CN105303560A - Robot laser scanning welding seam tracking system calibration method - Google Patents
Robot laser scanning welding seam tracking system calibration method Download PDFInfo
- Publication number
- CN105303560A CN105303560A CN201510607458.8A CN201510607458A CN105303560A CN 105303560 A CN105303560 A CN 105303560A CN 201510607458 A CN201510607458 A CN 201510607458A CN 105303560 A CN105303560 A CN 105303560A
- Authority
- CN
- China
- Prior art keywords
- video camera
- point
- sensor
- robot
- matrix
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
The invention discloses a robot laser scanning welding seam tracking system calibration method. A video camera in a sensor is calibrated based on a plane template firstly. The video camera is enabled to acquire at least three different positions by freely moving the sensor. The internal parameters of the video camera are solved according to the principle of least squares. Then image coordinates of an infinite point on a laser plane projected in the video camera are solved, and structured light is calibrated. Finally the calibrated sensor is fixed at the tail end of a manipulator via a flange plate. The same target point in space is detected by using the sensor through changing the attitude of a robot, and a conversion matrix of a video camera coordinate system and a manipulator tail end coordinate system is solved. A robot laser scanning welding seam tracking system acts as the object of study, and the parameters of the structured light are calibrated by adopting the video camera calibration method based on the plane template and the image coordinates of the infinite point on the laser plane projected in the video camera.
Description
Technical field
The present invention relates to the demarcation of robotic laser's scanning type weld seam tracking system, comprise the demarcation of laser scan type weld seam tracking sensor and the demarcation of Robot Hand-eye.
Background technology
Demarcation and the Robotic Hand-Eye Calibration of laser scan type weld seam tracking sensor are depended in the accurate tracking of laser scan type seam tracking system butt welded seam.The demarcation of sensor comprises camera calibration and calibration, and the Technical comparing of camera calibration is ripe.For the demarcation of laser structure light, the method used the earliest has profile of tooth standardization and wire drawing standardization, and these methods utilize specific demarcation to harrow and produce calibration point in structured light plane, and utilize auxiliary measuring instrument to obtain the coordinate of its calibration point in structured light plane.These two kinds of methods need accurate utility appliance.The classic method of Robotic Hand-Eye Calibration has and utilizes the instrument of high precision three-dimensional coordinates measurement instrument to sensor holders to measure, and the method is all not suitable for the hand and eye calibrating that end installs the robot of vision sensor.
Summary of the invention
For the deficiency of existing scaling method, the invention provides a kind of robotic laser's scanning type weld seam tracking system calibrating method.
The step of the technical solution used in the present invention is as follows:
Step 1. adopts demarcates the video camera in sensor based on plane template, by moving freely sensor, makes camera acquisition arrive the template image of at least three diverse locations (relative to video camera).The inner parameter of video camera is solved according to the principle of least square.
Step 2. asks for the image coordinate that on laser plane, infinite point a bit projects in video camera, demarcates structured light.
The sensor demarcated is fixed on arm end by ring flange by step 3., uses same impact point in sensor detection space, solve the transition matrix of camera coordinate system and arm end coordinate system by the attitude changing robot.
Beneficial effect of the present invention: the present invention with robotic laser's scanning type weld seam tracking system for research object, adopt the image coordinate a bit projected in video camera based on infinite point on the camera marking method of plane template and laser plane, structured light parameter is demarcated.And the logical attitude changing robot is measured impact point same in experimental field, calculates the trick matrix of this system fast.
Accompanying drawing explanation
Fig. 1 is robotic laser's seam tracking system;
Fig. 2 is laser scan type weld seam tracking sensor structure;
Fig. 3 is sensor measurement model;
Fig. 4 demarcates target;
Fig. 5 is that fixed point becomes pose measurement.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention will be further described.
(1) robotic laser's seam tracking system is as shown in Figure 1,
Robotic laser scans seam tracking system primarily of six-DOF robot and laser scan type weld seam tracking sensor composition, comprises robot 1, laser seam tracking sensor 2, word structured light 3 and face of weld 4.The coordinate system that this system relates to has as follows:
In figure, { R} is the base coordinate system be connected with robot base; { E} is arm end coordinate system; { C} is camera coordinate system.
