CN1977381B - 非易失性存储器件 - Google Patents
非易失性存储器件 Download PDFInfo
- Publication number
- CN1977381B CN1977381B CN2005800213312A CN200580021331A CN1977381B CN 1977381 B CN1977381 B CN 1977381B CN 2005800213312 A CN2005800213312 A CN 2005800213312A CN 200580021331 A CN200580021331 A CN 200580021331A CN 1977381 B CN1977381 B CN 1977381B
- Authority
- CN
- China
- Prior art keywords
- mentioned
- conductive layer
- layer
- film
- resistance change
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/101—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including resistors or capacitors only
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/30—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/061—Patterning of the switching material
- H10N70/063—Patterning of the switching material by etching of pre-deposited switching material layers, e.g. lithography
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/861—Thermal details
Abstract
Description
Claims (16)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004260642 | 2004-09-08 | ||
JP260642/2004 | 2004-09-08 | ||
PCT/JP2005/012324 WO2006027887A1 (ja) | 2004-09-08 | 2005-07-04 | 不揮発性記憶装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1977381A CN1977381A (zh) | 2007-06-06 |
CN1977381B true CN1977381B (zh) | 2010-05-26 |
Family
ID=36036181
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2005800213312A Expired - Fee Related CN1977381B (zh) | 2004-09-08 | 2005-07-04 | 非易失性存储器件 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20070235710A1 (zh) |
EP (1) | EP1793424B1 (zh) |
JP (1) | JP4795961B2 (zh) |
CN (1) | CN1977381B (zh) |
TW (1) | TW200620473A (zh) |
WO (1) | WO2006027887A1 (zh) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100657966B1 (ko) * | 2005-08-11 | 2006-12-14 | 삼성전자주식회사 | 리셋 전류 안정화를 위한 메모리 소자의 제조 방법 |
US7601995B2 (en) * | 2005-10-27 | 2009-10-13 | Infineon Technologies Ag | Integrated circuit having resistive memory cells |
EP2070088A4 (en) * | 2006-08-08 | 2009-07-29 | Nantero Inc | NON-VOLATILE RESISTIVE MEMORY, CIRCUIT BREAKERS AND OPERATING CIRCUITS WITH SCALABLE NANOTUBE SWITCHES WITH TWO TERMINALS |
JP4437299B2 (ja) | 2006-08-25 | 2010-03-24 | エルピーダメモリ株式会社 | 半導体装置及びその製造方法 |
JP4267013B2 (ja) | 2006-09-12 | 2009-05-27 | エルピーダメモリ株式会社 | 半導体装置の製造方法 |
US8232175B2 (en) * | 2006-09-14 | 2012-07-31 | Spansion Llc | Damascene metal-insulator-metal (MIM) device with improved scaleability |
US7504653B2 (en) | 2006-10-04 | 2009-03-17 | Macronix International Co., Ltd. | Memory cell device with circumferentially-extending memory element |
US7838860B2 (en) * | 2007-06-21 | 2010-11-23 | Qimonda Ag | Integrated circuit including vertical diode |
US8189372B2 (en) * | 2008-02-05 | 2012-05-29 | International Business Machines Corporation | Integrated circuit including electrode having recessed portion |
US8084842B2 (en) | 2008-03-25 | 2011-12-27 | Macronix International Co., Ltd. | Thermally stabilized electrode structure |
US9263126B1 (en) | 2010-09-01 | 2016-02-16 | Nantero Inc. | Method for dynamically accessing and programming resistive change element arrays |
JP4795485B2 (ja) * | 2008-12-05 | 2011-10-19 | パナソニック株式会社 | 不揮発性記憶素子及びその製造方法 |
US8829646B2 (en) * | 2009-04-27 | 2014-09-09 | Macronix International Co., Ltd. | Integrated circuit 3D memory array and manufacturing method |
CN101826546B (zh) * | 2010-04-06 | 2011-10-05 | 中国科学院上海微系统与信息技术研究所 | 纳米级侧壁限制电阻转换存储器单元及制造方法 |
US9082954B2 (en) | 2010-09-24 | 2015-07-14 | Macronix International Co., Ltd. | PCRAM with current flowing laterally relative to axis defined by electrodes |
US8497182B2 (en) | 2011-04-19 | 2013-07-30 | Macronix International Co., Ltd. | Sidewall thin film electrode with self-aligned top electrode and programmable resistance memory |
US8987700B2 (en) | 2011-12-02 | 2015-03-24 | Macronix International Co., Ltd. | Thermally confined electrode for programmable resistance memory |
US8981330B2 (en) | 2012-07-16 | 2015-03-17 | Macronix International Co., Ltd. | Thermally-confined spacer PCM cells |
US9214351B2 (en) | 2013-03-12 | 2015-12-15 | Macronix International Co., Ltd. | Memory architecture of thin film 3D array |
US8916414B2 (en) | 2013-03-13 | 2014-12-23 | Macronix International Co., Ltd. | Method for making memory cell by melting phase change material in confined space |
TWI549229B (zh) | 2014-01-24 | 2016-09-11 | 旺宏電子股份有限公司 | 應用於系統單晶片之記憶體裝置內的多相變化材料 |
US9559113B2 (en) | 2014-05-01 | 2017-01-31 | Macronix International Co., Ltd. | SSL/GSL gate oxide in 3D vertical channel NAND |
