CN103056517A - Three-dimensional laser washing device - Google Patents
Three-dimensional laser washing device Download PDFInfo
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- CN103056517A CN103056517A CN2012105829407A CN201210582940A CN103056517A CN 103056517 A CN103056517 A CN 103056517A CN 2012105829407 A CN2012105829407 A CN 2012105829407A CN 201210582940 A CN201210582940 A CN 201210582940A CN 103056517 A CN103056517 A CN 103056517A
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Abstract
The utility model discloses a three-dimensional laser washing device. The three-dimensional laser washing device comprises a pulsed laser with indicating red light and a control system of the same pulsed laser, a beam spread collimation optical system, a two-dimensional optical scanning galvanometer and a controller of the same two-dimensional optical scanning galvanometer, a focusing position regulator and a displacement controller. The focusing position regulator consists of a focusing lens, a filter, a microscopic imaging lens, a CCD (Charge Coupled Device) and a processor, wherein the focusing lens is fixed with the microscopic imaging lens, the indicating red light of the pulsed laser reflects on the sample and images on the CCD (Charge Coupled Device), the microscopic imaging lens moves longitudinally to find a position where the contrast ratio is the highest and the image edge is the clearest, the position is a focus position of the focusing lens, and the three-dimensional laser washing device consists of the two-dimensional scanning galvanometer and the focusing lens. The three-dimensional laser washing device makes full use of the two-dimensional laser washing device which is based on the optical galvanometer scanning system, presetting the surface shape of the washing material is not required before cleaning, thereby having the advantages of being wide in application, simple in structure, good in stability, easy to debug, and the like.
Description
Technical field
The invention belongs to the laser cleaning field, relate in particular to a kind of based on optics two-dimensional scan galvanometer and can be according to the three-dimensional laser cleaning device that is cleaned the material surface shape and automatically regulates.
Technical background
Laser cleaning is a kind of novel green cleaning mode, can clean the various types of pollutants of various material surfaces, and it has the convenient advantages such as remote and automation mechanized operation that realize.Laser cleaner substantially all is for planar structure at present, adopts the optics galvanometer scanning system to realize the two dimension cleaning.The operation principle of optics galvanometer scanning system is to be moved by two scanning galvanometer control x direction of principal axis and y direction of principal axis after the laser alignment of laser instrument output, to converge to material surface by condenser lens again.This system has that output torque is large, rotary inertia is little, speed is fast, precision is high and the characteristics such as stable, therefore is widely used in the laser cleaning field of a lot of materials.But in practical application, be not the plane in a lot of situations of the material surface that is cleaned, but the curve of certain variation is arranged, therefore the complete practical requirement of this 2-D optical scanning galvanometer is necessary the scan laser cleaning device in 2-D vibration mirror scan laser cleaning device basis design three-dimensional.
Summary of the invention
The purpose of this invention is to provide a kind of three-dimensional laser cleaning device, this installs based on the two-dimension optical galvanometer scanning system, has realized the adjustment of x, y in the laser cleaning process, three directions of z, has realized that the three-dimensional of material surface is cleaned.
Technical scheme of the present invention is: a kind of laser three-D cleaning device, comprise pulse laser and control system, beam-expanding collimation optical system, the first scanning galvanometer, the first scanning galvanometer controller, the second scanning galvanometer, the second scanning galvanometer controller, condenser lens, focal position adjustment device and displacement controller, wherein the focal position adjustment device comprises wave filter, micro-imaging lens, CCD and processor.Described pulse laser and control system are with indication ruddiness, and the beam-expanding collimation optical system becomes directional light with the laser bundle-enlarging collimation that laser instrument sends.
Described the first scanning galvanometer and the first scanning galvanometer controller control laser beam x direction move, and described the second scanning galvanometer and the second scanning galvanometer controller control laser beam y direction move, and form the two-dimensional scan galvanometer system.Described condenser lens control laser beam z direction moves, and the condenser lens central shaft overlaps with two-dimensional scan galvanometer central shaft.
Described wave filter, micro-imaging lens, CCD, processor and displacement controller form automatic focusing system, the center of its median filter, micro-imaging lens and CCD is on same optical axis, described optical axis when automatic focusing and two-dimensional scan galvanometer central shaft intersect at the center of micro-imaging lens, and become a small angle θ, θ is determined by the sweep limits of two-dimensional scan galvanometer, assurance allows indication ruddiness pass through, and can image in CCD by on the paracentral position at the reflection luminous energy on the sample by indication ruddiness, experimental results show that 10 °～20 ° of θ spans are advisable.
