CN201740971U - Photoresist removing device of electron beam photoresist light mask plate - Google Patents
Photoresist removing device of electron beam photoresist light mask plate Download PDFInfo
- Publication number
- CN201740971U CN201740971U CN2010201717678U CN201020171767U CN201740971U CN 201740971 U CN201740971 U CN 201740971U CN 2010201717678 U CN2010201717678 U CN 2010201717678U CN 201020171767 U CN201020171767 U CN 201020171767U CN 201740971 U CN201740971 U CN 201740971U
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- cell body
- support
- soup
- carriage
- mask plate
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Abstract
The utility model relates to a photoresist removing device of an electron beam photoresist light mask plate, a movable rod of a driving piece arranged at the lower part of a machine seat is connected with a drive connecting rod by a link plate, and the drive connecting rod is connected with a support; the wall periphery of an outer groove body arranged at the upper part of the machine seat is provided with an upper nozzle, and a bottom plate is provided with a liquid drainage runner; an inner groove body is arranged in the outer groove body by a support frame; a tray of a bracket is arranged in the inner groove body, the bottom surface of the tray is provided with an annular convex rib, and a holder at the lower part of the tray extends out of the inner groove body to be connected with the support in a sealing manner; the tray is provided with a support seat, a lower medicine liquid outlet communicated with a medicine liquid runner, and a peripheral medicine liquid side outlet; outlets of two independent medicine feeding holes of the support, communicated with a medicine liquid mixing chamber, are provided with check valves, and inlets thereof are connected with a medicine liquid pipeline; and a flexible seal sleeve sheathed at the outer side of the support is in sealed connection on the outer groove body and the holder of the bracket. The photoresist removing device of the electron beam photoresist light mask plate has the characteristics of low photoresist removing effect, and high production efficiency.
Description
Technical field
The utility model relates to a kind of device that removes photoresist of electron beam adhesive optical mask plate, belongs to the technical field of removing photoresist of optical semiconductor mask plate.
Background technology
Optical mask plate (light shield) is to be used for the template of P.e.c. in batches in the integrated circuit (IC) chip manufacturing.By photoetching method, the circuit pattern on the optical mask plate is printed onto on the Silicon Wafer in enormous quantities.Therefore any defective on the optical mask plate all can cause very big influence to the yield rate of chip.
Optical mask plate needs to remove the photoresist on surface after overexposure, developing.It is that optical mask plate is placed in the fixing cell body that traditional deep slot type soaks removal optical cement mode, optical cement stripper or concentrated sulphuric acid intermittence mixing hydrogen peroxide with special use soak, again optical mask plate is placed in the service sink and cleans, reach the purpose of removing this glue of light.Though this method production efficiency height, but because design of traditional chemical tank and chemical liquid are active low and unstable, and the conventional method of removing photoresist needs 15～30 minutes, therefore every optical mask plate removes photoresist and consumes 2～3 liters of chemical liquids, the technological process acid consumption is big on the one hand, on the other hand, because chemical liquid is to recycle, easily cause cross pollution, the effect of removing photoresist instability.Moreover, can cause the chromium layer on the optical mask plate to damage and increase the optical mask plate soak time because of the chemical reagent easily dilutable.
Another is by the photoresist on the rotary spray method removal optical mask plate, this method of removing photoresist can effectively be saved acid consumption with respect to traditional deep slot type immersion type, because soup is active strong, the back soup that removes photoresist is directly drained and is no longer recycled, can not cause cross pollution, the effect of removing photoresist is relatively stable.But this method can not effectively be cleaned for the mask plate border, and can only the single face of mask plate be cleaned at every turn, because can not be simultaneously the tow sides of optical mask plate be cleaned, its soup consumption also should not be underestimated, and the production efficiency of removing photoresist is not high.
Summary of the invention
The purpose of this utility model provides a kind of can reducing cost, the device that removes photoresist of the electron beam adhesive optical mask plate that the efficient of removing photoresist is high.
