JP2005030813A - Three-dimensional noncontact measuring apparatus and cnc precision grinding apparatus using the same - Google Patents

Three-dimensional noncontact measuring apparatus and cnc precision grinding apparatus using the same Download PDF

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JP2005030813A
JP2005030813A JP2003193978A JP2003193978A JP2005030813A JP 2005030813 A JP2005030813 A JP 2005030813A JP 2003193978 A JP2003193978 A JP 2003193978A JP 2003193978 A JP2003193978 A JP 2003193978A JP 2005030813 A JP2005030813 A JP 2005030813A
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axis
objective lens
optical microscope
ccd camera
optical
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Junichi Isono
純一 磯野
Yoshimi Sato
好美 佐藤
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Okamoto Machine Tool Works Ltd
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Okamoto Machine Tool Works Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To miniaturize a three-dimensional noncontact measuring apparatus, and to locate the three-dimensional noncontact measuring apparatus to the working field of a machine tool in-situ. <P>SOLUTION: XYZ position coordinates are displayed on a television display 32. The coordinates are synthesized and computed by an xyz position coordinates computation section, from an xy coordinates output signal outputted by a light reception means of a CCD camera 36 by allowing reflection light from an x-y plane in a subject 2 to directly impinge on the light axis (z axis) of an objective lens 54a of an optical microscope 50, and from a yz coordinates output signal outputted by a light reception means of the CCD camera 36 by allowing reflection light from the y-z plane of the subject to impinge on the light axis of an objective lens 54b of the optical microscope by refraction via a prism 56. A three-dimensional position can be measured by a single CCD camera and a single optical microscope. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

【０００１】
【発明の属する技術分野】
本発明は、ＣＮＣ精密研削装置、ＣＮＣ精密切削装置、ＣＮＣ精密導光板金型溝加工機等の工作機械において、該工作機械に取り付けられて加工されたワ−ク（被検体）の診断をするためにテレビジョン表示器に撮影画像を投映でき、および加工されたワ−クの３次元位置座標をテレビジョン表示器に表示可能な非接触３次元測定装置に関する。本発明の他の目的は、該非接触３次元測定装置を研削装置に取り付け、ｉｎ−ｓｉｔｕでテレビジョン表示器に撮影画像を表示可能であり、加工されたワ−クの３次元位置座標（Ｘｉ，Ｙｉ，Ｚｉ）をテレビジョン表示器に表示できるＣＮＣ精密研削装置に関する。
【０００２】
【従来の技術】
図７に示すＮＣ成形研削装置１を用い、Ｘ軸テ−ブル４上のチャック６にワ−ク２を載置し、研削液を供給ノズル１８よりワ−ク表面に供給しながらＸ軸テ−ブル４を左右方向に、該Ｘ軸テ−ブルに直交するサドル７に垂直な方向にコラム９を起立して設け、これに砥石軸頭１０を設け、この砥石軸に備えた回転砥石３を用い、操作盤８より指示されるプログラミングソフトにより砥石車とワ−クを相対的に移動させてワ−ク２に溝を加工することは知られている（特許文献１参照）。
図８中、８は制御ユニット、８ａはキ−ボ−ド、８ｂは主電源、８ｃはディスプレイ、１９はベッド、２０はタンク、２１はフィルタ−、２２はポンプ、２３は砥石軸モ−タ−、２５はＸ軸リニアスケ−ル、２６はＹ軸リニアスケ−ル、２８はＺ軸リニアスケ−ルである。
【０００３】
工作機械のワ−クの仕上がり寸法精度をより精密にするために、金属工作機械、導光板金型溝加工機、半導体製造装置などで加工されるワ−ク、導光板金型、ウエハおよびその加工工具（砥石、バイト、ダイヤモンドカッタ−）等の被検体の撮影画像を光学顕微鏡に結合したＣＣＤカメラを用い、テレビジョン表示器に投影し、診断もしくはモニタ−することは行われている。
【０００４】
