CN202229781U - Precise laser trimming device - Google Patents
Precise laser trimming device Download PDFInfo
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- CN202229781U CN202229781U CN2011203454686U CN201120345468U CN202229781U CN 202229781 U CN202229781 U CN 202229781U CN 2011203454686 U CN2011203454686 U CN 2011203454686U CN 201120345468 U CN201120345468 U CN 201120345468U CN 202229781 U CN202229781 U CN 202229781U
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- dichroic beam
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Abstract
The utility model belongs to field of the quartz sensor precise trimming technology, specifically relates to a precise laser trimming device, and aims to provide a device that is suitable for precise trimming of the sensitive structure of a quartz sensor and enables mechanical coupling to be effectively inhibited. The precise laser trimming device comprises a laser (1), a laser optical transmission device (2), a light beam scanning device (3), a visual observation alignment device (4) and a control device (5). The laser (1) is connected with the control device (5). The laser optical transmission device (2) is disposed on the optical path of laser pulses emitted by the laser (1). The light beam scanning device (3) is connected with the control device (5), and is disposed on the optical path of laser pulses and on the back side of the laser optical transmission device (2). The visual observation alignment device is arranged behind the laser optical transmission device (2). The device of the utility model allows trimming of the sensitive structure of a quartz sensor to be realized, enables mechanical coupling to be reduced by two or three levels, and enables mechanical coupling to be effectively inhibited.
Description
Technical field
The utility model belongs to the quartz transducer precision and repaiies the conditioning technology field, is specifically related to a kind of laser accurate and repaiies the accent device.
Background technology
In the process of quartz transducer sensitive structure; Since processing technology error and quartz material itself intrinsic anisotropic properties; The sensitive structure that processes is always not exclusively symmetrical; Thereby produce the output of bigger mechanical couplings, sometimes even can cause that circuit is saturated, can produce considerable influence the precision of quartz transducer.Through adopting laser trimming technology, precision is adjusted the barycenter of sensitive structure, can improve the symmetry of sensitive structure, suppresses mechanical couplings, improves the precision of sensor.When concrete the realization, need at first all to plate one deck gold film at the pro and con of quartzy sensitive structure, thickness vaporizes selectively with laser pulse then and remove the golden film of part, thereby the whole barycenter that changes sensitive structure distributes usually at 5～20um.At present, Shang Weiyou can be applicable to that quartz transducer sensitive structure precision repaiies accent, effectively suppresses the device of mechanical couplings.
The utility model content
The purpose of the utility model provides and a kind ofly is applicable to that quartz transducer sensitive structure precision is repaiied accent, the laser accurate that can effectively suppress mechanical couplings is repaiied the accent device.
The utility model is achieved in that
A kind of laser accurate is repaiied the accent device, comprises laser instrument, laser optics transmitting device, light-beam scanner, visual observation alignment device and control device; Laser instrument is connected with control device, and the laser optics transmitting device is placed on the light path of the laser pulse that laser instrument sends; Light-beam scanner is connected with control device, is placed on the light path of laser pulse, the rear side of laser optics transmitting device; The visual observation alignment system is placed on the rear side of laser optics transmitting device.
Aforesaid laser instrument is a ultraviolet laser, and the repetition frequency of laser instrument is in the 10k-100kHz scope, and power is in the 0.5-5W scope, and pulse width is in the 5-50ns scope.
Aforesaid laser optics transmitting device, it comprises laser beam expanding lens, polarization fading device and dichroic beam splitter; Laser beam expanding lens, polarization fading device and dichroic beam splitter from the close-by examples to those far off are placed on the light path of the laser pulse that laser instrument sends successively; The light path of laser pulse respectively with the optical axis coincidence of laser beam expanding lens, polarization fading device, the light path of laser pulse becomes miter angle with the normal direction of dichroic beam splitter.
Aforesaid laser beam expanding lens, polarization fading device and dichroic beam splitter must be processed by the optical glass that can see through ultraviolet light.
Aforesaid laser optics transmitting device also comprises laser powermeter, and laser powermeter is placed between polarization fading device and the dichroic beam splitter, and the light path of laser powermeter overlaps with polarization fading device and dichroic beam splitter.
Aforesaid light-beam scanner comprises two-dimensional scan galvanometer and focal imaging camera lens; The two-dimensional scan galvanometer on the light path of laser pulse, the rear side of dichroic beam splitter; The focal imaging camera lens is placed on the two-dimensional scan galvanometer output light path, is positioned at the rear side of two-dimensional scan galvanometer.
Aforesaid visual observation alignment system comprises CCD camera and monitor; The CCD camera is placed on a side of laser optics transmitting device, and the optical axis of the camera lens of CCD camera is vertical with the light path of laser pulse and aim at the intersection point of laser pulse and dichroic beam splitter; Monitor is connected with the CCD camera.
