-11-23 | 益阳强大机械制造有限公司 | One clears off the supply of machine polishing fluid and reflux |
| CN108655950A (en) * | 2018-04-28 | 2018-10-16 | 湖南宇晶机器股份有限公司 | Magnetic material grinder sand liquid cooling but with filtration system |
| CN112223078A (en) * | 2020-12-10 | 2021-01-15 | 湖南高福星智能科技有限公司 | Polishing liquid intelligent supply type polishing machine tool |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130327 |