CN2596321Y - Large size calibrating device with straightness analysis - Google Patents

Abstract

The utility model relates to a large size calibrating device with straightness analysis, which is mainly composed of a guideway system, a workbench, a three-light path two-frequency laser interference length measuring system, etc. The large size calibrating device with straightness analysis adopts laser to serve as a light source, and the light source is distributed into three beams of light which are in parallel in space through the light splitting and the light refracting of a spectroscope component; when a pyramid prism moves on the workbench along with a guideway, the light length of the three beams of light is caused to generate change because of the influence of the straightness of the guideway, and the light length path difference among the three beams of light can be utilized to analyse and calibrate the straightness of the guideway. The large size calibrating device with straightness analysis integrates the functions of length measuring of high precision, angle measuring, straightness measuring, etc. The utility model can realize the general and precise alignment of a large size calibrating system integrally and efficiently.

Description

A kind of large scale calibrating installation that has the linearity analysis

Affiliated technical field

The utility model relates to a kind of large scale calibrating installation that linearity is analyzed that has, and belongs to the metrology and measurement field.

Background technology

At present, the large-scale metrology system increases day by day, it mainly comprises laser interferometer, laser tracker, total powerstation, stadimeter etc., typical products has the ML10 laser ruler of Britain Reinshaw company, the laser tracker of Switzerland Lay Ka company, and they integrate functions such as surveying length, survey linearity and angle measurement.But the large scale calibrating installation that is used for calibrating the large-scale metrology system but can only be calibrated the length amount.It is the laser interferometry system of 25m that a cover measurement range is had in country metering institute, adopts the HP5529A laser head, is used as the long comparison of survey of the transmission of quantity value and the laser interferometer of invar baseline wire, and system has only at present and surveys long function.A long laser interferometry system of 30 meters is had in electro-optical distance instrument inspection center of country, is mainly used to carry out the circular error calibrating of stadimeter, and system also can only do and survey long comparison.Domestic large scale calibrating installation can only satisfy the long calibration of survey of large-scale metrology system at present, then need calibrate separately its straight line degree measurement and measurement of angle, come the straight line degree measurement assembly of calibration laser interferometer with inductance amesdial, with the measurement of angle uncertainty that the low-angle somascope comes the calibration laser interferometer, be subjected to this calibration program of restriction of efficient that its limitation is arranged.

What the length measurement system precision was the highest should belong to the laser interference length-measuring system, it be a kind of be the instrument that standard is measured tested length with the laser optical wavelength, ultimate principle is as shown in Figure 3: light source is the laser instrument that can launch two frequencies, a frequency is F1, another frequency is F2, frequency difference between F1, the F2 is about 1MHz, and they are the orthogonal linearly polarized lights of direction of vibration.Sub-fraction signal in the light is taken out beat frequency, form reference signal, frequency is F1-F2; Most of signal is divided into two bundles by polarization spectroscope S, and frequency is that a branch of of F1 is reflected to fixed prism M1, but frequency is a branch of index prism M2 that is transmitted to of F2.Two-beam after reflecting behind same axis process beat frequency, is received by receiver again, forms measuring-signal.When M2 was motionless, the detected signal frequency of photelectric receiver was F1-F2; When but index prism moves, comprised Doppler shift ± Δ f in the optical frequency that reflects, then the received signal frequency is F2-F1 ± Δ f.After measuring-signal and reference signal are subtracted each other, obtain ± Δ f.With counter right ± Δ f add up N, but then the movable length L of index prism is: $L=N\·\frac{\mathrm{\λ}}{2}=\frac{\mathrm{\λ}}{2}{\∫}_0^t\mathrm{fdt}$

Summary of the invention

In order to overcome existing large scale calibrating installation function singleness, can not to do the deficiency of comprehensive calibration to having the large-scale metrology system now, the utility model provides a kind of large scale calibrating installation that has the linearity analytic function.This calibrating installation integrates functions such as surveying length, angle measurement, survey linearity, can realize efficiently that the large-scale metrology system comprehensively calibrates.

The utility model utilizes the laser interference length-measuring system principle to realize the calibration of linearity, it comprises laser beam emitting head, beam splitting and interference mirror and corresponding receiver, the pyramid reflecting prism, the worktable of pyramid reflecting prism is installed, the guide track system of support table, this device also is equipped with two cover beam splitting and interference mirror and corresponding receiver in addition, the pyramid reflecting prism, beam splitting and interference mirror and corresponding receiver are installed together and constitute beam split and interference mirror assembly, corresponding three pyramid reflecting prisms constitute pyramid reflecting prism assembly, and pyramid reflecting prism assembly is installed on the worktable.

The generating laser that the utility model adopts can carry out multipath reception, and the beam of laser of being sent by laser instrument becomes the three beams directional light to penetrate after by beam splitting and interference mirror assembly.

The three beams of laser with receiving the reflection of pyramid reflecting prism assembly that sends of beam splitting and interference mirror assembly is parallel, and right-angle triangle of the vertical cross-section of three beams of laser formation, and three beams of laser is these leg-of-mutton three summits.

