CN100385629C - Method and device for cleaning semiconductor crystal wafer - Google Patents
Method and device for cleaning semiconductor crystal wafer Download PDFInfo
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- CN100385629C CN100385629C CNB2006100961042A CN200610096104A CN100385629C CN 100385629 C CN100385629 C CN 100385629C CN B2006100961042 A CNB2006100961042 A CN B2006100961042A CN 200610096104 A CN200610096104 A CN 200610096104A CN 100385629 C CN100385629 C CN 100385629C
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Abstract
A cleaning method and equipment of semiconductor wafer belongs to the equipment of wet-etching working procedure. The one group of equipment (system) relates to cankerous canal, spray advance washing canal, and stepped high and low rushing canal for the wet-etching, removing glue and cleaning in the process of semiconductor wafer production. Water from one hose cleans two groups of wafer at same time to keep the cleaning of the wafer surface. It reduces the hidden trouble of safety to working procedure and avoids the pollution of water and mark of acid. It changes the influent fashion of primary advance washing canal from bottom to brim of spray one and the water spout into the canal through the hole of the brim. It adds the spouting pressure in concentrated direction and cleans the wafer drastically to improve the wet-etching's rushing effort. The stepped high and low rushing canal is a whole, and water enters from the high end to the low end from top and bottom and saves half of water.
Description
Technical field
The present invention relates to a kind of cleaning method and cleaning equipment thereof of semiconductor crystal wafer, specifically be used for semiconductor crystal wafer production process wet etching, remove photoresist, the bath of operation such as cleaning, belong to the equipment in the wet etching operation.
Background technology
At present, be used for semiconductor crystal wafer production process wet etching, remove photoresist, four baths of bath groove of operation such as cleaning adopts in one linely, and abuts against together, forms one group by etching tank → preflush groove → two overflow launder, about also can adopting each one group, lift is housed on etching tank.Each bath groove uses a water inlet pipe (rear portion) separately, and the overflow launder back connects N2 (nitrogen) pipe, and bubbling is with the protection disk when bath is cleaned.Disk after the corrosion is through further flushing in any one overflow launder again after dashing in advance.The bath flow process is: semiconductor crystal wafer is through etching tank → preflush groove → two overflow launder → drying.The problem that the structure of this kind bath groove and cleaning method exist is: the disk that 1, takes out from etching tank must be crossed overflow launder after dashing in advance top could arrive preflush groove, has sour water to drip to be sprinkled upon the possibility in the groove therebetween, thereby the wash by water hidden danger of groove of pollution is arranged; If avoid the generation of this situation, operating personnel must specially get around the top of overflow launder, do not meeting operating habit like this, make troubles to real work.2, four tanks abut against together, and highly suitable, and the water that overflows when the disk more than two batches is washed by water simultaneously is easy to diffuse in the tank on next door and causes mutual pollution.3, each bath groove uses a water inlet pipe, pure water large usage quantity separately.4, original preflush groove is intake from the bottom, and is by the mode draining that overflow at bottom aperture and top, limited to the pre-rinse capability of disk.
Summary of the invention
The objective of the invention is to overcome above-mentioned weak point, thereby provide a kind of etching tank, fountain preflush groove, two of the high low flush grooves of staged to form one group; The water intake mode of former preflush groove changes the water inlet of fountain preflush groove top into by the bottom water inlet, water tiltedly sprays in the groove after by hole on the edge at a certain angle, and water spray pressure is amid a sharp increase, and in the direction set, flushing to disk is more thorough, can improve the bath effect of wet etching; The high low flush groove of staged is formed one, and pure water enters from high-end, and flows to low side continuation use from top and bottom, can save the cleaning equipment of the semiconductor crystal wafer of half pure water.
Another object of the present invention is to change former one-step method into two steps to clean, and the pure water of a water pipe can clean two batches of disks simultaneously, and disk surfaces is cleaned fully, cleans up guaranteeing.