US9847481B2 (en) | 2015-10-27 | 2017-12-19 | Taiwan Semiconductor Manufacturing Co., Ltd. | Metal landing on top electrode of RRAM |
KR102375588B1 (ko) | 2017-07-06 | 2022-03-16 | 삼성전자주식회사 | 반도체 장치 및 그 제조 방법 |
JP2020024965A (ja) | 2018-08-06 | 2020-02-13 | キオクシア株式会社 | 半導体記憶装置 |
JP2021150390A (ja) | 2020-03-17 | 2021-09-27 | キオクシア株式会社 | 記憶装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6731535B1 (en) * | 2002-12-10 | 2004-05-04 | Renesas Technology Corp. | Nonvolatile semiconductor memory device |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4809044A (en) * | 1986-08-22 | 1989-02-28 | Energy Conversion Devices, Inc. | Thin film overvoltage protection devices |
JPH0445584A (ja) * | 1990-06-13 | 1992-02-14 | Casio Comput Co Ltd | 相転移型メモリ素子およびその製造方法 |
JP2879749B2 (ja) | 1990-06-13 | 1999-04-05 | カシオ計算機株式会社 | 相転移型メモリ素子およびその製造方法 |
US5177567A (en) | 1991-07-19 | 1993-01-05 | Energy Conversion Devices, Inc. | Thin-film structure for chalcogenide electrical switching devices and process therefor |
US5789277A (en) * | 1996-07-22 | 1998-08-04 | Micron Technology, Inc. | Method of making chalogenide memory device |
US6337266B1 (en) * | 1996-07-22 | 2002-01-08 | Micron Technology, Inc. | Small electrode for chalcogenide memories |
US5825046A (en) * | 1996-10-28 | 1998-10-20 | Energy Conversion Devices, Inc. | Composite memory material comprising a mixture of phase-change memory material and dielectric material |
US5952671A (en) * | 1997-05-09 | 1999-09-14 | Micron Technology, Inc. | Small electrode for a chalcogenide switching device and method for fabricating same |
JP3388221B2 (ja) * | 2000-03-31 | 2003-03-17 | 株式会社東芝 | 記録媒体およびこれを用いた記録再生装置 |
US6440837B1 (en) * | 2000-07-14 | 2002-08-27 | Micron Technology, Inc. | Method of forming a contact structure in a semiconductor device |
DE10128482A1 (de) * | 2001-06-12 | 2003-01-02 | Infineon Technologies Ag | Halbleiterspeichereinrichtung sowie Verfahren zu deren Herstellung |
JP3749847B2 (ja) * | 2001-09-27 | 2006-03-01 | 株式会社東芝 | 相変化型不揮発性記憶装置及びその駆動回路 |
US6545903B1 (en) * | 2001-12-17 | 2003-04-08 | Texas Instruments Incorporated | Self-aligned resistive plugs for forming memory cell with phase change material |
US7116593B2 (en) * | 2002-02-01 | 2006-10-03 | Hitachi, Ltd. | Storage device |
JP3948292B2 (ja) * | 2002-02-01 | 2007-07-25 | 株式会社日立製作所 | 半導体記憶装置及びその製造方法 |
US6858482B2 (en) * | 2002-04-10 | 2005-02-22 | Micron Technology, Inc. | Method of manufacture of programmable switching circuits and memory cells employing a glass layer |
KR100979710B1 (ko) * | 2003-05-23 | 2010-09-02 | 삼성전자주식회사 | 반도체 메모리 소자 및 제조방법 |
DE102005025209B4 (de) * | 2004-05-27 | 2011-01-13 | Samsung Electronics Co., Ltd., Suwon | Halbleiterspeicherbauelement, elektronisches System und Verfahren zur Herstellung eines Halbleiterspeicherbauelements |
-
2005
- 2005-06-15 TW TW094119852A patent/TW200620473A/zh unknown
- 2005-07-04 EP EP05765318A patent/EP1793424B1/en not_active Expired - Fee Related
- 2005-07-04 WO PCT/JP2005/012324 patent/WO2006027887A1/ja active Application Filing
- 2005-07-04 US US11/630,241 patent/US20070235710A1/en not_active Abandoned
- 2005-07-04 CN CN2005800213312A patent/CN1977381B/zh not_active Expired - Fee Related
- 2005-07-04 JP JP2006535054A patent/JP4795961B2/ja not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6731535B1 (en) * | 2002-12-10 | 2004-05-04 | Renesas Technology Corp. | Nonvolatile semiconductor memory device |
Non-Patent Citations (3)
Title |
---|
JP特开平4-45584A 1992.02.14 |
JP特开平4-45585A 1992.02.14 |
JP特表2001-502848A 2001.02.27 |
Also Published As
Publication number | Publication date |
---|---|
EP1793424A1 (en) | 2007-06-06 |
TW200620473A (en) | 2006-06-16 |
EP1793424A4 (en) | 2009-06-10 |
EP1793424B1 (en) | 2011-10-05 |
US20070235710A1 (en) | 2007-10-11 |
CN1977381A (zh) | 2007-06-06 |
WO2006027887A1 (ja) | 2006-03-16 |
JPWO2006027887A1 (ja) | 2008-05-08 |
JP4795961B2 (ja) | 2011-10-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: RENESAS ELECTRONICS CORPORATION Free format text: FORMER OWNER: RENESAS TECHNOLOGY CORP. Effective date: 20101019 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: TOKYO TO, JAPAN TO: KANAGAWA PREFECTURE, JAPAN |
|
TR01 | Transfer of patent right |
Effective date of registration: 20101019 Address after: Kanagawa Patentee after: Renesas Electronics Corporation Address before: Tokyo, Japan, Japan Patentee before: Renesas Technology Corp. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100526 Termination date: 20140704 |
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EXPY | Termination of patent right or utility model |