CN217114356U - Bearing plate assembly and motion positioning device with same - Google Patents

Abstract

The utility model provides a loading board subassembly and have its motion positioner, loading board subassembly set up on motion positioner's mounting panel, and it includes: the bearing plate is arranged above the mounting plate and used for bearing a workpiece, the bearing plate motor stator is arranged on the upper side of the mounting plate, and the bearing plate motor rotor is arranged on the lower side of the bearing plate; the bearing plate sliding assembly is positioned between the bearing plate and the mounting plate and at least partially can slide so that the bearing plate can move relative to the mounting plate; the bearing plate sliding assembly is provided with a first sliding portion and a second sliding portion, the first sliding portion and the second sliding portion are arranged at intervals along the direction perpendicular to the movement direction of the bearing plate and are respectively located on two opposite sides of a rotor of a bearing plate motor, the first sliding portion is fixedly connected with the bearing plate, and the second sliding portion is connected with the bearing plate through at least part of deformable flexible connecting pieces so as to solve the problem that the movement precision of an XY moving table in the prior art can be reduced due to the influence of magnetic attraction between the stator of the motor and the rotor.

Description

Bearing plate assembly and motion positioning device with same

Technical Field

The utility model relates to a wafer check out test set technical field especially relates to a loading board subassembly and have its motion positioner.

Background

In situations where the positioning accuracy is extremely high, such as in the field of semiconductor manufacturing, it is often necessary to use a table to carry the wafer. The precision, speed and stability of the motion of the stage determine the precision, yield and yield of the semiconductor device. In the prior art, a common stacked motion platform realizes the accurate positioning of a silicon wafer in an XY two-dimensional plane.

In order to improve the acceleration and precision of the XY motion platform, a combination of multiple sets of iron core motor drives and guide rails is usually adopted to realize the motion in the XY direction. Due to the design of multiple groups of drives and guide rails, research and development personnel often pay more attention to the problem of motion synchronization, and neglecting the problem that the iron core motor drive can cause stress and heating deformation of a motion base station. Such deformation may directly affect the accuracy of the guide rails and the sliders, thereby causing a reduction in the positioning accuracy of the XY-motion stage.

Because the middle layer moving base station has larger volume, the influence of deformation can be reduced by the structure reinforcement, but the upper layer moving base station has smaller volume, and the influence of deformation is difficult to offset by the conventional reinforcement structure.

SUMMERY OF THE UTILITY MODEL

A primary object of the utility model is to provide a loading board subassembly and have its motion positioner to solve the problem that the motion precision of the XY motion platform among the prior art can descend because of the influence of the magnetic attraction between the stator of motor and the active cell.

In order to achieve the above object, according to the utility model discloses an aspect provides a loading board subassembly, the loading board subassembly sets up on the mounting panel of motion positioner in order to be used for bearing the weight of the work piece and to the work piece location, the loading board subassembly includes: the bearing plate is arranged above the mounting plate and used for bearing a workpiece, the bearing plate motor stator is arranged on the upper side of the mounting plate, and the bearing plate motor rotor is arranged on the lower side of the bearing plate; the bearing plate sliding assembly is arranged between the bearing plate and the mounting plate, and at least part of the bearing plate sliding assembly is arranged in a sliding manner so that the bearing plate moves relative to the mounting plate under the interaction of the bearing plate motor stator and the bearing plate motor rotor; the bearing plate sliding assembly is provided with a first sliding portion and a second sliding portion, the first sliding portion and the second sliding portion are connected with the bearing plate, the first sliding portion and the second sliding portion are arranged at intervals in the direction perpendicular to the movement direction of the bearing plate and are respectively located on two opposite sides of a rotor of a motor of the bearing plate, the first sliding portion is fixedly connected with the bearing plate, the second sliding portion is connected with the bearing plate through a flexible connecting piece, and at least part of the flexible connecting piece is arranged in a deformable mode around the movement direction of the bearing plate.

Further, the bearing plate sliding assembly comprises a bearing plate guide rail and a bearing plate sliding block; the bearing plate guide rails are arranged at intervals along a first direction and extend along a second direction; the bearing plate comprises a plurality of bearing plate slide blocks, wherein the bearing plate slide blocks are divided into two groups, each group of bearing plate slide blocks comprises at least one bearing plate slide block, and the two groups of bearing plate slide blocks are in one-to-one corresponding sliding connection with two bearing plate guide rails; the bearing plate motor rotor is positioned between the two groups of bearing plate slide blocks, the first sliding part is one group of bearing plate slide blocks, and the second sliding part is the other group of bearing plate slide blocks; the second direction is the moving direction of the bearing plate, and the first direction is perpendicular to the second direction.

Further, be provided with the holding tank that is used for holding flexible connectors on the loading board, the holding tank has the first opening that sets up towards the below of loading board, and the holding tank is used for holding flexible connectors.

