CN105157574B - A kind of laser tracker length measurement precision scaling method and device - Google Patents
A kind of laser tracker length measurement precision scaling method and device Download PDFInfo
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- CN105157574B CN105157574B CN201510216991.1A CN201510216991A CN105157574B CN 105157574 B CN105157574 B CN 105157574B CN 201510216991 A CN201510216991 A CN 201510216991A CN 105157574 B CN105157574 B CN 105157574B
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Abstract
A kind of laser tracker length measurement precision scaling method and device, belong to optical instrument measurement and demarcation calibration field, in order to solve prior art, to there is the high-precision guide rail stated accuracy of overlength low, high processing costs, survey long scope small, the problem of space-consuming is big, the interference length of the caliberating device using two-frequency laser interferometer is used as length standard, the platform and adjustable base thereon for being separated by a constant pitch in the range of ranging constitute high-precision dummy guideway, two-way measuring beam spacing is adjusted using right-angled edge microscope group, utilize pentaprism group turnover light path, realize the length measurement precision demarcation for the laser tracker that overlength ranging is carried out in limited space；The scaling method is leveling laser interferometer light beam；Adjust flatness and linearity of the dummy guideway to needed for demarcating；The outgoing beam of regulation laser tracker is allowed to parallel with the light beam of laser interferometer；Constitute optical path；Stationary mirror, regulation two-way measuring beam makes parallel to eliminate Abbe error；Measurement；Data processing.
Description
Technical field
The present invention relates to the length measurement precision scaling method and device of a kind of laser tracker, belong to optical instrument measurement and mark
Surely field is calibrated.
Background technology
Laser tracker is new large scale 3 d space coordinate measuring instrument developed in recent years in the world, can be right
Spatial point carry out real-time follow-up, with precision height, efficiency high, it is portable, simple to operate the features such as, be current large scale space
The Main Means of three-dimensional coordinate accurate measurement.
The basic functional principle of laser tracker：The measuring beam that laser is launched, is divided into two by interference spectroscope
Beam, a branch of to be transmitted directly on interferometer, another beam passes through tracking mirror homed on its target speculum.Reflected by target mirror
Light ray parallel in elementary beam return, reach spectroscope rear portion laser beam be launched on facula position sensor, it is another
Segment beam is directly entered two-frequency laser interferometer through interference spectroscope and carries out displacement interferometer measurement.When target mirror movement
When, follower head adjusts beam direction alignment reflector in real time, carries out space distance measurement.
At present, the survey length demarcation to laser tracker is main using the high-precision guide rail of overlength and two-frequency laser interferometer progress
Full ranging demarcation.
When carrying out full ranging using the high-precision guide rail of overlength and surveying long demarcation, by the target mirror of two-frequency laser interferometer and
The reflecting target mirror of laser tracker is fixed together, and is moved along high-precision guide rail linear, and interferometer and tracker measure reading simultaneously
Number, using the interference length-measuring of two-frequency laser interferometer as standard value, the long result of survey with laser tracker is contrasted, so as to mark
Determine the long error of survey of laser tracker.But there is certain defect in it：
Because the long scope of the survey of current laser tracker can accomplish 50m~100m, using the high-precision guide rail of overlength
The high-precision guide rail up to more than 50m is needed during measurement, its difficulty of processing is too big, cost is high, be difficult to realize.
There is error accumulation when the high-precision guide rail of above-mentioned overlength is due to processing and adjust trouble when splicing and installing, be difficult to reach
To the required precision of demarcation, therefore also will not be too high to the stated accuracy of laser tracker.
The target mirror of mobile two-frequency laser interferometer and the reflecting target mirror of laser tracker are carried out without light path of transferring
Surveying long demarcation needs to take sizable space.
The content of the invention
There are the low high-precision guide rail stated accuracy of overlength, high processing costs to solve prior art, survey long model in the present invention
Enclosing the problem of small, space-consuming is big, there is provided the length measurement precision scaling method and device of a kind of laser tracker.
A kind of laser tracker length measurement precision caliberating device, be characterized in：
Laser tracker 8, two-frequency laser interferometer 1, the and of interference microscope group fixture 4 are set gradually on optical table from left to right
Right-angled edge microscope group fixture 11, it is anti-that interference microscope group fixture 4 is sequentially placed interference microscope group 3, two-frequency laser interferometer target from lower to upper
Mirror 13, laser tracker reflecting target microscope group 14 are penetrated, wherein the interference spectroscope 3-1 that interference microscope group 3 is connected by vertical paper direction
With interference reflector 3-2 compositions, place right-angled edge microscope group 12 on right-angled edge microscope group fixture 11, right-angled edge microscope group 12 from lower to upper according to
Secondary is the second right-angle prism 12-2, the first right-angle prism 12-1, the 3rd right-angle prism 12-3, the 4th right-angle prism 12-4；
Dummy guideway 5 is placed on the right side of optical table 2, and pentaprism group 9 is fixed on pentaprism group fixture 10, pentaprism group folder
Tool 10 is placed on dummy guideway 5, and pentaprism group 9 is followed successively by the first pentaprism 9-1 and the second pentaprism 9-2 from lower to upper；
The outgoing beam of two-frequency laser interferometer 1 is divided into two beams, the first beam after interfering the interference spectroscope 3-1 in microscope group 3
The horizontal exit after interference spectroscope 3-1, and the horizontal exit after the first pentaprism 9-1 and the second pentaprism 9-2 reflections successively,
And the auxiliary of alignment two-frequency laser interferometer after the center of two-frequency laser interferometer target mirror 13, backtracking is directed to quasi-optical
Late center, the second beam is directed at two-frequency laser interferometer after entering interference reflector 3-2, backtracking after interference spectroscope 3-1
Auxiliary alignment diaphragm center；
The outgoing beam of laser tracker 8 sequentially passes through the first right-angle prism 12-1 and the second right-angle prism 12-2 reflections and water
Clear and penetrate, horizontal exit after then being reflected successively through pentaprism 9-1 and pentaprism 9-2, then sequentially pass through the 3rd right-angle prism 12-
3 and the 4th horizontal exit after right-angle prism 12-4, and the laser tracker reflection being aligned in laser tracker reflecting target microscope group 14
Target mirror 14-1 centers, interference system and tracking system after reflection inside backtracking to laser tracker 8.
The device also includes Position-Sensitive Detector group 6 and Position-Sensitive Detector group fixture 7, Position-Sensitive Detector group
6 are made up of first position sensing detector 6-1 and second place sensing detector 6-2, and are sequentially fixed at position from lower to upper
On sensing detector group fixture 7；For leveling dummy guideway 5, the light beam of laser tracker 8 and regulation optical path and reference path
The depth of parallelism.