Main solution of the present invention is achieved in that
Semiconductor crystal wafer of the present invention adopts following cleaning method:
1, the semiconductor crystal wafer that will treat operation is put into etching tank, 28～32 ℃ of etching tank fluid temperatures;
2, etch preceding 8～12 seconds in operation, open the pure water switch of fountain preflush groove, the pure water switch and the nitrogen switch of staged bath groove; Take out semiconductor crystal wafer and put into the fountain preflush groove and lift up and down 4～6 times from etching tank, the time was 8～12 seconds;
3, again semiconductor crystal wafer being put into staged low flush groove washed by water 4～5 minutes;
4, then semiconductor crystal wafer is transferred in the high bath of the staged groove and continued bath 4～5 minutes, take out at last, the speed with 880～920 rev/mins in whizzer dries 5～6 minutes.
The resistivity of fountain preflush groove, the high low flush trough inner water of staged is 10～15 megaohm rice among the present invention.
Semiconductor crystal wafer cleaning equipment of the present invention adopts etching tank, fountain preflush groove, the high low flush groove of staged to form a system, staged is arranged before and after the high low flush groove of staged, and the fountain preflush groove connects on water inlet pipe, the high low flush groove of staged and connects water inlet pipe.
Staged low flush trench bottom of the present invention is provided with osculum; The high bath of staged groove is provided with gutter channel.
Be provided with reservoir chamber around the fountain preflush groove top of the present invention, hole for water spraying be set on the bezel in groove, tiltedly spray water.Bottom at the preflush groove body is provided with osculum.
Compared with the prior art the present invention has the following advantages:
1, optimizes work flow, avoided the water pollution.Staged was arranged before and after former horizontal overflow launder changed into, and exceeded a bit than preflush groove, had avoided in the disk transfer process sour water to the pollution of pure water; During use, as about respectively lay one group of staged bath groove, leave certain space between two groups of stageds bath grooves, the water that can avoid diffusing out in the groove pollutes mutually.
2, saved the pure water consumption.Cleaning way originally adopts a step ablution, and each overflow launder uses a water inlet pipe separately, can only clean a collection of disk; Present staged bath groove is from a high-end tank water inlet, and the bath groove of low side uses high-end tank to flow through next water, does not use water inlet pipe in addition, and its resistivity of water can satisfy the requirement of preliminary flushing; Promptly adopt this two step ablutions, the pure water of a present water pipe can clean two batches of disks simultaneously, can save the pure water consumption of half approximately under the situation of full load operation.
3, improved the structure of preflush groove.Change the water intake mode of former preflush groove into the top water inlet by the bottom water inlet, water tiltedly sprays in the groove after by aperture at a certain angle, and water spray pressure is amid a sharp increase, and in the direction set, more thorough to the flushing of disk.
Description of drawings
Fig. 1 is a structure user mode schematic diagram of the present invention.
Fig. 2 is a fountain preflush groove structural representation of the present invention.
Fig. 3 is staged bath groove structural representation of the present invention.
Embodiment
Embodiment during following the present invention incites somebody to action in conjunction with the accompanying drawings is further described:
Embodiment one:
The present invention mainly adopts etching tank 1, fountain preflush groove 2,7,3 two of the high low flush grooves of staged to form one group (system) for left staged bath groove, and is independent separately.Can adopt left and right sides staged bath groove to use simultaneously for two groups during use.Put between left side staged bath groove and the right staged bath groove (etching tank, fountain preflush groove, the high low flush groove of staged) and leave the space, the water that can avoid diffusing out in the groove pollutes mutually.High low flush groove 7, the 3 front and back stageds of staged are arranged, the back connects water inlet pipe 4, air inlet pipe 5 respectively on etching tank 1, fountain preflush groove 2, the high low flush groove 3 of staged, on the etching tank 1 preparation lift 6, lift 6 in operation process with the continuous lifting of semiconductor crystal wafer.Air inlet pipe 5 is N2 (nitrogen) pipe, and bubbling is with the protection semiconductor crystal wafer when bath.
Around fountain preflush groove 2 top of the present invention is reservoir chamber 8, and water tiltedly sprays in groove from the aperture 9 on the bezel; Osculum 10 is arranged on the bottom of fountain preflush groove 2.
Staged low flush groove of the present invention 3 bottoms are provided with osculum 12; The high bath of staged groove 7 is provided with gutter channel 11.
