CN105583200A - Laser cleaning equipment - Google Patents
Laser cleaning equipment Download PDFInfo
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- CN105583200A CN105583200A CN201610070415.5A CN201610070415A CN105583200A CN 105583200 A CN105583200 A CN 105583200A CN 201610070415 A CN201610070415 A CN 201610070415A CN 105583200 A CN105583200 A CN 105583200A
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- laser
- scanning galvanometer
- cleaning equipment
- cleaning
- generating system
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
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- Optics & Photonics (AREA)
- Laser Beam Processing (AREA)
- Cleaning In General (AREA)
Abstract
The invention relates to laser cleaning equipment. The laser cleaning equipment comprises a laser generating system, a light beam shaping system and a control system, and further comprises a detecting system, a 3D scanning galvanometer and a focusing system, wherein the laser generating system is used for generating a laser beam; the light beam shaping system is arranged on a laser beam light path; the laser beam is emitted by the laser generating system, sequentially passes through the light beam shaping system, the 3D scanning galvanometer and the focusing system until a to-be-cleaned workpiece; and the control system is used for dynamically regulating a focal position of the laser beam and completing cleaning work in real time by controlling the laser generating system, the detecting system and the 3D scanning galvanometer. According to the laser cleaning equipment, the 3D scanning galvanometer is adopted, so that high-precision cleaning with precision being a micron dimension of a curved-surface object or a plant object can be realized; and an XY working platform system also can be adopted to realize large-scale cleaning operation. Besides, the invention further discloses a splicing type cleaning mode based on the XY working platform and portable cleaning equipment based on the 3D scanning galvanometer.
Description
Technical field
The invention belongs to the technical field of laser application, be specifically related to the laser cleaning equipment of a kind of laser cleaning equipment, particularly a kind of curved surface or large format.
Background technology
Conventional clean industrial equipment has various cleaning ways, is mostly to utilize chemical agent and mechanical means to clean. Today that, people environmental protection more and more stricter at China environmental protection laws and regulations requirement and awareness of safety strengthen day by day, industrial production clean in operable chemicals kind will become fewer and feweri. How to find more cleanly, and the abrasive cleaning way of tool is not that we must not irrespective problem. And laser cleaning has without grinding, noncontact, low thermal effect and be applicable to the cleaning characteristicses such as the object of various materials, be considered to the most reliably, the most effective solution. When in cleaning process, especially effects on surface is stained with the contamination particle of submicron order, these particles are often very tightly sticky, and conventional cleaning way can not be removed it, cleans very effective with this laser emission surface of the work. Because laser is contactless cleaning to workpiece, precision workpiece or its meticulous position are cleaned fool proof, and clean that precision is high to be widely accepted.
Existing laser cleaning machine adopts approximately 1 μ m optical maser wavelength mostly, and for example the SLCR company of Germany just adopts 1 mum wavelength. Because metal pair 1 mum wavelength laser absorption rate is quite high, so the materials such as dust, greasy dirt are cleaned, metal surface also can be injured. Cleaning the world 2006,22(4): in 27-32 laser cleaning equipment introduction, just mention and adopt 10.6 mum wavelengths to clean, what but this technical scheme adopted is the mode that adds object carrier on platform, because platform load is large, in the time cleaning high accuracy small items, can cause the shortcomings such as cleaning efficiency is low, precision is high not.
Summary of the invention
For overcoming the deficiencies in the prior art, the present invention proposes a kind of environment-protecting clean, high accuracy, low thermal effect and the abrasive cleaning device of tool not.
The technical scheme of laser cleaning equipment of the present invention is:
A kind of laser cleaning equipment, comprises laser generating system, beam shaping system, and control system, described laser generating system generation laser beam, described beam shaping system is arranged in laser beam light path, also comprises detection system, 3D scanning galvanometer and focusing system. Described laser beam, is sent by described laser generating system, successively by described beam shaping system, 3D scanning galvanometer and focusing system until workpiece to be cleaned; Described control system is by controlling described laser generating system, and detection system and 3D scanning galvanometer, dynamically adjust in real time laser beam foucing position and complete cleaning.