The dummy guideway 5 is by a moveable platform P(N+1)With N number of fixed platform P for being separated by a constant pitchi(i=1
~N) composition, P1On the left side, PNOn the right, the pitch size is determined by the tested points of collection；Fixed platform Pi(i=1~N)
With moveable platform P(N+1)It is upper that there is adjustable base, moveable platform P respectively(N+1)It is quick for shifting pentagonal prism group or position
Feel detector group, the linearity of dummy guideway 5 is adjusted using adjustable base.
Laser tracker length measurement precision scaling method, it comprises the following steps：
The first step, leveling dummy guideway；
Two-frequency laser interferometer 1 and interference microscope group fixture 4 are placed on optical table 2, the emergent light of two-frequency laser interferometer 1
Beam alignment interference spectroscope 3-1 centers, interference spectroscope 3-1 and interference reflector 3-2 are connected and placed perpendicular to paper direction
On interference microscope group fixture 4；
The outgoing beam of two-frequency laser interferometer 1 is divided into two beams after interfering the interference spectroscope 3-1 in microscope group 3, through interference
Light beam after spectroscope 3-1 reflects into interference reflector 3-2, regulation two-frequency laser interferometer 1 and interference microscope group fixture
4, make the auxiliary alignment diaphragm center that two-frequency laser interferometer 1 is directed at after reflected light backtracking, after interference spectroscope 3-1
Second beam light level outgoing；
First position sensing detector 6-1 is fixed on Position-Sensitive Detector group fixture 7, Position-Sensitive Detector group folder
Tool 7 is placed on fixed platform PNOn adjustable base on, regulation adjustable base and Position-Sensitive Detector group fixture 7 makes through dry
The second beam optical registration first position sensing detector 6-1 center-zeros after spectroscope 3-1 are related to, the adjustable base is fixed；It is mobile
Position-Sensitive Detector fixture 7 and first position sensing detector 6-1 to fixed platform PiIt is (i=1~(N-1)) and removable flat
Platform P(N+1)On adjustable base on, adjust adjustable base, make the second beam optical registration first position after interference spectroscope 3-1 quick
Feel detector 6-1 center-zeros, fixedly adjustable base, now it is believed that dummy guideway leveling；
Second step, regulation laser tracker light beam is parallel with laser interferometer light beam；
Laser tracker 8 is placed on optical table 2, positioned at the left side of two-frequency laser interferometer 1, light beam outgoing to the right,
Light beam points to the spatial point that spherical coordinates is (5000mm, 180 °, 90 °), closes servo；Position-Sensitive Detector fixture 7 is fixed
In fixed platform PNOn adjustable base on, while by second place sensing detector 6-2 be fixed on Position-Sensitive Detector folder
Tool 7 on, and positioned at first position sensing detector 6-1 top, make second place sensing detector 6-2 centers be aligned laser with
The outgoing beam of track instrument 8；Regulation laser tracker 8 and Position-Sensitive Detector fixture 7 make laser tracker beam alignment second
Put sensing detector 6-2 center-zeros；Shift position sensing detector fixture 7 is to fixed platform P1Adjustable base on, if swash
The light beam of optical tracker system 8 is not in second place sensing detector 6-2 center-zeros, then adjusting laser tracker 8 makes laser tracker 8
Beam alignment second place sensing detector 6-2 center-zeros, re-move Position-Sensitive Detector fixture 7 to fixed platform PN
On adjustable base on, if the light beam of laser tracker 8 is adjusted again not in second place sensing detector 6-2 center-zeros
Laser tracker makes the beam alignment second place sensing detector 6-2 center-zeros of laser tracker 8, so repeatedly until meeting
It is required that, now it is believed that the light beam of laser tracker 8 is parallel with the light beam of two-frequency laser interferometer 1；
3rd step, regulation optical path is parallel with reference path；
Adjust the first right-angle prism 12-1 and the second right-angle prism 12-2 light beam of reduced height laser tracker 8 and double frequency
The spacing of the light beam of laser interferometer 1 allows two light beams simultaneously by the first pentaprism 9-1 and the second pentaprism 9-2；One or five
Prism 9-1 and the second pentaprism 9-2 are fixed on pentaprism group fixture 10 and are directed at the light beam of two-frequency laser interferometer 1 from bottom to top
With the light beam of laser tracker 8, pentaprism group fixture 10 is fixed on fixed platform PNOn adjustable base on；Adjust pentaprism group folder
Tool 10 makes two light beams exit height after the second pentaprism 9-2 be higher than laser tracker 8；Adjust the 3rd right-angle prism 12-3,
The spacing of four right-angle prism 12-4 height, the light beam of expansion of laser light tracker 8 and the light beam of two-frequency laser interferometer 1, makes two light beams
It is respectively aligned to first position sensing detector 6-1 and second place sensing detector 6-2 centers；Adjust right-angled edge microscope group fixture 11
Make two light beams in first position sensing detector 6-1 and second place sensing detector 6-2 centers zero with pentaprism group fixture 10
Position；Mobile pentaprism group fixture 10 to fixed platform P1On adjustable base on, if the light beam of laser tracker 8 and double-frequency laser are dry
The light beam of interferometer 1 in first position sensing detector 6-1 or second place sensing detector 6-2 center-zeros, is not then readjusted
Center-zero is located at, pentaprism group fixture 10 is re-moved to fixed platform PNOn adjustable base on, if laser track
The light beam of instrument 8 and the light beam of two-frequency laser interferometer 1 be not in first position sensing detector 6-1 or second place sensing detector 6-2
Center-zero, then readjust and be located at center-zero, is so required repeatedly until meeting, is now considered as optical path and ginseng
Examine that light path is parallel, eliminate the influence of Abbe error；
4th step, regulation two-frequency laser interferometer target mirror 13 and laser tracker reflecting target mirror 14-1 positions make it
Center is respectively aligned to respective light beam formation measuring loop；
Pentaprism group fixture 10 is installed to fixed platform PNOn adjustable base on, remove the He of Position-Sensitive Detector group 6
Position-Sensitive Detector group fixture 7, by two-frequency laser interferometer target mirror 13 and laser tracker reflecting target microscope group 14 from
It is fixed on down on interference microscope group fixture 4, wherein, laser tracker reflecting target microscope group 14 includes laser tracker reflecting target mirror
14-1 and laser tracker reflecting target mirror base 14-2, regulation interference microscope group fixture 4 makes two-frequency laser interferometer target mirror
13 centers and laser tracker reflecting target mirror 14-1 centers are respectively aligned to the light beam of two-frequency laser interferometer 1 and the light of laser tracker 8
Beam, and make the full lattice of the signal of two-frequency laser interferometer 1；Mobile pentaprism group fixture 10 to fixed platform P1On adjustable base on,