(2) hardware configuration of sensor and principle of work thereof
As shown in Figure 2, laser scan type weld seam tracking sensor is made up of laser instrument 6, filter plate 8, industrial camera 5, connector 7 and spatter shield 9 etc.The perforate of sensor cabinet top, for power lead and the signal wire extraction of video camera, laser instrument.Sensor probe is connected with computing machine by signal wire.The spatter shield that sensor bottom of shell is made up of organic glass covers, the splashing produced when can stop welding, protection video camera.Semiconductor laser tilts to be fixed in sensor probe casing.The laser beam that one word laser instrument sends, oblique illumination, to the commissure on welding work pieces surface, forms laser stripe.Camera acquisition to the laser stripe image comprising weld information, be sent to computing machine by signal wire.
As shown in Figure 3, the measurement model of this sensor employing.In figure, π is the laser plane of laser instrument projection; O
c-X
cy
cz
cfor the camera coordinate system set up for initial point with optical axis and lens intersection point; O-XY is image coordinate system in video camera.There is 1 P (x in laser plane
c, y
c, z
c), be projected as p (x, y) at the plane of delineation.Following relation is obtained according to triangulation principle:
Wherein, f is focal length of camera; B is laser plane and X
caxle intersection point, to the distance of optical axis, is called that base is long; θ is X
cangle with laser plane, is called projectional angle.The camera coordinates of impact point and the transformational relation of image coordinate are:
If focal length of camera f, projectional angle θ, the long b of base are known in formula, then from formula (2), in three dimensions, any point all can with the some one_to_one corresponding in two dimensional image.The Internal system parameters solving f, θ, b and laser sensor system is demarcated.Wherein focal distance f is obtained by camera calibration.
(1) demarcation of sensor
When ascending a height to enjoy a distant view, the ground level of infinite point is straight line, and equally, two parallel lines at infinity meet at a bit.As shown in Figure 4, will demarcate target horizontal positioned, and regulate the position of sensor, and make the optical axis of video camera perpendicular to demarcation target, laser plane and two parallel lines meet at A, B 2 point, and control video camera moves along optical axis direction, obtains a series of intersection point A
i, B
i(i=1,2 ... n), it is projected as a in video camera
i, b
i(i=1,2 ... n).A
i, B
ilaser plane forms two parallel lines, and it at infinity meets at a bit.By a
iwith b
ifit to straight line respectively, on the intersection point of two straight lines and laser plane, infinite point a bit projects in video camera.
There is 1 P (x in laser plane
c, y
c, z
c) be p (x, y) in the picture point of the plane of delineation.According to triangulation principle, can obtain:
The P that sets up an office be on laser plane infinite point a bit, i.e. (x
c, y
c, z
c) → ∞, z
c→ ∞, can learn fcot θ-x
∞→ 0 and get final product:
cotθ=x
∞/f⑷
Wherein, x
∞for the image coordinate that infinite point on laser plane a bit projects in video camera.
If will
write as total differential form, can be obtained:
If make Δ x=0 namely can obtain:
(6) can be obtained by formula:
Wherein, x is the image coordinate of current goal point; If Δ y can be controlled
c, and obtaining corresponding Δ y by image procossing, then the long b of the base of structured light can determine.
(2) Robotic Hand-Eye Calibration
As shown in Figure 1, T
eRthat robot end { relative to pedestal mark, { can obtain from the Eulerian angle the controller of robot, comprise rotation matrix R E} by the transition matrix of R}
eRwith translation vector t
eR, T
cEfor camera coordinate system, { relative to arm end coordinate system, { transition matrix of E} comprises rotation matrix R to C}
cEwith translation vector t
cE.Because sensor is fixed in arm end, therefore T
cEdo not change with the motion of mechanical arm.
As shown in Figure 5, by changing the same impact point M of attitude repeated detection of robot, robot is under i-th pose, and the coordinate of impact point M under camera coordinate system is M
i c, the coordinate under basis coordinates system of robot is M
r, there is following transformational relation:
Wherein, T
eRifor robot i-th pose, arm end, relative to the transition matrix of basis coordinates system, comprises rotation matrix R
eRiwith translation vector t
eRi.