例えば、バイト刃先を主軸ヘッドの進退方向であるＺ軸方向（水平方向）に向けた状態でバイト刃先に光を照射してバイト刃先の映像を光学顕微鏡に結合したテレビカメラを介してテレビジョン表示器に拡大像映し、前記主軸ヘッドをＺ軸方向に進退させてバイト刃先を前記テレビジョン表示器のモニタ画面における中心線に接する位置に合わせ、バイト刃先が中心線に接したＺ軸方向の座標値Ｚ１を読み取り、次に、バイト刃先を１８０度旋回させ、主軸ヘッドをＺ軸方向に進退させ、この１８０度旋回させたときのバイト刃先を前記テレビジョン表示器のモニタ画面における中心線に接する位置に合わせ、バイト刃先が中心線に接したＺ軸方向の座標値Ｚ２を読み取り、読み取ったＺ軸方向の座標値Ｚ１，Ｚ２より主軸回転軸回りに回転するバイト刃先のバイト刃先旋回半径Ｒ１を式Ｒ１＝（Ｚ１−Ｚ２）／２より算出し、つぎに、バイト刃先旋回半径Ｒ１とバイト刃先曲率半径Ｒ２より半径誤差ΔＲを式ΔＲ＝（Ｒ１−Ｒ２）により算出し、バイト刃先位置微調整機構により前記半径誤差ΔＲだけバイト刃先をＺ軸方向に移動させてバイト刃先旋回半径Ｒ１とバイト刃先曲率半径Ｒ２とを一致させる局面切削装置が提案されている（特許文献２参照。）。
【０００５】
また、棒状切削工具をその回転軸を軸線として該軸線回りに回転自在に保持するとともに、その回転角度位置を検知可能にされた工具保持手段と、
該工具保持手段を前記軸線回りに回転駆動するようにされた回転駆動手段と、
前記工具保持手段を載置し前記軸線の方向に動作可能にされるとともに、その変位量を検知可能にされたＹ軸テ−ブルと、
該Ｙ軸テ−ブルを前記軸線の方向に直線駆動するようにされたＹ軸テ−ブル駆動手段と、
動作動作前記軸線の方向に前記回転手段とは対向して配置された対物レンズを備えるＹ軸顕微鏡およびＹ軸顕微鏡に搭載されたＹ軸テレビカメラと、
前記工具保持手段により保持された棒状切削工具を前記軸線の垂直方向から観察可能となるように前記Ｙ軸テ−ブルに対して垂直な方向に配置された対物レンズを備えるＺ軸顕微鏡およびＹ軸顕微鏡に搭載されたＺ軸テレビカメラと、
該Ｚ軸顕微鏡を保持し前記Ｙ軸テ−ブルに対して垂直方向に動作可能にされるとともに、その変位量を検知可能にされたＺ軸テ−ブルと、
該Ｚ軸テ−ブルを前記Ｙ軸テ−ブルに対して垂直な方向に直線駆動するようにされたＺ軸テ−ブル駆動手段と、
前記２つのテレビカメラにより撮影された画像を処理することにより、前記棒状切削工具の寸法、形状精度に関する複数の測定項目を測定するようにされた画像処理装置と、を有する棒状切削工具の測定装置が提案されている（特許文献３参照。）。
【０００６】
さらに、テレビジョン表示器の画面上に測定デ−タ点列と、解析範囲を特定する解析範囲特定図形とが表示され、解析範囲特定図形の位置をマウスで調整することにより解析範囲を指定し、指定が完了すると結果表示欄に測定結果が表示される表面性状解析プログラムも提案（特許文献４参照。）されており、そのソフトウエアも株式会社ミツトヨより画像ユニットデ−タ処理ソフトＱＳＰＡＫの商品名で市販されている。
【０００７】
【特許文献１】
特開２００２−３４６８７９号公報（第２−３頁および図６）
【特許文献２】
特開平８−２２９７２１号公報（第３−７頁および図１、図４）
【特許文献３】
特開２０００−７４６４４号公報（第６−１０頁および図１、図２、図６）
【特許文献４】
特開２００３−１４４４８号公報（第３−５頁および図１、図２、図４、図７）
【０００８】
テレビカメラの光源として利用されるレ−ザ光は方向と波長と位相（１波長を３６０度で分割した途中の角度）が揃っており、その波長は短く（例えば、ヘリウムネオンレ−ザは１波長当たり０．６３２８μｍ）、１ナノメ−トル（ｎｍ）の計測ができるので、精密な観察およびワ−クの加工ができる。
【０００９】
【発明が解決しようとする課題】
前記特許文献２および特許文献４で提案される２次元座標測定装置は２次元の平面状態で計測・補正等を行うので、１台の光学顕微鏡とこれに結合したテレビカメラを用いている。３次元測定装置は、特許文献３に記載されるようにＸ−Ｙ平面を撮像するＺ軸テレビカメラとＺ軸光学顕微鏡の結合と、Ｘ−Ｚ平面を撮像するＹ軸テレビカメラとＹ軸光学顕微鏡の結合を利用し、これら結合体をＺ軸方向およびＹ軸方向にを動作することにより得られた画像の発信信号を画像処理演算部で演算することにより基準点に対する被検体の３次元の位置座標（Ｘｉ，Ｙｉ，Ｚｉ）が求められる。
【００１０】
本発明は、被検体の３次元の位置座標（Ｘｉ，Ｙｉ，Ｚｉ）を測定するのに、特許文献３に記載されるような従来は各２台のテレビカメラと光学顕微鏡を用いていたのに対し、１台のテレビカメラと光学顕微鏡で被検体の３次元の位置座標を測定する装置を提供することを目的とするものである。
【００１１】
【課題を解決するための手段】
請求項１の発明は、左右方向（ｘ軸方向）に移動可能な被検体を載置するＸ軸テ−ブル、
前後方向（ｙ軸方向）に移動可能なサドル上に前記Ｘ軸テ−ブルに対し垂直の方向に設けたコラム、
該コラムに昇降可能に設けた支持軸
該支持軸に対物レンズの光軸（ｚ軸）が平行となるように取り付けた光学顕微鏡であって、該光学顕微鏡の同焦レボルバには少なくとも２個の同倍率の対物レンズを設け、一方の対物レンズは被検体のｘ−ｙ平面からの反射光を前記光軸に受け、他方の対物レンズには対物レンズ取付側とは反対側の受光部近傍にプリズムを配置して被検体のｙ−ｚ平面からの反射光を屈折させて前記光軸に受けるようにし、この光学顕微鏡の結像レンズ側にＣＣＤカメラを結合させた光学顕微鏡、
光源より被検体に照射された光が反射して光学顕微鏡の対物レンズに入光し、ｘ軸テ−ブルに垂直な光軸（ｚ軸）経てＣＣＤカメラに結像し、この結像を撮影画像としてテレビジョン表示器に映し出す画像処理部およびｘｙｚ位置座標演算部、
ｘ軸−、ｙ軸−、ｚ軸−リニアスケ−ル
および、
操作盤、プログラムソフト記憶部（ＲＯＭ）、デ−タ記録部（ＲＡＭ）および制御部（ＣＰＵ）を備えるコンピュ−タ、
を備える非接触３次元測定装置を提供するものである。
【００１２】
予め、ＣＣＤカメラを結合した光学顕微鏡の一方の対物レンズを使用して被検体のｘ−ｙ平面の画像を撮像したのち、ＣＣＤカメラを結合した光学顕微鏡を左右方向（ｘ軸方向）に移動させ、ついで同焦レボルバを回転してプリズムを備えた対物レンズの軸芯を光軸（ｚ軸）に一致させ、さらにこのＣＣＤカメラを結合した光学顕微鏡を昇降させて被検体のｙ−ｚ平面の画像を撮像することができるので、１台の光学顕微鏡とＣＣＤカメラを省略でき、非接触３次元測定装置をコンパクトにすることができる。
【００１３】
請求項２の発明は、前記非接触３次元測定装置において、被検体のｘ−ｙ平面からの反射光が前記光学顕微鏡の対物レンズの光軸に直接入射してＣＣＤカメラの受光手段より出力されるｘｙ座標出力信号と、被検体のｙ−ｚ平面からの反射光がプリズムを介して屈折されて前記光学顕微鏡の対物レンズの光軸に入射してＣＣＤカメラの受光手段より出力されるｙｚ座標出力信号とからｘｙｚ位置座標演算部が合成・演算したｘｙｚ位置座標がテレビジョン表示器に表示可能であることを特徴とする。
【００１４】
テレビジョン表示器にｘｙｚ位置座標を表示できるので、プログラミングされた所望の加工寸法と実際の加工されたワ−クの加工寸法を対比する欄をテレビジョン表示器に表示でき、加工ワ−クの診断が行える。
【００１５】
