CN102679875B - Active target and method for calibrating beam-target coupling sensor on line by using same - Google Patents

Active target and method for calibrating beam-target coupling sensor on line by using same Download PDF

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CN102679875B
CN102679875B CN201210173592.8A CN201210173592A CN102679875B CN 102679875 B CN102679875 B CN 102679875B CN 201210173592 A CN201210173592 A CN 201210173592A CN 102679875 B CN102679875 B CN 102679875B
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ccd image
image sensor
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journey
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CN102679875A (en
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刘炳国
刘国栋
陈凤东
庄志涛
胡涛
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Harbin Institute of Technology
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Abstract

The invention relates to an active target and a method for calibrating a beam-target coupling sensor on line by using the same and aims to solve the problems that a sensor cannot be calibrated on line, sensor parameters cannot be corrected on line, and the beam-target coupling precision is poor in the prior art. The method comprises the following steps of moving the active target into a target chamber center; opening a laser device, and 9 upper paths of laser emitted by the laser device enter a photosensitive surface of a charged coupled device (CCD) image sensor of the active target to form 9 upper light spots; and 9 lower paths of laser emitted by the laser device enter a photosensitive surface of a CCD image sensor of the active target to form 9 lower light spots; closing the laser device when the upper 9 light spots and the lower 9 light spots are respectively coincident with the centers of 9 upper cross curves and 9 lower cross curves; imaging 9 upper cross signs and 9 lower cross signs of the active target through upper and lower monitoring units in the field of view of a sensor, and calculating the positions of the cross signs on the CCD image sensor; opening all paths of laser, calculating the positions of all the light spots on the CCD of the beam-target coupling sensor; and calibrating. The method is applicable to the technical field of high-precision laser target shooting of large-scale laser drivers.

Description

Adopt active target to bundle target coupling sensor online calibration method
Technical field
The present invention relates to high-precision laser target practice technical field, be specifically related to active target and adopt this active target to bundle target coupling sensor online calibration method.
Background technology
Inertial confinement fusion is to utilize energetic particle beam DT target ball to be compressed to the high density of every cubic centimetre of several hectograms within the time of several nanoseconds, and pressure is several hundred million atmospheric pressure, thereby makes pellet in part, form the burning of fighting of hot spot point.At the end of the eighties in last century, American scientist once utilized the emittance of underground nuclear blast successfully to drive inertial confinement fusion, had confirmed the feasibility of this technology path.
Along with the appearance of laser technology, people begin one's study and utilize the very high power density of light laser and fabulous directivity to bombard deuterium-tritium target, thereby allow them produce controlled inertial confinement fusion, discharge fusion energy, and Here it is " laser fusion ".
For multiple laser being directed to diameter, be on the target of several millimeters, need special exact instrument, thereby the bundle target coupling sensor based on conjugate principle arises at the historic moment, this bundle target sensor has obtained the patent of invention (patent No.: ZL200810064874.8) for 2010.In order to guarantee the target practice precision of this sensor guiding laser, need to carry out special accurate off-line calibration to this sensor.But instrument calibration parameter can occur to drift about slowly, affects target practice precision.
In the bundle target sensor off-line calibration process of prior art, conventionally adopt the cylindrical target of diameter 2mm, as shown in Figure 3 and Figure 4.Externally under the monitoring of visual monitoring system, center by Laser Focusing to cylindrical target upper and lower end face, by the upper and lower monitoring means of sensor, respectively to target end face circle and laser facula imaging, by many groups target image space and hot spot image space, sensor parameters is demarcated.Take this demarcation target to have following problem: the making of 1) demarcating target is very difficult, first require the diffusing characteristic diffuser of target end face good, if target surface roughness is too high, incident laser major part is reflected, external monitoring system is difficult to light spot position to monitor, if roughness is low, laser facula there will be speckle, and the processing texture on surface, cut can produce a very large impact the positioning precision of hot spot, therefore, the surface treatment difficulty of target end face is very large, in addition, the target end face that is 2mm for diameter, be difficult to polish flat, therefore can aim at and bring error target, 2) need external monitoring system to position target and hot spot, not only system complex, and target character of surface has considerable influence to spot location precision, 3) cannot realize sensor on-line proving.
