CN201534876U - 一种平面磁控溅射装置 - Google Patents
一种平面磁控溅射装置 Download PDFInfo
- Publication number
- CN201534876U CN201534876U CN2009202225837U CN200920222583U CN201534876U CN 201534876 U CN201534876 U CN 201534876U CN 2009202225837 U CN2009202225837 U CN 2009202225837U CN 200920222583 U CN200920222583 U CN 200920222583U CN 201534876 U CN201534876 U CN 201534876U
- Authority
- CN
- China
- Prior art keywords
- current potential
- magnetic control
- sputtering device
- control sputtering
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009202225837U CN201534876U (zh) | 2009-09-27 | 2009-09-27 | 一种平面磁控溅射装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009202225837U CN201534876U (zh) | 2009-09-27 | 2009-09-27 | 一种平面磁控溅射装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN201534876U true CN201534876U (zh) | 2010-07-28 |
Family
ID=42534658
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009202225837U Expired - Lifetime CN201534876U (zh) | 2009-09-27 | 2009-09-27 | 一种平面磁控溅射装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN201534876U (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014036880A1 (zh) * | 2012-09-07 | 2014-03-13 | 昆山允升吉光电科技有限公司 | 一种掩模框架及其对应的掩模组件 |
WO2014036881A1 (zh) * | 2012-09-07 | 2014-03-13 | 昆山允升吉光电科技有限公司 | 一种掩模框架及其对应的蒸镀用掩模组件 |
CN104404466A (zh) * | 2014-12-26 | 2015-03-11 | 合肥京东方光电科技有限公司 | 磁控溅射镀膜方法及系统 |
CN104988465A (zh) * | 2015-06-29 | 2015-10-21 | 信利(惠州)智能显示有限公司 | 磁控溅射装置阳极部件 |
CN105098096A (zh) * | 2015-08-03 | 2015-11-25 | 京东方科技集团股份有限公司 | 封装料的布设方法、显示面板及其制作方法、显示装置 |
CN111172507A (zh) * | 2020-03-05 | 2020-05-19 | 东莞南玻工程玻璃有限公司 | 平面靶材烧穿报警系统 |
-
2009
- 2009-09-27 CN CN2009202225837U patent/CN201534876U/zh not_active Expired - Lifetime
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014036880A1 (zh) * | 2012-09-07 | 2014-03-13 | 昆山允升吉光电科技有限公司 | 一种掩模框架及其对应的掩模组件 |
WO2014036881A1 (zh) * | 2012-09-07 | 2014-03-13 | 昆山允升吉光电科技有限公司 | 一种掩模框架及其对应的蒸镀用掩模组件 |
CN103668053A (zh) * | 2012-09-07 | 2014-03-26 | 昆山允升吉光电科技有限公司 | 一种掩模框架及其对应的掩模组件 |
TWI503427B (zh) * | 2012-09-07 | 2015-10-11 | Kun Shan Power Stencil Co Ltd | 掩膜框架及其對應的蒸鍍用掩膜組件 |
CN104404466A (zh) * | 2014-12-26 | 2015-03-11 | 合肥京东方光电科技有限公司 | 磁控溅射镀膜方法及系统 |
US9934948B2 (en) | 2014-12-26 | 2018-04-03 | Boe Technology Group Co., Ltd. | Magnetron-sputtering coating system and method, and display substrate |
CN104988465A (zh) * | 2015-06-29 | 2015-10-21 | 信利(惠州)智能显示有限公司 | 磁控溅射装置阳极部件 |
CN105098096A (zh) * | 2015-08-03 | 2015-11-25 | 京东方科技集团股份有限公司 | 封装料的布设方法、显示面板及其制作方法、显示装置 |
CN111172507A (zh) * | 2020-03-05 | 2020-05-19 | 东莞南玻工程玻璃有限公司 | 平面靶材烧穿报警系统 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN201534876U (zh) | 一种平面磁控溅射装置 | |
CN201068469Y (zh) | 可延长靶材使用寿命的平面磁控溅射靶 | |
CN110106481B (zh) | 镀膜装置及物理气相沉积设备 | |
WO2021128699A1 (zh) | 一种新型磁控溅射阴极 | |
UA95809C2 (ru) | Способ осаждения слабопроводящих слоев (варианты) | |
CN209836293U (zh) | 一种高效率磁控溅射平面阴极 | |
CN105603371A (zh) | 一种磁性溅射靶材 | |
CN204162777U (zh) | 一种靶材组件 | |
CN101560643A (zh) | 等离子体产生设备、沉积设备和沉积方法 | |
CN103820759A (zh) | 一种提高矩形平面磁控溅射阴极靶材利用率的方法 | |
CN103290378A (zh) | 磁控溅射镀膜阴极机构 | |
CN1245534C (zh) | 无磁屏蔽型铁磁性靶材溅射阴极及其溅射方法 | |
CN1836829A (zh) | 散热装置制备方法 | |
CN202148349U (zh) | 一种磁控溅射用阴极 | |
CN106399958B (zh) | 一种用于金属镀膜的矩形磁控溅射靶 | |
CN102677008B (zh) | 在线制备太阳能电池导电极膜层的装置 | |
CN102994963B (zh) | 连续式卷绕溅射镀膜机 | |
JP5653257B2 (ja) | スパッタリング装置及びスパッタリング方法 | |
CN201301339Y (zh) | 一种高功率平面磁控溅射阴极 | |
CN203462120U (zh) | 一种矩形平面磁控溅射阴极 | |
CN203976900U (zh) | 一种溅射镀膜的靶材结构 | |
CN100446649C (zh) | 散热装置 | |
CN202786408U (zh) | 一种镀膜设备 | |
CN101418432B (zh) | 一种高功率平面磁控溅射阴极 | |
CN208649457U (zh) | 一种阴极体组件、磁控溅射阴极及磁控溅射装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150626 Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150626 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20150626 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE Technology Group Co., Ltd. Patentee after: Beijing BOE Photoelectricity Science & Technology Co., Ltd. Address before: 100176 No. 8 West Central Road, Beijing economic and Technological Development Zone, Beijing Patentee before: Beijing BOE Photoelectricity Science & Technology Co., Ltd. |
|
CX01 | Expiry of patent term |
Granted publication date: 20100728 |
|
CX01 | Expiry of patent term |