CN201594811U - MEMS microphone - Google Patents
MEMS microphone Download PDFInfo
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- CN201594811U CN201594811U CN2010200011253U CN201020001125U CN201594811U CN 201594811 U CN201594811 U CN 201594811U CN 2010200011253 U CN2010200011253 U CN 2010200011253U CN 201020001125 U CN201020001125 U CN 201020001125U CN 201594811 U CN201594811 U CN 201594811U
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- asic chip
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- 239000003990 capacitor Substances 0.000 claims description 23
- 238000000034 method Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 12
- 239000000047 product Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 101100428770 Arabidopsis thaliana VSR2 gene Proteins 0.000 description 3
- 101100428768 Arabidopsis thaliana VSR1 gene Proteins 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 230000005236 sound signal Effects 0.000 description 1
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Abstract
The utility model provides an MEMS microphone, which comprises an ASIC chip and an MEMS acoustic chip. The ASIC chip comprises an output end, a power end and a grounding end; a first filter circuit is connected between the power end and the grounding end of the ASIC chip; and a second filter circuit is connected between the output end and the grounding end of the ASIC chip. The MEMS microphone is capable of effectively stopping noise fluctuation of power signals and the influence of external RF signals on the ASIC chip through the power end and the output end, thereby substantially improving the PSR performance and the RF resistant performance of the MEMS microphone. The MEMS microphone with simple structure and low cost can not add additional process and cost burden to MEMS microphone manufacturing.
Description
Technical field
The utility model relates to a kind of microphone, relates in particular to a kind of MEMS microphone.
Background technology
In recent years, utilize the integrated MEMS microphone of MEMS (MEMS (micro electro mechanical system)) technology to begin to be applied in batches in the electronic products such as mobile phone, notebook, the high-temperature resistant result of this microphone is good, can withstand the high temperature test of SMT technology.The general structure of this product is exactly to utilize a wiring board and shell to constitute a cavity and the encapsulation that becomes the MEMS microphone, on the outer surface of wiring board, pad can be set, be used for fixing the MEMS microphone and be electrically connected to external circuit, MEMS acoustics chip and ASIC (Application Specific Integrated Circuit) chip are installed in the inside of cavity, asic chip comprises bigoted voltage end at least, input, output, power end and earth terminal, an electrode of MEMS acoustics chip is electrically connected the input of asic chip, another electrode is electrically connected the bigoted voltage end of asic chip, and the encapsulation of MEMS microphone is provided with the permeate chamber inside and outside and is used to receive the sound hole of external sound signal.For example patent documentation 1 discloses a kind of structure of this series products.
Patent documentation 1 discloses a kind of MEMS microphone, its structure as shown in Figure 1, the circular groove shape metal shell 110 of MEMS microphone and square wiring board 120 are combined together to form the encapsulating structure of MEMS microphone, and MEMS acoustics chip 10 and asic chip 20 are installed on the wiring board 120.The circuit structure of this MEMS microphone as shown in Figure 2, an electrode of MEMS acoustics chip 10 is electrically connected the input Vin of asic chip 20, another electrode connects the bigoted voltage end Bias of asic chip 20, and GND, Vout and Vdd are respectively earth terminal, output and the power ends of asic chip 20.
Yet, the anti-electromagnetic interference capability of this MEMS microphone a little less than, do not meet the designing requirement of existing electronic product; Simultaneously, there is certain noise fluctuations in the external voltage signal that power end provides, and PSR (Power Supply Rejection Ratio) is lower, and properties of product are had a significant impact.
Given this, need the MEMS microphone that a kind of anti-electromagnetic interference capability is good and Power Supply Rejection Ratio is higher.
Patent documentation 1: Chinese invention patent is announced CN1933680 number.
The utility model content
The utility model proposes in order to address the above problem.
The utility model provides a kind of MEMS microphone, comprises asic chip and MEMS acoustics chip, and described asic chip comprises output, power end and earth terminal, and, be connected with first filter circuit between the power end of described asic chip and the earth terminal; Be connected with second filter circuit between the output of described asic chip and the earth terminal.
In addition, preferably, asic chip also comprises bigoted voltage end and input, and an electrode of MEMS acoustics chip is electrically connected the input of described asic chip, and another electrode is electrically connected the bigoted voltage end of described asic chip.