If the light beam of laser tracker 8 and the light beam of two-frequency laser interferometer 1 be not in laser tracker reflecting target mirror 14-1 and laser interferometer
The center of target mirror 13, then readjusting makes the center of laser interferometer target mirror 13 and laser tracker reflecting target mirror
14-1 centers are respectively aligned to the light beam of two-frequency laser interferometer 1 and the light beam of laser tracker 8, and the signal of two-frequency laser interferometer 1 is full
Lattice；Pentaprism group fixture 10 is moved again to fixed platform PNOn adjustable base on, if the light beam of laser tracker 8 and double frequency swash
The light beam of optical interferometer 1 at laser tracker reflecting target mirror 14-1, the center of laser interferometer target mirror 13, is not then readjusted
The center of two-frequency laser interferometer target mirror 13 and laser tracker reflecting target mirror 14-1 centers is set to be respectively aligned to double-frequency laser
The light beam of interferometer 1 and the light beam of laser tracker 8, and the full lattice of the signal of two-frequency laser interferometer 1；So required repeatedly until meeting,
Measurement can now be started；
5th step, measurement；
Pentaprism group fixture 10 is placed on fixed platform P1On adjustable base on, by moveable platform P(N+1)Close to solid
Fixed platform P1, the servo of laser tracker 8 is opened, by laser tracker reflecting target mirror 14-1 " return to nest ", then laser tracker is anti-
The mirror 14-1 that shoots at the target is moved at the first right-angle prism 12-1, and break rapidly light, and now to sequentially pass through second straight for the light beam of laser tracker 8
Angle prism 12-2, the first pentaprism 9-1, the second pentaprism 9-2, the 3rd right-angle prism 12-3 and the 4th right-angle prism 12-4 go out
Penetrate, then laser tracker reflecting target mirror 14-1 is moved at the 4th right-angle prism 12-4 continuous light, put to reflecting target mirror base 14-
On 2, ambient compensation parameter is set in software；The Survey Software of two-frequency laser interferometer 1 is reopened, sets environment to mend automatically
Repay, provide tested point；Start to measure starting point, the survey measurements of two-frequency laser interferometer 1 is L1, the measurement of laser tracker 8
Registration is (d1, α1, β1), mobile pentaprism group fixture 10 to moveable platform P after being measured(N+1)On, it is slow mobile removable
Platform P(N+1)To fixed platform P2, by adjusting moveable platform P during being somebody's turn to do(N+1)On adjustable base make double-frequency laser interference
The signal of instrument 1 need to keep full lattice as far as possible, and pentaprism group fixture 10 is moved into fixed platform P2On adjustable base on, measurement second
Point, the survey measurements of two-frequency laser interferometer 1 is L2, the measurement registration of laser tracker 8 is (d2, α2, β2)；After the completion of survey i-th
(i=3~N) point, the survey measurements of two-frequency laser interferometer 1 is Li, the measurement registration of laser tracker 8 is (di, αi, βi), weight
Multiple aforesaid operations, until measurement N points terminate；
6th step, data processing；
The ranging registration of two-frequency laser interferometer 1 is LG=Ll0+LBi+LFi, (i=0~N), wherein Ll0For pentaprism group 9
In initial position fixed platform P1Locate the reading of two-frequency laser interferometer 1, LFiI pitch is moved for the first pentaprism 9-1 to produce
Light path, LBiThe light path that i pitch is produced is moved for the second pentaprism 9-2, as i=0, LBi=LFi=0；Laser tracker
8 ranging registration is dT=dT0+dBi+dFi, wherein dT0It is pentaprism group 9 in initial position fixed platform P1Locate laser tracker 8
Reading, dFiThe light path that i pitch is produced, dB are moved for the first pentaprism 9-1iI pitch production is moved for the second pentaprism 9-2
Raw light path, as i=0, dBi=dFi=0；Mobile 1 pitch, dT1=dT0+dB1+dF1, LG1=Ll0+LB1+LF1, then laser
The survey length change of tracker 8 and two-frequency laser interferometer 1 is respectively Δ dT1=dB1+dF1, Δ LG1=LB1+LF1, mobile 2 sections
Away from dT2=dT0+dB2+dF2, LG2=Ll0+LB2+LF2, then the survey length of laser tracker 8 and two-frequency laser interferometer 1, which changes, distinguishes
For Δ dT2=dB2+dF2, Δ LG1=LB2+LF2, by that analogy, i-th (i=(1~N-1)) individual pitch, laser tracker 8 and double
The survey length change of frequency laser interferometer 1 is respectively Δ dTi=dBi+dFi, Δ LGi=LBi+LFi；Compare laser tracker 8 and double frequency
The survey length that laser interferometer 1 is moved with pentaprism group 9 changes, its difference DELTA dLi=Δ dTi-ΔLGiAs laser tracker 8 exists
The pitch i long error of survey；Count and analysis result, provide survey long error of the laser tracker 8 in full ranging.
The beneficial effects of the invention are as follows：Using the interference length of two-frequency laser interferometer as length standard, pentaprism is utilized
Turnover light path, reduces device space-consuming, while adding the long calibration range of survey, is separated by using a series of in the range of ranging
The fixed platform with adjustable base and Position-Sensitive Detector of one constant pitch realize dummy guideway, are replaced often with dummy guideway
Advise super-long guiding rail, it is to avoid the accumulated error that super-long guiding rail is formed when processing and splicing and install, improve stated accuracy, simultaneously
Reduce processing cost and splicing adjustment difficulty so that the length measurement precision demarcation of laser tracker is easy to be realized, also causes the device
Easily popularization.
Brief description of the drawings
Fig. 1：Laser tracker length measurement precision caliberating device structural representation of the present invention.
Fig. 2：Dummy guideway leveling schematic diagram of the present invention.
Fig. 3：Laser tracker light beam leveling schematic diagram of the present invention.
Fig. 4：Optical path of the present invention and reference path leveling schematic diagram.
Fig. 5：Laser tracker of the present invention demarcates instrumentation plan.
Embodiment
The present invention is further explained in more detail with specific embodiment below in conjunction with the accompanying drawings.
As shown in figure 1, being set gradually from left to right on a kind of laser tracker length measurement precision caliberating device, optical table 2
Laser tracker 8, two-frequency laser interferometer 1, interference microscope group fixture 4 and right-angled edge microscope group fixture 11.Interfere microscope group fixture 4 under
Interference microscope group 3, two-frequency laser interferometer target mirror 13 and laser tracker reflecting target microscope group 14 are up sequentially placed, wherein
The interference spectroscope 3-1 and interference reflector 3-2 that interference microscope group 3 is connected by vertical paper direction are constituted.Right-angled edge microscope group fixture
Right-angled edge microscope group 12 is placed on 11, right-angled edge microscope group 12 is followed successively by the second right-angle prism 12-2, the first right-angle prism from lower to upper
12-1, the 3rd right-angle prism 12-3 and the 4th right-angle prism 12-4.
