CN1971210A - Laser plane coordinate standard device - Google Patents
Laser plane coordinate standard device Download PDFInfo
- Publication number
- CN1971210A CN1971210A CN 200610167616 CN200610167616A CN1971210A CN 1971210 A CN1971210 A CN 1971210A CN 200610167616 CN200610167616 CN 200610167616 CN 200610167616 A CN200610167616 A CN 200610167616A CN 1971210 A CN1971210 A CN 1971210A
- Authority
- CN
- China
- Prior art keywords
- coordinate
- measuring
- laser
- measurement
- light path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims abstract description 30
- 230000003287 optical effect Effects 0.000 claims description 9
- 238000004556 laser interferometry Methods 0.000 claims description 8
- 238000011156 evaluation Methods 0.000 abstract description 3
- 238000005188 flotation Methods 0.000 description 5
- 238000009434 installation Methods 0.000 description 3
- 239000004579 marble Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003100 immobilizing effect Effects 0.000 description 1
- 230000033001 locomotion Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Images
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention relates to a laser plane coordinate standard device, which comprises three laser interference measuring light paths for measuring horizontal axial coordinates, and is characterized in that: the device is added with a set of laser interference measuring light path for measuring the vertical axial coordinate, the measuring light path comprises a vertical shaft, a target workbench is positioned on the vertical shaft and is driven by a motor to move along the vertical shaft, a pyramid reflecting mirror and a measuring target are arranged on the workbench, and a steering prism which enables the light path to be steered to the vertical axial direction along the horizontal axial direction is arranged below the pyramid reflecting mirror and the measuring target. The device establishes the laser plane standard coordinate plane through two sets of mutually perpendicular laser interference measurement light paths, has simple structure, high Abbe error compensation accuracy and high measurement precision, and realizes the coordinate point-based direct calibration and error evaluation of the large-size portable three-coordinate measuring machine for the first time.
Description
Technical field
The present invention is a kind of laser plane coordinate calibration device, belongs to the length metering field.Directly apply to the large scale measurement of coordinates.
Background technology
The development of large scale metering mainly is the influence that is subjected to the industrial products demand.Particularly traditional large scale industry such as Aero-Space and automobile, information-based and the globalization of producing product causes the production of complex product need be carried out seamless link, unified assembling by the parts from production all over the world, supplier must satisfy the traceability of international standard dimensionally by the large component that the multilayer channel provides, and provides the explanation of uncertainty of measurement.Naval vessel, spacecraft, particle accelerator, large-scale ground telescope etc. all need large scale metering accurately in addition, utilize the large-scale metrology instrument to set up and maintenance system, calibrate accurately to guarantee system.The measurement of large component mainly depends on air line distance or spatial coordinate measuring system, for example portable large scale three coordinate measuring machines such as laser interferometer, coordinate measuring machine, transit, laser tracker, photogrammeter and 3D scanner.
Tracing to the source of large scale industrial instrument brought pressure to traditional particular measurement mode at present.Metrological service has been difficult to fund and ability is that every kind of industry measurement instrument is set up calibrating installation, for the link that guarantees to trace to the source is not interrupted, and can be by using other measured of the specific measured introducing of tracing to the source indirectly.Can only rely on standard length (as gauge block, drift slide etc.) to remove to calibrate portable large scale three coordinate measuring machine at present, calibrate portable three-coordinate measuring machine indirectly by the length of measuring between 2.This transmission of quantity value relates to complex calculations, can only realize tracing to the source indirectly and trace to the source in the part, can not fundamentally solve the calibrating coordinates of portable large scale three coordinate measuring machine, technical indicator that can not the thoroughly evaluating instrument.Said method has only realized that length traces to the source, and fails to realize directly tracing to the source of coordinate.
The one dimension calibration modes such as being confined to length comparison, tape measure of tracing to the source of portable large scale three coordinate measuring machines such as existing electronic theodolite, laser tracker, photogrammeter and 3D scanner.For accurately whether can't calibrating of its measurement of coordinates comprehensively.
Summary of the invention
The present invention designs at problems of the prior art just a kind of laser plane coordinate calibration device is provided, and its objective is the direct measurement and the calibration of the coordinate points that has realized the plane, and the optical reference coordinate surface is provided.Can be used for the portable three-coordinate measuring machine of large scale error evaluation and calibration, overcome the problem of existing calibration means deficiency.