Further, the flexible connector includes: the two connecting parts are respectively connected with the bearing plate and the bearing plate sliding block, and each connecting part is a plate body; and the flexible part is positioned between the two connecting parts so as to connect the two connecting parts, the flexible part is a plate body, and the minimum thickness of the flexible part is smaller than that of each connecting part, so that the flexible part can be arranged in a deformable manner.

Furthermore, the two connecting parts are respectively a bearing plate connecting part and a slider connecting part, and the flexible part extends along the movement direction of the bearing plate, wherein the bearing plate connecting part and the slider connecting part are both parallel to the horizontal direction and are arranged on two opposite sides of the flexible part at intervals along the horizontal direction; or the bearing plate connecting part is parallel to the vertical direction, the slider connecting part is parallel to the horizontal direction, and the bearing plate connecting part and the slider connecting part are arranged on two opposite sides of the flexible part at intervals along the vertical direction; or the bearing plate connecting part and the slider connecting part are both parallel to the horizontal direction and are arranged on two opposite sides of the flexible part at intervals along the vertical direction.

Furthermore, the bearing plate connecting part is connected with the bearing plate through a first fastening piece, a first connecting hole for the first fastening piece to penetrate through is formed in the bearing plate connecting part, a first fastening hole for the first fastening piece to insert into is formed in the bearing plate, and the first fastening piece penetrates through the first connecting hole and then is inserted into the first fastening hole; the hole center line of the first connecting hole and the hole center line of the first fastening hole are both parallel to the vertical direction; or the hole center line of the first connecting hole and the hole center line of the first fastening hole are both parallel to the horizontal direction.

Furthermore, the slider connecting part is connected with the bearing plate slider through a second fastening piece, a second connecting hole for the second fastening piece to penetrate through is formed in the slider connecting part, a second fastening hole for the second fastening piece to insert into is formed in the bearing plate slider, and the second fastening piece penetrates through the second connecting hole and then is inserted into the second fastening hole; and the hole center line of the second connecting hole and the hole center line of the second fastening hole are both parallel to the vertical direction.

Further, the flexible connector is made of a rigid material and the flexible connector is made by an integral molding process.

Further, the thickness of the flexible part ranges from 0.1mm to 5 mm; and/or the flexible part is a rectangular plate body, and the ratio of the length of the flexible part to the width of the flexible part is 1.5-3.

According to another aspect of the present invention, there is provided a motion positioning apparatus, comprising a fixed component, a first moving component and a second moving component connected in sequence, wherein the first moving component is movably disposed on the fixed component along a first direction, and the second moving component is movably disposed on the fixed component along a second direction; the first moving assembly comprises an upper mounting plate; the second moving assembly is the bearing plate assembly.

Use the technical scheme of the utility model, the utility model discloses a be located on motion positioner's the mounting panel in order to be used for bearing the weight of the work piece and to the loading board subassembly of work piece location, the loading board subassembly includes: the bearing plate is arranged above the mounting plate and used for bearing a workpiece, the bearing plate motor stator is arranged on the upper side of the mounting plate, and the bearing plate motor rotor is arranged on the lower side of the bearing plate; the bearing plate sliding assembly is arranged between the bearing plate and the mounting plate, and at least part of the bearing plate sliding assembly is arranged in a sliding manner so that the bearing plate moves relative to the mounting plate under the interaction of the bearing plate motor stator and the bearing plate motor rotor; wherein, the bearing plate sliding component is provided with a first sliding part and a second sliding part which are connected with the bearing plate, the first sliding part and the second sliding part are arranged at intervals along the direction which is vertical to the moving direction of the bearing plate and are respectively positioned at the two opposite sides of the rotor of the bearing plate motor, the first sliding part is fixedly connected with the bearing plate so that the bearing plate component has certain rigidity in all directions, thereby ensuring the moving precision of the moving positioning device, the second sliding part is connected with the bearing plate through a flexible connecting piece, at least part of the flexible connecting piece is arranged in a deformable way around the moving direction of the bearing plate, thereby avoiding the condition that the deformation of the bearing plate caused by the magnetic attraction between the stator of the bearing plate motor and the rotor of the bearing plate motor is transmitted to the bearing plate sliding component when the bearing plate component moves along the moving direction, and solving the problem that the moving precision of the XY moving platform in the prior art can be reduced due to the influence of the magnetic attraction between the stator of the motor and the rotor, the problem of bearing plate deformation that the active cell of the cored motor among the prior art that generates heat and arouses is also solved.

Drawings

The accompanying drawings, which form a part of the present application, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:

fig. 1 shows a schematic structural view of an embodiment of a motion positioning device according to the present invention;

figure 2 shows a schematic structural view of an embodiment of a carrier plate assembly according to the present invention;

FIG. 3 shows a schematic structural view of a first embodiment of a flexible connection unit of a loadboard assembly according to the present invention;

FIG. 4 illustrates a half cross-sectional view of a loadboard assembly having the flexible connection illustrated in FIG. 3;

FIG. 5 shows a schematic structural view of a second embodiment of a flexible connection unit for a load bearing plate assembly according to the present invention;

FIG. 6 illustrates a half cross-sectional view of a loadboard assembly having the flexible connection illustrated in FIG. 5;

fig. 7 shows a schematic structural view of a third embodiment of a flexible connection unit according to the invention.