Further, also comprise XY workbench, XY workbench work described in described control system control, described laser generating system, beam shaping system, 3D scanning galvanometer are installed on described XY workbench.
Further, described beam shaping system also comprises polarization by reflection unit, and described polarization by reflection unit comprises the cross-polarization eyeglass of parallel placement or polarized lenses and the reflecting optics of parallel placement.
Further, the cross-polarization eyeglass of described parallel placement be the polarized lenses of 2 or described parallel placement and reflecting optics everybody 1.
Further, described focusing system comprises varifocal mirror group.
Further, described varifocal mirror group is zoom lens.
Further, described varifocal mirror group is moving lens group, and described moving lens group is connected with motor, and described motor is installed on support, and by controlled motion in described control system.
Further, described detection system is laser ranging module, and described laser ranging module is sent distance measuring light beam, and described distance measuring light beam is coaxial with the laser beam that described laser generating system sends.
Further, described laser ranging module comprises light combination mirror, and plate described laser beam anti-reflection film on described light combination mirror eyeglass two sides, plates the reflectance coating of described distance measuring light beam in light combination mirror lens reflecting one side.
Further, described detection system is the visual module of CCD, the coaxial setting of laser beam or paraxonic setting that the visual module of described CCD and described laser generating system send.
Second technical scheme of the present invention is:
A kind of big width laser cleaning method, comprises following step:
1, workpiece drawing to be cleaned is imported to described control system;
2, described control system becomes multiple cleaning parts according to workpiece drawing to be cleaned and described XY workbench working range auto Segmentation;
3, XY workbench, described laser generating system described in control system control, detection system and 3D scanning galvanometer, subregion is cleaned, until cleaning completes.
The 3rd technical scheme of the present invention is:
A kind of portable laser cleaning equipment, comprises laser generating system, beam shaping system, control system, detection system, 3D scanning galvanometer and focusing system; Described laser generating system generation laser beam, described beam shaping system is arranged in laser beam light path, and described focusing system is zoom lens and is arranged at described 3D scanning galvanometer end; Described laser beam, is sent by described laser generating system, successively by described beam shaping system, 3D scanning galvanometer and zoom lens until workpiece to be cleaned; Described control system, by controlling described laser generating system, detection system and 3D scanning galvanometer, is dynamically adjusted in real time laser beam foucing position and completes cleaning.
Technical solution of the present invention has the following advantages:
The present invention has adopted 3D scanning galvanometer system, can curved face object or the high accuracy of planar object clean, precision reaches micron dimension; Adopt XY Work platform system, also can realize large format washing and cleaning operation.
Brief description of the drawings
Fig. 1 is the design diagram of laser cleaning equipment of the present invention;
Fig. 2 a is the structural representation of laser cleaning equipment of the present invention;
Fig. 2 b is Fig. 2 a laser cleaning device A direction structure view;
Fig. 3 is the optical component structure schematic diagram of laser cleaning equipment of the present invention;
Fig. 4 is that the visual module of the CCD of laser cleaning equipment of the present invention and laser beam coaxially arrange structural representation;
Fig. 5 is that the visual module of the CCD of laser cleaning equipment of the present invention and laser beam paraxonic arrange structural representation;
Fig. 6 is the Special-shaped object shape schematic diagram to be cleaned as example;
Wherein:
1, laser generating system; 2, beam shaping system; 3, detection system; 4, control system; 5,3D scanning galvanometer; 6, focusing system; 7, workpiece; 8, XY workbench; 9, polarization by reflection unit; 10, mechanical support frame; 11, the visual module of CCD; 12, fixed mount; 13, coaxial optical system; 14, the visual module fixing rack of CCD; 15,45 ° of speculums.
