CN202655283U - Multi-stage circulated cleaning equipment - Google Patents
Multi-stage circulated cleaning equipment Download PDFInfo
- Publication number
- CN202655283U CN202655283U CN 201220176688 CN201220176688U CN202655283U CN 202655283 U CN202655283 U CN 202655283U CN 201220176688 CN201220176688 CN 201220176688 CN 201220176688 U CN201220176688 U CN 201220176688U CN 202655283 U CN202655283 U CN 202655283U
- Authority
- CN
- China
- Prior art keywords
- rinse bath
- chamber
- circulating pump
- water
- transition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000004140 cleaning Methods 0.000 title claims abstract description 60
- 238000000926 separation method Methods 0.000 claims abstract description 38
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 [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 239000000428 dust Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000006011 modification reaction Methods 0.000 description 2
- 239000010865 sewage Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Abstract
The utility model discloses multi-stage circulated cleaning equipment comprising a rack, a first cleaning tank, a transitional cleaning tank, a final cleaning tank, a water inlet valve, a filtration treatment pond, a first circulating pump, a separation dike and a soiling solution tank, wherein the soiling solution tank, the first cleaning tank, the transitional cleaning tank and the final cleaning tank are sequentially and linearly arranged on the rack; the final cleaning tank is internally provided with the separation dike; the separation dike is used for separating the final cleaning tank into a cleaning chamber and a spilled soiling chamber; the separation dike is lower than the side wall of the final cleaning tank; the water inlet valve is communicated with the cleaning chamber of the final cleaning tank; and the side wall where the final cleaning tank and the transitional cleaning tank are connected is provided with a backflow hole communicated with the filtration treatment pond through a hose. The multi-stage circulated cleaning equipment is very remarkable in water-saving effect, capable of both reducing the cleaning cost and the waste of water sources, simple in structure, reasonable in design, low in cost and favorable in market popularization value.
Description
Technical field
The utility model relates to a kind of cleaning equipment, is specifically related to a kind of multilevel circulating cleaning equipment for solar cell silicon wafers.
Background technology
Silicon chip of solar cell is essential through multistage cleaning after cutting, is attached to the mortar of silicon chip surface with removal.Present used cleaning equipment is multistage groove-type cleaning machine, usually contains rinse bath more than three grades, and silicon chip to be cleaned shifts out after first order rinse bath begins to clean step by step, and the impurity that silicon chip surface adheres in the first rinse bath is maximum, will reduce step by step later on.In existing multistage rinse bath structure, every one-level rinse bath has independently water inlet and outlet system, every grade has waste water to discharge, the sewage of discharging in the rinse baths at different levels directly discharges, the water yield of the required consumption of cleaning silicon chip is very large, so not only water consumption is large, but also pollutes the environment, the Wafer Cleaning equipment that photovoltaic enterprise can recycle in the urgent need to a kind of cleaning fluid.
The utility model content
The purpose of this utility model is to overcome the defective that exists in the prior art, and a kind of multilevel circulating cleaning equipment of water saving is provided.
For achieving the above object, the technical solution of the utility model is a kind of multilevel circulating cleaning equipment of design, comprise frame, the first rinse bath, the transition rinse bath, last rinse bath, water intaking valve, filtration processing tank, the first circulating pump, divide separation levee and soiling solution groove, the soiling solution groove, the first rinse bath, transition rinse bath and last rinse bath successively straight line are arranged on the frame, in the end be provided with a minute separation levee in the rinse bath, divide separation levee that last rinse bath is separated into the purge chamber and the dirty chamber of overflowing, the height of minute separation levee is lower than the sidewall of last rinse bath, water intaking valve interlinks with the purge chamber of last rinse bath, in the end the sidewall that is bordered of rinse bath and transition rinse bath is provided with return port, and return port interlinks by flexible pipe and filtration processing tank; Equally, in the transition rinse bath, also be provided with a minute separation levee, divide separation levee that the transition rinse bath is separated into the purge chamber and the dirty chamber of overflowing, the height of minute separation levee is lower than the sidewall of transition rinse bath, on the sidewall that transition rinse bath and upper track rinse bath are bordered on, also be provided with return port, arranging of return port is highly suitable with minute separation levee, and return port interlinks by flexible pipe and filtration processing tank; In the first rinse bath, also be provided with a minute separation levee, divide separation levee that the first rinse bath is separated into the purge chamber and the dirty chamber of overflowing, the height of minute separation levee is higher than the sidewall of soiling solution groove, is provided with return port in the bottom of the excessive dirty chamber of the first rinse bath, and return port interlinks by flexible pipe and filtration processing tank; In the end between the purge chamber of the excessive dirty chamber of rinse bath and adjacent transition rinse bath, between the excessive dirty chamber in rear road and the purge chamber in front road, and be communicated with by the first circulating pump respectively between the excessive dirty chamber of the purge chamber of the first rinse bath and adjacent transition rinse bath, it is indoor that the water sucking mouth of the first circulating pump lays respectively at each dirt of overflowing, and the top, water sucking mouth of each first circulating pump is equipped with the horizontal filtering layer; Between the purge chamber of the pure water inlet of filtration processing tank and the first rinse bath, there is the second circulating pump to link to each other, the pure water inlet place of the water sucking mouth of the second circulating pump and filtration processing tank interlinks, and the delivery port of the second circulating pump interlinks through the purge chamber of flexible pipe and the first rinse bath.