請求項３の発明は、左右方向（Ｘ軸方向）にサ−ボドライブ移動可能なＸ軸テ−ブル、該Ｘ軸テ−ブル上に設けられたワ−クを載置するチャック、前後方向（Ｙ軸方向）にサ−ボドライブ移動可能なサドル、該サドル上に垂直方向（Ｚ軸方向）に設けたコラム、該コラムの前面に設けた砥石軸、該砥石軸に軸承された回転砥石、砥石軸昇降機構、砥石軸回転機構、Ｘ軸テ−ブルの左右方向に備えられたＸ軸リニアスケ−ル、サドルの前後方向に備えられたＹ軸リニアスケ−ル、コラムの垂直方向に設けられたＺ軸リニアスケ−ル、操作盤、プログラムソフト記憶部、デ−タ記録部および制御部を備えるコンピュ−タを備えるＣＮＣ研削装置、
および
前記ＣＮＣ研削装置のコラムに前後方向（ｙ軸方向）および上下方向に移動可能に設けた支持軸をＺ軸に平行に設け、この支持軸に対物レンズの光軸（ｚ軸）が平行となるように取り付けた光学顕微鏡であって、該光学顕微鏡の同焦レボルバには少なくとも２個の同倍率の対物レンズを設け、一方の対物レンズは被検体のｘ−ｙ平面からの反射光を前記光軸に受け、他方の対物レンズには対物レンズ取付側とは反対側の受光部近傍にプリズムを配置して被検体のｙ−ｚ平面からの反射光を屈折させて前記光軸に受けるようにし、この光学顕微鏡の結像レンズ側にＣＣＤカメラを結合させ、光源よりワ−クに照射された光が反射してＣＣＤカメラ対物レンズに入光し、Ｘ軸テ−ブルに垂直な対物レンズの光軸（ｚ軸）経てＣＣＤカメラの受光手段に結像しこの結像を撮影画像としてテレビジョン表示器に映し出す非接触３次元測定装置、
を有するＣＮＣ精密研削装置を提供するものである。
【００１６】
ＣＮＣ精密研削装置に非接触３次元測定装置がｉｎ−ｓｉｔｕで設置されているので、ＣＮＣ精密研削装置上で加工ワ−クの仕上がりの診断を行うことができる。テレビジョン表示器にｘｙｚ位置座標またはＸＹＺ位置座標を表示できるので、プログラミングされた所望の加工寸法と実際の加工されたワ−クの加工寸法を対比し、加工不足の位置座標と補足加工する寸法を記載した欄をテレビジョン表示器に表示でき、該欄のデ−タを見ながら操作盤より再加工プログラムを選択し、加工条件を再入力し、ワ−クを再度加工すればナノ精度の加工ワ−クが得られる。。
【００１７】
【発明の実施の形態】
【実施例】
以下、図面を用いて本発明を更に詳細に説明する。
図１はＣＮＣ精密研削装置の側面図、図２はＣＮＣ精密研削装置の平面図、図３はＣＮＣ精密研削装置の簡略正面図、図４はＣＮＣ精密研削装置のシステム図、図５はＣＣＤカメラを結合した光学顕微鏡の正面図、および図６はＣＣＤカメラを結合した光学顕微鏡の側面図である。
【００１８】
図１、図２および図３に示すＣＮＣ精密研削装置１において、２はワ−ク（被検体）、３は砥石車、４は水平方向（Ｘ軸方向）に往復移動可能なＸ軸テ−ブル、５は作業台、６は電磁チャック、７はサ−ボモ−タ７ａ駆動により前後方向（Ｙ軸方向）に移動可能なサドル、８は制御ユニット、９はコラム、１０は砥石軸頭、１１は砥石軸、１２は砥石軸頭をサ−ボモ−タ１３駆動により垂直方向（Ｚ軸方向）に移動する昇降機構、１４は砥石車を回転駆動させるサ−ボモ−タ、１７は安全保護カバ−、２５はＸ軸リニアスケ−ル、２６はＹ軸リニアスケ−ル、２８はＺ軸リニアスケ−ル、３０は非接触３次元測定装置、３１はパ−ソナルコンピュ−タ、３２はテレビジョン表示器、３３はキィボ−ド、３４はマウス、３５は光源、３６はＣＣＤカメラ、３７は支持軸、３８はガイド、３８ａはレ−ル、３９はスライダ−、４０はｙ軸リニアスケ−ル、４１は支持軸昇降機構、４２はｚ軸リニアスケ−ル、５０は光学顕微鏡である。
【００１９】
前記Ｘ軸テ−ブル４は、ベッド１９上に設けられた一対の案内面を滑べるサドル７に設けられたＶ字型軌道部により位置決めされ、Ｘ軸テ−ブル４はその係合部（スライダ）により案内レ−ルに摺動自在に支えられる。このＸ軸テ−ブル４は図示されていないサ−ボモ−タとボ−ルネジと螺合体よりなるドライブ機構により左右方向に往復移動可能である。Ｘ軸テ−ブル４は、Ｘ−Ｙステ−ジと言える。
【００２０】
砥石軸の上下（Ｚ軸方向）送りおよび前後（Ｙ軸方向）送りが数値制御されるＣＮＣ成形研削装置１のＸ軸テ−ブル４上の電磁チャック６上にワ−ク２を固定し、前記砥石軸に備えられた砥石車３をモ−タ１４で回転させつつ前記ワ−ク面に対し直角方向に切り込み速度５〜１００ｍｍ／分、Ｘ軸テ−ブルの反転を５０〜４００ストロ−ク／分の反転速度、ストロ−ク幅１０〜７５ｍｍ幅で反転させてワ−ク２を成形（例えば溝研削）加工する。
【００２１】
非接触３次元測定装置３０の支持軸３７は、支持軸昇降機構４１の取付板４３垂直方向（ｚ軸方向）に固定され、この取付板４３はコラム９の側壁に一対設けられたガイド３８のレ−ル３８ａ上にＸ軸方向と平行の左右方向（ｘ軸方向）に移動可能なスライダ−３９に取り付けられ、このスライダ−３９は左右方向に平行に延びる一対の前記レ−ル３８ａ上を図示されていないサ−ボモ−タの駆動を受けたボ−ルネジの回転を受けて前後方向（ｙ軸方向）に移動可能である。
【００２２】
光学顕微鏡５０は、図５および図６に示すように図に示されてない結像レンズを内蔵する鏡筒本体５１下部に接続されている照明鏡筒部５２下部に内側に向けた調心・同焦マニュアルレボルバ５３を取り付け、この調心・同焦マニュアルレボルバ５３の下面に２個の同倍率の対物レンズ５４ａ，５４ｂを前記調心・同焦レボルバ５３を回動させることにより同一の光軸（ｚ軸）を共有することができるように設けられる。
【００２３】
光軸（ｚ軸）は、Ｘ−Ｙステ−ジであるＸ軸テ−ブル４のＸ−Ｙ平面に対し垂直である。前記対物レンズの一方５４ａは光源３５より照射された光（例えば、ハロゲン光、レ−ザ光）がワ−ク（被検体）のＸＹ平面からの反射光を前記光軸に受ける。他方の対物レンズ５４ｂには対物レンズ取付側（マウント側）５４ｃとは反対側の受光部近傍にプリズム５６をプリズム固定具５７で配置して被検体２のＹ−Ｚ平面からの反射光を屈折させて前記光軸（ｚ軸）に受ける。この光学顕微鏡の結像レンズ側にアダプタ５８を介してＣＣＤカメラ３６を結合し、前記光軸に入射した反射光をこのＣＣＤカメラ上に結像（中間像）し、この結像の発信信号をＡ／Ｄコンバ−タを介してコンピュ−タ３１の記憶部（ＲＡＭ）に送信し、画像処理部で発信信号を処理して撮影画像としてテレビジョン表示器３１ａに映し出す。前記照明鏡筒部５２にはファイバ照明機器が接続される光ファイバ取付具５５が備え付けられている。
光源３５は光源発生器を２基設けてもよいが、移動可能なマグネットスタンドに光源発生器を取り付け、移動可能としてもよい。
【００２４】
非接触３次元測定装置３０は、前述したパ−ソナルコンピュ−タ３１、テレビジョン表示器３２、キィボ−ド３３、マウス３４、光源３５、ＣＣＤカメラ３６、支持軸３７、案内レ−ル３８、スライダ−３９、ｘ軸リニアスケ−ル（Ｘ軸リニアスケ−ルと兼用）、ｙ軸リニアスケ−ル４０、支持軸昇降機構４１、ｚ軸リニアスケ−ル４２、Ｘ−Ｙステ−ジであるＸ軸テ−ブル４および前記光学顕微鏡５０よりなる。