Dummy guideway 5 is placed on the right side of optical table 2, and pentaprism group 9 is fixed on pentaprism group fixture 10, pentaprism group folder
Tool 10 is placed on dummy guideway 5.Pentaprism group 9 is followed successively by the first pentaprism 9-1 and the second pentaprism 9-2 from lower to upper.
The dummy guideway 5 is by a moveable platform P(N+1)With N number of fixed platform P for being separated by a constant pitchi(i=1~N) group
Into P1On the left side, PNOn the right, the pitch size is determined by the tested points of collection, such as intensity 0.5m or sparse type
1m.Fixed platform number N determines by the ranging of laser tracker 8, fixed platform Pi(i=1~N) and moveable platform P(N+1)On
There is adjustable base respectively.Wherein, moveable platform P(N+1)Positioned at fixed platform Pi(i=1~(N-1)) and fixed platform Pi(i
=2~N) between, equivalent to the sliding block of guide rail, moved between fixed platform, for shifting pentagonal prism group or position sensing
Detector group, the linearity of dummy guideway 5 is adjusted using adjustable base.
The outgoing beam of two-frequency laser interferometer 1 is divided into two beams, the first beam after interfering the interference spectroscope 3-1 in microscope group 3
The horizontal exit after interference spectroscope 3-1, and reflected successively through the first pentaprism 9-1 and the second pentaprism 9-2, then horizontal exit
And the auxiliary of alignment two-frequency laser interferometer after the center of two-frequency laser interferometer target mirror 13, backtracking is directed to quasi-optical
Late center, the second beam is directed at two-frequency laser interferometer after entering interference reflector 3-2, backtracking after interference spectroscope 3-1
Auxiliary alignment diaphragm center.
The outgoing beam of laser tracker 8 sequentially passes through the first right-angle prism 12-1 and the second right-angle prism 12-2 reflections and water
Clear and penetrate, then the horizontal exit after pentaprism 9-1 and pentaprism 9-2 reflections, then sequentially pass through the 3rd right-angle prism 12-3 successively
With horizontal exit after the 4th right-angle prism 12-4, and the laser tracker reflecting target being aligned in laser tracker reflecting target microscope group 14
Mirror 14-1 centers, interference system and tracking system after reflection inside backtracking to laser tracker 8.
The device also includes Position-Sensitive Detector group 6 and Position-Sensitive Detector group fixture 7, Position-Sensitive Detector group
6 are made up of first position sensing detector 6-1 and second place sensing detector 6-2, and are sequentially fixed at position from lower to upper
On sensing detector group fixture 7；For leveling dummy guideway 5, the light beam of laser tracker 8 and regulation optical path and reference path
The depth of parallelism.
A kind of laser tracker length measurement precision scaling method, is totally divided into six steps, wherein preceding four step is before caliberating device
Phase adjusts, and the function of device is different in each step, also different from accessory.Comprise the following steps that：
The first step, leveling dummy guideway：
As shown in Fig. 2 two-frequency laser interferometer 1 and interference microscope group fixture 4 are placed on optical table 2, double-frequency laser interference
The outgoing beam alignment interference spectroscope 3-1 centers of instrument 1, interference spectroscope 3-1 and interference reflector 3-2 are perpendicular to paper direction
Connect and be placed on interference microscope group fixture 4.
The outgoing beam of two-frequency laser interferometer 1 is divided into two beams after interfering the interference spectroscope 3-1 in microscope group 3, through interference
Light beam after spectroscope 3-1 reflects into interference reflector 3-2, regulation two-frequency laser interferometer 1 and interference microscope group fixture
4, make the auxiliary alignment diaphragm center that two-frequency laser interferometer 1 is directed at after reflected light backtracking, after interference spectroscope 3-1
Second beam light level outgoing.
First position sensing detector 6-1 is fixed on Position-Sensitive Detector group fixture 7, Position-Sensitive Detector group folder
Tool 7 is placed on fixed platform PNOn adjustable base on, regulation adjustable base and Position-Sensitive Detector group fixture 7 make through interference
(deviation is not more than 2 microns to the second beam optical registration first position sensing detector 6-1 center-zeros after spectroscope 3-1, and deviation is big
It is small to be determined by stated accuracy and practical operation difficulty), fix the adjustable base.Shift position sensing detector fixture 7 and first
Position-Sensitive Detector 6-1 to fixed platform Pi(i=1~(N-1)) and moveable platform P(N+1)On adjustable base on, regulation
Adjustable base, makes the second beam optical registration first position sensing detector 6-1 center-zero (deviations after interference spectroscope 3-1
No more than 2 microns, deviation size is determined by stated accuracy and practical operation difficulty), fixedly adjustable base, now it is believed that virtual
Guide rail leveling.
Second step, regulation laser tracker light beam is parallel with laser interferometer light beam：
As shown in figure 3, laser tracker 8 is placed on optical table 2, positioned at the left side of two-frequency laser interferometer 1, light beam
Outgoing to the right, it is (5000mm, 180 °, 90 °) spatial point that light beam, which points to spherical coordinates, closes servo.Position-Sensitive Detector is pressed from both sides
Tool 7 is fixed on fixed platform PNOn adjustable base on, while by second place sensing detector 6-2 be fixed on position sensing visit
Survey on device fixture 7 and positioned at first position sensing detector 6-1 top, be directed at second place sensing detector 6-2 centers
The outgoing beam of laser tracker 8.Regulation laser tracker 8 and Position-Sensitive Detector fixture 7 make laser tracker beam alignment
(deviation is not more than 2 microns to second place sensing detector 6-2 center-zeros, and deviation size is difficult by stated accuracy and practical operation
Degree is determined).Shift position sensing detector fixture 7 is to fixed platform P1Adjustable base on, if the light beam of laser tracker 8 does not exist
Second place sensing detector 6-2 center-zeros, then adjusting laser tracker 8 makes the beam alignment second place of laser tracker 8
Sensing detector 6-2 center-zeros (deviation is not more than 2 microns, and deviation size is determined by stated accuracy and practical operation difficulty),
Position-Sensitive Detector fixture 7 is re-moved to fixed platform PNOn adjustable base on, if the light beam of laser tracker 8 is not
Two Position-Sensitive Detector 6-2 center-zeros, then regulation laser tracker makes the beam alignment second place of laser tracker 8 again
Sensing detector 6-2 center-zeros (deviation is not more than 2 microns, and deviation size is determined by stated accuracy and practical operation difficulty),
So required repeatedly until meeting, now it is believed that the light beam of laser tracker 8 is parallel with the light beam of two-frequency laser interferometer 1.