Preferably, 2～5 transition rinse baths of continuous arrangement between the first rinse bath and last rinse bath.
Preferably, described filtration processing tank comprises admission chamber, purification chamber and the water-purifying cavity of separating by internal partition, upper end open place at admission chamber is provided with the horizontal filtering layer, all be provided with the side filter course in admission chamber and the side-walls in purification chamber and the side-walls of purification chamber and water-purifying cavity, internal partition at filtration processing tank is provided with liquid drain hole, and the second circulating pump is placed in the water-purifying cavity.
Preferably, each first circulating pump is individually fixed in bottom, corresponding excessive dirty chamber.
Preferably, the second circulating pump is fixed in the water-purifying cavity bottom.
The course of work of the present utility model is as follows:
First with all each rinse bath topped up with water, the purge chamber of last rinse bath is connected with running water pipe through water intaking valve, again silicon chip to be cleaned is put into the purge chamber of the first rinse bath, after ultrasonic wave or mechanical oscillation cleaning, grit and the dirt particle overwhelming majority subsidiary on the silicon chip can enter in the cleaning fluid, clean again through by mechanical system silicon chip being relayed in the transition rinse bath again behind the previous cleaning of the first rinse bath, it is individual next definite according to the cleaning requirement how many transition rinse baths designs, after the transition rinse bath cleans, change over to and carry out final rinsing in the last rinse bath and get final product.
Through the actual use checking of applicant, adopt multilevel circulating cleaning equipment of the present utility model, the water consumption of continuous wash silicon chip is 1/3～1/10 of existing cleaning machine, water-saving result is very remarkable, has both reduced the cleaning cost, reduces again the waste to water resource.
Advantage of the present utility model and beneficial effect are: a kind of multilevel circulating cleaning equipment is provided, and its water-saving result is very remarkable, has both reduced the cleaning cost, reduce again the waste to water resource, and simple in structure, reasonable in design, with low cost, have good market popularization value.
Description of drawings
Fig. 1 is the schematic diagram of this multilevel circulating cleaning equipment.
The specific embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present utility model is further described.Following examples only are used for the technical solution of the utility model more clearly is described, and can not limit protection domain of the present utility model with this.
