CN202021177U - Multi-stage circulation cleaning equipment for solar silicon wafer - Google Patents
Multi-stage circulation cleaning equipment for solar silicon wafer Download PDFInfo
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- CN202021177U CN202021177U CN2010206888288U CN201020688828U CN202021177U CN 202021177 U CN202021177 U CN 202021177U CN 2010206888288 U CN2010206888288 U CN 2010206888288U CN 201020688828 U CN201020688828 U CN 201020688828U CN 202021177 U CN202021177 U CN 202021177U
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CN2010206888288U CN202021177U (en) | 2010-12-30 | 2010-12-30 | Multi-stage circulation cleaning equipment for solar silicon wafer |
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CN2010206888288U CN202021177U (en) | 2010-12-30 | 2010-12-30 | Multi-stage circulation cleaning equipment for solar silicon wafer |
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CN202021177U true CN202021177U (en) | 2011-11-02 |
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CN2010206888288U Expired - Fee Related CN202021177U (en) | 2010-12-30 | 2010-12-30 | Multi-stage circulation cleaning equipment for solar silicon wafer |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102836842A (en) * | 2012-08-08 | 2012-12-26 | 晶海洋半导体材料(东海)有限公司 | Multi-groove circulating silicon wafer cleaning machine |
CN102989717A (en) * | 2012-12-25 | 2013-03-27 | 西安烽火光伏科技股份有限公司 | On-line waste water reusing method in pre-cleaning working procedure |
TWI571321B (en) * | 2015-07-27 | 2017-02-21 | 盟立自動化股份有限公司 | Automation system for washing a plate member |
CN107164109A (en) * | 2017-03-31 | 2017-09-15 | 吴江创源新材料科技有限公司 | Cleaning fluid and preparation method thereof and cleaning before a kind of sapphire wafer annealing |
CN108704894A (en) * | 2018-05-25 | 2018-10-26 | 安徽尚忠活塞环有限公司 | A kind of piston ring cleaning line of high degree of automation |
CN110605275A (en) * | 2019-10-11 | 2019-12-24 | 张家港市科宇信超声有限公司 | Cleaning liquid circulating system and circulating method for ultrasonic cleaning machine |
-
2010
- 2010-12-30 CN CN2010206888288U patent/CN202021177U/en not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102836842A (en) * | 2012-08-08 | 2012-12-26 | 晶海洋半导体材料(东海)有限公司 | Multi-groove circulating silicon wafer cleaning machine |
CN102836842B (en) * | 2012-08-08 | 2014-07-16 | 晶海洋半导体材料(东海)有限公司 | Multi-groove circulating silicon wafer cleaning machine |
CN102989717A (en) * | 2012-12-25 | 2013-03-27 | 西安烽火光伏科技股份有限公司 | On-line waste water reusing method in pre-cleaning working procedure |
TWI571321B (en) * | 2015-07-27 | 2017-02-21 | 盟立自動化股份有限公司 | Automation system for washing a plate member |
CN107164109A (en) * | 2017-03-31 | 2017-09-15 | 吴江创源新材料科技有限公司 | Cleaning fluid and preparation method thereof and cleaning before a kind of sapphire wafer annealing |
CN108704894A (en) * | 2018-05-25 | 2018-10-26 | 安徽尚忠活塞环有限公司 | A kind of piston ring cleaning line of high degree of automation |
CN110605275A (en) * | 2019-10-11 | 2019-12-24 | 张家港市科宇信超声有限公司 | Cleaning liquid circulating system and circulating method for ultrasonic cleaning machine |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 074000 new industrial zone of Hebei, Gaobeidian Province, light green new energy Limited by Share Ltd Patentee after: Guangwei Green Energy Technology Co.,Ltd. Address before: 074000 new industrial zone of Hebei, Gaobeidian Province, light green new energy Limited by Share Ltd Patentee before: Lightway Green New Energy Co.,Ltd. |
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TR01 | Transfer of patent right |
Effective date of registration: 20160718 Address after: 074000, Baoding City, Hebei province Gaobeidian City Road on the north side of the west side of prosperous street Patentee after: BAODING LIGHTWAY GREEN ENERGY TECHNOLOGY CO.,LTD. Address before: 074000 new industrial zone of Hebei, Gaobeidian Province, light green new energy Limited by Share Ltd Patentee before: Guangwei Green Energy Technology Co.,Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111102 Termination date: 20181230 |
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CF01 | Termination of patent right due to non-payment of annual fee |