Wherein the figures include the following reference numerals:

1. a fixing assembly; 10. a base; 11. mounting a plate guide rail; 12. mounting a motor stator on a plate;

2. a first moving assembly; 20. mounting a plate; 21. a carrier plate guide rail; 22. bearing the plate motor stator; 23. mounting a plate slide block;

3. a second moving assembly; 30. a carrier plate; 301. accommodating grooves; 302. an avoidance groove; 31. a flexible connector; 311. a connecting portion; 3111. a carrier plate connection portion; 3112. a slider connecting portion; 312. a flexible portion; 313. a first connection hole; 314. a second connection hole; 32. a bearing plate slider; 33. bearing board motor active cell.

Detailed Description

It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.

As shown in fig. 1 to 7, the utility model provides a bearing plate assembly, bearing plate assembly sets up on the mounting panel 20 of motion positioner in order to be used for bearing the weight of the work piece and to the work piece location, and bearing plate assembly includes: a loading plate 30 disposed above the mounting plate 20 for loading a workpiece, a loading plate motor stator 22 mounted on an upper side of the mounting plate 20, and a loading plate motor mover 33 mounted on a lower side of the loading plate 30; a carrier plate sliding assembly disposed between the carrier plate 30 and the mounting plate 20, at least a portion of the carrier plate sliding assembly slidably disposed to move the carrier plate 30 relative to the mounting plate 20 under interaction of the carrier plate motor stator 22 and the carrier plate motor mover 33; the bearing plate sliding assembly is provided with a first sliding portion and a second sliding portion, the first sliding portion and the second sliding portion are connected with the bearing plate 30, the first sliding portion and the second sliding portion are arranged at intervals in a direction perpendicular to the movement direction of the bearing plate 30 and are respectively located on two opposite sides of a bearing plate motor rotor 33, the first sliding portion is fixedly connected with the bearing plate 30, the second sliding portion is connected with the bearing plate 30 through a flexible connecting piece 31, and at least part of the flexible connecting piece 31 is arranged in a deformable mode around the movement direction of the bearing plate 30.

In the prior art, in the motion process of the bearing plate assembly of the motion positioning device, the bearing plate motor stator 22 is usually fixedly connected to the bearing plate 30, the bearing plate motor stator 22 can generate a large magnetic attraction force along the vertical direction, i.e. the Z direction, to the bearing plate motor rotor 33, the magnetic attraction force acts on the bearing plate 30 through the bearing plate motor rotor 33 to cause the bearing plate 30 to generate the deformation in the Z direction, in addition, the heat generated by the bearing plate motor rotor 33 under high-speed motion can also cause the deformation of the bearing plate 30, because the volume of the bearing plate 30 is small and the strength of the structure of the bearing plate 30 is limited, the deformation of the bearing plate 30 can be transmitted to the bearing plate slider 32 and the bearing plate guide rail 21, so as to cause the deformation of the bearing plate guide rail 21, thereby affecting the positioning accuracy of the motion positioning device.

The utility model discloses set up one kind and be located on motion positioner's the mounting panel 20 in order to be used for bearing the weight of the work piece and to the loading board subassembly of work piece location, the loading board subassembly includes: a loading plate 30 disposed above the mounting plate 20 for loading a workpiece, a loading plate motor stator 22 mounted on an upper side of the mounting plate 20, and a loading plate motor mover 33 mounted on a lower side of the loading plate 30; a carrier plate sliding assembly disposed between the carrier plate 30 and the mounting plate 20, at least a portion of the carrier plate sliding assembly slidably disposed to move the carrier plate 30 relative to the mounting plate 20 under interaction of the carrier plate motor stator 22 and the carrier plate motor mover 33; wherein, the bearing plate sliding assembly has a first sliding part and a second sliding part connected with the bearing plate 30, the first sliding part and the second sliding part are arranged at intervals along the direction perpendicular to the moving direction of the bearing plate 30 and are respectively positioned at two opposite sides of the bearing plate motor rotor 33, the first sliding part is fixedly connected with the bearing plate 30, so that the bearing plate assembly has certain rigidity in all directions, thereby ensuring the moving precision of the moving positioning device, the second sliding part is connected with the bearing plate 30 through a flexible connecting piece 31, at least part of the flexible connecting piece 31 is arranged in a deformable way around the moving direction of the bearing plate 30, so as to avoid the condition that the deformation of the bearing plate 30 caused by the magnetic attraction between the bearing plate motor stator 22 and the bearing plate motor rotor 33 is transmitted to the bearing plate sliding assembly when the bearing plate assembly moves along the moving direction, thereby solving the problem that the moving precision of the XY moving platform in the prior art can be caused by the influence of the magnetic attraction between the stator and the rotor of the motor The problem of descending due to sound is solved, and the problem of deformation of the bearing plate 30 caused by heating of the rotor of the iron core motor in the prior art is also solved.