Summary of the invention
Invent herein in order to solve prior art and cannot realize online sensor on-line proving and sensor parameters is calibrated, and the problem of bundle target coupling low precision, thereby proposed to adopt initiatively target to bundle target coupling sensor online calibration method.
Active target, it comprises target bar, witness marker, supporting seat, first circuit board, second circuit board, the ccd image sensor of setting out on a journey, lower road ccd image sensor, the first shell and second housing,
One side of described supporting seat is fixed with target bar, supporting seat is coaxially connected with target bar, the inside that supporting seat closes on a side of target bar is fixed with witness marker, the opposite side of supporting seat fixedly mounts respectively the first shell and second housing, the first shell and second housing are about symmetrical distribution of coaxial cable of supporting seat and target bar
First circuit board 4 and the ccd image sensor of setting out on a journey are positioned at the inside of the first shell, and the ccd image sensor of setting out on a journey is fixed on first circuit board top, be positioned at the side away from supporting seat, and the photosurface of the ccd image sensor of setting out on a journey is exposed to hull outside;
Second circuit board He Xia road ccd image sensor is positioned at the inside of second housing, second circuit board and first circuit board are symmetrical about the coaxial cable of supporting seat and target bar, lower road ccd image sensor is fixed on second circuit board below, symmetrical about the coaxial cable of supporting seat and target bar with the ccd image sensor of setting out on a journey, the photosurface of Qie Xia road ccd image sensor is exposed to hull outside;
On the photosurface of the upper and lower road of photosurface of the ccd image sensor of setting out on a journey ccd image sensor, by laser incising, mark the target cross of 3 * 3 arrays, and the photosurface consistent size of the photosurface Yu Xia road ccd image sensor of the ccd image sensor of setting out on a journey.
Adopt active target to bundle target coupling sensor online calibration method, it comprises the steps:
Step 1, bundle target coupling sensor to be calibrated is sent into vacuum target chamber center, by external monitoring instrument, adjust bundle target coupling sensor attitude, the photosurface consistent size of the ccd image sensor of setting out on a journey of the photosurface size of the ccd image sensor of setting out on a journey and bundle target coupling sensor to be calibrated;
Step 2, active target is sent into vacuum target chamber center, the target bar of active target is fixed on target holder, active target is fixed in the visual field of bundle target coupling sensor, middle and upper part monitoring means and middle and lower part monitoring means by bundle target coupling sensor detect initiatively horizontal level and the attitude of target, and by target holder, active target are aligned;
Step 3, bundle target coupling sensor is shifted out to vacuum target chamber center;
Step 4, open laser instrument, produce each 9 tunnel laser beam up and down, wherein 9 road laser are incident on the photosurface of the ccd image sensor of setting out on a journey of target initiatively, form 9 hot spots on the photosurface of ccd image sensor of setting out on a journey; Other 9 road laser are incident on the photosurface of active Ba Xia road ccd image sensor, form 9 hot spots on the photosurface of Xia road ccd image sensor; Adjust the incident direction of each laser beam, 9 hot spots that make to set out on a journey on the photosurface of ccd image sensor respectively with the photosurface of this center superposition of 9 target crosses on ccd image sensor of setting out on a journey, lower road ccd image sensor on 9 hot spots respectively till the center superposition of 9 target crosses on the ccd image sensors of Yu Gaixia road, close laser instrument;
Step 5, bundle target coupling sensor to be calibrated is sent into target chamber center and adjusted position and attitude again;
Step 6, by monitoring means on bundle target coupling sensor and lower monitoring means to each 9 the target cross imagings up and down of active target, obtain the position of each target cross on the photosurface of ccd image sensor He Xia road ccd image sensor of setting out on a journey;
Step 7, open laser instrument, laser beam reflexes to setting out on a journey on ccd image sensor and sensor Xia to be measured road ccd image sensor of sensor to be measured through the catoptron of bundle target coupling sensor, on the ccd image sensor He Xia road ccd image sensor of setting out on a journey, form 9 hot spots respectively, bundle target coupling sensor top monitoring means and middle and lower part monitoring means carry out respectively upper and lower open and close movement, make the center position of hot spot and corresponding target cross separately minimum, calculate respectively the distance of the center of 9 target crosses on the center of 9 hot spots on ccd image sensor of now setting out on a journey and the photosurface of the ccd image sensor of setting out on a journey, the distance of the center of 9 target crosses on the photosurface of Yu Xia road, the center ccd image sensor of 9 hot spots on the ccd image sensor of lower road, according to result of calculation, obtain bundle target coupling error, thereby realize on-line proving.