【００２５】
Ｘ軸、Ｙ軸およびＺ軸は直交３軸系であり、ｘ軸、ｙ軸、およびｚ軸も直交３軸系である。また、Ｘ軸とｘ軸、Ｙ軸とｙ軸およびＺ軸とｚ軸は平行である。
公知のように、ＣＮＣ研削装置のｘｙｚ座標は、Ｘ軸テ−ブル４に対して基準点（Ｘ０，Ｙ０，Ｚ０）＝（０，０，０）となる位置を定めれば、Ｘ軸テ−ブルの左右方向に備えられたＸ軸リニアスケ−ル２５、サドルの前後方向に備えられたＹ軸リニアスケ−ル２６、コラムの垂直方向に設けられたＺ軸リニアスケ−ル２８および位置センサである各サ−ボモ−タのエンコ−ダ（あるいはアクチュエ−タ）でＸＹＺ位置座標（Ｘｉ，Ｙｉ，Ｚｉ）が読み取れる。
【００２６】
非接触３次元装置における位置座標は、ｙ軸リニアスケ−ル４０、ｚ軸リニアスケ−ル４２およびＸ軸テ−ブルの左右方向に備えられたＸ軸リニアスケ−ル６０と位置センサである各サ−ボモ−タのエンコ−ダ（あるいはアクチュエ−タ）およびＣＣＤカメラ３６でｘｙ座標（ｘｉ，ｙｉ）、ｙｚ座標（ｙｉ，ｚｉ）を読み取り、同一ｙ座標ｙｉにおけるｘｉ座標およびｚｉ座標をコンピュ−タ３１のｘｙｚ位置座標演算部（画像処理コントロ−ラ）で算出・合成して３次元位置座標（ｘｉ，ｙｉ，ｚｉ）を求める。
【００２７】
Ｘ軸とｘ軸、Ｙ軸とｙ軸およびＺ軸とｚ軸は平行であり、Ｘ−Ｙステ−ジであるＸ軸テ−ブル４はＣＮＣ精密成形研削装置１のＸ−Ｙステ−ジと非接触３次元測定装置３０のｘ−ｙステ−ジを兼用としているので、座標（ｘｉ，ｙｉ，ｚｉ）を平行に移動して演算すればＣＮＣ精密研削装置１の基準点に対する位置座標（Ｘｉ，Ｙｉ，Ｚｉ）を制御ユニット８のＸＹＺ位置座標演算部で演算して求めることができる（図４のシステム図参照）。
【００２８】
コンピュ−タ３１の記憶部ＲＯＭには画像処理プログラムが記憶され、テレビジョン表示器３２には画像処理プログラムに従って画像が映し出されたり、位置座標や加工ワ−クの寸法、溝深さ等を表示できる。
よって、プログラミングされた所望の加工寸法とテレビジョン表示器に表示された加工ワ−クの加工寸法を対比した欄をテレビジョン表示器３２に表示し、加工不足の部分およびその量を制御ユニット２４の操作盤８で入力し、補正の加工を行うこともでき、ワ−クの表面の仕上がりをナノ精度にすることができる。
【００２９】
【発明の効果】
本発明の３次元測定装置は、ＣＣＤカメラおよび光学顕微鏡が１台であっても、プリズムを利用してワ−ク（被検体）のｘ−ｙステ−ジおよびｙ−ｚステ−ジの拡大画像をテレビジョン表示器３２に表示し、ワ−クの診断を行うことができる。また、ｘｙ座標とｙｚ座標よりｘｙｚ座標を演算・合成することができ、ワ−クの寸法を計算・表示することができる。また、２つの２次元画像の出力信号より３次元画像を合成することができる。
【図面の簡単な説明】
【図１】ＣＮＣ精密研削装置の側面図である。
【図２】ＣＮＣ精密研削装置の平面図である。
【図３】ＣＮＣ精密研削装置の簡略正面図である。
【図４】ＣＮＣ精密研削装置のシステム図でる。
【図５】ＣＣＤカメラを結合した光学顕微鏡の正面図である。
【図６】ＣＣＤカメラを結合した光学顕微鏡の側面図である。
【図７】ＮＣ研削装置の斜視図である。（公知）
【符号の説明】
１ ＣＮＣ精密成形研削装置
２ ワ−ク（被検体）
３ 砥石車
４ Ｘ軸テ−ブル
７ サドル
８ 制御ユニット
９ コラム
３０ 非接触３次元測定装置
３１ コンピュ−タ
３６ ＣＣＤカメラ
５０ 光学顕微鏡
５４ 対物レンズ
５６ プリズム[0001]
BACKGROUND OF THE INVENTION
The present invention diagnoses a workpiece (subject) attached to a machine tool in a machine tool such as a CNC precision grinding apparatus, a CNC precision cutting apparatus, a CNC precision light guide plate die groove processing machine, and the like. Therefore, the present invention relates to a non-contact three-dimensional measuring apparatus capable of projecting a photographed image on a television display and capable of displaying the three-dimensional position coordinates of the processed workpiece on the television display. Another object of the present invention is to attach the non-contact three-dimensional measuring apparatus to a grinding apparatus and display a photographed image on a television display in-situ, and the three-dimensional position coordinates (X The present invention relates to a CNC precision grinding apparatus capable of displaying i , Y i , Z i ) on a television display.
[0002]
[Prior art]
7 is used to place the workpiece 2 on the chuck 6 on the X-axis table 4 and supply the grinding liquid to the workpiece surface from the supply nozzle 18 while the X-axis table is mounted. A column 9 is provided upright in a direction perpendicular to the saddle 7 orthogonal to the X-axis table, and the wheel 4 is provided with a grinding wheel head 10. It is known that a groove is formed in the workpiece 2 by relatively moving the grinding wheel and the workpiece by programming software instructed from the operation panel 8 (see Patent Document 1).
