CN212858217U - Laser cutting optical system integrating coaxial vision - Google Patents
Laser cutting optical system integrating coaxial vision Download PDFInfo
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- CN212858217U CN212858217U CN202021049231.9U CN202021049231U CN212858217U CN 212858217 U CN212858217 U CN 212858217U CN 202021049231 U CN202021049231 U CN 202021049231U CN 212858217 U CN212858217 U CN 212858217U
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Abstract
The utility model relates to a laser cutting optical system of integrated coaxial vision, including the laser instrument, the laser beam of laser instrument transmission conveys to waiting to process the breadth via laser beam expanding system, scanning mirror system, long focus field lens, speculum, it has two telecentric lens and CCD camera to arrange in proper order on the reverse extension line of the laser beam of speculum reflection, just speculum, two telecentric lens and CCD camera optics are coaxial. The utility model discloses a laser cutting optical system of integrated coaxial vision can realize that the flexible material of big breadth carries out the meticulous cutting, through coaxial vision system, can carry out real-time supervision to the cutting process, carries out accurate control to cutting process, realizes high accuracy and high efficiency laser cutting's purpose.
Description
Technical Field
The utility model relates to a laser technical field, more specifically say, relate to a laser cutting optical system of integrated coaxial vision.
Background
The flexible material is a material with certain softness and flexibility, and is a core functional component of flexible electronics. Flexible electronics refers to an emerging electronic technology for attaching organic, inorganic devices to flexible substrates to form circuits. Compared with the traditional silicon-based electronic technology established on a hard substrate, the flexible electronic has incomparable softness and ductility compared with the traditional silicon-based electronic technology on the premise of keeping high-efficiency photoelectric performance, high integration and high reliability, has great application potential in the fields of new generation information display, storage calculation, data encryption, biosensing, health medical treatment, renewable energy sources and the like, and is one of the most promising information technologies in the world at present. The ultrathin flexible substrate is an important constituent element of a flexible electronic device and a key component for assisting the flexible electronic device to realize flexibility. In view of the material characteristics and the requirement of ultra-high processing precision of the flexible substrate, the traditional mechanical processing method is no longer suitable, and the flexible substrate is usually refined by using micro-processing means such as photolithography, electron beam deposition, reactive ion etching and the like, but the methods have the defects of complex operation, high cost, limited processing breadth size and the like. The laser lift-off technology is a laser processing technology widely applied in the field of manufacturing of flexible electronic devices, but the technology aims at realizing the lift-off of the devices from a rigid substrate material and the transportation of the devices to a flexible substrate material, and does not relate to the substantial processing of the flexible material.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a laser cutting optical system of integrated coaxial vision has solved and has satisfied the problem that the superelevation becomes more meticulous to flexible substrate material among the prior art.
The utility model provides a technical scheme that technical problem adopted is: the utility model provides a laser cutting optical system of integrated coaxial vision, includes the laser instrument, the laser beam of laser instrument transmission conveys via laser beam expanding system, scanning galvanometer system, long focus field lens, speculum and treats the processing breadth, arrange in proper order on the reverse extension line of the laser beam of speculum reflection and be provided with two telecentric lens and CCD camera, just speculum, two telecentric lens and CCD camera optics are coaxial.
The utility model discloses an among the laser cutting optical system of integrated coaxial vision, the laser instrument is femto second laser instrument, and adopts 355nm wavelength, and the pulse frequency range covers 100 and supplyes 1000 kHz.
The utility model discloses an among the laser cutting optical system of integrated coaxial vision, laser beam expanding system includes concave lens and convex lens, concave lens with convex lens arranges the setting in proper order and is in the light-emitting window of laser instrument.
The utility model discloses an among the laser cutting optical system of integrated coaxial vision, the mirror system that shakes is shaken in the scanning including the X axle scanning that reflects the laser beam in proper order shakes the mirror speculum and Y axle scanning shakes the mirror speculum and is used for the drive the X axle scanning shakes the first driver that the mirror speculum used first reference position as the basis rotation and is used for the drive Y axle scanning shakes the second driver that the mirror speculum used second reference position as the basis rotation.