3rd step, regulation optical path is parallel with reference path：
As shown in figure 4, regulation the first right-angle prism 12-1 and the second right-angle prism 12-2 reduced height laser tracker 8
The spacing of light beam and the light beam of two-frequency laser interferometer 1 allows two light beams simultaneously by the first pentaprism 9-1 and the second pentaprism
9-2.First pentaprism 9-1 and the second pentaprism 9-2 are fixed on pentaprism group fixture 10 and are directed at double-frequency laser from bottom to top
The light beam of interferometer 1 and the light beam of laser tracker 8, pentaprism group fixture 10 are fixed on fixed platform PNOn adjustable base on.Adjust
Section pentaprism group fixture 10 makes two light beams exit height after the second pentaprism 9-2 be higher than laser tracker 8.Adjust the 3rd right angle
Prism 12-3, the 4th right-angle prism 12-4 light beam of height expansion of laser light tracker 8 and the light beam of two-frequency laser interferometer 1 spacing
Two light beams are made to be respectively aligned to first position sensing detector 6-1, second place sensing detector 6-2 centers.Adjust right-angle prism
Group fixture 11 and pentaprism group fixture 10 make two light beams in first position sensing detector 6-1 and second place sensing detector 6-
The deviation of 2 center-zeros is respectively less than 4 microns (deviation size is determined by stated accuracy and practical operation difficulty).Mobile pentaprism group
Fixture 10 is to fixed platform P1On adjustable base on, if the light beam of laser tracker 8 and the light beam of two-frequency laser interferometer 1 are first
The deviation of Position-Sensitive Detector 6-1 or second place sensing detector 6-2 center-zeros is more than 4 microns, and (deviation size is by marking
Determine precision and practical operation difficulty to determine), then readjust deviation is not more than 4 microns (deviation size is by stated accuracy and reality
Border operation difficulty is determined), pentaprism group fixture 10 is re-moved to fixed platform PNOn adjustable base on, if laser tracker
8 light beams and the light beam of two-frequency laser interferometer 1 are at first position sensing detector 6-1 or second place sensing detector 6-2 centers
The deviation of zero-bit is more than 4 microns (deviation size is determined by stated accuracy and practical operation difficulty), then readjusting makes deviation not
More than 4 microns (deviation size is determined by stated accuracy and practical operation difficulty), so requires until meeting, can now recognize repeatedly
It is parallel with reference path for optical path, eliminate the influence of Abbe error.
4th step, regulation two-frequency laser interferometer target mirror 13 and laser tracker reflecting target mirror 14-1 positions make it
It is directed at respective light beam formation measuring loop；
As shown in figure 5, pentaprism group fixture 10 is to fixed platform PNOn adjustable base on, remove Position-Sensitive Detector
Group 6 and Position-Sensitive Detector group fixture 7, by two-frequency laser interferometer target mirror 13 and laser tracker reflecting target microscope group
14 are fixed on interference microscope group fixture 4 from bottom to top, wherein, laser tracker reflecting target microscope group 14 reflects including laser tracker
Target mirror 14-1 and laser tracker reflecting target mirror base 14-2, regulation interference microscope group fixture 4 makes two-frequency laser interferometer target anti-
The centers of She Jing 13 and laser tracker reflecting target mirror 14-1 centers are respectively aligned to the light beam of two-frequency laser interferometer 1 and laser tracker
8 light beams, and make the full lattice of the signal of two-frequency laser interferometer 1.Mobile pentaprism group fixture 10 to fixed platform P1On adjustable base
On, if the light beam of laser tracker 8 and the light beam of two-frequency laser interferometer 1 be not in laser tracker reflecting target mirror 14-1 and double-frequency laser
The center of interferometer target mirror 13, then readjusting makes the center of two-frequency laser interferometer target mirror 13 and laser tracker
Reflecting target mirror 14-1 centers are respectively aligned to the light beam of two-frequency laser interferometer 1 and the light beam of laser tracker 8, and two-frequency laser interferometer
The full lattice of 1 signal.Pentaprism group fixture 10 is moved again to fixed platform PNOn adjustable base on, if the light beam of laser tracker 8
With the light beam of two-frequency laser interferometer 1 not in laser tracker reflecting target mirror 14-1, two-frequency laser interferometer target mirror 13
The heart, then readjusting makes the center of 1 target mirror of two-frequency laser interferometer 13 and laser tracker reflecting target mirror 14-1 centers point
Dui Zhun not the light beam of two-frequency laser interferometer 1, the light beam of laser tracker 8, and full lattice of the signal of laser interferometer 1.So repeatedly until
Meet and require, can now start measurement.
5th step, measurement；
As shown in figure 5, pentaprism group fixture 10 is placed on into fixed platform P1On adjustable base on, by moveable platform
P(N+1)Close to fixed platform P1, the servo of laser tracker 8 is opened, by laser tracker reflecting target mirror 14-1 " returning nest ", then will be swashed
Optical tracker system reflecting target mirror 14-1 is moved at the first right-angle prism 12-1, and break rapidly light, and now the light beam of laser tracker 8 is successively
By the second right-angle prism 12-2, the first pentaprism 9-1, the second pentaprism 9-2, the 3rd right-angle prism 12-3 and the 4th right-angled edge
Mirror 12-4 outgoing, then laser tracker reflecting target mirror 14-1 is moved at the 4th right-angle prism 12-4 continuous light, put to reflecting target
On mirror base 14-2, ambient compensation parameter is set in software.The Survey Software of two-frequency laser interferometer 1 is reopened, ring is set
Border is compensated automatically, provides tested point.Start to measure starting point, the survey measurements of two-frequency laser interferometer 1 is L1, laser tracker
8 measurement registration is (d1, α1, β1), mobile pentaprism group fixture 10 to moveable platform P after being measured(N+1)On, it is slow to move
Dynamic moveable platform P(N+1)To fixed platform P2, by adjusting moveable platform P during being somebody's turn to do(N+1)On adjustable base make double frequency
The signal of laser interferometer 1 need to keep full lattice as far as possible, and pentaprism group fixture 10 is moved on the adjustable base on fixed platform P2,
Second point is measured, the survey measurements of two-frequency laser interferometer 1 is L2, the measurement registration of laser tracker 8 is (d2, α2, β2).It is complete
Into i-th (i=3~N) point of rear survey, the survey measurements of two-frequency laser interferometer 1 is Li, the measurement registration of laser tracker 8 is (di,
αi, βi), aforesaid operations are repeated, until measurement N points terminate.