The utility model is that the technical scheme that achieves the above object is: a kind of device that removes photoresist of electron beam adhesive optical mask plate, it is characterized in that: comprise outer cell body, interior cell body, carriage and bearing, actuator and support, its motion bar of actuator that is installed in the support bottom is connected with drive link by yoke plate, and drive link is fixedlyed connected with bearing; The outer cell body that is installed in upper part of the frame is equipped with the downward-sloping top nozzle of spout along the top around the cell wall, base plate has the discharge opeing runner; Cell body is installed in the outer cell body by bearing support in described, the pallet of carriage is arranged in the interior cell body, tray bottom surface has the annular convex rib with interior cell body sealing, the opening and the bearing of cell body were tightly connected in the bracket of pallet bottom passed, pallet is provided with the plural supporting base that is used to support optical mask plate, the soup of tray bottom exports down with the interior soup runner of peripheral plural soup side outlet and carriage and communicates, the water channel exit of carriage is equipped with down nozzle, and the water channel in the carriage is connected with water pipe respectively with top nozzle; The soup hybrid chamber of described bearing communicates with soup runner on the carriage, on the bearing two independently medicine feeding hole communicate with the soup hybrid chamber, and the exit of each medicine feeding hole is provided with retaining valve, inflow point is connected with liquor piping, and the flexible gland both sides that are enclosed within the bearing outside are sealedly connected on respectively on the bracket of outer cell body and carriage.
Be separately installed with web member on the bracket of described carriage and the base plate of outer cell body, the flexible gland both sides are tightly connected by web member and the base plate of outer cell body and the bracket of carriage respectively.
Described actuator is cylinder or oil cylinder, and actuator is installed on the support more than two, is separately installed with guide pin bushing on the support, and the drive link that is installed on the yoke plate is arranged in the guide pin bushing.
Cell body and outer trough body structure in the utility model adopts, in the pallet of movable carriage is arranged in the cell body and form shallow slot structure, cell body was connected with bearing in the bracket of carriage passed, therefore only need optical mask plate is lain in the pallet, when in pallet is crimped on, being sealing condition on the cell body, make that optical mask plate is horizontal to be immersed in the soup, to remove the photoresist on optical mask plate surface.And, the pallet of carriage and interior cell body are broken away from when on the carriage when mobile, soup is put from interior cell body row discharged by the discharge opeing runner in the outer cell body, so with respect to traditional slot type cleaning, the shallow-slot type that lies low cleaning can be saved big medicine amount liquid use.Through measuring and calculating, in the technological process of conventional photomask plate soaking and washing, 20 liters of concentrated sulphuric acids can be washed 7～8 light and cover template die, average every optical mask plate consumes 2.5 liters of concentrated sulphuric acids, adopt the every optical mask plate of method that removes photoresist of the present utility model to consume 400 milliliters, save 2.1 liters, by cleaning 40 every day, about 15 yuan/liter of concentrated sulphuric acid costs, can save the soup cost every day about 1200 yuan.Be provided with the soup hybrid chamber in the bearing of the present utility model, therefore the concentrated sulphuric acid of heating can be mixed in the soup hybrid chamber of bearing again by in the cell body in the injection of soup runner with hydrogen peroxide, the maximum activity of soup when guaranteeing to remove photoresist, so only need soak the technology of removing photoresist in 1～10 minute, 15～30 minutes acid soak with the traditional handicraft employing, time is compared and shortens dramatically, improve the technology production capacity, the present invention can prevent that soup is back in the liquor piping from medicine feeding hole by retaining valve, improves functional reliability.In addition the present invention adopt under the soup outlet and plural soup side outlet soup is injected in the cell body, can carry out soup spray and infiltration simultaneously to the optical mask plate upper and lower surface respectively, can clean up on the optical mask plate border, dash clear by top nozzle and the two-way spray of following nozzle in addition, simultaneously optical mask plate is carried out two-sided cleaning and shortened process time significantly, can significantly reduce the use amount of chemical liquid, the technology cost is reduced greatly.The present invention separates with actuator outer cell body with drive link, prevent the erosion of cleaning fluid to driving mechanism, and equipment work is reliable, and the monolithic acid consumption is few, need not to recycle soup, the cross pollution that causes when avoiding cleaning, and cleaning performance is stable.
Description of drawings
Below in conjunction with accompanying drawing embodiment of the present utility model is described in further detail.
Fig. 1 is a structural representation of the present utility model.
Fig. 2 is the plan structure synoptic diagram of Fig. 1.
Fig. 3 is the structure for amplifying synoptic diagram of interior cell body.
Fig. 4 is the hydraulic schematic diagram of the utility model soup on-line mixing.