The utility model discloses an among the laser cutting optical system of integrated coaxial vision, first reference position is the X axle scans the plane of reflection that shakes the mirror speculum and is 45 positions with the laser beam, second reference position is the Y axle scans the plane of reflection that shakes the mirror speculum and is 45 positions with the laser beam.
The utility model discloses an among the laser cutting optical system of integrated coaxial vision, the one end of the mirror speculum that shakes is installed in the X axle scanning on the rotation axis of first driver, the one end that the mirror speculum that shakes is installed in the Y axle scanning on the rotation axis of second driver, just the rotation axis of first driver with the rotation axis mutually perpendicular of second driver.
The utility model discloses an among the laser cutting optical system of integrated coaxial vision, long focus field lens is used for receiving the laser beam that the mirror reflector reflected shakes is shaken in the Y axle scanning, long focus field lens with Y axle scanning shakes mirror reflector reflected laser beam optics coaxial.
The utility model discloses an among the laser cutting optical system of integrated coaxial vision, the speculum is installed deviating from of long focus field lens one side of Y axle scanning mirror that shakes, the plane of reflection of speculum with the contained angle of the optical axis of long focus field lens is 45.
The utility model discloses an among the laser cutting optical system of integrated coaxial vision, X axle scanning shake the mirror speculum with Y axle scanning shake the mirror speculum respectively only to the scanning mirror speculum that shakes of the laser beam reflection of incident.
The utility model discloses an among the laser cutting optical system of integrated coaxial vision, the lens of long focus field lens adopts ultraviolet fused quartz glass.
Implement the utility model discloses a laser cutting optical system of integrated coaxial vision has following beneficial effect: the utility model discloses a laser cutting optical system of integrated coaxial vision can realize that the flexible material of big breadth carries out the meticulous cutting, through coaxial vision system, can carry out real-time supervision to the cutting process, carries out accurate control to cutting process, realizes high accuracy and high efficiency laser cutting's purpose.
Drawings
Fig. 1 is a schematic structural diagram of a laser cutting optical system integrated with coaxial vision according to the present invention;
wherein, 1, laser; 2. a concave lens; 3. a convex lens; 4, an X-axis scanning galvanometer reflector; 5, a Y-axis scanning galvanometer reflector; 6. a first driver; 7. a second driver; 8. a long focal length field lens; 9. a mirror; 10. a double telecentric lens; a CCD camera; 12. the breadth to be processed.
Detailed Description
The structure and the operation principle of the laser cutting optical system integrated with coaxial vision according to the present invention will be further described with reference to the accompanying drawings and embodiments:
in the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
As shown in fig. 1, the preferred embodiment of the utility model provides a laser cutting optical system of integrated coaxial vision, including laser instrument 1, the laser beam of laser instrument 1 transmission via laser beam expanding system, scanning galvanometer system, long focus field lens 8, speculum 9 conveying to waiting to process the breadth 12, wherein, arrange in proper order on the reverse extension line of the laser beam of speculum 9 reflection and be provided with two telecentric lens 10 and CCD camera 11, and speculum 9, two telecentric lens 10 and CCD camera 11 optics are coaxial.
The laser 1 is a femtosecond laser, and adopts 355nm wavelength, and the pulse frequency range covers 100-1000 kHz. For example, the femtosecond laser employs ALTA series laser of Advanced Optowave corporation. The ALTA series laser is Q-switch, picosecond and femtosecond pulse ultrafast laser with TEM00 mode and power up to 10W.
The laser beam expanding system comprises a concave lens 2 and a convex lens 3, and the concave lens 2 and the convex lens 3 are sequentially arranged at the light outlet of the laser 1. The laser beam expanding system is used for expanding narrower laser beams emitted by the laser 1 (especially a femtosecond laser), so that a better focusing effect is obtained to obtain smaller focusing light spots, meanwhile, the laser beam expanding system is limited by a low damage threshold of an optical element, and the laser energy density of laser irradiated on the surface of the optical element can be reduced by increasing the diameter of the light spots of output laser beams, so that the purpose of protecting lenses is achieved.