(9) formula is launched to obtain:
Control mechanical arm, can obtain just to repetitive measurement impact point M:
1) rotation matrix R
cEsolve
If in motion process, the attitude of robot remains unchanged is R
eR1=R
eR2=...=R
eRn=R
0.
Due to R
0be orthogonal matrix, namely have
can be obtained by repetitive measurement:
Order
then (12) formula can be written as R
cEa
1=b
1matrix equation, solve by decomposition of singular matrix method (SVD) Q, namely
R
CE=VU
T⒀
Wherein V and U is respectively matrix
right singular matrix and left singular matrix.
2) translation vector t
cE
Can obtain according to formula (10):
The multiple attitude of control mechanical arm is carried out detection to impact point and can be obtained type as A
2t
cE=b
2
Wherein A
2=[R
eR2-R
eR1r
eR3-R
eR1r
eRn-R
eR1], b
2=[R
eR1r
cEm
1 c-
R
ER2R
CEM
2 C+t
ER1-t
ER2R
ER1R
CEM
1 C-R
ER3R
CEM
3 C+t
ER1-t
ER3…
R
ER1R
CEM
1 C-R
ERnR
CEM
n C+t
ER1-t
ERn]。
Claims (1)
1. robotic laser's scanning type weld seam tracking system calibrating method, is characterized in that the method comprises the following steps:
Step 1. adopts demarcates the video camera in sensor based on plane template, by moving freely sensor, making camera acquisition arrive the template image of at least three diverse locations, solving the inner parameter of video camera according to the principle of least square;
Step 2. asks for the image coordinate that on laser plane, infinite point a bit projects in video camera, demarcates structured light, specifically:
To demarcate target horizontal positioned, and regulate the position of sensor, and make the optical axis of video camera perpendicular to demarcation target, laser plane and two parallel lines meet at A, B 2 point, and control video camera moves along optical axis direction, obtains a series of intersection point A
i, B
i, i=1,2 ... n, it is projected as a in video camera
i, b
i; Intersection point A
i, B
ilaser plane forms two parallel lines, and it at infinity meets at a bit; By a
iwith b
ifit to straight line respectively, on the intersection point of two straight lines and laser plane, infinite point a bit projects in video camera;
There is 1 P (x in laser plane
c, y
c, z
c) be p (x, y) in the picture point of the plane of delineation; According to triangulation principle:
The P that sets up an office be on laser plane infinite point a bit, i.e. (x
c, y
c, z
c) → ∞, z
c→ ∞, can learn fcot θ-x
∞→ 0 and get final product:
cotθ=x
∞/f⑷
Wherein, x
∞for the image coordinate that infinite point on laser plane a bit projects in video camera; If will
write as total differential form, can be obtained:
If make Δ x=0 namely can obtain:
(6) can be obtained by formula:
Wherein, x is the image coordinate of current goal point; If Δ y can be controlled
c, and obtaining corresponding Δ y by image procossing, then the long b of the base of structured light can determine;
The sensor demarcated is fixed on arm end by ring flange by step 3., uses same impact point in sensor detection space, solve the transition matrix of camera coordinate system and arm end coordinate system by the attitude changing robot, specifically:
By changing the same impact point M of attitude repeated detection of robot, robot is under i-th pose, and the coordinate of impact point M under camera coordinate system is M
i c, the coordinate under basis coordinates system of robot is M
r, there is following transformational relation:
Wherein, T
eRifor robot i-th pose, arm end, relative to the transition matrix of basis coordinates system, comprises rotation matrix R
eRiwith translation vector t
eRi;
(9) formula is launched to obtain:
Control mechanical arm, can obtain just to repetitive measurement impact point M:
1) rotation matrix R