The present invention proposes a kind of bundle target coupling process based on active target, and this is target employing target cross initiatively, realizes online detection and the calibration of sensor.When laser incides on CCD, can record laser spot position by CCD, adjust laser spot position and overlap with cross curve, set up the reference-calibrating that target spot-hot spot overlaps.Owing to having adopted CCD chip as target surface, initiatively target can directly be measured the position indicating on the position of laser facula on target and target, therefore do not need outside monitoring equipment to carry out the coupling of monitor beam target, do not need to consider the reflection characteristic of target surface, the planarization of target surface also reaches nano-precision, therefore can greatly improve convenience and the stated accuracy of use.The witness marker of sensor positions it for shooting range monitoring instrument.
Accompanying drawing explanation
Fig. 1 is the structural representation of active target;
Fig. 2 is the schematic diagram of application active target to bundle target coupling sensor online calibration method;
Fig. 3 is the target of sensor collection and the image of laser facula;
Fig. 4 is the image that ccd image sensor gathers laser facula;
Fig. 5 is the planimetric map of ccd image sensor 6 of setting out on a journey;
Fig. 6 is the cross curve example photograph image on laser grooving and scribing CCD chip;
The image that the CCD that Fig. 7 is delineation cross curve gathers.
Embodiment
Embodiment one, in conjunction with Fig. 1, illustrate present embodiment, active target described in present embodiment, it comprises target bar 1, witness marker 2, supporting seat 3, first circuit board 4, second circuit board 5, the ccd image sensor 6 of setting out on a journey, lower road ccd image sensor 7, the first shell 8 and second housing 9
One side of described supporting seat 3 is fixed with target bar 1, supporting seat 3 is coaxially connected with target bar 1, the inside that supporting seat 3 closes on a side of target bar 1 is fixed with witness marker 2, the opposite side of supporting seat 3 fixedly mounts respectively the first shell 8 and second housing 9, the first shell 8 and second housing 9 are about symmetrical distribution of coaxial cable of supporting seat 3 and target bar 1
First circuit board 4 and the ccd image sensor 6 of setting out on a journey are positioned at the inside of the first shell 8, and the ccd image sensor 6 of setting out on a journey is fixed on first circuit board 4 tops, is positioned at the side away from supporting seat 3, and the photosurface of the ccd image sensor 6 of setting out on a journey is exposed to hull outside;
Second circuit board 5 He Xia road ccd image sensors 7 are positioned at the inside of second housing 9, second circuit board 5 is symmetrical about the coaxial cable of supporting seat 3 and target bar 1 with first circuit board 4, lower road ccd image sensor 7 is fixed on second circuit board 5 belows, symmetrical about the coaxial cable of supporting seat 3 and target bar 1 with the ccd image sensor 6 of setting out on a journey, the photosurface of Qie Xia road ccd image sensor 7 is exposed to hull outside;
On the photosurface of ccd image sensor 6 He Xia road ccd image sensors 7 of setting out on a journey, by laser incising, mark the target cross of 3 * 3 arrays, and the target cross of 3 * 3 arrays of the target cross Yu Xia road ccd image sensor 7 of 3 * 3 arrays of the ccd image sensor 6 of setting out on a journey is in full accord.