In at least one embodiment of the present invention, the loading plate sliding assembly includes a loading plate guide rail 21 and a loading plate slider 32; the number of the bearing plate guide rails 21 is two, and the two bearing plate guide rails 21 are arranged at intervals along the first direction and extend along the second direction; the number of the bearing plate slide blocks 32 is multiple, the plurality of bearing plate slide blocks 32 are divided into two groups, each group of bearing plate slide blocks 32 comprises at least one bearing plate slide block 32, and the two groups of bearing plate slide blocks 32 are in one-to-one corresponding sliding connection with the two bearing plate guide rails 21; the bearing plate motor mover 33 is located between the two sets of bearing plate sliders 32, the first sliding portion is one set of bearing plate sliders 32, and the second sliding portion is the other set of bearing plate sliders 32; the second direction is a moving direction of the bearing plate 30, and the first direction is perpendicular to the second direction.

It should be noted that, as shown in fig. 1, the first direction is an X direction, the second direction is a Y direction, the vertical direction is a Z direction, and the X direction, the Y direction and the Z direction are mutually perpendicular to each other two by two.

Preferably, the two bearing plate guide rails 21 are symmetrically arranged about a predetermined plane, the number of the bearing plate sliders 32 in the two sets of bearing plate sliders 32 is the same, and the two sets of bearing plate sliders 32 are also symmetrically arranged about the predetermined plane, each bearing plate slider 32 in one set of bearing plate sliders 32 is rigidly connected to the bearing plate 30, and each bearing plate slider 32 in the other set of bearing plate sliders 32 is flexibly connected to the bearing plate 30 through the flexible connecting member 31.

In the embodiment shown in fig. 1 to 7 of the present invention, the number of the loading plate sliders 32 in each set of the loading plate sliders 32 is two.

As shown in fig. 2, 4 and 6, the loading plate 30 is provided with a receiving groove 301 for receiving the flexible connecting member 31, the receiving groove 301 has a first opening disposed toward the lower side of the loading plate 30, the receiving groove 301 is used for receiving the flexible connecting member 31, and at least a portion of the receiving groove 301 penetrates through the loading plate 30 in a vertical direction.

Specifically, the principle of the entire carrier plate assembly is illustrated by taking fig. 4 as an example, and the moving direction of the carrier plate assembly in fig. 4 is perpendicular to the page of fig. 4 to point to the inside or outside of the figure. The bearing plate slider 32 on the left side is fixedly connected with the bearing plate 30, so that the bearing plate 30 has rigidity in all directions during movement, and the movement precision of the bearing plate assembly is ensured. The flexible connecting piece 31 is arranged in the accommodating groove 301 and is respectively connected with the bearing plate 30 and the bearing plate slide block 32 on the right side, the bearing plate motor rotor 33 is arranged on the lower side of the bearing plate 30, when the bearing plate motor works, the bearing plate 30 can be influenced by magnetic attraction or heating due to the bearing plate motor rotor 33, so that deformation along the vertical direction (generally in a concave shape) is generated, and the flexible connecting piece 31 can deform along the movement direction of the bearing plate assembly, so that the deformation along the vertical direction of the bearing plate 30 can be buffered, adverse effects brought to the two groups of bearing plate slide blocks 32 due to the deformation of the bearing plate 30 are greatly reduced, and the problem of precision reduction caused by abnormal stress of each bearing plate slide block 32 and the bearing plate guide rail 21 corresponding to the bearing plate slide block 32 is solved.

As shown in fig. 3, 5 and 7, the flexible connecting member 31 includes: the two connecting parts 311 are respectively connected with the bearing plate 30 and the bearing plate slide block 32, and each connecting part 311 is a plate body; a flexible portion 312, the flexible portion 312 being located between the two connecting portions 311 to connect the two connecting portions 311, the flexible portion 312 being a plate body, a minimum thickness of the flexible portion 312 being smaller than a minimum thickness of each of the connecting portions 311, so that the flexible portion 312 is deformably disposed.

Specifically, the two connection portions 311 are a carrier plate connection portion 3111 and a slider connection portion 3112, respectively, and the flexible portion 312 extends along the moving direction of the carrier plate 30, wherein the cross-sectional area of the flexible portion 312 remains unchanged along the moving direction of the carrier plate 30.

As shown in fig. 3, in the first embodiment of the flexible connecting member 31, the carrier connecting portion 3111 and the slider connecting portion 3112 are both arranged on opposite sides of the flexible portion 312 in parallel with the horizontal direction and spaced apart from each other in the horizontal direction to form a "one-line" shaped flexible connecting member 31.

As shown in fig. 5, in the second embodiment of the flexible connector 31, the carrier plate connecting portion 3111 is parallel to the vertical direction, the slider connecting portion 3112 is parallel to the horizontal direction, and the carrier plate connecting portion 3111 and the slider connecting portion 3112 are arranged at intervals in the vertical direction on opposite sides of the flexible portion 312 to form an inverted "T" shaped flexible connector 31.