The position of described micro-imaging lens is fixed on indication ruddiness before cleaning the highest at the image contrast that CCD becomes, and the most clear place, edge.Described condenser lens is fixed on the focusing regulator, and described condenser lens and micro-imaging lens relative position fix, and described displacement controller control focusing regulator is mobile in the z-direction.。
When carrying out laser cleaning, clean and focus on material surface with collimated laser beam through two-dimensional scan galvanometer and condenser lens.Laser instrument sent indication ruddiness after cleaning was finished, and condenser lens shifts out, and autofocus system moves into, indication ruddiness images on the CCD at the reverberation on the sample, and when sample was positioned at micro-imaging lens focus position, the picture picture of one-tenth was the most clear, contrast is the highest, and the edge is the most clear; When sample during away from the focal position, contrast descends, edge blurry, and this moment, the micro-imaging lens moved forward and backward, and searched out the high rim of contrast and stopped the position the most clearly, finished focusing.Because condenser lens and micro-imaging lens are fixed together, so condenser lens and sample are also at a distance of the position of focal length.After focusing was finished, laser instrument sent cleaning laser again, again began to clean.
The present invention is on the two-dimensional laser cleaning device basis based on the optics galvanometer scanning system commonly used, the indication ruddiness that utilizes laser instrument to carry, when the reverberation of indication ruddiness on sample passes through the autofocus system imaging, regulate contrast position the highest and that the edge cleans most and finish the focusing of z axle, thereby realized the laser three-D cleaning.This device takes full advantage of existing equipment, and need not to set in advance the cleaning material surface configuration before cleaning, and applied range, is easy to the advantage such as debugging at simple in structure, good stability.
Description of drawings
Fig. 1 laser three-D cleaning device figure;
Fig. 2 automatic focusing device figure;
Wherein: 1 pulse laser and control system; 2 beam-expanding collimation optical systems; 3 cleaning collimated laser beams; 4 first scanning galvanometers; 5 first scanning galvanometer controllers; 6 second scanning galvanometers; 7 second scanning galvanometer controllers; 8 condenser lenses; 9 focal position adjustment devices; 10 displacement controllers; 11 samples; 12 indication ruddiness; 13 wave filters; 14 micro-imaging lens; 15 CCD; 16 processors.
The specific embodiment
A kind of laser three-D cleaning device comprises pulse laser and control system 1, beam-expanding collimation optical system 2, cleans with collimated laser beam 3, the first scanning galvanometer 4, the first scanning galvanometer controller 5, the second scanning galvanometer 6, the second scanning galvanometer controller 7, condenser lens 8, focal position adjustment device 9, displacement controller 10.Pulse laser and control system 1 are with indication ruddiness, and beam-expanding collimation optical system 2 becomes directional light with the laser bundle-enlarging collimation that laser instrument sends.During laser cleaning, the first scanning galvanometer 4 and the first scanning galvanometer controller 5 control laser beam x directions move, the second scanning galvanometer and the second scanning galvanometer controller control laser beam y direction move, the first scanning galvanometer and the second scanning galvanometer form the two-dimensional scan galvanometer, and condenser lens 8 and focal position adjustment device 9 control laser beam z directions move.Condenser lens 8 central shafts overlap with two-dimensional scan galvanometer central shaft, and both form together three-dimensional laser and clean.
Focal position adjustment device 9 comprises wave filter 13, micro-imaging lens 14, CCD15 and processor 16.Wave filter 13 filtering veiling glares only allow the ruddiness of 632.8nm pass through.Focal position adjustment device 9 and displacement controller 10 form automatic focusing system.The operation principle of automatic focusing system is when the object reflection ray converges on the CCD15 through the micro-imaging lens, if when object is positioned at micro-imaging lens 14 focal position, the picture picture of one-tenth is the most clear, and contrast is the highest, and the edge is the most clear; When sample during away from the focal position, contrast descends, edge blurry, and this moment, the micro-imaging lens moved forward and backward, and searched out the high rim of contrast and stopped the position the most clearly, just can finish focusing.Before carrying out the cleaning first time, indication ruddiness converges on the CCD15 through micro-imaging lens 14 at the reflection ray on the sample, micro-imaging lens 14 are regulated in front and back, it is the highest to seek image contrast, and the most clear place, edge, be the initial position of micro-imaging lens 14, then condenser lens 8 and micro-imaging lens 14 be fixed together, can move forward and backward in the z direction.