The scanning galvanometer system comprises an X-axis scanning galvanometer reflecting mirror 4 and a Y-axis scanning galvanometer reflecting mirror 5 which sequentially reflect laser beams, a first driver 6 used for driving the X-axis scanning galvanometer reflecting mirror 4 to rotate on the basis of a first reference position and a second driver 7 used for driving the Y-axis scanning galvanometer reflecting mirror 5 to rotate on the basis of a second reference position. The first reference position is a position where the reflection surface of the X-axis scanning galvanometer mirror 4 and the laser beam form an angle of 45 °, and the second reference position is a position where the reflection surface of the Y-axis scanning galvanometer mirror 5 and the laser beam form an angle of 45 °. The laser beam here may be an incident laser beam or a reflected laser beam.
Wherein, one end of the X-axis scanning galvanometer mirror 4 is arranged on the rotating shaft of the first driver 6, one end of the Y-axis scanning galvanometer mirror 5 is arranged on the rotating shaft of the second driver 7, and the rotating shaft 6 of the first driver is vertical to the rotating shaft of the second driver 7.
The reflecting surface of the X-axis scanning galvanometer reflector 4 is perpendicular to the horizontal plane, and when the reflecting surface of the X-axis scanning galvanometer reflector 4 forms an included angle of 45 degrees with the incident laser beam, the X-axis scanning galvanometer reflector 4 can horizontally deflect the propagation direction of the laser beam incident from the convex lens 3 by 90 degrees and reflect the laser beam to the Y-axis scanning galvanometer reflector 5. When the reflecting surface of the Y-axis scanning galvanometer reflector 5 and the laser beam reflected by the X-axis scanning galvanometer reflector 4 form an included angle of 45 degrees, the transmission direction of the incident laser beam (especially the femtosecond laser beam) can be vertically deflected by 90 degrees.
The rotation of the X-axis scanning galvanometer reflector 4 and the Y-axis scanning galvanometer reflector 5 can enable the incident horizontal laser beam to realize linear scanning in a certain angle area in a vertical space.
The X-axis scanning galvanometer reflector 4, the Y-axis scanning galvanometer reflector 5, the first driver 6 and the second driver 7 jointly form a scanning galvanometer system, and a SUPERSCAN V-15 type galvanometer system produced by RayLase company is usually selected, wherein reflecting films plated on reflecting surfaces of the X-axis scanning galvanometer reflector 4 and the Y-axis scanning galvanometer reflector 5 preferably adopt reflecting films meeting the reflecting requirements of femtosecond laser.
Wherein, X axle scanning galvanometer speculum 4 and Y axle scanning galvanometer speculum 5 are the scanning galvanometer speculum that only reflects to the laser beam of incidenting, and the remaining wavelength light beam all can see through X axle scanning galvanometer speculum 4 and Y axle scanning galvanometer speculum 5.
The long-focus field lens 8 is used for receiving the laser beam reflected by the Y-axis scanning galvanometer reflector 5, and the long-focus field lens 8 is optically coaxial with the laser beam reflected by the Y-axis scanning galvanometer reflector 5. The long focal length field lens 8 is arranged right in front of the Y-axis scanning galvanometer reflector 5. The long-focus field lens 8 is a field lens with a model number of S4LFT0508/126, which is generally produced by Hill of Germany, the focal length of the field lens is 566mm, the scanning angle is +/-23 degrees, the scanning range can reach 325mm multiplied by 325mm, the lens is made of ultraviolet fused quartz glass, and the coated film is preferably adapted to the focusing requirement of femtosecond laser.
The long-focus field lens 8 is used for focusing a laser beam (especially a femtosecond laser beam) output by the scanning galvanometer system, the size of a focusing light spot is close to the optical diffraction limit, the submicron-level cutting line width can be obtained, and the laser beams with different incidence angles can be focused on the same plane, so that the uniformity of the cutting line width in the large-width flexible material cutting process is ensured, the processing quality is improved, and the processing breadth of the long-focus field lens 8 can reach 300mm multiplied by 300 mm.