The ccd image sensor 6 He Xia road ccd image sensors 7 of setting out on a journey form by the CCD of Highgrade integration, and the cover glass of the ccd image sensor 6 He Xia road ccd image sensors 7 of setting out on a journey is removed, to eliminate the refraction skew of cover glass to incident beam.As shown in Figure 5, the image that the CCD of delineation cross curve gathers as shown in Figure 6 and Figure 7 for cross curve example photo on laser grooving and scribing CCD chip.The position of cross curve in image processed and can be obtained by image.When laser incides on CCD, can record laser spot position by CCD, adjust laser spot position and overlap with cross curve, set up the reference-calibrating that target spot-hot spot overlaps.
The difference of the active target described in embodiment two, present embodiment and embodiment one is, the width range of the cross curve of the target cross that on the ccd image sensor 6 He Xia road ccd image sensors 7 of setting out on a journey, laser incising marks is: 8 μ m~12 μ m.
Embodiment three, in conjunction with Fig. 2, illustrate present embodiment, present embodiment be this active target of employing based on described in embodiment one to bundle target coupling sensor online calibration method,
The upper monitoring means of bundle target coupling sensor comprises the ccd image sensor 10 of setting out on a journey, upper microcobjective 11 and upper laser mirror 12, the lower monitoring means of bundle target coupling sensor comprises lower road ccd image sensor 17, lower laser mirror 18 and lower microcobjective 19, upper monitoring means and lower monitoring means are for detection of the imaging of practicing shooting, during the middle and upper part monitoring means of bundle target coupling sensor comprises, set out on a journey ccd image sensor 13 and in upper microcobjective 14, lower microcobjective 15He Zhongxia road ccd image sensor 16 during the middle and lower part monitoring means of bundle target coupling sensor comprises, middle and upper part monitoring means and middle and lower part monitoring means are for detection of the position of practicing shooting,
Adopt active target to bundle target coupling sensor online calibration method, it comprises the steps:
Step 1, bundle target coupling sensor to be calibrated is sent into vacuum target chamber center, by external monitoring instrument, adjust bundle target coupling sensor attitude, the photosurface consistent size of the ccd image sensor 10 of setting out on a journey of the photosurface size of the ccd image sensor 6 of setting out on a journey and bundle target coupling sensor to be calibrated;
Step 2, active target is sent into vacuum target chamber center, the target bar 1 of active target is fixed on target holder, active target is fixed in the visual field of bundle target coupling sensor, middle and upper part monitoring means and middle and lower part monitoring means by bundle target coupling sensor detect initiatively horizontal level and the attitude of target, and by target holder, active target are aligned; Target holder is a bracing frame that 6 DOF is adjustable, can according to the monitoring result of monitoring means, realize the adjustment of the spatial attitude of target, makes its edge overlap and be levelling with the datum line of bundle target coupling sensor;
Step 3, bundle target coupling sensor is shifted out to vacuum target chamber center;
Step 4, open laser instrument, produce each 9 tunnel laser beam up and down, wherein 9 road laser are incident on the photosurface of the ccd image sensor 6 of setting out on a journey of target initiatively, form 9 hot spots on the photosurface of ccd image sensor 6 of setting out on a journey, other 9 road laser are incident on the photosurface of active Ba Xia road ccd image sensor 7, form 9 hot spots on the photosurface of Xia road ccd image sensor 7, the ccd image sensor 6 He Xia road ccd image sensors 7 of setting out on a journey record laser spot position data and by first circuit board 4 and second circuit board 5, transfer to computing machine respectively, by the position of computer measurement hot spot, adjust the incident direction of each laser beam, 9 hot spots that make to set out on a journey on the photosurface of ccd image sensor 6 respectively with the center superposition of these 9 target crosses on ccd image sensor 6 of setting out on a journey, till the center superposition of 9 target crosses on 9 hot spots difference Yu Gaixia road ccd image sensors 7 on the photosurface of lower road ccd image sensor 7, close laser instrument,