In FIG. 8, 8 is a control unit, 8a is a keyboard, 8b is a main power supply, 8c is a display, 19 is a bed, 20 is a tank, 21 is a filter, 22 is a pump, and 23 is a grindstone shaft motor. -And 25 are X-axis linear scales, 26 is a Y-axis linear scale, and 28 is a Z-axis linear scale.
[0003]
In order to make the finished dimensional accuracy of a work of a machine tool more precise, a work machined with a metal machine tool, a light guide plate die groove processing machine, a semiconductor manufacturing apparatus, a light guide plate die, a wafer and its A CCD camera coupled with an optical microscope is used to project a photographed image of a subject such as a processing tool (grinding stone, bite, diamond cutter), etc., and is projected or diagnosed or monitored.
[0004]
For example, when the cutting tool edge is directed in the Z-axis direction (horizontal direction), which is the forward / backward direction of the spindle head, light is applied to the cutting tool blade and the image of the cutting tool edge is displayed on a television via a television camera coupled to an optical microscope. The image is magnified on the instrument, and the spindle head is moved back and forth in the Z-axis direction so that the cutting tool edge is aligned with the center line on the monitor screen of the television display. The value Z1 is read, and then the cutting tool edge is rotated 180 degrees, the spindle head is advanced and retracted in the Z-axis direction, and the cutting tool edge when rotated 180 degrees is in contact with the center line on the monitor screen of the television display. The coordinate value Z2 in the Z-axis direction where the cutting tool edge is in contact with the center line is read in accordance with the position, and rotated around the main axis rotation axis from the read Z-axis direction coordinate values Z1 and Z2 The cutting edge turning radius R1 of the cutting edge is calculated from the equation R1 = (Z1-Z2) / 2, and then a radius error ΔR is calculated from the cutting edge turning radius R1 and the cutting edge curvature radius R2 by the equation ΔR = (R1-R2). ), And a cutting tool that moves the cutting tool edge in the Z-axis direction by the radius error ΔR by a tool cutting edge position fine adjustment mechanism to match the cutting tool edge turning radius R1 and the cutting tool curvature radius R2 has been proposed. (See Patent Document 2).
[0005]
Also, a tool holding means for holding the rod-shaped cutting tool so as to be rotatable about the rotation axis about the rotation axis, and capable of detecting the rotation angle position;
Rotational drive means adapted to rotationally drive the tool holding means about the axis;
A Y-axis table on which the tool holding means is placed and enabled to move in the direction of the axis, and the amount of displacement thereof can be detected;
Y-axis table driving means adapted to linearly drive the Y-axis table in the direction of the axis;
Y-axis microscope equipped with an objective lens arranged opposite to the rotating means in the direction of the axis and a Y-axis TV camera mounted on the Y-axis microscope;
Z-axis microscope and Y-axis comprising an objective lens arranged in a direction perpendicular to the Y-axis table so that the rod-shaped cutting tool held by the tool holding means can be observed from the direction perpendicular to the axis A Z-axis TV camera mounted on a microscope;
A Z-axis table that holds the Z-axis microscope and is operable in a direction perpendicular to the Y-axis table and capable of detecting the amount of displacement;
Z-axis table driving means adapted to linearly drive the Z-axis table in a direction perpendicular to the Y-axis table;
An image processing apparatus for measuring a plurality of measurement items related to the dimension and shape accuracy of the bar-shaped cutting tool by processing images taken by the two television cameras, and a measuring apparatus for the bar-shaped cutting tool Has been proposed (see Patent Document 3).
[0006]
In addition, a measurement data point sequence and an analysis range specifying figure for specifying the analysis range are displayed on the screen of the television display. The analysis range is designated by adjusting the position of the analysis range specifying figure with the mouse. A surface texture analysis program that displays the measurement result in the result display column when the specification is completed is also proposed (see Patent Document 4), and the software is also a product of image unit data processing software QSPAK from Mitutoyo Corporation. It is marketed by name.
[0007]
[Patent Document 1]
JP 2002-346879 A (page 2-3 and FIG. 6)
[Patent Document 2]
JP-A-8-229721 (page 3-7 and FIGS. 1 and 4)
[Patent Document 3]
JP 2000-74444 A (page 6-10 and FIGS. 1, 2 and 6)
[Patent Document 4]
JP 2003-14448 (page 3-5 and FIGS. 1, 2, 4, and 7)
[0008]
Laser light used as a light source of a television camera has a uniform direction, wavelength and phase (an angle in the middle of dividing one wavelength by 360 degrees), and the wavelength is short (for example, helium neon laser has 1 Since it can measure 1 nanometer (nm) per wavelength (0.6328 μm), precise observation and work processing are possible.
[0009]
[Problems to be solved by the invention]
Since the two-dimensional coordinate measuring apparatus proposed in Patent Document 2 and Patent Document 4 performs measurement and correction in a two-dimensional plane state, a single optical microscope and a television camera coupled thereto are used. As described in Patent Document 3, the three-dimensional measuring apparatus includes a combination of a Z-axis television camera that captures an XY plane and a Z-axis optical microscope, a Y-axis television camera that captures an X-Z plane, and Y-axis optics. Utilizing the coupling of the microscope, the image processing signals are used to calculate the transmission signals of the images obtained by operating these combinations in the Z-axis direction and the Y-axis direction, thereby providing a three-dimensional object of the subject relative to the reference point. Position coordinates (X i , Y i , Z i ) are obtained.
[0010]
In the present invention, two TV cameras and an optical microscope are conventionally used to measure the three-dimensional position coordinates (X i , Y i , Z i ) of a subject. In contrast, an object of the present invention is to provide an apparatus for measuring the three-dimensional position coordinates of a subject with one television camera and an optical microscope.
[0011]
[Means for Solving the Problems]
The invention of claim 1 is an X-axis table for placing a subject movable in the left-right direction (x-axis direction).
A column provided on a saddle movable in the front-rear direction (y-axis direction) in a direction perpendicular to the X-axis table;
A support shaft provided on the column so as to be movable up and down. An optical microscope attached to the support shaft so that the optical axis (z-axis) of the objective lens is parallel to the column. An objective lens having the same magnification is provided, one objective lens receives reflected light from the xy plane of the subject on the optical axis, and the other objective lens is near the light receiving portion on the side opposite to the objective lens mounting side. An optical microscope in which a prism is arranged to refract the reflected light from the yz plane of the subject so as to be received by the optical axis, and a CCD camera is coupled to the imaging lens side of the optical microscope;
The light irradiated to the subject from the light source is reflected and enters the objective lens of the optical microscope, and forms an image on the CCD camera through the optical axis (z-axis) perpendicular to the x-axis table. An image processing unit and an xyz position coordinate calculation unit which are displayed as an image on a television display;
x-axis, y-axis, z-axis, linear scale, and
A computer including an operation panel, a program software storage unit (ROM), a data recording unit (RAM), and a control unit (CPU);
The non-contact three-dimensional measuring apparatus provided with this is provided.