As shown in fig. 7, in the third embodiment of the flexible connecting member 31, the carrier plate connecting portion 3111 and the slider connecting portion 3112 are arranged on opposite sides of the flexible portion 312 in parallel to the horizontal direction and at intervals in the vertical direction to form an "i" shaped flexible connecting member 31.

Preferably, the plate area of the slider connection part 3112 is larger than that of the carrier plate connection part 3111 to ensure a large contact area between the slider connection part 3112 and the carrier plate slider 32, thereby ensuring reliability of the entire connection.

The utility model discloses a be connected through first fastener between loading board connecting portion 3111 and the loading board 30 of flexible connector 31, be provided with the first connecting hole 313 that is used for supplying first fastener to pass on loading board connecting portion 3111, be provided with the first fastening hole that is used for supplying first fastener to insert on the loading board 30, insert in the first fastening hole after first fastener passes first connecting hole 313; alternatively, the hole center line of the first connection hole 313 and the hole center line of the first fastening hole are both parallel to the vertical direction; or both the hole center line of the first coupling hole 313 and the hole center line of the first fastening hole are parallel to the horizontal direction.

In both embodiments of the flexible connector 31 shown in fig. 3 and 7, the carrier plate connecting portion 3111 is a plate body parallel to the horizontal direction, and the hole center line of the first connection hole 313 and the hole center line of the first fastening hole are both disposed parallel to the vertical direction, i.e., perpendicular to the carrier plate connecting portion 3111.

In the embodiment of the flexible connector 31 shown in fig. 5, the carrier plate connecting portion 3111 is a plate body parallel to the vertical direction, and the hole center line of the first connecting hole 313 and the hole center line of the first fastening hole are both disposed parallel to the horizontal direction, i.e., perpendicular to the carrier plate connecting portion 3111.

The slider connecting part 3112 of the flexible connecting piece 31 of the utility model is connected with the bearing plate slider 32 through the second fastening piece, the slider connecting part 3112 is provided with a second connecting hole 314 for the second fastening piece to pass through, the bearing plate slider 32 is provided with a second fastening hole for the second fastening piece to insert, and the second fastening piece is inserted into the second fastening hole after passing through the second connecting hole 314; wherein, the hole center line of the second connecting hole 314 and the hole center line of the second fastening hole are both parallel to the vertical direction.

As shown in fig. 3, 5 and 7, in the three embodiments of the flexible connector 31, the slider connecting portion 3112 is a plate body parallel to the horizontal direction, and the hole center line of the second connecting hole 314 and the hole center line of the second fastening hole are both disposed parallel to the vertical direction, i.e., perpendicular to the slider connecting portion 3112.

Specifically, the first fastener and the second fastener are both screws.

The utility model discloses a flexible connection 31's structure is optional to be set up, like the flexible connection 31 of the "T" font shown in figure 5, compare with flexible connection 31 in figure 3 and figure 7, the direction of the hole core line of first connecting hole 313 is different for loading board 30 and loading board connecting portion 3111 contact in vertical direction and connect, the contact surface is parallel to vertical direction promptly, connect like this and to finely tune the initial position of loading board 30 in vertical direction, so as to make loading board 30 keep the horizontality better.

The utility model discloses a flexible connection member 31's structure is optional to be set up, flexible connection member 31 of "one" font shown in fig. 3 and flexible connection member 31 of "worker" font shown in fig. 7, compare with the flexible connection member 31 of "T" font of falling in fig. 5, the direction of the hole core line of first connecting hole 313 is different, make loading board 30 and loading board connecting portion 3111 contact and connect in the horizontal direction, the contact surface is on a parallel with the horizontal direction promptly, compare with the contact surface that is on a parallel with vertical direction, the area that is on a parallel with the horizontal direction contact surface can be accomplished bigger, the area of contact of loading board connecting portion 3111 with loading board 30 has been increased, the quantity of the first fastener between loading board connecting portion 3111 and the loading board 30 has been increased simultaneously, holistic rigidity of connection can be guaranteed better.

The utility model discloses a flexible connection piece 31 is made by rigid material, and flexible connection piece 31 is made by integrated into one piece technology.

Alternatively, the flexible portion 312 is a thin sheet-shaped plate body having a uniform thickness or the flexible portion 312 is a plate body having a non-uniform thickness.

Preferably, the thickness of the flexible portion 312 ranges from 0.1mm to 5mm, and the specific value needs to be determined according to the allowable displacement of the carrier plate 30.

Preferably, the flexible portion 312 is a rectangular plate body, and a ratio of a length of the flexible portion 312 to a width of the flexible portion 312 in a rectangular plane is 1.5 to 3. Here, the length of the flexible portion 312 refers to a dimension of the flexible portion 312 in a moving direction (i.e., the second direction, i.e., the Y direction) of the carrier plate 30, and the width of the flexible portion 312 refers to a dimension of the flexible portion 312 from a side close to the carrier plate connecting portion 3111 to a side close to the slider connecting portion 3112.