After this laser cleaning was finished, laser instrument 1 was launched indication ruddiness 12, and condenser lens 8 shifts out light path, and automatic focusing system moves into light path.The central shaft of two-dimensional scan galvanometer is by the center of micro-imaging lens 14, the central shaft that micro-imaging lens 14, wave filter 13 and CCD15 form becomes a small angle θ with two-dimensional scan galvanometer central shaft, this angle guarantees that automatic focusing system had both allowed indication ruddiness pass through, and indication ruddiness can be imaged in CCD by on the paracentral position at the reflection luminous energy on the sample again.Experimental results show that 10 °～20 ° of θ spans are advisable.At this moment, indication ruddiness images on the CCD at the reverberation on the sample, moves forward and backward micro-imaging lens 14, if the picture picture that becomes is the most clear, contrast is the highest, and the edge is the most clear, then regulate micro-imaging lens 14 in this position.Because condenser lens 8 and micro-imaging lens 14 are fixed together, so condenser lens 8 and sample are finished focusing also at a distance of the position of focal length.Shift out automatic focusing system, move into condenser lens 8, again start laser instrument and clean.
The present invention is on the two-dimensional laser cleaning device basis based on the optics galvanometer scanning system commonly used, the indication ruddiness that utilizes laser instrument to carry, when the reverberation of indication ruddiness on sample passes through the autofocus system imaging, the adjusting contrast is the highest finishes the focusing of z axle in the position the most clearly with the edge, thereby has realized the laser three-D cleaning.This device takes full advantage of existing equipment, and need not to set in advance the cleaning material surface configuration before cleaning, and applied range, is easy to the advantage such as debugging at simple in structure, good stability.
Embodiment
Adopt the 1064nm solid state laser, frequency is 5Hz, and the focal length of SamLight 2-D optical scanning galvanometer and 254nm cleans, and wave filter only allows the light of 632.8nm pass through, and imaging len is also selected 254nm, and θ=15 ° adopt industrial area array CCD to gather image.
Claims (4)
1. laser three-D cleaning device, comprise pulse laser and control system (1), beam-expanding collimation optical system (2), the first scanning galvanometer (4), the first scanning galvanometer controller (5), the second scanning galvanometer (6), the second scanning galvanometer controller (7), condenser lens (8), focal position adjustment device (9) and displacement controller (10), wherein focal position adjustment device (9) comprises wave filter (13), micro-imaging lens (14), CCD (15) and processor (16); It is characterized in that, described the first scanning galvanometer (4) and the first scanning galvanometer controller (5) control laser beam x direction move, described the second scanning galvanometer (6) and the second scanning galvanometer controller (7) control laser beam y direction move, described the first scanning galvanometer (4) and the second scanning galvanometer (6) form the two-dimensional scan galvanometer, described condenser lens (8) control laser beam z direction moves, and the condenser lens central shaft overlaps with two-dimensional scan galvanometer central shaft; Described pulse laser and control system (1) are with indication ruddiness, described condenser lens (8) is fixed on the focusing regulator (9), and described condenser lens (8) and micro-imaging lens (14) relative position are fixed, and described displacement controller control focusing regulator (9) is mobile in the z-direction.
2. a kind of laser three-D cleaning device according to claim 1, it is characterized in that, described wave filter (13), micro-imaging lens (14), CCD (15), processor (16) and displacement controller (10) form automatic focusing system, the center of described wave filter (13), micro-imaging lens (14) and CCD (15) is on same optical axis, described optical axis and two-dimensional scan galvanometer central shaft be θ at an angle, and intersects at the center of micro-imaging lens (14) when focusing.
3. a kind of laser three-D cleaning device according to claim 1 is characterized in that, the initial position of described micro-imaging lens (14) is arranged on the reverberation of indication ruddiness at CCD(15) the upper the highest and the most clear place, edge of image contrast.
4. a kind of laser three-D cleaning device according to claim 2 is characterized in that, 10 ° ~ 20 ° of the spans of described θ.
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Application publication date: 20130424 |