cEsolve
If in motion process, the attitude of robot remains unchanged is R
eR1=R
eR2=...=R
eRn=R
0;
Due to R
0be orthogonal matrix, namely have
can be obtained by repetitive measurement:
Order
Then (12) formula can be written as R
cEa
1=b
1matrix equation, solve by decomposition of singular matrix method Q, namely
R
CE=VU
T⒀
Wherein V and U is respectively matrix
right singular matrix and left singular matrix;
2) translation vector t
cE
Can obtain according to formula (10):
The multiple attitude of control mechanical arm is carried out detection to impact point and can be obtained type as A
2t
cE=b
2
Wherein A
2=[R
eR2-R
eR1r
eR3-R
eR1r
eRn-R
eR1],
b
2=[R
ER1R
CEM
1 C-R
ER2R
CEM
2 C+t
ER1-t
ER2R
ER1R
CEM
1 C-R
ER3R
CEM
3 C+t
ER1-t
ER3…R
ER1R
CEM
1 C-R
ERnR
CEM
n C+t
ER1-t
ERn]。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510607458.8A CN105303560B (en) | 2015-09-22 | 2015-09-22 | Robotic laser scanning type weld seam tracking system calibrating method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510607458.8A CN105303560B (en) | 2015-09-22 | 2015-09-22 | Robotic laser scanning type weld seam tracking system calibrating method |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105303560A true CN105303560A (en) | 2016-02-03 |
CN105303560B CN105303560B (en) | 2018-01-12 |
Family
ID=55200782
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201510607458.8A Expired - Fee Related CN105303560B (en) | 2015-09-22 | 2015-09-22 | Robotic laser scanning type weld seam tracking system calibrating method |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN105303560B (en) |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105716527A (en) * | 2016-04-18 | 2016-06-29 | 中国计量学院 | Laser-welding seam tracking sensor calibration method |
CN106066185A (en) * | 2016-05-24 | 2016-11-02 | 华南理工大学 | A kind of line laser sensor automatic calibration device towards weld joint tracking and method |
CN107144236A (en) * | 2017-05-25 | 2017-09-08 | 西安交通大学苏州研究院 | A kind of robot automatic scanner and scan method |
CN109623822A (en) * | 2018-12-28 | 2019-04-16 | 芜湖哈特机器人产业技术研究院有限公司 | Robotic Hand-Eye Calibration method |
CN109764805A (en) * | 2018-12-10 | 2019-05-17 | 中国铁建重工集团有限公司 | A kind of mechanical arm positioning device and method based on laser scanning |
CN110009685A (en) * | 2018-12-29 | 2019-07-12 | 南京衍构科技有限公司 | A kind of laser camera hand and eye calibrating method increasing material applied to electric arc |
CN110044259A (en) * | 2019-04-04 | 2019-07-23 | 上海交通大学 | A kind of gathering pipe flexible measurement system and measurement method |
CN110102856A (en) * | 2019-05-28 | 2019-08-09 | 广州工顺焊接科技有限公司 | A kind of method of the 3D scanning weld seam of laser scanning weld seam equipment |
CN110251209A (en) * | 2019-05-24 | 2019-09-20 | 北京贝麦克斯科技有限公司 | A kind of bearing calibration and device |
CN110480181A (en) * | 2018-06-16 | 2019-11-22 | 南京理工大学 | The target prediction method of foreign matter device is removed based on laser |
CN112729779A (en) * | 2020-12-25 | 2021-04-30 | 中冶南方工程技术有限公司 | Robot handheld laser sensor optical axis adjusting method and robot |
CN112971984A (en) * | 2021-02-05 | 2021-06-18 | 上海阅行医疗科技有限公司 | Coordinate registration method based on integrated surgical robot |
CN113418927A (en) * | 2021-06-08 | 2021-09-21 | 长春汽车工业高等专科学校 | Automobile mold visual detection system and detection method based on line structured light |
CN113825980A (en) * | 2019-07-19 | 2021-12-21 | 西门子(中国)有限公司 | Robot eye calibration method, device, computing equipment, medium and product |
CN115032944A (en) * | 2022-08-12 | 2022-09-09 | 山东睿鑫激光科技有限公司 | Laser welding control method based on machine vision |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000111320A (en) * | 1998-10-05 | 2000-04-18 | Monorisu:Kk | Information acquisition device in three-dimensional shape |
