CN202085441U - Direct-drive XYZ axis positioning system with moving mass reduction function - Google Patents

Abstract

The utility model relates to a direct-drive XYZ axis positioning system with the moving mass reduction function, which comprises a plane motor and a Z-axis motor, wherein, the plane motor comprises an X coil motor and a Y linear brushless motor which respectively provide an X-direction force and a Y-direction force, and the Z-axis motor provides a Z-direction force. The utility model is different from a conventional XYZ axis positioning system in that, despite a coupled axis or a decoupled axis, the plane motor replaces two actuators, thereby simplifying design and improving compactness. The manufacture of one plane motor involves less cost and material demands than the manufacture of two independent actuators. Moreover, reduced connecting piece requirements lead to less investment in manufacture and assembly, since the processing errors, alignment errors and stacking errors during assembly are reduced.

Description

Have reduce moving mass directly drive XYZ axle navigation system

Technical field

The utility model relates to a kind of XYZ axle patch system, and it is used for the selection and the installation of micro device, for example semiconductor, LED and optical element, particularly relate to a kind of have reduce moving mass directly drive XYZ axle navigation system.

Background technology

Directly drive actuator (for example linear electric motors) and popularized in recent years, especially for making electronic component and semi-conductive equipment.As everyone knows, adopting the advantage of directly driving is high acceleration, high-speed, and high accuracy reduces moving mass, does not have the simplified design of complicated transmission system, and moving-member and transmission mechanism also without any wearing and tearing and crack, have reliability preferably simultaneously.

Yet the advantage that effect not too obviously or is not too noted is exactly directly to drive the rigidity that has increased kinematic system by using.Do not have for example ball screw of transmitting device, belt or shaft coupling directly drive the rigidity that load has improved kinematic system.Better the rigidity effect causes short setting time, and it is an important parameters in the performance of kinematic system in fact.For example, the short distance and the acceleration that move a load 5mm are 6G, position of related features is will be in positive and negative 10 microns on the target location, the 17ms time is finished motion if desired, rigid system can make setting time greatly about 1ms, although one more compatible or more flexibly system can make setting time at 10ms, with respect to rigid system, want 10 times time.A flexiblesystem often has vibrations, and particularly in the end of motion, system need have very rapid deceleration and stop.The difference of rigid system that Here it is and flexiblesystem performance, but also be very important, and the huge difference on the such performance finally can have influence on the productivity of a machine in the manufacturing industry.

Therefore, an ideal design of directly driving (for example linear induction motor system) is to arrive high as far as possible rigidity.Except the selection of preferred materials (being subject to cost) realizes higher rigidity, should in design, use minimum parts, because more connecting means better flexibility and flexibility ratio.Relevant with the rigidity of a system, another key areas of in design, considering be adopt by or close the center of gravity location line of force of load quality.This can be reduced in the effect of the moment load between high acceleration and the deceleration.Cancel each other by a big distance when the barycenter of actuating force and load, produces a huge moment and it can cause the crooked and vibrations of system, therefore having increased needs the setting time that move.The system of a rigidity can be reduced influence by this moment load, and a flexiblesystem that has more multi-link has more adverse effect.In the degree that is designed aspect the actuating force effect how rigidity and system are called system's closed-loop bandwidth.A lot of common available motion control cards comprise computing and function, and it allows us to do a frequency response in the system to test and obtain system's closed-loop bandwidth.A rigid system that has load drives near center of gravity, and the setting time that trends towards higher bandwidth and such system motion also can be shorter.

The advantage of directly driving for example linear electric motors is clear and definite and compellent, belt drive system unlike ball screw drive system or band pulley, it is exactly advantage without any mechanically that straight drive system has a disadvantage, that is to say that it must directly drive load.Restriction of directly driving and characteristics mean that moving mass should be reduced as much as possible, thereby reach higher dynamic property as much as possible.