Step 5, bundle target coupling sensor to be calibrated is sent into target chamber center and adjusted position and attitude again;
Step 6, by monitoring means on bundle target coupling sensor and lower monitoring means to each 9 the target cross imagings up and down of active target, obtain the position of each target cross on the photosurface of ccd image sensor 6 He Xia road ccd image sensors 7 of setting out on a journey;
Step 7, open laser instrument, laser beam reflexes to setting out on a journey on ccd image sensor 10 and sensor Xia to be measured road ccd image sensor 17 of sensor to be measured through the catoptron of bundle target coupling sensor, on the ccd image sensor 10He Xia road ccd image sensor 17 of setting out on a journey, form 9 hot spots respectively, by controlling the Computer of bundle target coupling sensor, count each facula position on ccd image sensor 13He Xia road, road ccd image sensor 17 in, bundle target coupling sensor top monitoring means and middle and lower part monitoring means carry out respectively upper and lower open and close movement, make the center position of hot spot and corresponding target cross separately minimum, adopt least square method to analyze, calculate respectively the distance of the center of 9 target crosses on the center of 9 hot spots on ccd image sensor 10 of now setting out on a journey and the photosurface of the ccd image sensor 6 of setting out on a journey, the distance of the center of 9 target crosses on the photosurface of Yu Xia road, the center ccd image sensor 7 of 9 hot spots on lower road ccd image sensor 17, according to result of calculation, obtain bundle target coupling error, thereby realize on-line proving.
Calculate respectively the distance of the center of 9 target crosses on the center of 9 hot spots on ccd image sensor 10 of setting out on a journey and the photosurface of the ccd image sensor 6 of setting out on a journey, be to have obtained 9 distance parameters, each distance parameter represents to be positioned at the distance of ccd image sensor 10 and the set out on a journey hot spot of ccd image sensor 6 same positions and the center of target cross of setting out on a journey.
In like manner, on the photosurface of Yu Xia road, the center ccd image sensor 7 of 9 hot spots on lower road ccd image sensor 17, the distance of the center of 9 cross curve is also 9 distance parameters, and each distance parameter represents to be positioned at the distance of the hot spot of ccd image sensor 17He Xia road, lower road ccd image sensor 7 same positions and the center of target cross.
Present embodiment has adopted CCD chip as target surface, initiatively target can directly be measured the position indicating on the position of laser facula on target and target, therefore do not need outside monitoring equipment to carry out the coupling of monitor beam target, do not need to consider the reflection characteristic of target surface, the planarization of target surface also reaches nano-precision, therefore can greatly improve convenience and the stated accuracy of use.The witness marker of sensor positions it for shooting range monitoring instrument.

Claims (1)

1. adopt active target to bundle target coupling sensor online calibration method, described active target comprises target bar (1), witness marker (2), supporting seat (3), first circuit board (4), second circuit board (5), the ccd image sensor of setting out on a journey (6), lower road ccd image sensor (7), the first shell (8) and second housing (9)
One side of described supporting seat (3) is fixed with target bar (1), supporting seat (3) is coaxially connected with target bar (1), the inside that supporting seat (3) closes on a side of target bar (1) is fixed with witness marker (2), the opposite side of supporting seat (3) fixedly mounts respectively the first shell (8) and second housing (9), the first shell (8) and second housing (9) are about symmetrical distribution of coaxial cable of supporting seat (3) and target bar (1)
First circuit board (4) and the ccd image sensor of setting out on a journey (6) are positioned at the inside of the first shell (8), the ccd image sensor (6) of setting out on a journey is fixed on first circuit board (4) top, be positioned at the side away from supporting seat (3), and the photosurface of the ccd image sensor of setting out on a journey (6) is exposed to hull outside;
Second circuit board (5) He Xia road ccd image sensor (7) is positioned at the inside of second housing (9), second circuit board (5) is symmetrical about the coaxial cable of supporting seat (3) and target bar (1) with first circuit board (4), lower road ccd image sensor (7) is fixed on second circuit board (5) below, symmetrical about the coaxial cable of supporting seat (3) and target bar (1) with the ccd image sensor of setting out on a journey (6), the photosurface of Qie Xia road ccd image sensor (7) is exposed to hull outside;