The technical scheme of the utility model implementation is:
A kind of multilevel circulating cleaning equipment, it is characterized in that, comprise frame 1, the first rinse bath 2, transition rinse bath 3, last rinse bath 4, water intaking valve 5, filtration processing tank 6, the first circulating pump 7, divide separation levee 8 and soiling solution groove 9, soiling solution groove 9, the first rinse bath 2, transition rinse bath 3 and last rinse bath 4 successively straight line are arranged on the frame 1, in the end be provided with minute separation levee 8 in the rinse bath 4, divide separation levee 8 that last rinse bath 4 is separated into purge chamber 11 and the dirty chamber 12 of overflowing, the height of minute separation levee 8 is lower than the sidewall of last rinse bath 4, water intaking valve 5 interlinks with the purge chamber 11 of last rinse bath 4, in the end rinse bath 4 is provided with return port 10 with the sidewall that transition rinse bath 3 is bordered, and return port 10 interlinks by flexible pipe 13 and filtration processing tank 6; Equally, in transition rinse bath 3, also be provided with minute separation levee 8, divide separation levee 8 that transition rinse bath 3 is separated into purge chamber 11 and the dirty chamber 12 of overflowing, the height of minute separation levee 8 is lower than the sidewall of transition rinse bath 3, on the sidewall that transition rinse bath 3 and upper track rinse bath are bordered on, also be provided with return port 10, arranging of return port 10 is highly suitable with minute separation levee 8, and return port 10 interlinks by flexible pipe 13 and filtration processing tank 6; In the first rinse bath 2, also be provided with minute separation levee 8, divide separation levee 8 that the first rinse bath 2 is separated into purge chamber 11 and the dirty chamber 12 of overflowing, the height of minute separation levee 8 is higher than the sidewall of soiling solution groove 9, bottom in the excessive dirty chamber 12 of the first rinse bath 2 is provided with return port 10, and return port 10 interlinks by flexible pipe 13 and filtration processing tank 6; In the end between the purge chamber 11 of the excessive dirty chamber 12 of rinse bath 4 and adjacent transition rinse bath 3, between the excessive dirty chamber 12 in rear road and the purge chamber 11 in front road, and be communicated with by the first circulating pump 7 respectively between the excessive dirty chamber 12 of the purge chamber 11 of the first rinse bath 2 and adjacent transition rinse bath 3, the water sucking mouth of the first circulating pump 7 lays respectively in each dirty chamber 12 of overflowing, and the top, water sucking mouth of each first circulating pump 7 is equipped with horizontal filtering layer 64; Between the purge chamber 11 of the pure water inlet of filtration processing tank 6 and the first rinse bath 2, there is the second circulating pump 71 to link to each other, the pure water inlet place of the water sucking mouth of the second circulating pump 71 and filtration processing tank 6 interlinks, and the delivery port of the second circulating pump 71 interlinks through the purge chamber 11 of flexible pipe 13 and the first rinse bath 2.Described filtration processing tank 6 comprises admission chamber 61, purification chamber 62 and the water-purifying cavity 63 of separating by internal partition 66, upper end open place at admission chamber 61 is provided with horizontal filtering layer 64, all be provided with side filter course 65 in admission chamber 61 and the side-walls in purification chamber 62 and the side-walls of purification chamber 62 and water-purifying cavity 63, being provided with liquid drain hole 67, the second circulating pumps 71 at the internal partition 66 of filtration processing tank 6 is placed in the water-purifying cavity 63.
The recycling process of cleaning fluid is as follows in cleaning process:
Running water is by purge chamber 11 supplies of water intaking valve 5 low discharge ground in the last rinse bath 4, the cleaning fluid that contains micro-dust in the last rinse bath 4 is then proposed 8 overflows to the dirty chamber 12 of overflowing through separation, cleaning fluid can be used as the cleaning fluid of front road transition rinse bath 3 in the excessive dirty chamber 12 of last rinse bath 4, and from the admission chamber 61 of return port 10 and connecting hose 13 inflow filtration processing tanks 6, flow into water-purifying cavity 63 through purifying chamber 62 again, clean water in the water-purifying cavity 63 is sent in the purge chamber 11 of the first rinse bath 2 by 71 suctions of the second circulating pump, floating soiling solution flows into and passes on sewage treatment plant in the soiling solution groove 9 and focus in the excessive dirty chamber 12 of the first rinse bath 2, after the return port 10 until the reuse cleaning fluid then is provided with by 12 bottoms, dirty chamber of overflowing that contains dust granule in the excessive dirty chamber 12 of the first rinse bath 2 flows into by flexible pipe 13 and carries out after-treatment in the filtration processing tank 6, cleaning fluid through after-treatment is transported in the first rinse bath 2 by the second circulating pump 71 again, as the cleaning fluid of the first cleaning rinse bath 2.Each first circulating pump 7 is transported to the cleaning fluid of corresponding excessive dirty chamber 12 in the purge chamber 11 in front road.
The above only is preferred embodiment of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model know-why; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.