6th step, data processing；
The ranging registration of two-frequency laser interferometer 1 is LG=Ll0+LBi+LFi, (i=0~N), wherein Ll0For pentaprism group 9
In initial position fixed platform P1Locate the reading of two-frequency laser interferometer 1, LFiI pitch is moved for the first pentaprism 9-1 to produce
Light path, LBiThe light path that i pitch is produced is moved for the second pentaprism 9-2, as i=0, LBi=LFi=0；Laser tracker
8 ranging registration is dT=dT0+dBi+dFi, wherein dT0It is pentaprism group 9 in initial position fixed platform P1Locate laser tracker 8
Reading, dFiThe light path that i pitch is produced, dB are moved for the first pentaprism 9-1iI pitch production is moved for the second pentaprism 9-2
Raw light path, as i=0, dBi=dFi=0.Mobile 1 pitch, dT1=dT0+dB1+dF1, LG1=Ll0+LB1+LF1, then laser
The survey length change of tracker 8 and two-frequency laser interferometer 1 is respectively Δ dT1=dB1+dF1, Δ LG1=LB1+LF1, mobile 2 sections
Away from dT2=dT0+dB2+dF2, LG2=Ll0+LB2+LF2, then the survey length of laser tracker 8 and two-frequency laser interferometer 1, which changes, distinguishes
For Δ dT2=dB2+dF2, Δ LG1=LB2+LF2, by that analogy, i-th (i=(1~N-1)) individual pitch, laser tracker 8 and double
The survey length change of frequency laser interferometer 1 is respectively Δ dTi=dBi+dFi, Δ LGi=LBi+LFi.Compare laser tracker 8 and double
The survey length that frequency laser interferometer 1 is moved with pentaprism group 9 changes, its difference DELTA dLi=Δ dTi-ΔLGiAs laser tracker 8
In the long error of pitch i survey.Count and analysis result, provide survey long error of the laser tracker 8 in full ranging.
Claims (5)
1. a kind of laser tracker length measurement precision caliberating device, it is characterized in that, set gradually from left to right on optical table (2) sharp
Optical tracker system (8), two-frequency laser interferometer (1), interference microscope group fixture (4) and right-angled edge microscope group fixture (11), interference microscope group folder
Tool (4) is sequentially placed interference microscope group (3), two-frequency laser interferometer target mirror (13), laser tracker reflection from lower to upper
Target microscope group (14), wherein interference spectroscope (3-1) and interference reflector (3- that interference microscope group (3) is connected by vertical paper direction
2) constitute, place right-angled edge microscope group (12) on right-angled edge microscope group fixture (11), right-angled edge microscope group (12) is followed successively by the from lower to upper
Two right-angle prisms (12-2), the first right-angle prism (12-1), the 3rd right-angle prism (12-3), the 4th right-angle prism (12-4)；
Dummy guideway (5) is placed on the right side of optical table (2), pentaprism group (9) is placed on dummy guideway (5), pentaprism group (9)
The first pentaprism (9-1) and the second pentaprism (9-2) are followed successively by from lower to upper；
Two-frequency laser interferometer (1) outgoing beam is divided into two beams, first after interfering the interference spectroscope (3-1) in microscope group (3)
Beam horizontal exit after interference spectroscope (3-1), and reflected successively through the first pentaprism (9-1) and the second pentaprism (9-2), then
Horizontal exit is simultaneously directed at two-frequency laser interferometer after being directed at two-frequency laser interferometer target mirror (13) center, backtracking
(1) auxiliary alignment diaphragm center, the second beam enters after interference reflector (3-2), backtracking after interference spectroscope (3-1)
It is directed at the auxiliary alignment diaphragm center of two-frequency laser interferometer (1)；
Laser tracker (8) outgoing beam sequentially passes through the first right-angle prism (12-1) and the second right-angle prism (12-2) reflection simultaneously
Horizontal exit, then the horizontal exit after the first pentaprism (9-1) and the second pentaprism (9-2) reflection, then sequentially pass through the successively
Three right-angle prisms (12-3) and the 4th right-angle prism (12-4) horizontal exit, and be directed at laser tracker reflecting target microscope group (14) afterwards
In laser tracker reflecting target mirror (14-1) center, enter after backtracking laser tracker (8) internal intervention system and with
Track system；
The device also includes Position-Sensitive Detector group (6) and Position-Sensitive Detector group fixture (7), Position-Sensitive Detector group
(6) it is made up of, and fixes successively from lower to upper first position sensing detector (6-1) and second place sensing detector (6-2)
On Position-Sensitive Detector group fixture (7)；Surveyed for leveling dummy guideway (5) and laser tracker (8) light beam and regulation
Measure the depth of parallelism of light path and reference path；
The dummy guideway (5) is by a moveable platform P(N+1)With N number of fixed platform P for being separated by a constant pitchi, i=1~
N is constituted, fixed platform Pi, i=1~N and moveable platform P(N+1)It is upper that there is adjustable base, moveable platform P respectively(N+1)Solid
Moved between fixed platform, for shifting pentaprism group (9) or Position-Sensitive Detector group (6), adjust virtual using adjustable base
The linearity of guide rail (5).
2. a kind of laser tracker length measurement precision caliberating device according to claim 1, it is characterised in that virtual in leveling
During guide rail (5), the first position sensing detector (6-1) in Position-Sensitive Detector group (6) is fixed on position sensitive detection
On device group fixture (7), Position-Sensitive Detector group fixture (7) is placed sequentially in fixed platform Pi, i=1~N adjustable base
On, make beam alignment first position sensing detector (6-1) center of two-frequency laser interferometer (1) through n times regulation adjustable base.
3. a kind of laser tracker length measurement precision caliberating device according to claim 1, it is characterised in that leveling laser with
During track instrument (8) light beam, the second place sensing detector (6-2) in Position-Sensitive Detector group (6) is fixed on position sensing
On detector group fixture (7) and positioned at the top of first position sensing detector (6-1), by Position-Sensitive Detector group fixture
(7) it is successively placed on fixed platform P1With fixed platform PNAdjustable base on, re-adjustments laser tracker (8) makes position sensing
The light beam of laser tracker (8) is directed at second place sensing detector (6-2) when detector group fixture (7) is at two positions
Center.
4. a kind of laser tracker length measurement precision caliberating device according to claim 1, it is characterised in that leveling measures light
When road and reference path, pentaprism group (9) is fixed on pentaprism group fixture (10), and be placed on dummy guideway (5) can
Adjust on base, Position-Sensitive Detector group (6) is fixed on Position-Sensitive Detector group fixture (7), and be placed on interference mirror
On optical table (2) between group fixture (4) and right-angled edge microscope group fixture (11), regulation right-angled edge microscope group fixture (11) and five ribs
Microscope group fixture (10) makes pentaprism group (9) from fixed platform P1Through moveable platform P(N+1)It is moved to fixed platform PNDuring it is double
Frequency laser interferometer (1) light beam and laser tracker (8) light beam are respectively aligned to first position sensing detector (6-1) center all the time
With second place sensing detector (6-2) center.