CN103558850A (en) * | 2013-07-26 | 2014-02-05 | 无锡信捷电气股份有限公司 | Laser vision guided welding robot full-automatic movement self-calibration method |
KR20140090872A (en) * | 2013-01-10 | 2014-07-18 | (주)팜비젼 | Camera Calibration Apparatus and Method |
CN104197960A (en) * | 2014-09-15 | 2014-12-10 | 北京航空航天大学 | Global calibration method for vision-guided camera of laser tracker |
-
2015
- 2015-09-22 CN CN201510607458.8A patent/CN105303560B/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000111320A (en) * | 1998-10-05 | 2000-04-18 | Monorisu:Kk | Information acquisition device in three-dimensional shape |
KR20140090872A (en) * | 2013-01-10 | 2014-07-18 | (주)팜비젼 | Camera Calibration Apparatus and Method |
CN103558850A (en) * | 2013-07-26 | 2014-02-05 | 无锡信捷电气股份有限公司 | Laser vision guided welding robot full-automatic movement self-calibration method |
CN104197960A (en) * | 2014-09-15 | 2014-12-10 | 北京航空航天大学 | Global calibration method for vision-guided camera of laser tracker |
Non-Patent Citations (3)
Title |
---|
MIN-GOO KANG等: "Laser Vision System for Automatic Seam Tracking of Stainless Pipe Welding Machine (ICCAS 2007)", 《INTERNATIONAL CONFERENCE ON CONTROL,AUTOMATION AND SYSTEM 2007》 * |
刘少林等: "激光视觉焊缝跟踪系统设计与关键技术", 《电焊机》 * |
张虓等: "结构光视觉焊缝跟踪传感器光学系统的研究", 《电焊机》 * |
Cited By (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105716527B (en) * | 2016-04-18 | 2018-01-12 | 中国计量学院 | Laser seam tracking transducer calibration method |
CN105716527A (en) * | 2016-04-18 | 2016-06-29 | 中国计量学院 | Laser-welding seam tracking sensor calibration method |
CN106066185A (en) * | 2016-05-24 | 2016-11-02 | 华南理工大学 | A kind of line laser sensor automatic calibration device towards weld joint tracking and method |
CN106066185B (en) * | 2016-05-24 | 2018-05-15 | 华南理工大学 | A kind of line laser sensor automatic calibration device and method towards weld joint tracking |
CN107144236A (en) * | 2017-05-25 | 2017-09-08 | 西安交通大学苏州研究院 | A kind of robot automatic scanner and scan method |
CN110480181A (en) * | 2018-06-16 | 2019-11-22 | 南京理工大学 | The target prediction method of foreign matter device is removed based on laser |
CN109764805B (en) * | 2018-12-10 | 2021-04-27 | 中国铁建重工集团股份有限公司 | Mechanical arm positioning device and method based on laser scanning |
CN109764805A (en) * | 2018-12-10 | 2019-05-17 | 中国铁建重工集团有限公司 | A kind of mechanical arm positioning device and method based on laser scanning |
CN109623822A (en) * | 2018-12-28 | 2019-04-16 | 芜湖哈特机器人产业技术研究院有限公司 | Robotic Hand-Eye Calibration method |
CN109623822B (en) * | 2018-12-28 | 2022-05-27 | 芜湖哈特机器人产业技术研究院有限公司 | Robot hand-eye calibration method |
CN110009685A (en) * | 2018-12-29 | 2019-07-12 | 南京衍构科技有限公司 | A kind of laser camera hand and eye calibrating method increasing material applied to electric arc |
CN110009685B (en) * | 2018-12-29 | 2022-02-22 | 南京衍构科技有限公司 | Laser camera hand-eye calibration method applied to electric arc material increase |
CN110044259B (en) * | 2019-04-04 | 2022-08-02 | 上海交通大学 | Folding pipe flexibility measuring system and measuring method |
CN110044259A (en) * | 2019-04-04 | 2019-07-23 | 上海交通大学 | A kind of gathering pipe flexible measurement system and measurement method |
CN110251209A (en) * | 2019-05-24 | 2019-09-20 | 北京贝麦克斯科技有限公司 | A kind of bearing calibration and device |
CN110102856A (en) * | 2019-05-28 | 2019-08-09 | 广州工顺焊接科技有限公司 | A kind of method of the 3D scanning weld seam of laser scanning weld seam equipment |
CN113825980A (en) * | 2019-07-19 | 2021-12-21 | 西门子(中国)有限公司 | Robot eye calibration method, device, computing equipment, medium and product |
CN113825980B (en) * | 2019-07-19 | 2024-04-09 | 西门子(中国)有限公司 | Robot hand-eye calibration method, device, computing equipment and medium |