It should be noted that, in the case that the thickness of the flexible portion 312 is a fixed value, the smaller the length of the flexible portion 312, the smaller the rigidity along the moving direction of the carrier plate 30, and the greater the flexibility around the moving direction of the carrier plate 30; the smaller the width of the flexible portion 312, the greater its stiffness in the direction of movement of the carrier plate 30, and the less flexibility in the direction of movement around the carrier plate 30; in order to keep the balance between the overall motion precision and the deformation decoupling capability of the kinematic locating device, a better technical effect can be achieved by setting the ratio of the length of the flexible portion 312 to the width of the flexible portion 312 to 1.5 to 3.

The utility model discloses a combination of guide rail slider and cored motor can realize the motion with high speed with higher speed greatly, and the influence of motor volume, generating heat and magnetic attraction is taken into account to the synthesis, should alleviate the drive mass as far as possible, consequently, need carry out the lightweight design to the structural component, if loading board 30 and mounting panel 20 can adopt the preparation of light metal material, for example the aluminum alloy.

The utility model also provides a motion positioning device, which comprises a fixed component 1, a first moving component 2 and a second moving component 3 which are connected in sequence, wherein the first moving component 2 is movably arranged on the fixed component 1 along the first direction, and the second moving component 3 is movably arranged on the fixed component 1 along the second direction; the first mobile assembly 2 comprises the above-mentioned mounting plate 20; the second moving assembly 3 is the above-mentioned bearing plate assembly.

In fig. 1, the fixing assembly 1 includes a base 10, and a mounting plate guide rail 11 and a mounting plate motor stator 12 are arranged above the base 10; the mounting plate 20 of the first moving assembly 2 is arranged above the base 10 and is in sliding connection with the mounting plate guide rail 11 through a mounting plate sliding block 23, and the mounting plate motor rotor matched with the mounting plate motor stator 12 is arranged below the mounting plate 20 and corresponds to the mounting plate motor stator 12; a bearing plate guide rail 21 and a bearing plate motor stator 22 are arranged above the mounting plate 20, the second moving assembly 3, i.e. the bearing plate 30 of the bearing plate assembly, is arranged above the mounting plate 20 and is slidably connected with the bearing plate guide rail 21 through a bearing plate slider 32, and a bearing plate motor rotor 33 matched with the bearing plate motor stator 22 is connected with the bearing plate 30 and is arranged corresponding to the bearing plate motor stator 22.

In at least one embodiment of the motion positioning apparatus of the present invention, the mounting plate rail 11 and the mounting plate motor stator 12 extend in a first direction, i.e., the X direction, to guide and drive the motion of the first moving assembly 2 in the first direction, respectively; the number of the mounting plate guide rails 11 is three, the three mounting plate guide rails 11 are arranged at intervals along the second direction, correspondingly, the number of the mounting plate sliding blocks 23 is also three, and the three mounting plate sliding blocks 23 are in one-to-one corresponding sliding connection with the three mounting plate guide rails 11 to guide the movement of the mounting plate 20 together; the number of the mounting plate motor stators 12 is two, one mounting plate motor stator 12 is arranged between every two adjacent mounting plate guide rails 11, correspondingly, the number of the mounting plate motor rotors is also two, and the two mounting plate motor rotors and the two mounting plate motor stators 12 are arranged in a one-to-one correspondence manner to drive the mounting plate 20 to move together.

Alternatively, the mounting plate 20 and the mounting plate slider 23 may be directly connected, or a mounting plate slider adapter may be additionally provided to avoid transmission of a force that deforms the mounting plate 20 to the mounting plate slider 23 and the mounting plate rail 11.

The mounting plate motor stator 12 may generate a larger Z-direction attractive force to the mounting plate motor mover during the movement of the first moving assembly 2, and the deformation of the mounting plate 20 caused by the interaction between the mounting plate motor stator 12 and the mounting plate motor mover may be reduced by increasing the structural strength of the mounting plate 20.

In at least one embodiment of the motion positioning apparatus of the present invention, the loading plate guide rail 21 and the loading plate motor stator 22 extend along the second direction, i.e., the Y direction, to guide and drive the motion of the second moving assembly 3 along the second direction, respectively; the number of the bearing plate guide rails 21 is two, the two bearing plate guide rails 21 are arranged at intervals along the first direction, correspondingly, the number of the bearing plate sliders 32 is also two, and the two groups of bearing plate sliders 32 are slidably connected with the two bearing plate guide rails 21 in a one-to-one correspondence manner so as to guide the movement of the bearing plate 30 together; the number of the bearing plate motor stators 22 is one, the bearing plate motor stators 22 are located between the two bearing plate guide rails 21, correspondingly, the number of the bearing plate motor rotors 33 is also one, and the bearing plate motor rotors 33 are arranged corresponding to the bearing plate motor stators 22 to drive the bearing plates 30 to move.