Detailed description of the invention
The principle of laser cleaning machine, utilizes the superlaser that focuses on pollutant surface by pollutant ablation gasification, and does not hurt workpiece body. As higher to laser absorption rate in glue, dust, grease and other nonmetallic materials, and workpiece body is less to laser absorption, but or workpiece body absorbing laser body larger with respect to pollutant, heat radiation is very fast, do not injure workpiece body, and pollutant is vaporized. The present invention propose to utilize high-energy laser (both can approximately 1 μ m, can be also 10.6 μ m, more can other wavelength laser instrument) device that cleans. In addition, can change different wave length laser instrument according to the difference of pollutant and workpiece material. Metal, some plastics can be with 10.6 mum wavelength laser instruments as PT, PC, PE etc. and paper object, and some object can be by 1 mum wavelength laser cleaning, and also some particular matter can be used other long wavelength lasers.
Below in conjunction with accompanying drawing, by embodiment, technical solution of the present invention is described further.
Shown in a and Fig. 2 b, a kind of laser cleaning equipment, comprises laser generating system 1, beam shaping system 2, detection system 3, control system 4,3D scanning galvanometer 5 and focusing system 6 as shown in Figure 1, Figure 2.
When cleaning workpiece area is greater than 300mm × 300mm, can increase XY workbench 8, described in this embodiment, XY workbench 8 adopts planer-type workbench. Described 3D scanning galvanometer 5 is arranged on described planer-type workbench and works, and increases cleaning area.
As shown in Figure 3, there is laser beam in described laser generating system 1, described laser beam successively by described beam shaping system 2, detection system 3,3D scanning galvanometer 5 and focusing system 6 until workpiece to be cleaned 7. Described control system 4 is by controlling described laser generating system 1, and detection system 3 and 3D scanning galvanometer 5, adjust in real time laser beam foucing position and complete cleaning.
Described beam shaping system 2 is carried out shaping to laser beam. Described beam shaping system 2 also comprises cross-polarization unit 9, and cross-polarization unit 9 comprises 2 polarized lenses of parallel placement, prevents that the laser of workpiece reflection from causing damage to optics.
As a kind of embodiment, described detection system 3 can be selected laser ranging module, whether is accurately positioned at irradiated surface of the work for detection of current laser beam foucing, and error is no more than the depth of focus size of optical focusing system. Described laser ranging module is sent distance measuring light beam, and distance measuring light beam is coaxial with the laser beam that described laser generating system 1 sends, and can directly measure the surface of the work of current laser beam irradiation and the distance of described focusing system 6, thereby judge whether in focal position; If not, adjusting laser beam foucing position makes it accurately be positioned surface of the work. Described laser ranging module also comprises light combination mirror, and plate described laser beam anti-reflection film on described light combination mirror eyeglass two sides, plates the reflectance coating of described distance measuring light beam in light combination mirror lens reflecting one side.
As another kind of embodiment, described detection system 3 also can be selected the visual module 11 of CCD, and the visual module 11 of described CCD is for monitoring, observation cleaning performance. As shown in Figure 4, the visual module 11 of described CCD coaxially arranges with the laser beam that described laser generating system 1 sends, the fixing described beam shaping system 2 of described fixed mount 12 and described coaxial optical system 13. As shown in Figure 5, the laser beam that the visual module of described CCD 11 and described laser generating system 1 send also can paraxonic setting, and the visual module fixing rack 14 of described CCD is for the visual module 11 of fixation of C CD, and described 45 ° of speculums 15 are for launching paraxonic light path.
Described 3D scanning galvanometer 5 is controlled by control system 4, makes laser requirement campaign according to the rules by reflection. For cleaning general regular planar, 2D galvanometer can reach scanning cleaning function. But when occurring special-shaped object, or irregular surface, as shown in Figure 6, laser arrives 3D scanning galvanometer 5 by beam shaping system 2, under control system 4 is controlled, makes laser orbiting motion according to the rules, thereby carries out the high accuracy scanning cleaning of special-shaped object. Precision reaches micron dimension, and the high accuracy that does not also affect planar object is simultaneously cleaned.