In addition, preferably, described first filter circuit is a capacitor.
In addition, preferably, described second filter circuit is a capacitor.
In addition, preferably, described first filter circuit is a varistor.
In addition, preferably, described second filter circuit is two capacitors that are connected in parallel.
In addition, preferably, described second filter circuit is a varistor and capacitor that is connected in parallel.
In addition, preferably, described second filter circuit is a ∏ type filter circuit.
The utility model is by being connected with first filter circuit and second filter circuit respectively between the power end of asic chip and output and earth terminal.First filter circuit can stop the noise fluctuations and the extraneous RF signal of the power supply signal of power end that asic chip is impacted effectively; Second filter circuit can stop extraneous RF signal by output asic chip to be impacted effectively, can significantly improve the PSR performance and the anti-RF performance of MEMS microphone.
Description of drawings
By below in conjunction with accompanying drawing embodiment being described, above-mentioned feature of the present utility model and technological merit will become apparent and understand easily.
Fig. 1 is a schematic diagram of representing the concrete structure of MEMS microphone in the past;
Fig. 2 is the circuit diagram in the MEMS microphone of representing in the past;
Fig. 3 is the circuit diagram of the MEMS microphone that relates to of expression the utility model;
Fig. 4 is the physical circuit schematic diagram of a kind of MEMS microphone of relating to of expression the utility model;
Fig. 5 is the physical circuit schematic diagram of second kind of MEMS microphone relating to of expression the utility model;
Fig. 6 is the physical circuit schematic diagram of the third MEMS microphone of relating to of expression the utility model;
Fig. 7 is the physical circuit schematic diagram of the 4th kind of MEMS microphone relating to of expression the utility model.
Embodiment
Below in conjunction with the drawings and specific embodiments the utility model is done further detailed description.
Fig. 3 represents the circuit diagram of the MEMS microphone that the utility model relates to.As shown in Figure 3, the MEMS microphone that the utility model relates to, comprise a MEMS acoustics chip (being expressed as MEMS among Fig. 3) and an asic chip (Fig. 3 is expressed as ASIC) that is used for amplification signal, asic chip comprises bigoted voltage end (being expressed as Bias among Fig. 3), input (being expressed as Vin among Fig. 3), output (being expressed as Vout among Fig. 3), power end (being expressed as Vdd among Fig. 3) and earth terminal (being expressed as GND among Fig. 3), an electrode of MEMS acoustics chip is electrically connected the input Vin of asic chip, another electrode is electrically connected the bigoted voltage end Bias of asic chip, and, be connected with first filter circuit and second filter circuit between the power end Vdd of asic chip and output end vo ut and the earth terminal GND respectively.
By this design, when the power supply signal by the power end input produces fluctuation, first filter circuit that is connected power end and earth terminal will store according to the fluctuation of power supply signal or release energy, thereby make the load voltage of input ASIC power end level and smooth, the noise fluctuations because of the external power source signal does not change, thereby reaches the purpose of anti-electromagnetic interference, raising Power Supply Rejection Ratio.Equally, when existing extraneous radio frequency (RF) signal to exert an influence to the power end of ASIC and output, be connected to power end, output and earth terminal between first, second filter circuit also can be according to extraneous radio frequency (RF) signal to the corresponding storage of the influence that power end and output produced or release energy, thereby eliminate of the influence of RF signal to power end and the output of ASIC.
That is to say, be connected the power end of asic chip and the noise fluctuations and extraneous RF (radio frequency) signal of the power supply signal that first filter circuit between the earth terminal can stop power end effectively asic chip is impacted; And second filter circuit that is connected between the output and ground of asic chip can stop extraneous RF signal by output asic chip to be impacted effectively, can significantly improve the PSR performance and the anti-RF performance of MEMS microphone.
Particularly, first filter circuit and second filter circuit can be according to different properties of product needs and flexible design.As:
Fig. 4 is the physical circuit schematic diagram of a kind of MEMS microphone of relating to of expression the utility model.As shown in Figure 4, an electrode of MEMS acoustics chip is electrically connected the Vin of asic chip, and another electrode is electrically connected the Bias of asic chip; The Vdd and first filter circuit between the GND that are connected in parallel on asic chip are capacitor C1; The Vout and second filter circuit between the GND that are connected in parallel on asic chip are capacitor C2.