The objective of the invention is to be achieved through the following technical solutions:
This kind laser plane coordinate calibration device, comprise three tunnel laser interferometry light paths of measuring the horizontal axis coordinate, it is characterized in that: the laser interferometry light path that has increased the vertical axial coordinate of a cover measurement in this device, this measurement light path comprises a vertical axes, object tables is positioned on the vertical axes, and move along vertical axes by motor-driven, corner cube reflector and measurement target drone are set on the worktable, its below be provided with one make the optical routing horizontal axis turn to vertical axes to turn to prism.
Technical solution of the present invention provides two-way orthogonal measurement light path according to the formation of coordinate surface.The measurement of coordinate plane is realized by two cover laser interferometer.Be subjected to the influence of factors such as guide rail linearity, bigger error is arranged between the coordinate of impact point and the coordinate surface, if improve the true coordinate that precision must solve impact point by rational compensation.
Adopt two cover two-frequency laser interferometers as the length metering standard, set up the moving coordinate guide rail of X, Z both direction.The Y coordinate is the value of immobilizing during calibration.Provide two orthogonal measurement light paths respectively by two cover laser interferometry systems, the measurement structure that is drawn has formed the coordinate system of calibrating installation, i.e. optical reference coordinate surface, thus realized direct calibration to the coordinate of system under test (SUT).
Because the linearity of long guideway is difficult to control, two subsidiary light paths on horizontal optical path can be eliminated the influence to the transverse axis guide rail linearity, especially eliminate the influence of vertical vertical pivot to impact point.The measurement structure in the same way of this three road interference lights can be monitored the variation of ernst abbe angle on the horizontal axis guide rail both direction in real time, compensates the Abbe error of measured target point simultaneously according to the real-time ernst abbe angle of surveying.Test shows the measuring accuracy that adopts this scheme effectively to improve system, has reduced the requirement to the linearity of guide rail simultaneously.Vertical axes to measurement be to turn to prism N to realize by the four road laser interference system and one 90 °.Because impact point P installation position is approximate coaxial with the catoptron of the 4th road sign collimated light beam, under the very little situation of vertical axes guide rail linearity, can ignore the influence of Abbe error.Keep horizontal table motionless, like this length of stroke P of impact point in the vertical direction
ZJust can directly obtain by the four road light.
Description of drawings
Fig. 1 is the implementing procedure synoptic diagram of technical solution of the present invention
Fig. 2 is the composition and the structural representation of technical solution of the present invention
Fig. 3 is the light channel structure synoptic diagram of technical solution of the present invention
Embodiment
Below with reference to drawings and Examples technical solution of the present invention is described in further detail:
Shown in accompanying drawing 1～3, laser plane coordinate calibration device of the present invention, comprise three tunnel laser interferometry light paths of measuring the horizontal axis coordinate, it comprises horizontal main optical path OX, auxiliary optical path OY, OZ, its main body is a marble line slideway 7,36 meters of length overalls, nine marble splicings form, and are positioned at independently on the ground, support by lifting jack, the measurement standard that adopts be the length of former hewlette-packard apart from two-frequency laser interferometer 8, interferometer is positioned at an end of guide rail, target mirror is placed on the air-flotation workbench 9, along the operation of marble line slideway, measured by interferometer 8 by the distance that moves by motor-driven for air-flotation workbench 9.On air-flotation workbench 9, increased the laser interferometry light path of the vertical axial coordinate of a cover measurement, this measurement light path comprises a vertical axes 1, object tables 2 is positioned on the vertical axes 1, and drive by motor 3 and to move along vertical axes, corner cube reflector 4 and measurement target drone 5 are set on the worktable 2, its below be provided with one make the optical routing horizontal axis turn to vertical axes to turn to pentaprism 6, another interferometer 8 outgoing of optical routing.
The measurement target drone 5 that is calibrated is installed on the object tables 2 of vertical axes 1, and measured target 5 can be realized the measurement of two-way single shaft linear measure longimetry and planimetric coordinates with air-flotation workbench 9 and vertical table 2 motions.Moving target platform 2 and air-flotation workbench 9 can make measured target 5 place on the optional position of measuring system standard coordinate face.During measurement, two laser interferometer 8 just can be gathered the position of impact point on two coordinate axis, use the coordinate figure of being gathered same impact point by the school instrument simultaneously, will be to the coordinate system of system standard coordinate surface by the coordinate system transformation of school surveying instrument, data are through least square fitting analysis and processing, obtain by the deviate of D coordinates value in the measuring system relative system standard coordinate face of school, thereby judge by the uncertainty of measurement of school measuring system whether satisfy the technical requirement that is calibrated measuring system in measurement space point coordinate position.