The beneficial effect of the utility model is:
The device of the utility model adopts laser instrument, laser optics transmitting device, light-beam scanner, visual observation alignment device and control device; Can realize the accent of repairing of quartz transducer sensitive structure; Through checking; The device of the utility model is repaiied the live width of accent less than 5 microns, can realize can mechanical couplings being reduced by 2～3 one magnitude to the removal of positive golden film of quartz transducer sensitive structure and reverse side gold film; Effectively suppress mechanical couplings, improved the performance of quartz transducer sensitive structure.
Description of drawings
Fig. 1 is that a kind of laser accurate of the utility model is repaiied the structure principle chart of transferring device;
Among the figure: 1. laser instrument, 2. laser optics transmitting device, 3. light-beam scanner, 4. visual observation alignment device; 5. control device, 6. laser beam expanding lens, 7. polarization fading device, 8. laser powermeter; 9. dichroic beam splitter, 10. two-dimensional scan galvanometer, 11. focal imaging camera lenses; 12.CCD camera, 13. monitors, 14. quartz transducer sensitive structures.
Embodiment
Below in conjunction with accompanying drawing and embodiment a kind of laser accurate of the utility model is repaiied and to be transferred device to introduce:
As shown in Figure 1, a kind of laser accurate is repaiied the accent device, comprises laser instrument 1, laser optics transmitting device 2, light-beam scanner 3, visual observation alignment device 4 and control device 5.
Wherein, laser instrument is connected with control device 5, and the control signal of its receiving control device 5 is sent precision and repaiied the required laser pulse of accent under the control of control signal, also laser parameter is sent to control device 5.Laser instrument 2 can adopt existing techniques in realizing, is commercially available, and adopts ultraviolet laser usually; The repetition frequency of laser instrument is in the 10k-100kHz scope; Like 10kHz, 50kHz or 100kHz, power is in the 0.5-5W scope, like 0.5W, 2.5W or 5W; Pulse width is in the 5-50ns scope, like 5ns, 25ns or 50ns.
Laser optics transmitting device 2 is placed on the light path of the laser pulse that laser instrument 2 sends, and it comprises laser beam expanding lens 6, polarization fading device 7 and dichroic beam splitter 9.Laser beam expanding lens 6, polarization fading device 7 and dichroic beam splitter 9 from the close-by examples to those far off are placed on the light path of the laser pulse that laser instrument 2 sends successively; The light path of laser pulse respectively with the optical axis coincidence of laser beam expanding lens 6, polarization fading device 7, the light path of laser pulse becomes miter angle with the normal direction of dichroic beam splitter 9.Laser beam expanding lens 6 is used to adjust diameter and the focal position through its laser beam, when the diameter of needs adjustment laser beam and focal position, and manual adjustments according to actual needs.Polarization fading device 7 is used to adjust the size through its laser power, repaiies the laser power requirement of accent to satisfy precision.Polarization fading device 7 is manual adjustments according to actual needs also.Dichroic beam splitter 9 is used for visible light is separated with the laser of repairing the required wavelength of accent, makes visible light get into the visual observation alignment system, repaiies the laser of transferring required wavelength and gets into optical beam scanning system.Laser beam expanding lens 6, polarization fading device 7 and dichroic beam splitter 9 must be processed by the optical glass that can see through ultraviolet light; Be matured product, be commercially available.
In a preferred embodiment, laser optics transmitting device 2 also comprises laser powermeter 8, and laser powermeter 8 is placed between polarization fading device 7 and the dichroic beam splitter 9, and the light path of laser powermeter 8 overlaps with polarization fading device 7 and dichroic beam splitter 9.The range of laser powermeter 8 surpasses the peak power of the laser instrument of being selected for use, and in the present embodiment, the range of laser powermeter 8 surpasses 5W.Laser powermeter 8 is a matured product, is commercially available.
Light-beam scanner 3 is connected with control device 5, is placed on the light path of laser pulse, the rear side of laser optics transmitting device 2, and it comprises two-dimensional scan galvanometer 10 and focal imaging camera lens 11.Two-dimensional scan galvanometer 10 on the light path of laser pulse, the rear side of dichroic beam splitter 9.Focal imaging camera lens 11 is placed on two-dimensional scan galvanometer 10 output light paths, is positioned at the rear side of two-dimensional scan galvanometer 10.Focal imaging camera lens 11 receives the output beam from two-dimensional scan galvanometer 10, and light beam is focused on.The control signal that two-dimensional scan galvanometer 10 receives from the laser pulse and the control device 5 of dichroic beam splitter 9; Through deflection the beam Propagation direction is controlled; Change the position of focal imaging camera lens 11 laser focal spots, remove the gold on the quartz transducer sensitive structure 14.Two-dimensional scan galvanometer 10 is a matured product with focal imaging camera lens 11, is commercially available.