The method of a use minimizing load quality is the decoupling zero by actuator." decoupling zero " meaning is to separate 2 actuators in structure, and 2 actuators are worked simultaneously for it and the whole weight of an actuator is not by another support or support.Effectively decoupling zero can not reduce the quantity of actuator.This only be one preferably method arrange the bearing of actuator and guided-moving.Replace installing whole actuator on the bracing frame that another actuator moves, it will mean will support whole weight.When another part is installed on the fixed bearing, decoupling zero effect actuator means that the wt part of actuator only is supported.The former decoupling zero actuator of having developed of a lot of mechanism as shown in Figure 1, carries out decoupling zero an XYZ axle navigation system by 3 actuators.

In Fig. 1, the reference axis of a cartesian coordinate system is to have X, Y, the mark of Z axle.3 linear electric motors dispose X are provided, Y, the motion of Z axle.Equipment in the rear end is the X linear electric motors.X linear electric motors 15 are to be fixed on a pedestal, and coil (not expression temporarily among the figure) moves X workbench 16 (being shaped as rectangular) in X-direction.X workbench 16 is the supporting constructions for Y-axis, and it connects Y-axis to X-axis.The guide rail of Y-axis is fixed on the X workbench 16, and the slide block of Y-axis slides along this guide rail, and is connected to Y workbench 17.Y workbench 17 is another connector or supporting construction.It also is to be connected to the y-axis motor coil.Y-axis linear motor stator electric 18 is to be fixed on fixedly on the support 19.Y-axis workbench 17 also is to support the Z axis rail.Be fixed on these guide rails is the Z workbench 20 of slide block and Z axle.End-effector 21 and Z motor coil are to be rotatably coupled to Z axle workbench 20.Z motor stator 22 is to be fixed on fixedly on the support 19.

The summary of each coil, and the parts of their connectors and needs driving are shown in following table one.

Table one

How power be sent to the summary of end-effector by next interface/connector from each motor coil, shown in following table two.

Table two

Prior art can reduce the moving mass of system, mainly is by not moving each motor stator.Because the quality of magnet and track plate, stator are heavier comparatively speaking.Therefore, effectively reduced the quality of movable part.Yet, can see from table one, also comprise a lot of moving-members.Some parts wherein are skimble-skamble for quality, X workbench for example, as shown in Figure 1.An effective grade beam, it need support the guide rail of the whole length of Y-axis.In addition, utilize so much connector, can compromise the rigidity of system, particularly working as most parts is normally to be connected by securing member.Can find out that also the power of each motor coil also must be transmitted by a plurality of connectors from table two before final arrival end-effector.Further observe such Decoupling design, it is difficult to by the power rotating band of load center of gravity all interconnected parts are arranged, the position of inherent configuration and actuator.

The utility model content

The purpose of this utility model be to provide a kind of have reduce moving mass directly drive XYZ axle navigation system, it improves the performance of an XYZ axle system by using direct driving motor.

Concrete technical scheme of the present utility model is as follows: a kind of have reduce moving mass directly drive XYZ axle navigation system, comprising:

One planar motor; With

One Z spindle motor;

Described planar motor comprises an X coil motor and a Y linear brushless motor, the corresponding respectively power that provides on directions X and the Y direction, and the Z spindle motor provides the power on the Z direction.

In the utility model, described coil is dimensionally less than magnet, and each axle is finished needed stroke or had following relation when mobile:

Sx＝Lx1-Cx1；

Sy＝Ly1-Cy1；

Sx is the range of X-axis;

Sy is the range of Y-axis;

Lx1 is the distance between directions X two row's magnet edges;

Ly1 is the distance between two extreme magnet edges of Y direction;

Cx1 is the width of the X coil on directions X;

Cy1 is the length of the Y coil on the Y direction.

In the utility model, described coil is dimensionally less than magnet, and it must satisfy following relation:

Lx2-Cx2≥Sy；

Lx2 is the every row's of X magnet a length overall;

Cx2 is the length of X coil on the Y direction.