Apparatus of the present invention have been set up laser plane standard coordinate face by the orthogonal laser interferometry light path of two covers, this apparatus structure machine is simple, Abbe error compensation accuracy height, the measuring accuracy height is realized the direct calibration and the error evaluation based on coordinate points of the portable three-coordinate measuring machine of large scale first.
Claims (2)
1. laser plane coordinate calibration device, comprise three tunnel laser interferometry light paths of measuring the horizontal axis coordinate, it is characterized in that: the laser interferometry light path that has increased the vertical axial coordinate of a cover measurement in this device, this measurement light path comprises a vertical axes (1), object tables (2) is positioned on the vertical axes (1), and drive by motor (3) and to move along vertical axes, corner cube reflector (4) and measurement target drone (5) are set on the worktable (2), its below be provided with one make the optical routing horizontal axis turn to vertical axes to turn to prism (6).
2. laser plane coordinate calibration device according to claim 1 is characterized in that: turn to prism to adopt pentaprism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101676163A CN100465579C (en) | 2006-12-19 | 2006-12-19 | Laser plane coordinate standard device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101676163A CN100465579C (en) | 2006-12-19 | 2006-12-19 | Laser plane coordinate standard device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1971210A true CN1971210A (en) | 2007-05-30 |
| CN100465579C CN100465579C (en) | 2009-03-04 |
Family
ID=38112136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006101676163A Expired - Fee Related CN100465579C (en) | 2006-12-19 | 2006-12-19 | Laser plane coordinate standard device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100465579C (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013044677A1 (en) * | 2011-09-29 | 2013-04-04 | 天津大学 | Large-scale, three-dimensional coordinate measuring method and apparatus with laser tracking |
| CN103328162A (en) * | 2010-11-26 | 2013-09-25 | 温泽尔斯坎泰克有限责任公司 | Method for controlling a co-ordinate measuring device |
| CN104097114A (en) * | 2014-07-08 | 2014-10-15 | 沈阳机床(集团)有限责任公司 | Method for measuring and separating geometric errors of multi-axis-linkage numerical control machine tool |
| CN105157574A (en) * | 2015-04-30 | 2015-12-16 | 长春理工大学 | Length measurement precision calibrating method and device for laser tracker |
| CN105332972A (en) * | 2015-11-30 | 2016-02-17 | 中国航空工业集团公司北京长城计量测试技术研究所 | Field calibration device for hydraulic displacement servo system |
| CN106705908A (en) * | 2016-12-12 | 2017-05-24 | 广西壮族自治区计量检测研究院 | Calibration device for vehicle overall dimension measuring instrument |
| CN116222464A (en) * | 2023-05-08 | 2023-06-06 | 江苏省计量科学研究院(江苏省能源计量数据中心) | High-precision linear displacement detection system |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102175147A (en) * | 2011-01-10 | 2011-09-07 | 昆山双虎电子科技有限公司 | Dynamic revising method of three-coordinate measuring machine |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07239217A (en) * | 1994-02-28 | 1995-09-12 | Agency Of Ind Science & Technol | Laser tracking type coordinate measuring apparatus |
| JP4434431B2 (en) * | 2000-05-15 | 2010-03-17 | キヤノン株式会社 | 3D shape measuring device |
| JP3751928B2 (en) * | 2002-10-16 | 2006-03-08 | 石川県 | Laser interferometer and measuring apparatus using the same |
| CN1252444C (en) * | 2002-12-24 | 2006-04-19 | 中国航空工业总公司第三○四研究所 | Laser interference length measuring system for realizing real-time compensation of Abbe errors |
| CN2596321Y (en) * | 2002-12-24 | 2003-12-31 | 中国航空工业总公司第三○四研究所 | Large-size calibrating device with straightness analysis function |
| JP2005030813A (en) * | 2003-07-09 | 2005-02-03 | Okamoto Machine Tool Works Ltd | Three-dimensional noncontact measuring apparatus and cnc precision grinding apparatus using the same |
-
2006
- 2006-12-19 CN CNB2006101676163A patent/CN100465579C/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103328162A (en) * | 2010-11-26 | 2013-09-25 | 温泽尔斯坎泰克有限责任公司 | Method for controlling a co-ordinate measuring device |
