CN201376997Y - 硅材料酸腐蚀综合处理装置 - Google Patents
硅材料酸腐蚀综合处理装置 Download PDFInfo
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- CN201376997Y CN201376997Y CN200920135241U CN200920135241U CN201376997Y CN 201376997 Y CN201376997 Y CN 201376997Y CN 200920135241 U CN200920135241 U CN 200920135241U CN 200920135241 U CN200920135241 U CN 200920135241U CN 201376997 Y CN201376997 Y CN 201376997Y
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CN200920135241U CN201376997Y (zh) | 2009-02-27 | 2009-02-27 | 硅材料酸腐蚀综合处理装置 |
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CN200920135241U CN201376997Y (zh) | 2009-02-27 | 2009-02-27 | 硅材料酸腐蚀综合处理装置 |
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CN201376997Y true CN201376997Y (zh) | 2010-01-06 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102629642A (zh) * | 2012-04-13 | 2012-08-08 | 上海超日(洛阳)太阳能有限公司 | 一种防太阳能电池减反射绒面产生黑纹的绒面制备方法 |
CN103245549A (zh) * | 2013-05-10 | 2013-08-14 | 西安航空动力股份有限公司 | 一种单晶叶片晶粒度腐蚀装置 |
CN111659665A (zh) * | 2020-05-29 | 2020-09-15 | 徐州鑫晶半导体科技有限公司 | 硅片的清洗方法及硅片的清洗设备 |
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2009
- 2009-02-27 CN CN200920135241U patent/CN201376997Y/zh not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102629642A (zh) * | 2012-04-13 | 2012-08-08 | 上海超日(洛阳)太阳能有限公司 | 一种防太阳能电池减反射绒面产生黑纹的绒面制备方法 |
CN103245549A (zh) * | 2013-05-10 | 2013-08-14 | 西安航空动力股份有限公司 | 一种单晶叶片晶粒度腐蚀装置 |
CN103245549B (zh) * | 2013-05-10 | 2014-12-24 | 西安航空动力股份有限公司 | 一种单晶叶片晶粒度腐蚀装置 |
CN111659665A (zh) * | 2020-05-29 | 2020-09-15 | 徐州鑫晶半导体科技有限公司 | 硅片的清洗方法及硅片的清洗设备 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SHENZHEN JIEJIA WEICHUANG MICROELECTRONICS EQUIPME Free format text: FORMER OWNER: SHENZHEN SC EXACT EQUIPMENT CO., LTD. Effective date: 20110329 |
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C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 518103 BUILDING A13, LINPOKENG INDUSTRIAL ZONE, HAOSI, SHAJING TOWN, BAO'AN DISTRICT, SHENZHEN CITY, GUANGDONG PROVINCE TO: 518000 1/F, BUILDING A4, LINPOKENG INDUSTRIAL ZONE, HAOSI, SHAJING SUBDISTRICT, BAO'AN DISTRICT, SHENZHEN CITY |
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TR01 | Transfer of patent right |
Effective date of registration: 20110329 Address after: 518000, Shenzhen Baoan District manhole Street oyster four Lin slope pit Industrial Zone, A4 building, first floor Patentee after: Shenzhen Jiejiachuang Microelectronic Equipment Co., Ltd. Address before: 518103 A13 building, oyster four woods slope pit Industrial Zone, Baoan District, Guangdong, Shenzhen Patentee before: Shenzhen SC Exact Equipment Co., Ltd. |
|
C56 | Change in the name or address of the patentee |
Owner name: SHENZHEN S.C NEW ENERGY TECHNOLOGY CORPORATION Free format text: FORMER NAME: SHENZHEN JIEJIA WEICHUANG MICROELECTRONICS EQUIPMENT CO., LTD. |
|
CP03 | Change of name, title or address |
Address after: 518000, Guangdong, Shenzhen province Baoan District manhole Street oyster four Lin slope pit Industrial Zone A4 and No. A6 workshop Patentee after: Shenzhen S. C New Energy Equipment Co., Ltd. Address before: 518000, Shenzhen Baoan District manhole Street oyster four Lin slope pit Industrial Zone, A4 building, first floor Patentee before: Shenzhen Jiejiachuang Microelectronic Equipment Co., Ltd. |
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CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20100106 |