5. a kind of laser tracker length measurement precision scaling method, it is characterized in that, this method comprises the following steps：
The first step, leveling dummy guideway (5)；
Two-frequency laser interferometer (1) and interference microscope group fixture (4) are placed on optical table (2), and two-frequency laser interferometer (1) goes out
Irradiating light beam is directed at interference spectroscope (3-1) center, and interference spectroscope (3-1) and interference reflector (3-2) are perpendicular to paper direction
Connect and be placed on interference microscope group fixture (4)；
Two-frequency laser interferometer (1) outgoing beam is divided into two beams after interfering the interference spectroscope (3-1) in microscope group (3), through dry
Relate to the light beam after spectroscope (3-1) to reflect into interference reflector (3-2), regulation two-frequency laser interferometer (1) and interference
Microscope group fixture (4), makes the auxiliary alignment diaphragm center that two-frequency laser interferometer (1) is directed at after reflected light backtracking, through interference
The second beam light level outgoing after spectroscope (3-1)；
First position sensing detector (6-1) is fixed on Position-Sensitive Detector group fixture (7), Position-Sensitive Detector group folder
Tool (7) is placed on fixed platform PNOn adjustable base on, regulation adjustable base and Position-Sensitive Detector group fixture (7) makes
Second beam optical registration first position sensing detector (6-1) center-zero after interference spectroscope (3-1), fixes the adjustable bottom
Seat；Shift position sensing detector fixture (7) and first position sensing detector (6-1) are to fixed platform Pi, i=1~(N-1)
With moveable platform P(N+1)On adjustable base on, adjust adjustable base, make the second beam light pair after interference spectroscope (3-1)
Quasi- first position sensing detector (6-1) center-zero, fixedly adjustable base, now it is believed that dummy guideway leveling；
Second step, regulation laser tracker (8) light beam is parallel with two-frequency laser interferometer (1) light beam；
Laser tracker (8) is placed on optical table (2), and the left side positioned at two-frequency laser interferometer (1), light beam goes out to the right
Penetrate, light beam points to the spatial point that spherical coordinates is (5000mm, 180 °, 90 °), closes servo；By Position-Sensitive Detector fixture (7)
It is fixed on fixed platform PNOn adjustable base on, while by second place sensing detector (6-2) be fixed on position sensing visit
Survey on device fixture (7), and positioned at the top of first position sensing detector (6-1), make in second place sensing detector (6-2)
The heart is directed at laser tracker (8) outgoing beam；Regulation laser tracker (8) and Position-Sensitive Detector fixture (7) make laser with
The track instrument beam alignment second place sensing detector (6-2) center-zero；Shift position sensing detector fixture (7) is put down to fixed
Platform P1Adjustable base on, if laser tracker (8) light beam is adjusted not in second place sensing detector (6-2) center-zero
Section laser tracker (8) makes laser tracker (8) beam alignment second place sensing detector (6-2) center-zero, moves again
Position-Sensitive Detector fixture (7) is moved to fixed platform PNOn adjustable base on, if laser tracker (8) light beam is not second
Position-Sensitive Detector (6-2) center-zero, then regulation laser tracker makes laser tracker (8) beam alignment second again
Put sensing detector (6-2) center-zero, so repeatedly until meet require, now it is believed that laser tracker (8) light beam with
Two-frequency laser interferometer (1) light beam is parallel；
3rd step, regulation optical path is parallel with reference path；
Adjust reduced height laser tracker (8) light beam of the first right-angle prism (12-1) and the second right-angle prism (12-2) and double
The spacing of frequency laser interferometer (1) light beam allows two light beams simultaneously by the first pentaprism (9-1) and the second pentaprism (9-
2)；First pentaprism (9-1) and the second pentaprism (9-2) are fixed on pentaprism group fixture (10) and are directed at double frequency from bottom to top
Laser interferometer (1) light beam and laser tracker (8) light beam, pentaprism group fixture (10) are fixed on fixed platform PNOn it is adjustable
On base；Regulation pentaprism group fixture (10) makes two light beams exit height after the second pentaprism (9-2) be higher than laser tracker
(8)；Adjust the height of the 3rd right-angle prism (12-3) and the 4th right-angle prism (12-4), expansion of laser light tracker (8) light beam and
The spacing of two-frequency laser interferometer (1) light beam, makes two light beams be respectively aligned to first position sensing detector (6-1) and the second place
Sensing detector (6-2) center；Regulation right-angled edge microscope group fixture (11) and pentaprism group fixture (10) make two light beams at first
Put sensing detector (6-1) and second place sensing detector (6-2) center-zero；Mobile pentaprism group fixture (10) is extremely fixed
Platform P1On adjustable base on, if laser tracker (8) light beam and two-frequency laser interferometer (1) light beam be not quick in first position
Feel detector (6-1) or second place sensing detector (6-2) center-zero, then readjust and be located at center-zero, weight
The new pentaprism group fixture (10) that moves is to fixed platform PNOn adjustable base on, if laser tracker (8) light beam and double frequency swash
Optical interferometer (1) light beam not in first position sensing detector (6-1) or second place sensing detector (6-2) center-zero,
Then readjust and be located at center-zero, so required repeatedly until meeting, be now considered as optical path and reference path is flat
OK, the influence of Abbe error is eliminated；
4th step, regulation two-frequency laser interferometer target mirror (13) and laser tracker reflecting target mirror (14-1) position makes it
Center is respectively aligned to respective light beam formation measuring loop；
Pentaprism group fixture (10) is installed to fixed platform PNOn adjustable base on, remove Position-Sensitive Detector group (6) and position
Sensing detector group fixture (7) is put, by two-frequency laser interferometer target mirror (13) and laser tracker reflecting target microscope group
(14) it is fixed on from bottom to top on interference microscope group fixture (4), wherein, laser tracker reflecting target microscope group (14) is tracked including laser
Instrument reflecting target mirror (14-1) and laser tracker reflecting target mirror base (14-2), regulation interference microscope group fixture (4) make double-frequency laser
Interferometer target mirror (13) center and laser tracker reflecting target mirror (14-1) center are respectively aligned to two-frequency laser interferometer
(1) light beam and laser tracker (8) light beam, and make the full lattice of two-frequency laser interferometer (1) signal；Mobile pentaprism group fixture (10)
To fixed platform P1On adjustable base on, if laser tracker (8) light beam and two-frequency laser interferometer (1) light beam be not in laser