Optionally, the bearing plate 30 and the bearing plate motor mover 33 may be directly connected to each other, or may be additionally connected to each other by a bearing plate adapter, wherein an avoiding groove 302 for accommodating at least a portion of the bearing plate motor mover 33 is disposed below the bearing plate 30 to reduce a deformation force transmitted from the bearing plate motor mover 33 to the bearing plate 30.

Specifically, the carrier module above the carrier plate 30 can be fixedly connected to the side of the carrier plate 30 by a fastener to ensure the positional flatness of the workpiece.

Bearing board 30 and bearing board motor active cell 33 among the prior art are connected, the part of fixed bearing board motor active cell 33 in the middle of the bottom of bearing board 30 can produce the deformation of Z direction because of the influence of the magnetic attraction that bearing board motor active cell 33 received equally, the active cell generates heat and also can arouse the whole deformation of aluminum alloy bearing board 30 under the high-speed motion in addition, because the effect is strengthened to the less and ordinary intensity of structure of bearing board 30 volume is limited, should warp can be transmitted to on the bearing board guide rail 21 by bearing board slider 32, thereby lead to bearing board guide rail 21 to take place deformation, influence motion positioner's positioning accuracy, so adopt the utility model discloses a bearing board subassembly can avoid effectively because of the bearing board 30 warp the adverse effect to positioning accuracy that causes.

From the above description, it can be seen that the above-mentioned embodiments of the present invention achieve the following technical effects:

the utility model discloses set up one kind and be located on motion positioner's the mounting panel 20 in order to be used for bearing the weight of the work piece and to the loading board subassembly of work piece location, the loading board subassembly includes: a loading plate 30 disposed above the mounting plate 20 for loading a workpiece, a loading plate motor stator 22 mounted on an upper side of the mounting plate 20, and a loading plate motor mover 33 mounted on a lower side of the loading plate 30; a carrier plate sliding assembly disposed between the carrier plate 30 and the mounting plate 20, at least a portion of the carrier plate sliding assembly slidably disposed to move the carrier plate 30 relative to the mounting plate 20 under interaction of the carrier plate motor stator 22 and the carrier plate motor mover 33; wherein, the bearing plate sliding assembly has a first sliding part and a second sliding part connected with the bearing plate 30, the first sliding part and the second sliding part are arranged at intervals along the direction perpendicular to the moving direction of the bearing plate 30 and are respectively positioned at two opposite sides of the bearing plate motor rotor 33, the first sliding part is fixedly connected with the bearing plate 30, so that the bearing plate assembly has certain rigidity in all directions, thereby ensuring the moving precision of the moving positioning device, the second sliding part is connected with the bearing plate 30 through a flexible connecting piece 31, at least part of the flexible connecting piece 31 is arranged in a deformable way around the moving direction of the bearing plate 30, so as to avoid the condition that the deformation of the bearing plate 30 caused by the magnetic attraction between the bearing plate motor stator 22 and the bearing plate motor rotor 33 is transmitted to the bearing plate sliding assembly when the bearing plate assembly moves along the moving direction, thereby solving the problem that the moving precision of the XY moving platform in the prior art can be caused by the influence of the magnetic attraction between the stator and the rotor of the motor The problem of descending due to sound is solved, and the problem of deformation of the bearing plate 30 caused by heating of the rotor of the iron core motor in the prior art is also solved.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.

The relative arrangement of the components and steps, the numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present application unless specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective portions shown in the drawings are not drawn in an actual proportional relationship for the convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.

In the description of the present application, it is to be understood that the orientation or positional relationship indicated by the directional terms such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal" and "top, bottom", etc., are generally based on the orientation or positional relationship shown in the drawings, and are used for convenience of description and simplicity of description only, and in the case of not making a reverse description, these directional terms do not indicate and imply that the device or element being referred to must have a particular orientation or be constructed and operated in a particular orientation, and therefore, should not be considered as limiting the scope of the present application; the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.

Spatially relative terms, such as "above … …," "above … …," "above … … surface," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and the terms have no special meanings unless otherwise stated, and therefore, the scope of protection of the present application is not to be construed as being limited.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. A load bearing plate assembly disposed on a mounting plate (20) of a motion positioning apparatus for bearing and positioning a workpiece, the load bearing plate assembly comprising:

the bearing plate (30) is arranged above the mounting plate (20) and used for bearing the workpiece, the bearing plate motor stator (22) is arranged on the upper side of the mounting plate (20), and the bearing plate motor rotor (33) is arranged on the lower side of the bearing plate (30);

a carrier plate sliding assembly disposed between the carrier plate (30) and the mounting plate (20), at least a portion of the carrier plate sliding assembly slidably disposed to move the carrier plate (30) relative to the mounting plate (20) under interaction of the carrier plate motor stator (22) and the carrier plate motor mover (33);

the bearing plate sliding assembly is provided with a first sliding portion and a second sliding portion, the first sliding portion and the second sliding portion are connected with the bearing plate (30), the first sliding portion and the second sliding portion are arranged at intervals in a direction perpendicular to the movement direction of the bearing plate (30) and are respectively located on two opposite sides of a bearing plate motor rotor (33), the first sliding portion is fixedly connected with the bearing plate (30), the second sliding portion is connected with the bearing plate (30) through a flexible connecting piece (31), and at least part of the flexible connecting piece (31) is arranged in a deformable mode around the movement direction of the bearing plate (30).