Described focusing system 6 can make Laser Focusing become very little hot spot to be radiated at surface of the work, color difference eliminating, also can eliminate the aberration such as spherical aberration, coma simultaneously, ensure in the time that laser beam foucing drops on surface of the work, surface of the work imaging is still high-visible within the specific limits, thereby can realize precision cleaning.
Described focusing system 6 also comprises varifocal mirror group, and described varifocal mirror group is zoom lens or moving lens group. Described moving lens group is connected with motor, and described motor is installed on support, and by controlled motion in described control system.
Described focusing system 6 also comprises removable camera lens. Described removable camera lens can be according to cleaning breadth artificial selection amasthenic lens. Because camera lens is less, in cleaning situation on an equal basis, required laser power is less, and cost is lower. In the situation that allowing, change camera lens, make to clean cost lower.
Described focusing system 6 can also arrange defocusing amount. The laser focusing on workpiece object surface, if any damage described workpiece 7 surfaces, can be adjusted described focusing system 6, makes laser depart from certain distance on described workpiece 7 surfaces, both can complete cleaning, again unlikely damage workpiece.
In the time that described workpiece 7 is larger, can use described planer-type workbench to clean by connecting method. First workpiece to be cleaned 7 drawings are imported to control system 4; Secondly, control system 4 becomes multiple cleaning parts according to workpiece 7 drawings to be cleaned and planer-type workbench working range auto Segmentation; Finally, control planer-type workbench, laser generating system 1, detection system 3 and 3D scanning galvanometer 5 by control system 4, subregion is cleaned, until cleaning completes.
The present invention also provides portable laser cleaning equipment, and described portable laser cleaning equipment comprises laser generating system 1, beam shaping system 2, control system 4,3D scanning galvanometer 5 and focusing system 6. By laser generating system 1, laser beam occurs, beam shaping system 2 is arranged in laser beam light path, and focusing system 6 is for zoom lens and be arranged at described 3D scanning 5 ends that shake. Described laser beam is successively by beam shaping system 2,3D scanning galvanometer 5 and zoom lens, until workpiece to be cleaned; Control system 4 controls described laser generating system 1 and 3D scanning galvanometer 5 completes cleaning in the dynamic laser beam foucing position of adjusting in real time.
Zoom lens and described 3D as focusing system are scanned 5 integrators that shake by this portable laser cleaning equipment, equipment more simplified convenient, is beneficial to the occasion that road, boats and ships etc. need portable cleaning.
A kind of laser cleaning equipment or portable cleaning equipment described in the embodiment of the present invention, specific works step is as follows:
Described laser generating system 1 Emission Lasers bundle, through described optical shaping system 2 and detection system 3,3D scanning galvanometer 5 and described focusing system 6 described in directive. Described 3D scanning galvanometer is under the effect of described control system 4, along workpiece 7 clean surface scannings. Now, laser beam cleans on directive workpiece 7 surfaces after described focusing system 6 focuses on. Meanwhile, described detection system 5 is monitored whole cleaning process and cleaning performance.
Should be understood that above-described embodiment is only explanation technical conceive of the present invention and feature, its object is understand content of the present invention and implement according to this for those skilled in the art, and not detailed description of the invention is exhaustive, can not limit the scope of the invention with this. All technical schemes according to the present invention are modified or are equal to replacement, and do not depart from aim and the scope of technical solution of the present invention, and it all should be encompassed in the middle of claim scope of the present invention.
Claims (12)
1. a laser cleaning equipment, comprise laser generating system (1), beam shaping system (2) and control system (4), described laser generating system (1) Emission Lasers bundle, described beam shaping system (2) is arranged in laser beam light path, it is characterized in that: also comprise detection system (3), 3D scanning galvanometer (5) and focusing system (6);
Described laser beam, is sent by described laser generating system (1), and successively by described beam shaping system (2), 3D scanning galvanometer (5), focusing system (6) is until workpiece to be cleaned (7); Described control system (4) is by controlling described laser generating system (1), and detection system (3) and 3D scanning galvanometer (5), dynamically adjust in real time laser beam foucing position and complete cleaning.