The visual observation alignment system is placed on the rear side of laser optics transmitting device 2; It comprises CCD camera 12 and monitor 139; CCD camera 12 is placed on a side of laser optics transmitting device 2, and the optical axis of the camera lens of CCD camera 12 is vertical with the light path of laser pulse and aim at the intersection point of laser pulse and dichroic beam splitter 9.Monitor 139 is connected with CCD camera 12, the image of the quartz transducer sensitive structure 14 of the facula position that is used to show that CCD camera 12 collects.
The concrete course of work of the utility model is following:
The first step: initialization;
Repair the accent device to laser accurate and power on, the laser instrument preheating realizes initialization;
Second step: laser parameter is set;
The laser parameter of storage in the control device 5 is set;
The 3rd step: regulate the laser power after decaying;
The 4th step: repair accent;
The quartz transducer sensitive structure 14 of waiting to repair accent is placed on the focal spot position of focal imaging camera lens 11, and control device 5 sends sweep parameters, sends laser parameter to laser instrument to two-dimensional scan galvanometer 10 simultaneously, realizes the right accent of repairing.
The device of the utility model adopts laser instrument, laser optics transmitting device 2, light-beam scanner 3, visual observation alignment device 4 and control device 5; Can realize the accent of repairing of quartz transducer sensitive structure 14; Through checking; The device of the utility model is repaiied the live width of accent less than 5 microns, can realize can mechanical couplings being reduced by 2～3 one magnitude to the removal of quartz transducer sensitive structure 14 positive golden films and reverse side gold film; Effectively suppress mechanical couplings, improved the performance of quartz transducer sensitive structure 14.
Claims (7)
1. a laser accurate is repaiied the accent device, it is characterized in that: it comprises laser instrument (1), laser optics transmitting device (2), light-beam scanner (3), visual observation alignment device (4) and control device (5); Laser instrument (1) is connected with control device (5), and laser optics transmitting device (2) is placed on the light path of the laser pulse that laser instrument (1) sends; Light-beam scanner (3) is connected with control device (5), is placed on the light path of laser pulse, the rear side of laser optics transmitting device (2); The visual observation alignment system is placed on the rear side of laser optics transmitting device (2).
2. device according to claim 1 is characterized in that: described laser instrument (1) is a ultraviolet laser (1), and the repetition frequency of laser instrument (1) is in the 10k-100kHz scope, and power is in the 0.5-5W scope, and pulse width is in the 5-50ns scope.
3. device according to claim 1 and 2 is characterized in that: described laser optics transmitting device (2), and it comprises laser beam expanding lens (6), polarization fading device (7) and dichroic beam splitter (9); Laser beam expanding lens (6), polarization fading device (7) and dichroic beam splitter (9) from the close-by examples to those far off are placed on the light path of the laser pulse that laser instrument (1) sends successively; The light path of laser pulse respectively with the optical axis coincidence of laser beam expanding lens (6), polarization fading device (7), the light path of laser pulse becomes miter angle with the normal direction of dichroic beam splitter (9).
4. device according to claim 3 is characterized in that: described laser beam expanding lens (6), polarization fading device (7) and dichroic beam splitter (9) must be processed by the optical glass that can see through ultraviolet light.
5. device according to claim 1; It is characterized in that: described laser optics transmitting device (2) also comprises laser powermeter (8); Laser powermeter (8) is placed between polarization fading device (7) and the dichroic beam splitter (9), and the light path of laser powermeter (8) overlaps with polarization fading device (7) and dichroic beam splitter (9).
6. device according to claim 1 is characterized in that: described light-beam scanner (3) comprises two-dimensional scan galvanometer (10) and focal imaging camera lens (11); Two-dimensional scan galvanometer (10) on the light path of laser pulse, the rear side of dichroic beam splitter (9); Focal imaging camera lens (11) is placed on two-dimensional scan galvanometer (10) output light path, is positioned at the rear side of two-dimensional scan galvanometer (10).
7. device according to claim 1; It is characterized in that: described visual observation alignment system comprises CCD camera (12) and monitor (13); CCD camera (12) is placed on a side of laser optics transmitting device (2), and the optical axis of the camera lens of CCD camera (12) is vertical with the light path of laser pulse and aim at the intersection point of laser pulse and dichroic beam splitter (9); Monitor (13) is connected with CCD camera (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203454686U CN202229781U (en) | 2011-09-15 | 2011-09-15 | Precise laser trimming device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203454686U CN202229781U (en) | 2011-09-15 | 2011-09-15 | Precise laser trimming device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202229781U true CN202229781U (en) | 2012-05-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203454686U Expired - Lifetime CN202229781U (en) | 2011-09-15 | 2011-09-15 | Precise laser trimming device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202229781U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108747000A (en) * | 2018-06-13 | 2018-11-06 | 北京航天控制仪器研究院 | A kind of multifunction laser precise machining equipment |
-
2011
- 2011-09-15 CN CN2011203454686U patent/CN202229781U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108747000A (en) * | 2018-06-13 | 2018-11-06 | 北京航天控制仪器研究院 | A kind of multifunction laser precise machining equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120523 |
|
| CX01 | Expiry of patent term |