Semiconductor crystal wafer cleaning method of the present invention adopts following processing step:
The present invention will treat that the semiconductor crystal wafer of operation puts into etching tank (28 ℃ of left etching tank fluid temperatures, 40～44 ℃ of right etching tank fluid temperatures) according to kind according to technological requirement, open the lift switch, pick up counting with stopwatch; The continuous lifting of semiconductor crystal wafer sector-meeting in operation process can be determined the total time of operation by observing its surperficial extent of corrosion when exposing the corrosion liquid level.
Etch preceding 8 seconds in operation, open the pure water switch of fountain preflush groove, the pure water switch of staged bath groove and nitrogen switch (all requiring to reach the assigned address of flowmeter); Take out semiconductor crystal wafer and put into the fountain preflush groove and lift up and down 4 times from etching tank, the time was 8 seconds.Again semiconductor crystal wafer is put into staged low flush groove bath 4 minutes.Then semiconductor crystal wafer is transferred in the high bath of the staged groove and continued bath 4 minutes, take out at last, the speed with 880 rev/mins in whizzer dries 5 minutes.
Semiconductor crystal wafer adopts above-mentioned identical cleaning method to clean in the right staged bath of another group (system) groove.The bath flow process is: the high bath of left etching tank → left preflush groove → staged low flush groove → staged groove → drying.Right etching tank → high the bath of right preflush groove → staged low flush groove → staged groove → drying.In the embodiment of the invention staged bath groove total about two groups, each component be two of height, pure water enters from high-end (one of back), and flows to low side (one of front) from top and bottom and continue use, can save the pure water of half.
The resistivity of fountain preflush groove, the high low flush trough inner water of staged is 10 megaohm rice in the embodiment of the invention.After 8～10 minutes, resistivity of water generally requires to reach more than the 10 megaohm rice in the groove at the flushing disk.From developing result, this numeral is high more, means that resistivity of water is high more, and contained ion concentration is low more, and disk surfaces is clean more.If the disk surfaces after the flushing is residual acid arranged, it is bad just to cause acid to invade easily; More pickling can be fallen though prolong the bath time theoretically, can waste a large amount of pure water like this, and delayed the time of whole flow process.
Adopt original bath groove that the resistivity that the disk bath recorded after 8～10 minutes is difficult to reach requirement, generally can only reach 6～7 megaohm rice and standard and differ 3 orders of magnitude, then will spend 15 minutes more than will bringing up to 9 megaohm rice, effect is unsatisfactory.Use this combined bath groove, can within 10 minutes, make resistivity of water reach 10 megaohm rice, meet the requirements; If also change the staged groove of washing by water the structure of preflush groove into, then can within 8 minutes, make resistivity reach 10 megaohm rice, reach 12 megaohm rice within 10 minutes, function admirable, save time and the pure water consumption in, improved the effect of bath.
Embodiment two:
Adopt left and right sides staged bath groove identical among the embodiment one to use simultaneously for two groups in the embodiment of the invention.Technological parameter is as follows: 30 ℃ of etching tank fluid temperatures; Etch preceding 10 seconds in operation, open pure water, staged bath groove, the nitrogen switch switch of fountain preflush groove; Semiconductor crystal wafer is put into the fountain preflush groove and is lifted up and down 5 times, and the time was 10 seconds; Again semiconductor crystal wafer is put into staged low flush groove bath 4 minutes; Semiconductor crystal wafer is transferred in the high bath of the staged groove and is continued bath 4 minutes, takes out at last, and the speed with 880 rev/mins in whizzer dries 5 minutes.
Embodiment three: adopt left and right sides staged bath groove identical among the embodiment one, two to use simultaneously for two groups in the embodiment of the invention.Technological parameter is as follows: 32 ℃ of etching tank fluid temperatures; Etch preceding 12 seconds in operation, open pure water, staged bath groove, the nitrogen switch switch of fountain preflush groove; Semiconductor crystal wafer is put into the fountain preflush groove and is lifted up and down 6 times, and the time was 12 seconds; Again semiconductor crystal wafer is put into staged low flush groove bath 5 minutes; Semiconductor crystal wafer is transferred in the high bath of the staged groove and is continued bath 5 minutes, takes out at last, and the speed with 920 rev/mins in whizzer dries 6 minutes.
The semiconductor crystal wafer that adopts the equipment among above-mentioned technological parameter and the embodiment one to clean in the embodiment of the invention two, three can make resistivity reach more than the 10 megaohm rice equally, function admirable, save time and the pure water consumption in, improved the effect of bath.