Tracker reflecting target mirror (14-1) and laser interferometer target mirror (13) center, then readjusting makes laser interferometer target
Speculum (13) center and laser tracker reflecting target mirror (14-1) center are respectively aligned to two-frequency laser interferometer (1) light beam and swashed
Optical tracker system (8) light beam, and the full lattice of two-frequency laser interferometer (1) signal；Pentaprism group fixture (10) is moved again to put down to fixed
Platform PNOn adjustable base on, if laser tracker (8) light beam and two-frequency laser interferometer (1) light beam be not anti-in laser tracker
Shoot at the target mirror (14-1), two-frequency laser interferometer target mirror (13) center, then readjusting makes two-frequency laser interferometer target
Speculum (13) center and laser tracker reflecting target mirror (14-1) center are respectively aligned to two-frequency laser interferometer (1) light beam and swashed
Optical tracker system (8) light beam, and the full lattice of two-frequency laser interferometer (1) signal；So require, can be now opened until meeting repeatedly
Begin to measure；
5th step, measurement；
Pentaprism group fixture (10) is placed on fixed platform P1On adjustable base on, by moveable platform P(N+1)Close to fixed
Platform P1Laser tracker (8) servo is opened, by laser tracker reflecting target mirror (14-1) " return to nest ", then laser tracker is anti-
Mirror (14-1) of shooting at the target is moved to the first right-angle prism (12-1) place, and break rapidly light, and now the light beam of laser tracker 8 sequentially passes through the
Two right-angle prisms (12-2), the first pentaprism (9-1), the second pentaprism (9-2), the 3rd right-angle prism (12-3) and the 4th right angle
Prism (12-4) outgoing, then laser tracker reflecting target mirror (14-1) is moved to the continuous light in the 4th right-angle prism (12-4) place, put
To reflecting target mirror base (14-2), ambient compensation parameter is set in software；Reopen the measurement of two-frequency laser interferometer (1)
Software, sets environment to compensate automatically, provides tested point；Start to measure starting point, the survey measurements of two-frequency laser interferometer (1) is
L1, the measurement registration of laser tracker (8) is (d1,α1,β1), mobile pentaprism group fixture (10) is extremely removable after being measured
Platform P(N+1)On, slow mobile moveable platform P(N+1)To fixed platform P2, by adjusting moveable platform P during being somebody's turn to do(N+1)
On adjustable base make the signal of two-frequency laser interferometer (1) that full lattice need to be kept as far as possible, pentaprism group fixture (10) is moved to solid
Fixed platform P2On adjustable base on, measure second point, the survey measurements of two-frequency laser interferometer (1) is L2, laser tracker
(8) measurement registration is (d2,α2,β2)；After the completion of survey i-th, i=3~N points, the survey measurements of two-frequency laser interferometer (1) is
Li, the measurement registration of laser tracker (8) is (di,αi,βi), aforesaid operations are repeated, until measurement N points terminate；
6th step, data processing；
The ranging registration of two-frequency laser interferometer (1) is LG=Llo+LBi+LFi, i=0~N, wherein LloExist for pentaprism group (9)
Initial position fixed platform P1Locate the reading of two-frequency laser interferometer (1), LFiFor the mobile i pitch production of the first pentaprism (9-1)
Raw light path, LBiThe light path produced for the mobile i pitch of the second pentaprism (9-2), as i=0, LBi=LFi=0；Laser with
The ranging registration of track instrument (8) is dT=dT0+dBi+dFi, wherein dT0It is pentaprism group (9) in initial position fixed platform P1Swash at place
The reading d of optical tracker system (8)T=dT0+dBi+dFi, dFiThe light path produced for the mobile i pitch of the first pentaprism (9-1), dBi
The light path produced for the mobile i pitch of the second pentaprism (9-2), as i=0, dBi=dFi=0；Mobile 1 pitch, dT1=
dT0+dB1+dF1, LG1=Ll0+LB1+LF1, then the survey of laser tracker (8) and two-frequency laser interferometer (1) grows change and is respectively
ΔdT1=dB1+dF1, Δ LG1=LB1+LF1, mobile 2 pitches, dT2=dT0+dB2+dF2, LG2=Ll0+LB2+LF2, then laser with
The survey length change of track instrument (8) and two-frequency laser interferometer (1) is respectively Δ dT2=dB2+dF2, Δ LG2=LB2+LF2, with such
Push away, i-th, i=(1~N-1) individual pitch, the survey length change of laser tracker (8) and two-frequency laser interferometer (1) is respectively Δ dTi
=dBi+dFi, Δ LGi=LBi+LFi；Compare laser tracker (8) and two-frequency laser interferometer (1) mobile with pentaprism group (9)
Survey length change, its difference DELTA dLi=Δ dTi-ΔLGiAs survey long error of the laser tracker (8) in pitch i；Count and divide
Result is analysed, survey long error of the laser tracker (8) in full ranging is provided.
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1240270A (en) * | 1999-07-02 | 2000-01-05 | 清华大学 | Target space position and attitude laser tracking-measuring system and method |
| CN2596321Y (en) * | 2002-12-24 | 2003-12-31 | 中国航空工业总公司第三○四研究所 | Large size calibrating device with straightness analysis |
| CN1971210A (en) * | 2006-12-19 | 2007-05-30 | 中国航空工业第一集团公司北京长城计量测试技术研究所 | Laser plane coordinate calibration device |
| CN102003935A (en) * | 2010-11-03 | 2011-04-06 | 中国科学院光电技术研究所 | Environment compensation method for measurement employing laser tracker |
| RU2419766C1 (en) * | 2009-12-01 | 2011-05-27 | Государственное образовательное учреждение высшего профессионального образования "Московский государственный университет геодезии и картографии" (МИИГАиК) | Bench to test and calibrate levels and bar code stick |
| CN205102782U (en) * | 2015-04-30 | 2016-03-23 | 长春理工大学 | Laser tracking appearance length measuring precision calibration device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011064609A (en) * | 2009-09-18 | 2011-03-31 | Mitsutoyo Corp | Interferometer |
-
2015
- 2015-04-30 CN CN201510216991.1A patent/CN105157574B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1240270A (en) * | 1999-07-02 | 2000-01-05 | 清华大学 | Target space position and attitude laser tracking-measuring system and method |
| CN2596321Y (en) * | 2002-12-24 | 2003-12-31 | 中国航空工业总公司第三○四研究所 | Large size calibrating device with straightness analysis |
| CN1971210A (en) * | 2006-12-19 | 2007-05-30 | 中国航空工业第一集团公司北京长城计量测试技术研究所 | Laser plane coordinate calibration device |
| RU2419766C1 (en) * | 2009-12-01 | 2011-05-27 | Государственное образовательное учреждение высшего профессионального образования "Московский государственный университет геодезии и картографии" (МИИГАиК) | Bench to test and calibrate levels and bar code stick |
| CN102003935A (en) * | 2010-11-03 | 2011-04-06 | 中国科学院光电技术研究所 | Environment compensation method for measurement employing laser tracker |
| CN205102782U (en) * | 2015-04-30 | 2016-03-23 | 长春理工大学 | Laser tracking appearance length measuring precision calibration device |
Non-Patent Citations (2)
| Title |
|---|
| 单站式激光跟踪坐标测量系统研究;张亚娟;《中国博士学位论文全文数据库信息科技辑》;20130515(第05期);第3-14,72-74页 * |
| 大尺寸计量校准技术研究及在量值传递中的应用;马骊群;《中国博士学位论文全文数据库工程科技Ⅱ辑》;20080215(第02期);第92-100页 * |
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