In application process, for instance, when the power supply signal by the power end input increased, the C1 that is connected power end and earth terminal will store the energy that increases with respect to the normal power source signal; When the power supply signal by the power end input reduces, the C1 that is connected power end and earth terminal will discharge the energy that reduces with respect to the normal power source signal, thereby make the load voltage of input ASIC power end level and smooth, the noise fluctuations because of the external power source signal does not change.Sort circuit structure shown in Figure 4 two electric capacity only need be in circuit in parallel just can reach the effect of anti-electromagnetic interference, and simplicity of design, with low cost can not increase extra technology and cost burden to the manufacturing of MEMS microphone.
Fig. 5 is the physical circuit schematic diagram of second kind of MEMS microphone relating to of expression the utility model.As shown in Figure 5, same, an electrode of MEMS acoustics chip is electrically connected the Vin of asic chip, and another electrode is electrically connected the Bias of asic chip; First filter circuit is the capacitor C1 that is connected in parallel between Vdd and the GND; And second filter circuit is a ∏ type filter circuit that is connected in parallel between Vout and the GND, is made of capacitor C2, capacitor C3 and a resistance R 1.
In application process, for instance, when the power supply signal by the power end input changed, the capacitor C1 that is connected power end and earth terminal will store or discharge the energy that increases or reduce with respect to the normal power source signal; When existing extraneous radiofrequency signal to exert an influence to the power end of ASIC and output, be connected in parallel on the capacitor C1 between Vdd and the GND and be connected in parallel on Vout and GND between ∏ type filter circuit can be according to extraneous radiofrequency signal to the corresponding storage of the influence that power end and output produced or release energy, the load voltage of level and smooth asic chip power end and output, thus of the influence of RF signal eliminated to power end and the output of ASIC.
And compare to circuit structure shown in Figure 4, the anti-RF better effects if of circuit structure of this ∏ type filter circuit of Fig. 5, and possess certain anti-static function.
Fig. 6 is the physical circuit schematic diagram of the third MEMS microphone of relating to of expression the utility model.As shown in Figure 6, an electrode of MEMS acoustics chip is electrically connected the Vin of asic chip, and another electrode is electrically connected the Bias of asic chip; First filter circuit is the capacitor C1 that is connected in parallel between Vdd and the GND; Second filter circuit is that a varistor VSR1 and a capacitor C2 of being connected in parallel between Vout and the GND constitute.
In application process, for instance, when the power supply signal by the power end input changed, the capacitor C1 that is connected power end and earth terminal will store or discharge the energy that increases or reduce with respect to the normal power source signal; When existing extraneous radiofrequency signal to exert an influence to the power end of ASIC and output, be connected in parallel on the capacitor C1 between Vdd and the GND and be connected in parallel on Vout and GND between varistor VSR1 and capacitor C2 can be according to extraneous radiofrequency signal to the corresponding storage of the influence that power end and output produced or release energy, the load voltage of level and smooth asic chip power end and output, thus of the influence of RF signal eliminated to power end and the output of ASIC.And compare to circuit structure shown in Figure 4, the anti-RF better effects if of the sort circuit structure of Fig. 6, and possess certain anti-static function.
Fig. 7 is the physical circuit schematic diagram of the 4th kind of MEMS microphone relating to of expression the utility model.As shown in Figure 7, an electrode of MEMS acoustics chip is electrically connected the Vin of asic chip, and another electrode is electrically connected the Bias of asic chip; First filter circuit is a varistor VSR2 who is connected in parallel between Vdd and the GND; Second filter circuit is that one or two capacitor C2, C3 being connected in parallel between Vout and the GND constitute.
In application process, for instance, when the power supply signal by the power end input changed, the varistor VSR2 that is connected power end and earth terminal will store or discharge the energy that increases or reduce with respect to the normal power source signal; When existing extraneous radiofrequency signal to exert an influence to the power end of ASIC and output, be connected in parallel on the varistor VSR2 between Vdd and the GND and be connected in parallel on Vout and GND between capacitor C3 and capacitor C2 can be according to extraneous radiofrequency signal to the corresponding storage of the influence that power end and output produced or release energy, the load voltage of level and smooth asic chip power end and output, thus of the influence of RF signal eliminated to power end and the output of ASIC.