[0012]
After taking an image on the xy plane of the subject using one objective lens of an optical microscope coupled with a CCD camera in advance, the optical microscope coupled with the CCD camera is moved in the left-right direction (x-axis direction). Then, the confocal revolver is rotated so that the axis of the objective lens provided with the prism coincides with the optical axis (z-axis), and the optical microscope coupled with the CCD camera is moved up and down on the yz plane of the subject. Since an image can be taken, one optical microscope and a CCD camera can be omitted, and the non-contact three-dimensional measuring apparatus can be made compact.
[0013]
In the non-contact three-dimensional measuring apparatus, the reflected light from the xy plane of the subject directly enters the optical axis of the objective lens of the optical microscope and is output from the light receiving means of the CCD camera. Xy coordinate output signal and reflected light from the yz plane of the subject are refracted through the prism and incident on the optical axis of the objective lens of the optical microscope and output from the light receiving means of the CCD camera. The xyz position coordinates synthesized and calculated by the xyz position coordinate calculation unit from the output signal can be displayed on the television display.
[0014]
Since the xyz position coordinates can be displayed on the television display, a column for comparing the desired machining dimension programmed and the machining dimension of the actual machined workpiece can be displayed on the television display. Diagnosis can be made.
[0015]
According to a third aspect of the present invention, there is provided an X-axis table capable of servo drive movement in the left-right direction (X-axis direction), a chuck for placing a work provided on the X-axis table, A saddle movable in the servo drive in the Y-axis direction), a column provided vertically on the saddle (Z-axis direction), a grindstone shaft provided in front of the column, a rotating grindstone supported by the grindstone shaft, and a grindstone Axis lifting mechanism, grinding wheel axis rotation mechanism, X axis linear scale provided in the left and right direction of the X axis table, Y axis linear scale provided in the front and rear direction of the saddle, Z provided in the vertical direction of the column CNC grinding apparatus comprising a computer comprising an axis linear scale, an operation panel, a program software storage unit, a data recording unit and a control unit,
Further, a support shaft provided on the column of the CNC grinding apparatus so as to be movable in the front-rear direction (y-axis direction) and the vertical direction is provided in parallel to the Z-axis, and the optical axis (z-axis) of the objective lens is parallel to the support shaft. An optical microscope mounted so that at least two objective lenses having the same magnification are provided in a confocal revolver of the optical microscope, and one objective lens receives reflected light from the xy plane of the subject. The other objective lens is provided with a prism in the vicinity of the light receiving portion opposite to the objective lens mounting side so that the reflected light from the yz plane of the subject is refracted and received by the optical axis. The CCD camera is coupled to the imaging lens side of this optical microscope, the light irradiated to the work from the light source is reflected and enters the CCD camera objective lens, and the objective lens is perpendicular to the X-axis table. Of the CCD camera through the optical axis (z-axis) Non-contact three-dimensional measuring apparatus for projecting a television display the imaged image on the optical means as a photographed image,
The CNC precision grinding apparatus which has this.
[0016]
Since the non-contact three-dimensional measuring apparatus is installed in-situ in the CNC precision grinding apparatus, the finish of the work workpiece can be diagnosed on the CNC precision grinding apparatus. Since the xyz position coordinates or XYZ position coordinates can be displayed on the television display, the desired machining dimension programmed and the machining dimension of the actual machined workpiece are compared, and the position coordinates that are insufficiently machined and the dimensions to be supplemented. Can be displayed on the television display, and if the reprocessing program is selected from the operation panel while viewing the data in the column, the processing conditions are re-input, and the workpiece is processed again. A machining work is obtained. .
[0017]
DETAILED DESCRIPTION OF THE INVENTION
【Example】
Hereinafter, the present invention will be described in more detail with reference to the drawings.
1 is a side view of a CNC precision grinding apparatus, FIG. 2 is a plan view of the CNC precision grinding apparatus, FIG. 3 is a simplified front view of the CNC precision grinding apparatus, FIG. 4 is a system diagram of the CNC precision grinding apparatus, and FIG. And FIG. 6 is a side view of the optical microscope combined with a CCD camera.
[0018]
In the CNC precision grinding apparatus 1 shown in FIGS. 1, 2 and 3, 2 is a work (subject), 3 is a grinding wheel, 4 is an X-axis tape which can be reciprocated in the horizontal direction (X-axis direction). 5 is a work table, 6 is an electromagnetic chuck, 7 is a saddle that can be moved in the front-rear direction (Y-axis direction) by driving a servo motor 7a, 8 is a control unit, 9 is a column, 10 is a grinding wheel head, 11 is a grinding wheel shaft, 12 is a lifting mechanism that moves the wheel head in the vertical direction (Z-axis direction) by driving a servo motor 13, 14 is a servo motor that rotationally drives the grinding wheel, and 17 is safety protection. Cover, 25 is an X-axis linear scale, 26 is a Y-axis linear scale, 28 is a Z-axis linear scale, 30 is a non-contact three-dimensional measuring device, 31 is a personal computer, 32 is a television display , 33 keyboard, 34 mouse, 35 light source, 36 CC Camera 37, support shaft 38, guide 38, 38 a rail, 39 slider, 40 y-axis linear scale, 41 support shaft lifting mechanism, 42 z-axis linear scale, 50 optical microscope is there.
[0019]
The X-axis table 4 is positioned by a V-shaped track portion provided on the saddle 7 that slides on a pair of guide surfaces provided on the bed 19, and the X-axis table 4 has its engaging portion. (Slider) is slidably supported on the guide rail. The X-axis table 4 can be reciprocated in the left-right direction by a drive mechanism comprising a servo motor, a ball screw and a screw (not shown). The X-axis table 4 can be said to be an XY stage.
[0020]
The workpiece 2 is fixed on the electromagnetic chuck 6 on the X-axis table 4 of the CNC forming grinding device 1 in which the vertical (Z-axis direction) feed and the front-rear (Y-axis direction) feed of the grindstone axis are numerically controlled. While the grinding wheel 3 provided on the grinding wheel shaft is rotated by a motor 14, the cutting speed is 5 to 100 mm / min in the direction perpendicular to the work surface, and the reversal of the X axis table is 50 to 400 strokes. The workpiece 2 is formed (for example, groove grinding) by reversing at a reversal speed of 10 m / min and a stroke width of 10 to 75 mm.
[0021]
The support shaft 37 of the non-contact three-dimensional measuring apparatus 30 is fixed in the vertical direction (z-axis direction) of the mounting plate 43 of the support shaft lifting mechanism 41, and the mounting plate 43 is formed by a pair of guides 38 provided on the side wall of the column 9. The slider 39 is mounted on a rail 38a that is movable in the left-right direction (x-axis direction) parallel to the X-axis direction. The slider 39 extends on the pair of rails 38a extending in parallel in the left-right direction. It can move in the front-rear direction (y-axis direction) under the rotation of a ball screw that is driven by a servo motor (not shown).