Wherein: 1-top nozzle, the outer cell body of 2-, cell body in the 2-1-discharge opeing runner, 3-, the 4-optical mask plate, 5-carriage, 5-1-pallet, 5-2-supporting base, the 5-3-water channel, 5-4-soup runner, 5-5-bracket, the 5-6-annular convex rib, 5-7-soup side outlet, the 5-8-soup is outlet down, the 6-web member, 7-flexible gland, 8-lower seal, the 9-bearing, 9-1-Connection Block, 9-2-medicine feeding hole, 9-3-soup hybrid chamber 10-rebound, 11-support, 12-drive link, the 13-guide pin bushing, 14-yoke plate, 15-actuator, the 16-liquor piping, 17-retaining valve, 18-O-ring seal, the last O-ring seal of 19-, 20-bearing support, nozzle under the 21-.
Embodiment
See shown in Fig. 1～3, the device that removes photoresist of electron beam adhesive optical mask plate of the present utility model, comprise outer cell body 2, interior cell body 3, carriage 5 and bearing 9, actuator 15 and support 11, actuator 15 of the present utility model is installed in the bottom of support 11, the motion bar of actuator 15 is connected with drive link 12 by yoke plate 14, drive link 12 is fixedlyed connected with the Connection Block 9-1 on the bearing 9, actuator 15 of the present utility model can be adopted as cylinder or oil cylinder, or other conventional driving mechanism, when adopting cylinder or oil cylinder, being respectively equipped with interface on the actuator 15 communicates with the medium of outside, make by medium that motion bar moves axially on the actuator 15, bearing 9 is moved up and down and drive drive link 12.The utility model is for making drive link 12 stressed more steady, actuator 15 can adopt more than two and be installed on the support 11, as two or four actuators 15, the motion bar of each actuator 15 is connected with yoke plate 14 respectively, be separately installed with two guide pin bushings 13 on the support 11, the drive link 12 that is installed on the yoke plate 14 is arranged in two guide pin bushings 13.
See Fig. 1, shown in 3, the outer cell body 2 of the utility model is installed in the top of support 11, on this support 11 rebound 10 is installed also, outer cell body 2 is installed on the support 11 by rebound 10, outer cell body 2 is equipped with the downward-sloping top nozzle of spout 1 along the top around the cell wall, rinse water can be rushed at above the optical mask plate 4, top nozzle 1 of the present utility model has been adopted conventional structure, and top nozzle 1 is installed on the cell wall of outer cell body 2 by mount pad, has discharge opeing runner 2-1 on the base plate of outer cell body 2, upper surface by 1 pair of optical mask plate 4 of top nozzle washes, interior cell body 3 is installed in the outer cell body 2 by bearing support 20, interior cell body 3 bottoms have opening, the pallet 5-1 of carriage 5 is arranged in the interior cell body 3, the bottom surface of pallet 5-1 has the annular convex rib 5-6 with interior cell body 3 sealings, this annular convex rib 5-6 can be provided with multi-turn, to reduce the seepage of soup, the opening and the bearing 9 of cell body 3 were tightly connected in the bracket 5-5 of the utility model pallet 5-1 bottom passed. see Fig. 1, shown in 3, between bracket 5-5 and the bearing 9 O-ring seal 18 is installed, pallet 5-1 is provided with the plural supporting base 5-2 that is used to support optical mask plate 4, this pallet 5-1 can be concave shaped or plate shaped, the cell wall height is greater than the height sum of supporting base 5-2 and the optical mask plate 4 of pallet 5-1 around the interior cell body 3, the utility model pallet 5-1 is provided with outlet 5-8 under the soup, by soup down outlet 5-8 the bottom of optical mask plate 4 dashed pouring soak, periphery along pallet 5-1 is provided with plural soup side outlet 5-7, this soup side outlet 5-7 can be tilting as shown in Figure 3, or be arranged on the side of pallet 5-1, can make soup reflex to the sidepiece and the top of optical mask plate 4 by the madial wall of interior cell body by tilting soup side outlet 5-7, making soup dash to drench to the sidepiece of optical mask plate 4 and top by soup side outlet 5-7 soaks, soup down outlet 5-8 and soup side outlet 5-7 all communicates with the interior soup runner 5-4 of carriage 5, by carriage 5 soup is injected in the interior