| CN103328162B (en) * | 2010-11-26 | 2017-03-08 | 温泽尔精密有限责任公司 | The method controlling coordinate measuring apparatus |
| WO2013044677A1 (en) * | 2011-09-29 | 2013-04-04 | 天津大学 | Large-scale, three-dimensional coordinate measuring method and apparatus with laser tracking |
| CN104097114A (en) * | 2014-07-08 | 2014-10-15 | 沈阳机床(集团)有限责任公司 | Method for measuring and separating geometric errors of multi-axis-linkage numerical control machine tool |
| CN105157574A (en) * | 2015-04-30 | 2015-12-16 | 长春理工大学 | Length measurement precision calibrating method and device for laser tracker |
| CN105157574B (en) * | 2015-04-30 | 2017-10-13 | 长春理工大学 | A kind of laser tracker length measurement precision scaling method and device |
| CN105332972A (en) * | 2015-11-30 | 2016-02-17 | 中国航空工业集团公司北京长城计量测试技术研究所 | Field calibration device for hydraulic displacement servo system |
| CN105332972B (en) * | 2015-11-30 | 2017-04-12 | 中国航空工业集团公司北京长城计量测试技术研究所 | Field calibration device for hydraulic displacement servo system |
| CN106705908A (en) * | 2016-12-12 | 2017-05-24 | 广西壮族自治区计量检测研究院 | Calibration device for vehicle overall dimension measuring instrument |
| CN116222464A (en) * | 2023-05-08 | 2023-06-06 | 江苏省计量科学研究院(江苏省能源计量数据中心) | High-precision linear displacement detection system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100465579C (en) | 2009-03-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100465579C (en) | Laser plane coordinate standard device | |
| CN105547344B (en) | A kind of test equipment calibrating installation and its calibration method | |
| EP1990605B1 (en) | Method of determining geometric errors in a machine tool or measuring machine | |
| CN103954219B (en) | Two dimension strain line dynamic photoelectric aims at interferometric measuring means | |
| WO2013044677A1 (en) | Large-scale, three-dimensional coordinate measuring method and apparatus with laser tracking | |
| CN108507466B (en) | The method that three-dimensional precise information is obtained using two-dimentional line laser scanner | |
| CN102721393B (en) | On-site self-calibration method for measurement system error of precise rotary table | |
| CN103278110A (en) | Compensation method for coupling error of guide rail | |
| CN104215181A (en) | Large-length laser interferometer measurement system for eliminating Abbe error | |
| CN102636137A (en) | REVO (Resident Encrypted Variable Output) measuring head position posture calibrating method in joint arm type coordinate measuring machine | |
| CN111811496B (en) | Oblique non-contact three-dimensional linear velocity and double-shaft dynamic angle measuring system and method | |
| US6949733B2 (en) | Determination of a movable gantry position including a dual measurement module | |
| CN110455226B (en) | Calibration system and method for laser collimation transceiving integrated straightness measurement | |
| Kuang et al. | A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module | |
| TWI648516B (en) | Dual optical measurement compensation system | |
| CN102602425A (en) | Locomotive limiting system and calibration method thereof | |
| CN211072866U (en) | Take receiving and dispatching split type five degree of freedom measuring device of light path drift compensation | |
| CN201885688U (en) | Three-dimensional position tracking and measuring device | |
| CN113091653A (en) | Device and method for measuring angle freedom degree error of linear guide rail based on pentaprism | |
| Ma et al. | A large-scale laser plane calibration system | |
| Liu et al. | New method for large-scale dimensional metrology using laser tracker system | |
| CN113513986B (en) | Geometric tolerance measuring device and measuring method thereof | |
| CN114485358B (en) | Axle parallelism measuring method and measuring platform thereof | |
| CN115235383A (en) | Method for detecting and debugging orthogonality of spatial cross guide rail | |
| Zhang et al. | Development of a precision vertical planar stage as a programmable planar artefact |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090304 Termination date: 20141219 |
|
| EXPY | Termination of patent right or utility model |