[0022]
As shown in FIGS. 5 and 6, the optical microscope 50 has an inward alignment / alignment in the lower part of the illumination barrel part 52 connected to the lower part of the barrel body 51 containing the imaging lens not shown in the figure. An in-focus manual revolver 53 is attached, and the same optical axis is obtained by rotating the aligning / in-focus revolver 53 with two objective lenses 54a, 54b having the same magnification on the lower surface of the in-focus / in-focus manual revolver 53. (Z axis) is provided so that it can be shared.
[0023]
The optical axis (z-axis) is perpendicular to the XY plane of the X-axis table 4 which is an XY stage. One of the objective lenses 54a receives light (for example, halogen light, laser light) emitted from the light source 35 and receives reflected light from the XY plane of a work (subject) on the optical axis. In the other objective lens 54b, a prism 56 is arranged with a prism fixture 57 in the vicinity of the light receiving portion opposite to the objective lens mounting side (mount side) 54c, and the reflected light from the YZ plane of the subject 2 is refracted. And received by the optical axis (z-axis). A CCD camera 36 is coupled to the imaging lens side of the optical microscope via an adapter 58, and the reflected light incident on the optical axis is imaged (intermediate image) on the CCD camera. The data is transmitted to the storage unit (RAM) of the computer 31 via the A / D converter, the transmission signal is processed by the image processing unit, and the captured image is displayed on the television display 31a. The illumination barrel portion 52 is provided with an optical fiber fixture 55 to which a fiber illumination device is connected.
The light source 35 may be provided with two light source generators, but may be movable by attaching the light source generator to a movable magnet stand.
[0024]
The non-contact three-dimensional measuring apparatus 30 includes a personal computer 31, a television display 32, a keyboard 33, a mouse 34, a light source 35, a CCD camera 36, a support shaft 37, a guide rail 38, the above-described personal computer 31. Slider 39, x-axis linear scale (also used as X-axis linear scale), y-axis linear scale 40, support shaft lifting mechanism 41, z-axis linear scale 42, X-axis stage as XY stage -It consists of Bull 4 and the optical microscope 50.
[0025]
The X axis, Y axis, and Z axis are orthogonal triaxial systems, and the x axis, y axis, and z axes are also orthogonal triaxial systems. The X axis and x axis, the Y axis and y axis, and the Z axis and z axis are parallel.
As is well known, if the xyz coordinate of the CNC grinding apparatus is set to a position where the reference point (X 0 , Y 0 , Z 0 ) = (0, 0 , 0 ) with respect to the X-axis table 4, X-axis linear scale 25 provided in the left-right direction of the X-axis table, Y-axis linear scale 26 provided in the front-rear direction of the saddle, Z-axis linear scale 28 provided in the vertical direction of the column, and position The XYZ position coordinates (X i , Y i , Z i ) can be read by the encoder (or actuator) of each servo motor as a sensor.
[0026]
The position coordinates in the non-contact three-dimensional apparatus are the y-axis linear scale 40, the z-axis linear scale 42, the X-axis linear scale 60 provided in the left-right direction of the X-axis table, and each sensor which is a position sensor. The xy coordinates (x i , y i ) and the yz coordinates (y i , z i ) are read by the encoder (or actuator) of the motor and the CCD camera 36, and the x i coordinates at the same y coordinate y i and The z i coordinates are calculated and synthesized by the xyz position coordinate calculation unit (image processing controller) of the computer 31 to obtain the three-dimensional position coordinates (x i , y i , z i ).
[0027]
The X-axis and x-axis, the Y-axis and y-axis, and the Z-axis and z-axis are parallel, and the X-axis table 4 that is the XY stage is the XY stage of the CNC precision forming and grinding apparatus 1. And the xy stage of the non-contact three-dimensional measuring apparatus 30 are also used, so if the coordinates (x i , y i , z i ) are moved in parallel and calculated, the reference point of the CNC precision grinding apparatus 1 is calculated. The position coordinates (X i , Y i , Z i ) can be calculated by the XYZ position coordinate calculation unit of the control unit 8 (see the system diagram in FIG. 4).
[0028]
An image processing program is stored in the storage unit ROM of the computer 31, and an image is displayed on the television display 32 according to the image processing program, and position coordinates, dimensions of the work workpiece, groove depth, etc. are displayed. it can.
Therefore, a column in which the desired programmed machining dimension and the machining dimension of the machining workpiece displayed on the television display are compared is displayed on the television display 32, and the insufficient portion and the amount of machining are displayed on the control unit 24. It is also possible to perform correction processing by inputting on the operation panel 8 and to make the work surface finish nano-accurate.
[0029]
【The invention's effect】
The three-dimensional measuring apparatus of the present invention uses a prism to expand the xy stage and yz stage of a work (subject) even if there is only one CCD camera and one optical microscope. The image can be displayed on the television display 32 and the work can be diagnosed. Further, xyz coordinates can be calculated and synthesized from xy coordinates and yz coordinates, and the dimensions of the workpiece can be calculated and displayed. A three-dimensional image can be synthesized from the output signals of two two-dimensional images.
[Brief description of the drawings]
FIG. 1 is a side view of a CNC precision grinding apparatus.
FIG. 2 is a plan view of a CNC precision grinding apparatus.
FIG. 3 is a simplified front view of a CNC precision grinding apparatus.
FIG. 4 is a system diagram of a CNC precision grinding apparatus.
FIG. 5 is a front view of an optical microscope coupled with a CCD camera.
FIG. 6 is a side view of an optical microscope coupled with a CCD camera.