The calibration process of large scale calibrating installation is as follows: laser head is launched beam of laser, after beam splitting and interference part beam split refractive power, be scattered in the three-beam (establishing a branch of light that does not wherein change direction is main optical path) that is parallel to each other in the space, three prism of corner cubes of three beams of laser directive are returned through prismatic reflection again, produce on corresponding interference part respectively and interfere.When the prism of corner cube assembly with worktable on guide rail when mobile, owing to be subjected to the influence of the linearity of guide rail, the light path of three light beams is changed, the light path of every light beam is measured by laser interferometer, carrying out single channel simultaneously respectively receives, difference between the three-beam light path can be obtained through algebraic operation, according to the span of worktable level supporting air cushion and the Abbe brachium of the relative main optical path of other two-beam, the surface level linearity can be obtained again through computing.According to the span of worktable vertical plane supporting air cushion and the Abbe brachium of the relative main optical path of other two-beam, get final product the vertical plane linearity equally through computing.Total linearity be straight horizontal dimension and straight vertical dimension vector and.

The pin-point accuracy that integrates of the present utility model is surveyed functions such as length, angle measurement, survey linearity, can completely realize the comprehensively accurately calibration of large-scale metrology system efficiently.And a kind of new method with laser calibration large-scale metrology system linearity proposed.

Description of drawings

Below in conjunction with accompanying drawing the utility model is described further.

Fig. 1 is a straight line degree measurement schematic diagram of the present utility model.

Fig. 2 is the large scale calibrating installation that has the linearity analytic function.

Fig. 3 is the laser interference length-measuring systematic schematic diagram

Fig. 4 is originally to be schematic appearance of the present utility model.

Embodiment

In the drawings, calibrating installation laser head HP5527B (1) launches beam of laser and be scattered in the three-beam that is parallel to each other in the space after beam splitting and interference component (2) beam splitting, refractive power, if wherein do not change a branch of light of direction always is that X is to light path (being main optical path), the three beams directional light incides on three prism of corner cube mirror groups (3) on the air-flotation workbench (4), reflect through prism assemblies (3) again, on the interference part of beam splitting and interference component (2), produce respectively and interfere.When drag chain follow-up driving system (6) drive air-flotation workbench (4) is mobile along grouan guide rail (5), prism of corner cube assembly (3) is also followed mobile, the light path of three light beams should not equate if guide rail has geometric error, yet be subjected to the influence of guide rail horizontal direction and vertical direction linearity, the light path of three-beam can be different, worktable has the angle of pitch of α degree on the guide rail surface level as shown in Figure 1, if the light path of main optical path is Lx, the light path that Z passes by to light path is Lz, the light path that the Y light path is passed by is Ly, X, the Z-axis difference of Z two catoptrons is A, air-flotation workbench (4) two horizontal air cushion centre distance are B, two air cushion centre distance are C on the vertical plane, X, the transverse axis difference of Y two catoptrons is D, then:

The horizontal direction linearity of this position is:

In like manner the vertical direction linearity of this position is:

Guide rail is at the synthetic linearity of this position

Therefore, order is measured each position linearity successively, can carry out Evaluating Straightness Error by data processing.

This large scale calibrating installation can not only can be surveyed long calibration to the large-scale metrology system also can carry out the linearity calibration, is a kind of large scale calibrating installation that linearity is analyzed that has.

ML10 laser interferometer measurement system with the accurate RENISHAW of a station symbol verifies the ability of the utility model alignment degree and surveys long ability.

The error bandwidth of linearity after by best linear fit provides, comparison result: the difference of two cover systems measurement linearity is 0.008mm to the maximum in 10 meters, with the length of this device calibration laser interferometer apart from the linearity annex, satisfy the requirement of JJG739-91 " two-frequency laser interferometer working standard vertification regulation " cathetus degree uncertainty of measurement, i.e. " 5m measurement assembly uncertainty is not less than (1%D+0.25) μ m, 30m measurement assembly uncertainty and is not less than (2.5%D+2.5) μ m in displayed value D＜1000 μ m ".

Linear measure longimetry comparison conclusion: in 20 meters scopes, under the situation (default condition) of no environment compensation, the linear measure longimetry precision is better than ± 0.2 ± 0.1L (micron), and L is for measuring length, and unit is a rice.Satisfy the requirement of linear measure longimetry uncertainty among the JJG739-91 " two-frequency laser interferometer working standard vertification regulation ", i.e. " the linear measure longimetry uncertainty is not less than the μ m of δ=(0.2+0.5L), and in the formula: L-measures length, unit be meter ".

Claims (3)

1. large scale calibrating installation that has the linearity analytic function, comprise laser beam emitting head, beam split and interference mirror and corresponding receiver, the pyramid reflecting prism, the worktable of pyramid reflecting prism is installed, the guide track system of support table, it is characterized in that this device also has two cover beam split and interference mirror and corresponding receiver, the pyramid reflecting prism, three cover beam splitting and interference mirror and corresponding receiver are installed together and constitute beam split and interference mirror assembly, corresponding three pyramid reflecting prisms constitute pyramid reflecting prism assembly, and pyramid reflecting prism assembly is installed on the worktable.

2. a kind of large scale calibrating installation that has the linearity analytic function according to claim 1 is characterized in that laser beam by beam split and interference mirror assembly is from same laser beam emitting head.

3. a kind of large scale calibrating installation that has the linearity analytic function according to claim 1, it is characterized in that by the three beams of laser that sends of beam split and interference mirror assembly parallel with receiving the reflection of pyramid reflecting prism assembly, and the vertical cross-section of three beams of laser constitutes a right-angle triangle, and three beams of laser is these leg-of-mutton three summits.

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