Claims (5)
1. multilevel circulating cleaning equipment, it is characterized in that, comprise frame (1), the first rinse bath (2), transition rinse bath (3), last rinse bath (4), water intaking valve (5), filtration processing tank (6), the first circulating pump (7), divide separation levee (8) and soiling solution groove (9), soiling solution groove (9), the first rinse bath (2), transition rinse bath (3) and last rinse bath (4) successively straight line are arranged on the frame (1), in the end be provided with a minute separation levee (8) in the rinse bath (4), divide separation levee (8) that last rinse bath (4) is separated into purge chamber (11) and the dirty chamber (12) of overflowing, the height of minute separation levee (8) is lower than the sidewall of last rinse bath (4), water intaking valve (5) interlinks with the purge chamber (11) of last rinse bath (4), in the end rinse bath (4) is provided with return port (10) with the sidewall that transition rinse bath (3) is bordered, and return port (10) interlinks by flexible pipe (13) and filtration processing tank (6); Equally, in transition rinse bath (3), also be provided with a minute separation levee (8), divide separation levee (8) that transition rinse bath (3) is separated into purge chamber (11) and the dirty chamber (12) of overflowing, the height of minute separation levee (8) is lower than the sidewall of transition rinse bath (3), on the sidewall that transition rinse bath (3) and upper track rinse bath are bordered on, also be provided with return port (10), arranging highly of return port (10) is suitable with minute separation levee (8), and return port (10) interlinks by flexible pipe (13) and filtration processing tank (6); In the first rinse bath (2), also be provided with a minute separation levee (8), divide separation levee (8) that the first rinse bath (2) is separated into purge chamber (11) and the dirty chamber (12) of overflowing, the height of minute separation levee (8) is higher than the sidewall of soiling solution groove (9), bottom in the excessive dirty chamber (12) of the first rinse bath (2) is provided with return port (10), and return port (10) interlinks by flexible pipe (13) and filtration processing tank (6); In the end between the purge chamber (11) of the excessive dirty chamber (12) of rinse bath (4) and adjacent transition rinse bath (3), between the excessive dirty chamber (12) in rear road and the purge chamber (11) in front road, and be communicated with by the first circulating pump (7) respectively between the excessive dirty chamber (12) of the purge chamber (11) of the first rinse bath (2) and adjacent transition rinse bath (3), the water sucking mouth of the first circulating pump (7) lays respectively in each dirty chamber (12) of overflowing, and the top, water sucking mouth of each first circulating pump (7) is equipped with horizontal filtering layer (64); Between the purge chamber (11) of the pure water inlet of filtration processing tank (6) and the first rinse bath (2), there is the second circulating pump (71) to link to each other, the pure water inlet place of the water sucking mouth of the second circulating pump (71) and filtration processing tank (6) interlinks, and the delivery port of the second circulating pump (71) interlinks through the purge chamber (11) of flexible pipe (13) with the first rinse bath (2).
2. multilevel circulating cleaning equipment according to claim 1 is characterized in that, 2～5 transition rinse baths of continuous arrangement (3) between the first rinse bath (2) and last rinse bath (4).
3. multilevel circulating cleaning equipment according to claim 1, it is characterized in that, described filtration processing tank (6) comprises the admission chamber (61) of separating by internal partition (66), purify chamber (62) and water-purifying cavity (63), be provided with horizontal filtering layer (64) at the upper end open place of admission chamber (61), all be provided with side filter course (65) in admission chamber (61) and the side-walls in purification chamber (62) and the side-walls of purification chamber (62) and water-purifying cavity (63), internal partition (66) in filtration processing tank (6) is provided with liquid drain hole (67), and the second circulating pump (71) is placed in the water-purifying cavity (63).
4. multilevel circulating cleaning equipment according to claim 1 is characterized in that, each first circulating pump (7) is individually fixed in bottom, corresponding excessive dirty chamber (12).
5. multilevel circulating cleaning equipment according to claim 1 is characterized in that, the second circulating pump (71) is fixed in water-purifying cavity (63) bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220176688 CN202655283U (en) | 2012-04-23 | 2012-04-23 | Multi-stage circulated cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220176688 CN202655283U (en) | 2012-04-23 | 2012-04-23 | Multi-stage circulated cleaning equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202655283U true CN202655283U (en) | 2013-01-09 |
Family
ID=47450217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220176688 Expired - Fee Related CN202655283U (en) | 2012-04-23 | 2012-04-23 | Multi-stage circulated cleaning equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202655283U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104874573A (en) * | 2015-05-13 | 2015-09-02 | 成都中牧生物药业有限公司 | Automatic washing device for ampoule |
| CN110523697A (en) * | 2019-09-06 | 2019-12-03 | 安吉长虹制链有限公司 | A kind of chain system of processing |
-
2012
- 2012-04-23 CN CN 201220176688 patent/CN202655283U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104874573A (en) * | 2015-05-13 | 2015-09-02 | 成都中牧生物药业有限公司 | Automatic washing device for ampoule |
| CN110523697A (en) * | 2019-09-06 | 2019-12-03 | 安吉长虹制链有限公司 | A kind of chain system of processing |
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