FIG. 7 is a perspective view of an NC grinding apparatus. (Known)
[Explanation of symbols]
1 CNC precision molding and grinding machine 2 Workpiece (subject)
3 Grinding wheel 4 X-axis table 7 Saddle 8 Control unit 9 Column 30 Non-contact 3D measuring device 31 Computer 36 CCD camera 50 Optical microscope 54 Objective lens 56 Prism

Claims (3)

左右方向（ｘ軸方向）に移動可能な被検体を載置するＸ軸テ−ブル、
前後方向（ｙ軸方向）に移動可能なサドル上に前記Ｘ軸テ−ブルに対し垂直の方向に設けたコラム、
該コラムに昇降可能に設けた支持軸
該支持軸に対物レンズの光軸（ｚ軸）が平行となるように取り付けた光学顕微鏡であって、該光学顕微鏡の同焦レボルバには少なくとも２個の同倍率の対物レンズを設け、一方の対物レンズは被検体のｘ−ｙ平面からの反射光を前記光軸に受け、他方の対物レンズには対物レンズ取付側とは反対側の受光部近傍にプリズムを配置して被検体のｙ−ｚ平面からの反射光を屈折させて前記光軸に受けるようにし、この光学顕微鏡の結像レンズ側にＣＣＤカメラを結合させた光学顕微鏡、
光源より被検体に照射された光が反射して光学顕微鏡の対物レンズに入光し、ｘ軸テ−ブルに垂直な光軸（ｚ軸）経てＣＣＤカメラに結像し、この結像を撮影画像としてテレビジョン表示器に映し出す画像処理部およびｘｙｚ位置座標演算部、
ｘ軸−、ｙ軸−、ｚ軸−リニアスケ−ル
および、
操作盤、プログラムソフト記憶部、デ−タ記録部および制御部を備えるコンピュ−タ、
を備える非接触３次元測定装置。An X-axis table for placing an object movable in the left-right direction (x-axis direction);
A column provided on a saddle movable in the front-rear direction (y-axis direction) in a direction perpendicular to the X-axis table;
A support shaft provided on the column so as to be movable up and down. An optical microscope attached to the support shaft so that the optical axis (z-axis) of the objective lens is parallel to the column. An objective lens having the same magnification is provided, one objective lens receives reflected light from the xy plane of the subject on the optical axis, and the other objective lens is near the light receiving portion on the side opposite to the objective lens mounting side. An optical microscope in which a prism is arranged to refract the reflected light from the yz plane of the subject so as to be received by the optical axis, and a CCD camera is coupled to the imaging lens side of the optical microscope;
The light irradiated to the subject from the light source is reflected and enters the objective lens of the optical microscope, and forms an image on the CCD camera through the optical axis (z-axis) perpendicular to the x-axis table. An image processing unit and an xyz position coordinate calculation unit which are displayed as an image on a television display;
x-axis, y-axis, z-axis, linear scale, and
A computer having an operation panel, a program software storage unit, a data recording unit and a control unit;
A non-contact three-dimensional measuring apparatus comprising: 被検体のｘ−ｙ平面からの反射光が前記光学顕微鏡の対物レンズの光軸に直接入射してＣＣＤカメラの受光手段より出力されるｘｙ座標出力信号と、被検体のｙ−ｚ平面からの反射光がプリズムを介して屈折されて前記光学顕微鏡の対物レンズの光軸に入射してＣＣＤカメラの受光手段より出力されるｙｚ座標出力信号とからｘｙｚ位置座標演算部が合成・演算したｘｙｚ位置座標がテレビジョン表示器に表示可能であることを特徴とする、請求項１に記載の非接触３次元測定装置。The reflected light from the xy plane of the subject directly enters the optical axis of the objective lens of the optical microscope and is output from the light receiving means of the CCD camera, and from the yz plane of the subject. The xyz position, which is synthesized and computed by the xyz position coordinate computation unit, from the yz coordinate output signal which is refracted through the prism and incident on the optical axis of the objective lens of the optical microscope and output from the light receiving means of the CCD camera. The non-contact three-dimensional measuring apparatus according to claim 1, wherein the coordinates can be displayed on a television display. 左右方向（Ｘ軸方向）にサ−ボドライブ移動可能なＸ軸テ−ブル、該Ｘ軸テ−ブル上に設けられたワ−クを載置するチャック、前後方向（Ｙ軸方向）にサ−ボドライブ移動可能なサドル、該サドル上に垂直方向（Ｚ軸方向）に設けたコラム、該コラムの前面に設けた砥石軸、該砥石軸に軸承された回転砥石、砥石軸昇降機構、砥石軸回転機構、Ｘ軸テ−ブルの左右方向に備えられたＸ軸リニアスケ−ル、サドルの前後方向に備えられたＹ軸リニアスケ−ル、コラムの垂直方向に設けられたＺ軸リニアスケ−ル、操作盤、プログラムソフト記憶部、デ−タ記録部および制御部を備えるコンピュ−タを備えるＣＮＣ研削装置、
および
前記ＣＮＣ研削装置のコラムに前後方向（ｙ軸方向）および上下方向に移動可能に設けた支持軸をＺ軸に平行に設け、この支持軸に対物レンズの光軸（ｚ軸）が平行となるように取り付けた光学顕微鏡であって、該光学顕微鏡の同焦レボルバには少なくとも２個の同倍率の対物レンズを設け、一方の対物レンズは被検体のｘ−ｙ平面からの反射光を前記光軸に受け、他方の対物レンズには対物レンズ取付側とは反対側の受光部近傍にプリズムを配置して被検体のｙ−ｚ平面からの反射光を屈折させて前記光軸に受けるようにし、この光学顕微鏡の結像レンズ側にＣＣＤカメラを結合させ、光源よりワ−クに照射された光が反射してＣＣＤカメラ対物レンズに入光し、Ｘ軸テ−ブルに垂直な対物レンズの光軸（ｚ軸）経てＣＣＤカメラの受光手段に結像しこの結像を撮影画像としてテレビジョン表示器に映し出す非接触３次元測定装置、
を有するＣＮＣ精密研削装置。X-axis table movable in servo drive in the left-right direction (X-axis direction), chuck for placing a work provided on the X-axis table, and in the front-rear direction (Y-axis direction) Boddle movable saddle, column provided vertically on the saddle (Z-axis direction), grinding wheel shaft provided on the front surface of the column, rotary grinding wheel supported by the grinding wheel shaft, grinding wheel shaft lifting mechanism, grinding wheel shaft rotation Mechanism, X-axis linear scale provided in the left-right direction of the X-axis table, Y-axis linear scale provided in the front-rear direction of the saddle, Z-axis linear scale provided in the vertical direction of the column, operation panel A CNC grinding apparatus comprising a computer comprising a program software storage unit, a data recording unit and a control unit,
Further, a support shaft provided on the column of the CNC grinding apparatus so as to be movable in the front-rear direction (y-axis direction) and the vertical direction is provided in parallel to the Z-axis, and the optical axis (z-axis) of the objective lens is parallel to the support shaft. An optical microscope mounted so that at least two objective lenses having the same magnification are provided in a confocal revolver of the optical microscope, and one objective lens receives reflected light from the xy plane of the subject. The other objective lens is provided with a prism in the vicinity of the light receiving portion opposite to the objective lens mounting side so that the reflected light from the yz plane of the subject is refracted and received by the optical axis. The CCD camera is coupled to the imaging lens side of this optical microscope, the light irradiated to the work from the light source is reflected and enters the CCD camera objective lens, and the objective lens is perpendicular to the X-axis table. Of the CCD camera through the optical axis (z-axis) Non-contact three-dimensional measuring apparatus for projecting a television display the imaged image on the optical means as a photographed image,
CNC precision grinding equipment.
JP2003193978A 2003-07-09 2003-07-09 Three-dimensional noncontact measuring apparatus and cnc precision grinding apparatus using the same Pending JP2005030813A (en)

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