And compare to circuit structure shown in Figure 4, the anti-RF better effects if of Fig. 7 sort circuit structure, and possess certain anti-static function.
Though described several embodiment of the present utility model at the particular circuit configurations of MEMS microphone above; but; in the above teachings; those skilled in the art can carry out various improvement and distortion on the basis of above-mentioned execution mode; and these improvement and distortion; all should drop in the protection range of the present utility model; those skilled in the art should be understood that; above-mentioned specific descriptions are just in order better to explain the purpose of this utility model; be not to restriction of the present utility model, protection range of the present utility model is limited by claim and equivalent thereof.
Under above-mentioned instruction of the present utility model; those skilled in the art can carry out various improvement and distortion on the basis of the foregoing description; and these improvement and distortion; all drop in the protection range of the present utility model; those skilled in the art should be understood that; above-mentioned specific descriptions are just better explained the purpose of this utility model, and protection range of the present utility model is limited by claim and equivalent thereof.
Claims (8)
1. a MEMS microphone comprises asic chip and MEMS acoustics chip, and described asic chip comprises output, power end and earth terminal, it is characterized in that,
Be connected with first filter circuit between the power end of described asic chip and the earth terminal;
Be connected with second filter circuit between the output of described asic chip and the earth terminal.
2. according to the described MEMS microphone of claim 1, it is characterized in that,
Described asic chip also comprises bigoted voltage end and input;
An electrode of described MEMS acoustics chip is electrically connected the input of described asic chip, and another electrode is electrically connected the bigoted voltage end of described asic chip.
3. according to claim 1 or 2 described MEMS microphones, it is characterized in that,
Described first filter circuit is a capacitor.
4. according to claim 1 or 2 described MEMS microphones, it is characterized in that,
Described second filter circuit is a capacitor.
5. according to claim 1 or 2 described MEMS microphones, it is characterized in that,
Described first filter circuit is a varistor.
6. according to claim 1 or 2 described MEMS microphones, it is characterized in that,
Described second filter circuit is two capacitors that are connected in parallel.
7. according to claim 1 or 2 described MEMS microphones, it is characterized in that,
Described second filter circuit is a varistor and capacitor that is connected in parallel.
8. according to claim 1 or 2 described MEMS microphones, it is characterized in that,
Described second filter circuit is a ∏ type filter circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010200011253U CN201594811U (en) | 2010-01-13 | 2010-01-13 | MEMS microphone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010200011253U CN201594811U (en) | 2010-01-13 | 2010-01-13 | MEMS microphone |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201594811U true CN201594811U (en) | 2010-09-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010200011253U Expired - Lifetime CN201594811U (en) | 2010-01-13 | 2010-01-13 | MEMS microphone |
Country Status (1)
| Country | Link |
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| CN (1) | CN201594811U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102932723A (en) * | 2012-11-13 | 2013-02-13 | 山东共达电声股份有限公司 | Two-end micro-electro-mechanical system (MEMS) microphone |
| CN104010260A (en) * | 2014-06-17 | 2014-08-27 | 山东共达电声股份有限公司 | Two-line MEMS microphone |
| CN105100979A (en) * | 2014-05-04 | 2015-11-25 | 钰太芯微电子科技（上海）有限公司 | Microphone packaging structure with improved electromagnetic interference resistance |
-
2010
- 2010-01-13 CN CN2010200011253U patent/CN201594811U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102932723A (en) * | 2012-11-13 | 2013-02-13 | 山东共达电声股份有限公司 | Two-end micro-electro-mechanical system (MEMS) microphone |
| CN102932723B (en) * | 2012-11-13 | 2015-07-29 | 山东共达电声股份有限公司 | A kind of two ends MEMS microphone |
| CN105100979A (en) * | 2014-05-04 | 2015-11-25 | 钰太芯微电子科技（上海）有限公司 | Microphone packaging structure with improved electromagnetic interference resistance |
| CN104010260A (en) * | 2014-06-17 | 2014-08-27 | 山东共达电声股份有限公司 | Two-line MEMS microphone |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Knowles Electronics Co. Ltd. Assignor: Goertek Inc. Contract record no.: 2015990000235 Denomination of utility model: MEMS (micro electro mechanical system) microphone structure and manufacturing method of MEMS microphone structure Granted publication date: 20100929 License type: Common License Record date: 20150424 |
|
| LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20100929 |