The reflector 9 is installed on one side of the long focal length field lens 8 departing from the Y-axis scanning galvanometer reflector 5, and the included angle between the reflecting surface of the reflector 9 and the optical axis of the long focal length field lens 8 is 45 degrees. The reflector 9 is used for turning the light path of the focused laser beam (especially femtosecond laser beam) output by the long-focus field lens 8 by 90 degrees, and a double telecentric lens 10 and a CCD camera 11 can be arranged on the optical axis of the turning light path, thereby realizing the purpose of coaxial visual monitoring. That is, a laser beam (especially, femtosecond laser beam) reflected by the reflecting mirror 9 is extended in the reverse direction, a double telecentric lens 10 and a CCD camera 11 are installed, and the reflecting mirror 9, the double telecentric lens 10 and the CCD camera 11 are optically coaxial.
The double telecentric lens 10 and the CCD camera 11 jointly form a coaxial on-line monitoring system, the double telecentric lens 10 can image a 300mm multiplied by 300mm area, the image distortion is less than 0.1 percent, and the CCD camera 11 is a high-frame-frequency large-target-surface industrial camera and is used for imaging, measuring and quality monitoring of a flexible material cutting area. The double telecentric lens 10 and the CCD camera 11 are both products known in the prior art.
The laser beam (especially the femtosecond laser beam) is reflected by the reflecting mirror 9 and then focused on the to-be-processed breadth 12, the dimension of a focusing light spot is in a submicron order, so that the purpose of fine cutting is realized, and the focused laser beam (especially the femtosecond laser beam) can be linearly scanned or scanned in any path within the range of 300mm multiplied by 300mm on the surface of the to-be-processed breadth 12 through the rotating action of the X-axis scanning galvanometer reflecting mirror 4 and the Y-axis scanning galvanometer reflecting mirror 5, so that the expected processing pattern and shape are obtained.
Referring to fig. 1, specifically, a laser 1, a concave lens 2, a convex lens 3, and an X-axis scanning galvanometer mirror 4 are collinear along a first direction. The X-axis scanning galvanometer reflector 4, the Y-axis scanning galvanometer reflector 5, the long-focus field lens 8 and the reflector 9 are on the same straight line along a second direction. The reflector 9, the double telecentric lens 10, the CCD camera 11 and the breadth to be processed 12 are on the same straight line along the third direction. The second direction is perpendicular to the first direction, and the third direction is parallel to the first direction.
The utility model provides an above-mentioned technical scheme, at big breadth flexible material femto second laser cutting's in-process, can realize the on-line monitoring of meticulous cutting and technology, promote cutting efficiency and quality. Particularly, the utility model has the following technical characteristics:
(1) the utility model has the outstanding technical characteristics that the cutting of the flexible material with the breadth of 300mm multiplied by 300mm can be realized, the cutting line width can reach the submicron level, the cutting line width is usually in the size of 600nm, and the cutting precision can reach 1 mu m;
(2) the utility model has another outstanding technical characteristics that the cutting process of the flexible material with the breadth of 300mm multiplied by 300mm can be monitored on line, thereby realizing the control of the cutting technological process and realizing the cutting with high precision and high efficiency;
(3) the utility model discloses a third outstanding technical characterstic is that laser cutting and visual imaging system are coaxial to be placed, has realized the purpose that what sees to be gained, has higher optical accuracy, and the system easily modular design and have compacter structure.
It should be understood that modifications and variations can be made by persons skilled in the art in light of the above teachings, but fall within the scope of the appended claims.
Claims (10)
1. The utility model provides an integrated coaxial vision's laser cutting optical system, its characterized in that, includes the laser instrument, the laser beam of laser instrument transmission conveys via laser beam expanding system, scanning galvanometer system, long focal length field lens, speculum and treats the processing breadth, arrange in proper order on the reverse extension line of the laser beam of speculum reflection and be provided with two telecentric lens and CCD camera, just speculum, two telecentric lens and CCD camera optics are coaxial.