In the utility model, described coil is dimensionally less than magnet, and it must satisfy following relation:

Ly2-Cy2≥Sx

Ly2 is the total length of each Y magnet;

Cy2 is the width of Y coil on directions X.

In the utility model, described planar motor is directly connected to described Z spindle motor.

In the utility model, also comprise an air-bearing, by the motion on described air-bearing guiding directions X and the Y direction.

In the utility model, comprise that also a linear axis holds, described linear bearing is used to guide the motion at directions X and the above planar motor of Y direction.

The beneficial effect that the utlity model has: the utility model similarly is not conventional XYZ axle navigation system, and no matter whether axle is coupled or decoupling zero, and it has used planar motor to replace two actuators, has simplified design, makes it compacter.The cost of making a planar motor also is lower than makes two independent actuators and materials demand still less.And because the minimizing of the required connector of the utility model has also reduced the input of making and assembling, because the mismachining tolerance when assembling, alignment error and storehouse error also can reduce.And make two coils on a solid portion, planar motor can very simple installation.

In addition, also might use air bearing, therefore further simplify design in order to guide these two axle amount motions.Two axles that only need a cover air-bearing have been realized a very compact design.

Since the coil with two planar motors of planar motor is embedded on the solid metal, being generally used for connecting a motor coil can be deleted to the work or the supporting construction of another motor coil or other moving-member.The utility model has lacked the quantity that needs parts, therefore also reduces moving mass.Along with the minimizing of quality, can realize higher acceleration with the motor force of same quantity, so the utility model can transform more performance.

The more important thing is that along with the reduction of coupling part, the rigidity of whole kinematic system has been improved.Along with rigidity preferably, can reach higher acceleration, after finishing, motion has shorter setting time.

In addition, along with the design of planar motor, motor force acts on the center of gravity of very close whole load quality.The utility model can reduce when high acceleration and deceleration the moment load may cause vibrations.Therefore, motor force is driven near center of gravity and can obtain better dynamic property.

Description of drawings

Fig. 1 is the structure chart of the decoupling zero actuator of prior art;

Fig. 2 is the profile that coiler part is crossed in the cutting of the utility model planar motor;

Fig. 3 is the isometric view of the utility model planar motor;

Fig. 4 is the side view of the utility model XYZ axle system;

Fig. 5 is that the utility model uses mechanical bearing to guide the structure chart of the planar motor on X and the Y direction.

[figure number is to as directed]

1X coil 2Y coil

3 magnet, 4 magnet

5 end-effectors, 6 stators

7 planar motor coils, 8 slide blocks

9a top air-bearing 9b bottom air-bearing

10 guide rails, 11 motor coils

12 stator 13X directions

14Y direction 15X linear electric motors

16X workbench 17Y workbench

18Y axle linear motor stator electric 19 is support fixedly

20Z workbench 21 end-effectors

The 22Z motor stator

Embodiment

Further understand and understanding for making architectural feature of the present utility model and the effect reached had, cooperate detailed explanation, be described as follows in order to preferred embodiment and accompanying drawing:

Described in the utility model have reduce moving mass directly drive XYZ axle navigation system, replace using the driver of three isolation, a planar motor is used to provide the motion of 2 axles, the 3rd actuator keeps independent and separates with planar motor.Below Fig. 2 cutting of showing planar motor cross the profile of coiler part, the track of bottom and magnet are overlapping with the coil at top as shown, the track plate at top is not shown in this explanation.

Planar motor comprise 2 the cover coils in single plane, and be assembled in monolithic can be the pottery, the solid material of aluminium or other suitable material.X coil 1 comprise one single-phase, be actually a voice coil motor.Y coil 2 comprises three-phase on the other hand, and therefore in fact it is a three-phase brushless motor.For each track plate (top and bottom), 2 cover magnet 3 and 4 are assembled.Magnet 3 for X-axis comprises two rows, and each whole row has same polarity, and the polarity that has the direction in Y-axis to replace for the magnet 4 of Y-axis.