2. laser cleaning equipment according to claim 1, it is characterized in that, also comprise XY workbench (8), described control system (4) is controlled described XY workbench (8) work, and described laser generating system (1), beam shaping system (2), 3D scanning galvanometer (5) are installed on described XY workbench (8).
3. laser cleaning equipment according to claim 1, it is characterized in that, described beam shaping system (2) also comprises polarization by reflection unit (9), and described polarization by reflection unit (9) comprises the cross-polarization eyeglass of parallel placement or polarized lenses and the reflecting optics of parallel placement.
4. laser cleaning equipment according to claim 3, is characterized in that, the cross-polarization eyeglass of described parallel placement be the polarized lenses of 2 or described parallel placement and reflecting optics everybody 1.
5. laser cleaning equipment according to claim 1, is characterized in that, described focusing system (6) comprises varifocal mirror group.
6. laser cleaning equipment according to claim 5, is characterized in that, described varifocal mirror group is zoom lens.
7. laser cleaning equipment according to claim 5, is characterized in that, described varifocal mirror group is moving lens group, and described moving lens group is connected with motor, and described motor is installed on support, and by controlled motion in described control system.
8. laser cleaning equipment according to claim 1, is characterized in that, described detection system is laser ranging module, and described laser ranging module is sent distance measuring light beam, and described distance measuring light beam is coaxial with the laser beam that described laser generating system sends.
9. laser cleaning equipment according to claim 8, is characterized in that, described laser ranging module comprises light combination mirror, and plate described laser beam anti-reflection film on described light combination mirror eyeglass two sides, plates the reflectance coating of described distance measuring light beam in light combination mirror lens reflecting one side.
10. laser cleaning equipment according to claim 1, it is characterized in that, described detection system is the visual module of CCD (11), the coaxial setting of laser beam or paraxonic setting that the visual module of described CCD (11) and described laser generating system (1) send.
11. big width laser cleaning methods according to claim 2, is characterized in that, comprise following step:
1. workpiece drawing to be cleaned is imported to described control system;
2. described control system becomes multiple cleaning parts according to workpiece drawing to be cleaned and described XY workbench working range auto Segmentation;
3. XY workbench, described laser generating system described in control system control, detection system and 3D scanning galvanometer, subregion is cleaned, until cleaning completes.
12. 1 kinds of portable laser cleaning equipments, comprise laser generating system (1), beam shaping system (2), control system (4), there is laser beam in described laser generating system (1), described beam shaping system (2) is arranged in laser beam light path, it is characterized in that: also comprise 3D scanning galvanometer (5) and focusing system (6), described focusing system (6) is zoom lens, and described zoom lens are arranged at described 3D scanning galvanometer (5) end;
Described laser beam, is sent by described laser generating system (1), successively by described beam shaping system (2), 3D scanning galvanometer (5), zoom lens until workpiece to be cleaned (7); Described control system (4) is controlled described laser generating system (1) and 3D scanning galvanometer (5) work.
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| CN201610070415.5A CN105583200A (en) | 2016-02-01 | 2016-02-01 | Laser cleaning equipment |
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| CN201610070415.5A CN105583200A (en) | 2016-02-01 | 2016-02-01 | Laser cleaning equipment |
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| CN105855245A (en) * | 2016-06-23 | 2016-08-17 | 济南高能清扬激光清洗有限公司 | Large-breadth laser washing machine |
| CN105855245B (en) * | 2016-06-23 | 2018-02-27 | 济南高能清扬激光清洗有限公司 | A kind of big width laser cleaning machine |
| CN106180080A (en) * | 2016-08-31 | 2016-12-07 | 龚传波 | A kind of laser cleaner of antisitic defect |
| CN107931865A (en) * | 2016-10-12 | 2018-04-20 | 中国科学院沈阳自动化研究所 | Large Enclosure inner wall dirt automatic online laser cleaner and method |
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Application publication date: 20160518 |