cell body 3, optical mask plate 4 is soaked, and can reduce chemical liquid consumption.See shown in Fig. 1～3, also be provided with water channel 5-3 in the utility model carriage 5, water channel 5-3 outlet is equipped with plural nozzle 21 down, and the water channel 5-3 in the carriage 5 are connected with water pipe respectively with top nozzle 1, and the upper and lower surface by top nozzle 1 and 21 pairs of optical mask plates 4 of following nozzle cleans simultaneously.See shown in Figure 3, the utility model bearing 9 comprises the soup hybrid chamber 9-3 on top, the Connection Block 9-1 of bottom and be arranged on the bearing 9 two independently medicine feeding hole 9-2, the soup hybrid chamber 9-3 of bearing 9 communicates with soup runner 5-4 on the carriage 5, on the bearing 9 two independently medicine feeding hole 9-2 communicate with soup hybrid chamber 9-3, and the outlet of each medicine feeding hole 9-2 is equipped with retaining valve 17, import is connected with liquor piping 16, prevent that by retaining valve 17 soup is back in the liquor piping 16 from medicine feeding hole 9-2, see Fig. 1, shown in 4, in injecting after the utility model concentrated sulphuric acid and the hydrogen peroxide online proportioning of soup hybrid chamber 9-3 in bearing 9 in the cell body 3, this concentrated sulphuric acid and hydrogen peroxide pass through hydraulic pump separately respectively, liquor piping 16, medicine feeding hole 9-2 in the bearing 9 and retaining valve 17 afterwards enter in the soup hybrid chamber 9-3 and mix, and the flow of this soup is controlled by the pressure valve on each pipeline.See shown in Fig. 1,3 that flexible gland 7 both sides that the utility model is enclosed within the bearing outside are sealedly connected on respectively on the bracket 5-5 of outer cell body 2 and carriage 5, soup can not outflowed corrode driving mechanism below the rinse bath by this flexible gland 7.For easy for installation, can keep the better seal effect, on the bracket 5-5 of the utility model carriage 5 and the base plate of outer cell body 2 web member 6 is installed, web member 6 is a ring groove shape, flexible gland 7 both sides are installed in respectively on the web member 6, and flexible gland 7 both sides have lower seal 8 and last O-ring seal 19 to seal with the base plate of outer cell body 2 and the bracket 5-5 of carriage 5 respectively, mount pad and sleeve pipe collapsible, corrosion resistant that flexible gland of the present utility model 7 both sides adopt corrosion-resistant material to make are to guarantee the impulse stroke of drive link 12.
During the utility model work, optical mask plate 4 is placed on the supporting base 5-2 of carriage 5, when actuator 15 drive annular convex rib 5-6 that drive link 12 move down carriage 5 to make its tray bottom be pressed on the cell body 3, make and constitute seal cavity between carriage 5 and the interior cell body 3, the concentrated sulphuric acid and hydrogen peroxide pass through hydraulic pump separately respectively, liquor piping 16, mix in medicine feeding hole 9-2 in the bearing 9 and the retaining valve 17 laggard soup hybrid chamber 9-3 of going into, again by the soup runner 5-4 in the pallet 5-1, the soup of bottom exports 5-8 and soup side outlet 5-7 down and accumulates in interior cell body 3, until mask optical mask plate 4, optical mask plate 4 was soaked in soup 5～10 minutes, the superpower oxidisability and the severe corrosive that have after utilizing the concentrated sulphuric acid and hydrogen peroxide mixing, optical mask plate 4 surperficial optical cements are peeled off totally, to remove the photoresist on optical mask plate 4 surfaces.Move when actuator 15 drive drive link 12 make on the carriage 5, make its pallet break away from interior cell body 3, the soup of accumulating in the interior cell body 3 rushes down to outer cell body 2, and discharges by its discharge opeing runner 2-1 on the base plate.Do the to-and-fro movement of stretching when actuator 15, drive carriages 5 by drive link 12 and pump, deionized water passes through the upper and lower surface of the optical mask plate 4 of top nozzle 1 and 21 sprinklings of following nozzle simultaneously, and optical mask plate 4 remained on surface medicine liquid washings are clean.