2. The integrated coaxial vision laser cutting optical system as claimed in claim 1, wherein the laser is a femtosecond laser, and the 355nm wavelength is adopted, and the pulse frequency range covers 100 and 1000 kHz.
3. The integrated in-line vision laser cutting optical system according to claim 1, wherein the laser beam expanding system comprises a concave lens and a convex lens, and the concave lens and the convex lens are sequentially arranged at a light outlet of the laser.
4. The integrated in-line vision laser cutting optical system according to claim 1, wherein the scanning galvanometer system includes an X-axis scanning galvanometer mirror and a Y-axis scanning galvanometer mirror that sequentially reflect the laser beam, and a first driver for driving the X-axis scanning galvanometer mirror to rotate based on a first reference position and a second driver for driving the Y-axis scanning galvanometer mirror to rotate based on a second reference position.
5. The integrated in-line vision laser cutting optical system according to claim 4, wherein the first reference position is a position where the reflection surface of the X-axis scanning galvanometer mirror is at 45 ° to the laser beam, and the second reference position is a position where the reflection surface of the Y-axis scanning galvanometer mirror is at 45 ° to the laser beam.
6. The integrated in-line vision laser cutting optical system according to claim 4, wherein one end of the X-axis scanning galvanometer mirror is mounted on the rotating shaft of the first driver, one end of the Y-axis scanning galvanometer mirror is mounted on the rotating shaft of the second driver, and the rotating shafts of the first driver and the second driver are perpendicular to each other.
7. The integrated in-line vision laser cutting optical system according to claim 4, wherein the long focus field lens is configured to receive the laser beam reflected by the Y-axis scanning galvanometer mirror, and the long focus field lens is optically coaxial with the laser beam reflected by the Y-axis scanning galvanometer mirror.
8. The integrated coaxial vision laser cutting optical system according to claim 7, wherein the reflector is installed on a side of the long focal length field lens departing from the Y-axis scanning galvanometer reflector, and an included angle between a reflecting surface of the reflector and an optical axis of the long focal length field lens is 45 °.
9. The integrated in-line vision laser cutting optical system according to claim 4, wherein the X-axis scanning galvanometer mirror and the Y-axis scanning galvanometer mirror are scanning galvanometer mirrors reflecting only an incident laser beam, respectively.
10. The integrated in-line vision laser cutting optical system according to claim 1, wherein the lens of the long focal length field lens is made of ultraviolet fused silica glass.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202021049231.9U CN212858217U (en) | 2020-06-08 | 2020-06-08 | Laser cutting optical system integrating coaxial vision |
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| CN202021049231.9U CN212858217U (en) | 2020-06-08 | 2020-06-08 | Laser cutting optical system integrating coaxial vision |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114951972A (en) * | 2022-05-27 | 2022-08-30 | 深圳泰德激光技术股份有限公司 | Optical path system and laser cutting machine |
| CN116423040A (en) * | 2023-03-20 | 2023-07-14 | 苏州菲镭泰克激光技术有限公司 | Laser welding galvanometer system |
| CN118060710A (en) * | 2024-04-19 | 2024-05-24 | 苏州旭欣智能科技有限公司 | Laser scanning galvanometer structure capable of adaptively adjusting breadth and height |
-
2020
- 2020-06-08 CN CN202021049231.9U patent/CN212858217U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114951972A (en) * | 2022-05-27 | 2022-08-30 | 深圳泰德激光技术股份有限公司 | Optical path system and laser cutting machine |
| CN116423040A (en) * | 2023-03-20 | 2023-07-14 | 苏州菲镭泰克激光技术有限公司 | Laser welding galvanometer system |
| CN116423040B (en) * | 2023-03-20 | 2023-11-28 | 苏州菲镭泰克激光技术有限公司 | Laser welding galvanometer system |
| CN118060710A (en) * | 2024-04-19 | 2024-05-24 | 苏州旭欣智能科技有限公司 | Laser scanning galvanometer structure capable of adaptively adjusting breadth and height |
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