Claims (5)
1. the cleaning method of a semiconductor crystal wafer is characterized in that:
(1), semiconductor crystal wafer is put into etching tank, 28～32 ℃ of etching tank fluid temperatures;
(2), etch preceding 8～12 seconds, open the pure water switch of fountain preflush groove, the pure water switch and the nitrogen switch of staged bath groove in operation; Take out semiconductor crystal wafer and put into the fountain preflush groove and lift up and down 4～6 times from etching tank, the time was 8～12 seconds;
(3), again semiconductor crystal wafer being put into staged low flush groove washed by water 4～5 minutes;
(4), then semiconductor crystal wafer is transferred in the high bath of the staged groove and continued bath 4～5 minutes, take out at last, the speed with 880～920 rev/mins in whizzer dries 5～6 minutes.
2. according to the cleaning method of the described semiconductor crystal wafer of claim 1, the resistivity that it is characterized in that described fountain preflush groove, the high low flush trough inner water of staged is 10～15 megaohm rice.
3. the used cleaning equipment of the cleaning method of semiconductor crystal wafer as claimed in claim 1, it is characterized in that adopting etching tank (1), fountain preflush groove (2), the high low flush groove of staged (7,3) to form a system, staged is arranged before and after the high low flush groove of staged (7,3), connects water inlet pipe (4) respectively on fountain preflush groove (2), the staged high bath groove (7).
4. cleaning equipment according to claim 3 is characterized in that described staged low flush groove (3) bottom is provided with osculum (12); Staged high bath groove (7) is provided with gutter channel (11).
5. cleaning equipment according to claim 3 is characterized in that being provided with reservoir chamber (8) around described fountain preflush groove (2) top, and hole for water spraying (9) is set on the bezel; The bottom is provided with osculum (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100961042A CN100385629C (en) | 2006-09-18 | 2006-09-18 | Method and device for cleaning semiconductor crystal wafer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100961042A CN100385629C (en) | 2006-09-18 | 2006-09-18 | Method and device for cleaning semiconductor crystal wafer |
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| CN1941292A CN1941292A (en) | 2007-04-04 |
| CN100385629C true CN100385629C (en) | 2008-04-30 |
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| CNB2006100961042A Active CN100385629C (en) | 2006-09-18 | 2006-09-18 | Method and device for cleaning semiconductor crystal wafer |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101794089B (en) * | 2010-04-12 | 2012-06-13 | 常州瑞择微电子科技有限公司 | Resist removing method of electron beam resist optical mask plate and device thereof |
| CN102339729B (en) * | 2010-07-22 | 2013-06-12 | 中芯国际集成电路制造(上海)有限公司 | Wafer cleaning and drying machine |
| CN112992652A (en) * | 2019-12-16 | 2021-06-18 | 中芯集成电路（宁波）有限公司 | Wet cleaning device and cleaning method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87103641A (en) * | 1986-05-16 | 1987-11-25 | 伊斯曼柯达公司 | Clean the method and apparatus of semiconductor wafer |
| CN1329748A (en) * | 1998-10-09 | 2002-01-02 | Scp环球技术公司 | Wafer cleaning and vapor drying system and method |
| JP2002151457A (en) * | 2000-11-08 | 2002-05-24 | Sony Corp | Method of washing substrate and substrate cleaning device |
| JP2004283761A (en) * | 2003-03-24 | 2004-10-14 | Dainippon Printing Co Ltd | Substrate cleaning system |
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2006
- 2006-09-18 CN CNB2006100961042A patent/CN100385629C/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87103641A (en) * | 1986-05-16 | 1987-11-25 | 伊斯曼柯达公司 | Clean the method and apparatus of semiconductor wafer |
| CN1329748A (en) * | 1998-10-09 | 2002-01-02 | Scp环球技术公司 | Wafer cleaning and vapor drying system and method |
| JP2002151457A (en) * | 2000-11-08 | 2002-05-24 | Sony Corp | Method of washing substrate and substrate cleaning device |
| JP2004283761A (en) * | 2003-03-24 | 2004-10-14 | Dainippon Printing Co Ltd | Substrate cleaning system |
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