X coil 1 and Y coil 2 are designed to littler than magnet, make the resistance of coil reduce to minimum and improve efficiency of motor.Those skilled in the art should be taken into account that also the utility model also can be designed to the coil bigger than magnet.Along with coil less than magnet, and have maximum stroke or mobile design is measured for each, can set up following relation:

Sx＝Lx1-Cx1；

Sy＝Ly1-Cy1；

Sx is the range of X-axis, and Sy is the range of Y-axis;

Lx1 is the distance between directions X two row's magnet edges;

Ly1 is the distance between two extreme magnet edges of Y direction;

Cx1 is the width of X coil on directions X;

Cy1 is the length of Y coil on the Y direction.

Can observe,,, can on directions X, produce needed power even the part of its 2 coil is long and be parallel to Y-axis for X-axis.2 short coiler parts are parallel to X-axis and also can produce power in Y direction.These power are worthless, and they can influence the power that the utility model obtains from the Y coil in Y direction (increase or deduct).Yet as long as the X coil rests in the X magnet, one side of this coil produces power, will have been cancelled out each other by the opposite power that the coil another side produces.In order to ensure this situation, the utility model need be determined the X coil always in 2 row's magnet, even at 2 extreme strokes of Y-axis.

Therefore, Lx2-Cx2 〉=Sy;

Lx2 is the every row's of X magnet a length overall;

Cx2 is the length of X coil on the Y direction.

Similarly, when it is mobile, can produce required power perpendicular to the Y-axis coiler part of Y-axis when electric current.Another parts are parallel to Y-axis and also produce power, but are cancelled each other by opposite coil component.In order to prevent that any undesirable motor that can influence is just when the power that operates, below the utility model also can need to determine:

Ly2-Cy2≥Sx；

Ly2 is the total length of every block of Y magnet;

Cy2 is a Y coil width on directions X.

Should be noted also that the stroke on X and Y direction can lack than Sx and Sy, allow range.

Fig. 3 shows the isometric view of planar motor, and it has described the configuration that has a Z spindle motor at initial stage.Compare with existing processes, this design is compacter and simplifies.With reference to figure 4, Fig. 4 is the side view of XYZ axle system, and planar motor is placed on almost and the same horizontal level of end-effector, and stator 6 is fixed on one stably on the horizontal substrate.Planar motor coil 7 terminad effectors extend, and the slide block 8 of Z axle is directly to be fixed on the coil surface of end of motor coil 7.

Therefore, there are not X workbench and Y workbench (additional supporting construction) to use in design.Four air-bearing shafts rims are used for guiding the motion of X-axis and Y-axis.Top air-bearing 9a and bottom air-bearing 9b allow coil to slide in 2 directions of X-axis and Y-axis, and have restricted its moving in the Z direction.This allows us only to use a cover bearing for 2 kinematic axiss.Contactless Laser feedback transducer is the position feedback that is used for X-axis and Y direction, and a closed loop moving control card is used for controlled motion.The closed-loop control of X motor will guarantee that coil is always in designed stroke and be equally applicable to the Y motor.Hard spacingly prevent just in case any stroke that exceeds when controller goes wrong or power supply breaks down as spacing be not though these demonstrate on drawing.The guide rail 10 of Z axle also is to be directly installed on the linear motor coil 11 of Z axle, and this guide rail guides the slide block 8 that is installed in planar linear motor coil 7.The stator 12 of Z axle is mounted in the stable supporting.

As shown in Figure 4, CG1 has shown the center of gravity (load comprises end-effector 5, guide rail 10 and Z motor coil 11) of Z axle load, and CG2 has shown the center of gravity of whole mobile weight.Whole moving mass comprises end-effector 5, guide rail 10, Z motor coil 11, slide block 8 and planar motor coil 11.Can observe, the effect route of power Fz passes through to CG1 from Z spindle motor coil, and this meaning the utility model is effectively in the center of gravity actuating force of Z direction by load quality.Similarly, the effect route of the power Fx that the planar motor coil from directions X comes almost also is the position that drives at same CG2 place.Be positioned at effect route and the somewhat little deviation of CG2 of the power Fy of Y hub of a spool.Therefore, with this design, the utility model can be provided with the center of gravity of actuating force near load as much as possible.