CN112729779B (en) * | 2020-12-25 | 2023-02-24 | 中冶南方工程技术有限公司 | Robot handheld laser sensor optical axis adjusting method and robot |
CN112729779A (en) * | 2020-12-25 | 2021-04-30 | 中冶南方工程技术有限公司 | Robot handheld laser sensor optical axis adjusting method and robot |
CN112971984B (en) * | 2021-02-05 | 2022-05-31 | 上海阅行医疗科技有限公司 | Coordinate registration method based on integrated surgical robot |
CN112971984A (en) * | 2021-02-05 | 2021-06-18 | 上海阅行医疗科技有限公司 | Coordinate registration method based on integrated surgical robot |
CN113418927A (en) * | 2021-06-08 | 2021-09-21 | 长春汽车工业高等专科学校 | Automobile mold visual detection system and detection method based on line structured light |
CN115032944A (en) * | 2022-08-12 | 2022-09-09 | 山东睿鑫激光科技有限公司 | Laser welding control method based on machine vision |
CN115032944B (en) * | 2022-08-12 | 2022-10-25 | 山东睿鑫激光科技有限公司 | Laser welding control method based on machine vision |
Also Published As
Publication number | Publication date |
---|---|
CN105303560B (en) | 2018-01-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN105303560A (en) | Robot laser scanning welding seam tracking system calibration method | |
CN102607457B (en) | Measuring device and measuring method for large three-dimensional morphology based on inertial navigation technology | |
CN102927908B (en) | Robot eye-on-hand system structured light plane parameter calibration device and method | |
CN106524945B (en) | A kind of plane included angle On-line Measuring Method based on mechanical arm and structure light vision | |
CN109676243A (en) | Weld distinguishing and tracking system and method based on dual laser structure light | |
CN104034263B (en) | A kind of non-contact measurement method of forging's block dimension | |
CN1939638B (en) | Display method for laser irradiations state and display system of laser irradiation state | |
CN108827264B (en) | Mobile workbench and its mechanical arm optics target positioning device and localization method | |
CN110906863B (en) | Hand-eye calibration system and calibration method for line-structured light sensor | |
CN105798909A (en) | Calibration system and method of zero position of robot based on laser and vision | |
Luna et al. | Calibration of line-scan cameras | |
DE112012001254T5 (en) | Automatic measurement of dimension data with a laser tracker | |
CN103134387B (en) | Low altitude low speed small target detection and interception system calibration method | |
CN103398660A (en) | Structured light visual sensor parameter calibration method for acquiring height information of welded joint | |
CN104613899A (en) | Full-automatic calibration method for structured light hand-eye three-dimensional measuring system | |
CN103438798A (en) | Initiative binocular vision system overall calibration method | |
CN105716527A (en) | Laser-welding seam tracking sensor calibration method | |
CN102944188A (en) | Calibration method of spot scanning three-dimensional topography measuring system | |
CN109227551A (en) | A kind of vision positioning Robot Hand-eye coordinate transformation method | |
CN109623822A (en) | Robotic Hand-Eye Calibration method | |
CN110211175B (en) | Method for calibrating space pose of collimated laser beam | |
CN102679875B (en) | Active target and method for calibrating beam-target coupling sensor on line by using same | |
CN103759637A (en) | Auxiliary measuring target | |
CN102538707A (en) | Three dimensional localization device and method for workpiece | |
CN203657743U (en) | Auxiliary measurement target |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180112 Termination date: 20200922 |
|
CF01 | Termination of patent right due to non-payment of annual fee |