On the photosurface of the upper and lower road of the photosurface ccd image sensor (7) of the ccd image sensor of setting out on a journey (6), by laser incising, mark the target cross of 3 * 3 arrays, and the photosurface consistent size of the photosurface Yu Xia road ccd image sensor (7) of the ccd image sensor of setting out on a journey (6);
It is characterized in that, adopt initiatively target to comprise the steps: bundle target coupling sensor online calibration method
Step 1, bundle target coupling sensor to be calibrated is sent into vacuum target chamber center, by external monitoring instrument, adjust bundle target coupling sensor attitude, the photosurface consistent size of the ccd image sensor of setting out on a journey (10) of the photosurface size of the ccd image sensor of setting out on a journey (6) and bundle target coupling sensor to be calibrated;
Step 2, active target is sent into vacuum target chamber center, the target bar (1) of active target is fixed on target holder, active target is fixed in the visual field of bundle target coupling sensor, middle and upper part monitoring means and middle and lower part monitoring means by bundle target coupling sensor detect initiatively horizontal level and the attitude of target, and by target holder, active target are aligned;
Step 3, bundle target coupling sensor is shifted out to vacuum target chamber center;
Step 4, open laser instrument, produce each 9 tunnel laser beam up and down, wherein 9 road laser are incident on the photosurface of the ccd image sensor of setting out on a journey (6) of target initiatively, form 9 hot spots on the photosurface of the ccd image sensor of setting out on a journey (6); Other 9 road laser are incident on the photosurface of active Ba Xia road ccd image sensor (7), form 9 hot spots on the photosurface of Xia road ccd image sensor (7); Adjust the incident direction of each laser beam, 9 hot spots that make to set out on a journey on the photosurface of ccd image sensor (6) respectively with this ccd image sensor of setting out on a journey (6) on the center superposition of 9 target crosses, 9 hot spots on the photosurface of lower road ccd image sensor (7) respectively till the center superposition of 9 target crosses on Yu Gaixia road ccd image sensors (7), are closed laser instrument;
Step 5, bundle target coupling sensor to be calibrated is sent into target chamber center and adjusted position and attitude again;
Step 6, by monitoring means on bundle target coupling sensor and lower monitoring means to each 9 the target cross imagings up and down of active target, obtain the position of each target cross on the photosurface of the ccd image sensor of setting out on a journey (6) He Xia road ccd image sensor (7);
Step 7, open laser instrument, laser beam reflexes on the ccd image sensor of setting out on a journey (10) and sensor Xia to be measured road ccd image sensor (17) of sensor to be measured through the catoptron of bundle target coupling sensor, respectively at 9 hot spots of the upper formation of the ccd image sensor of setting out on a journey (10) He Xia road ccd image sensor (17), bundle target coupling sensor top monitoring means and middle and lower part monitoring means carry out respectively upper and lower open and close movement, make the center position of hot spot and corresponding target cross separately minimum, calculate respectively the distance of the center of 9 target crosses on the center of 9 hot spots on ccd image sensor (10) of now setting out on a journey and the photosurface of ccd image sensor (6) of setting out on a journey, the distance of the center of 9 target crosses on the photosurface of Yu Xia road, the center ccd image sensor (7) of 9 hot spots on lower road ccd image sensor (17), according to result of calculation, obtain bundle target coupling error, thereby realize on-line proving.
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EP2722136A1 (en) * 2012-10-19 2014-04-23 inos Automationssoftware GmbH Method for in-line calibration of an industrial robot, calibration system for performing such a method and industrial robot comprising such a calibration system
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CN110070950B (en) * 2019-04-25 2020-08-11 中国工程物理研究院激光聚变研究中心 Target coupling, aiming and positioning method compatible with multi-angle injection beam
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