With above-mentioned configuration, the utility model is not only moving mass and has been reduced, and the quantity of moving-member, especially those needed supports have significantly reduced with being connected also.

How power be sent to the summary of end-effector by next interface/connector from each motor coil, shown in following table three.

Table three

Along with the eliminating for the mobile supporting structure of X and Y, the power of coming from each motor coil is more direct to be delivered to load, has caused the system of higher rigidity, still less momentary load and lower moving mass, the setting time that allows high acceleration more and lack.

Be more preferably and use air-bearing to guide motion on X and Y direction,, also may use mechanical bearing to guide planar motor on X and the Y direction because it is simple and be frictionless motion.As shown in Figure 5, planar motor coil 7 is by 2 cover linear bearings, the 13rd, guide on directions X, and the 14th, guide on the Y direction.Utilize this method, without any obvious change, and planar motor coil still directly drives and describes in the scheme of Z axle load just as improvement formerly in the center of gravity of moving load.

Should be noted that the arrangement of dull and stereotyped motor and Z motor is an example of the present utility model.Other imaginabale combinations are possible, for example dull and stereotyped motor is placed on the vertical plane, and have the 3rd vertical with dull and stereotyped motor, XYZ axle motion is provided in diverse ways.And such variation and modification belong to essence and the scope that the utility model is described.

In sum, it only is preferred embodiment of the present utility model, be not to be used for limiting the scope that the utility model is implemented, all equalizations of doing according to the described shape of the utility model claim scope, structure, feature and spirit change and modify, and all should be included in the claim scope of the present utility model.

Claims (7)

1. One kind have reduce moving mass directly drive XYZ axle navigation system, it is characterized in that, comprising:

   One planar motor; With

   One Z spindle motor;

   Described planar motor comprises an X coil motor and a Y linear brushless motor, the corresponding respectively power that provides on directions X and the Y direction, and the Z spindle motor provides the power on the Z direction.
2. 2. according to claim 1 have reduce moving mass directly drive XYZ axle navigation system, it is characterized in that described coil is dimensionally less than magnet, each axle is finished needed stroke or is being had following relation when mobile:

   Sx＝Lx1-Cx1；

   Sy＝Ly1-Cy1；

   Sx is the range of X-axis;

   Sy is the range of Y-axis;

   Lx1 is the distance between directions X two row's magnet edges;

   Ly1 is the distance between two extreme magnet edges of Y direction;

   Cx1 is the width of the X coil on directions X;

   Cy1 is the length of the Y coil on the Y direction.
3. 3. according to claim 1 have reduce moving mass directly drive XYZ axle navigation system, it is characterized in that described coil is dimensionally less than magnet, it must satisfy following relation:

   Lx2-Cx2≥Sy；

   Lx2 is the every row's of X magnet a length overall;

   Cx2 is the length of X coil on the Y direction.
4. 4. the XYZ axle that directly drives that reduces moving mass that has according to claim 1 is located, and it is characterized in that described coil is dimensionally less than magnet, and it must satisfy following relation:

   Ly2-Cy2≥Sx

   Ly2 is the total length of each Y magnet;

   Cy2 is the width of Y coil on directions X.
5. 5. according to claim 1 have reduce moving mass directly drive XYZ axle navigation system, it is characterized in that described planar motor is directly connected to described Z spindle motor.
6. 6. according to claim 1 have reduce moving mass directly drive XYZ axle navigation system, it is characterized in that, also comprise an air-bearing, by the motion on described air-bearing guiding directions X and the Y direction.
7. 7. according to claim 1 have reduce moving mass directly drive XYZ axle navigation system, it is characterized in that comprise that also a linear axis holds, described linear bearing is used to guide the motion at directions X and the above planar motor of Y direction.

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