Claims (3)
1. the device that removes photoresist of an electron beam adhesive optical mask plate, it is characterized in that: comprise outer cell body (2), interior cell body (3), carriage (5) and bearing (9), actuator (15) and support (11), its motion bar of actuator (15) that is installed in support (11) bottom is connected with drive link (12) by yoke plate (14), and drive link (12) is fixedlyed connected with bearing (9); The outer cell body (2) that is installed in support (11) top is equipped with the downward-sloping top nozzle of spout (1) along the top around the cell wall, base plate has the discharge opeing runner; Cell body (3) is installed in the outer cell body (2) by bearing support (20) in described, the pallet (5-1) of carriage (5) is arranged in the interior cell body (3), pallet (5-1) bottom surface has the annular convex rib (5-6) with interior cell body (3) sealing, opening and bearing (9) that the bracket (5-5) of pallet (5-1) bottom passes interior cell body (3) are tightly connected, pallet (5-1) is provided with the plural supporting base (5-2) that is used to support optical mask plate, the soup of pallet (5-1) the bottom interior soup runner (5-4) of outlet (5-8) and peripheral plural soup side outlet (5-7) and carriage (5) down communicates, water channel (5-3) exit of carriage (5) is equipped with down nozzle (21), and the water channel (5-3) in the carriage (5) is connected with water pipe respectively with top nozzle (1); The soup hybrid chamber (9-3) of described bearing (9) communicates with soup runner (5-4) on the carriage (5), bearing (9) last two independently medicine feeding hole (9-2) communicate with soup hybrid chamber (9-3), and the exit of each medicine feeding hole (9-2) is provided with retaining valve (17), inflow point is connected with liquor piping (16), and flexible gland (7) both sides that are enclosed within bearing (9) outside are sealedly connected on respectively on the bracket (5-5) of outer cell body (2) and carriage (5).
2. the device that removes photoresist of electron beam adhesive optical mask plate according to claim 1, it is characterized in that: be separately installed with web member (6) on the bracket (5-5) of described carriage (5) and the base plate of outer cell body (2), flexible gland (7) both sides are tightly connected by web member (6) and the base plate of outer cell body (2) and the bracket (5-5) of carriage (5) respectively.
3. the device that removes photoresist of electron beam adhesive optical mask plate according to claim 1, it is characterized in that: described actuator (15) is cylinder or oil cylinder, actuator is more than (15) two and be installed on the support (11), be separately installed with guide pin bushing (13) on the support (11), the drive link (12) that is installed on the yoke plate (14) is arranged in the guide pin bushing (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201717678U CN201740971U (en) | 2010-04-12 | 2010-04-12 | Photoresist removing device of electron beam photoresist light mask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201717678U CN201740971U (en) | 2010-04-12 | 2010-04-12 | Photoresist removing device of electron beam photoresist light mask plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201740971U true CN201740971U (en) | 2011-02-09 |
Family
ID=43556247
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201717678U Expired - Lifetime CN201740971U (en) | 2010-04-12 | 2010-04-12 | Photoresist removing device of electron beam photoresist light mask plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201740971U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102921324A (en) * | 2012-11-03 | 2013-02-13 | 常州瑞择微电子科技有限公司 | Drug mixer |
-
2010
- 2010-04-12 CN CN2010201717678U patent/CN201740971U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102921324A (en) * | 2012-11-03 | 2013-02-13 | 常州瑞择微电子科技有限公司 | Drug mixer |
| CN102921324B (en) * | 2012-11-03 | 2014-06-18 | 常州瑞择微电子科技有限公司 | Drug mixer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP02 | Change in the address of a patent holder |
Address after: 213022, Changzhou, Jiangsu province north of the Yangtze River North Road No. 3 Building No. 25, West first floor Co-patentee after: Wuxi China Resources Microelectronics Co., Ltd. Patentee after: Changzhou Ruize Microelectronics Technology Co., Ltd. Address before: 213022, No. 25 middle Yangtze Road, Xinbei District, Jiangsu, Changzhou 3-318 Co-patentee before: Wuxi China Resources Microelectronics Co., Ltd. Patentee before: Changzhou Ruize Microelectronics Technology Co., Ltd. |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20180628 Address after: 213022 west of West Tower 3, No. 25 Changjiang North Road, Xinbei District, Changzhou, Jiangsu, China Co-patentee after: WUXI DISI MICROELECTRONIC CO., LTD. Patentee after: Changzhou Ruize Microelectronics Technology Co., Ltd. Address before: 213022 west of West Tower 3, No. 25 Changjiang North Road, Xinbei District, Changzhou, Jiangsu, China Co-patentee before: Wuxi China Resources Microelectronics Co., Ltd. Patentee before: Changzhou Ruize Microelectronics Technology Co., Ltd. |
|
| TR01 | Transfer of patent right | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110209 |
|
| CX01 | Expiry of patent term |