2. The carrier plate assembly of claim 1, wherein the carrier plate slide assembly comprises a carrier plate guide rail (21) and a carrier plate slider (32); wherein the content of the first and second substances,

the number of the bearing plate guide rails (21) is two, and the two bearing plate guide rails (21) are arranged at intervals along a first direction and extend along a second direction;

the number of the bearing plate sliding blocks (32) is multiple, the bearing plate sliding blocks (32) are divided into two groups, each group of the bearing plate sliding blocks (32) comprises at least one bearing plate sliding block (32), and the two groups of the bearing plate sliding blocks (32) are in one-to-one corresponding sliding connection with the two bearing plate guide rails (21);

the bearing plate motor rotor (33) is positioned between the two groups of bearing plate sliding blocks (32), the first sliding part is one group of bearing plate sliding blocks (32), and the second sliding part is the other group of bearing plate sliding blocks (32);

the second direction is the moving direction of the bearing plate (30), and the first direction is perpendicular to the second direction.

3. The carrier plate assembly of claim 1,

be provided with on loading board (30) and be used for holding tank (301) of flexible connecting piece (31), holding tank (301) have towards the first opening that the below of loading board (30) set up, holding tank (301) are used for holding flexible connecting piece (31).

4. The carrier plate assembly according to claim 2, wherein the flexible connection (31) comprises:

the two connecting parts (311) are respectively connected with the bearing plate (30) and the bearing plate sliding block (32), and each connecting part (311) is a plate body;

a flexible portion (312), the flexible portion (312) being located between the two connecting portions (311) to connect the two connecting portions (311), the flexible portion (312) being a plate body, a minimum thickness of the flexible portion (312) being smaller than a thickness of each of the connecting portions (311) so that the flexible portion (312) is deformably disposed.

5. Carrier plate assembly according to claim 4, wherein the two connection portions (311) are a carrier plate connection portion (3111) and a slider connection portion (3112), respectively, the flexible portion (312) extending in a direction of movement of the carrier plate (30), wherein,

the bearing plate connecting part (3111) and the slider connecting part (3112) are both parallel to the horizontal direction and arranged on two opposite sides of the flexible part (312) at intervals along the horizontal direction; or

The bearing plate connecting part (3111) is parallel to the vertical direction, the slider connecting part (3112) is parallel to the horizontal direction, and the bearing plate connecting part (3111) and the slider connecting part (3112) are arranged on two opposite sides of the flexible part (312) at intervals along the vertical direction; or

The bearing plate connecting portion (3111) and the slider connecting portion (3112) are both arranged on opposite sides of the flexible portion (312) in parallel to the horizontal direction and at intervals in the vertical direction.

6. Carrier plate assembly according to claim 5,

the bearing plate connecting part (3111) is connected with the bearing plate (30) through a first fastening piece, a first connecting hole (313) for the first fastening piece to pass through is formed in the bearing plate connecting part (3111), a first fastening hole for the first fastening piece to insert into is formed in the bearing plate (30), and the first fastening piece penetrates through the first connecting hole (313) and then is inserted into the first fastening hole;

wherein a hole center line of the first connection hole (313) and a hole center line of the first fastening hole are both parallel to a vertical direction; or the hole center line of the first connection hole (313) and the hole center line of the first fastening hole are both parallel to the horizontal direction.

7. Carrier plate assembly according to claim 5,

the slider connecting part (3112) is connected with the bearing plate slider (32) through a second fastening piece, a second connecting hole (314) for the second fastening piece to pass through is formed in the slider connecting part (3112), a second fastening hole for the second fastening piece to insert into is formed in the bearing plate slider (32), and the second fastening piece penetrates through the second connecting hole (314) and then is inserted into the second fastening hole;

wherein, the hole center line of the second connecting hole (314) and the hole center line of the second fastening hole are both parallel to the vertical direction.

8. Load carrying plate assembly according to claim 4, characterized in that the flexible connection member (31) is made of a rigid material and that the flexible connection member (31) is made by an integrated moulding process.

9. The loadboard assembly of claim 8,

the minimum thickness of the flexible part (312) ranges from 0.1mm to 5 mm; and/or

The flexible portion (312) is a rectangular plate, and the ratio of the length of the flexible portion (312) to the width of the flexible portion (312) is 1.5 to 3.

10. A kinematic positioning device, characterized by comprising a fixed component (1), a first moving component (2) and a second moving component (3) connected in sequence, wherein the second moving component (3) is the bearing plate component of any one of claims 1 to 9, the first moving component (2) is movably arranged on the fixed component (1) along a first direction, and the second moving component (3) is movably arranged on the fixed component (1) along a second direction; wherein the first moving assembly (2) comprises the mounting plate (20).

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