CN1252444C - Laser interference length measuring system for realizing real-time compensation of Abbe errors - Google Patents
Laser interference length measuring system for realizing real-time compensation of Abbe errors Download PDFInfo
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- CN1252444C CN1252444C CN 02157995 CN02157995A CN1252444C CN 1252444 C CN1252444 C CN 1252444C CN 02157995 CN02157995 CN 02157995 CN 02157995 A CN02157995 A CN 02157995A CN 1252444 C CN1252444 C CN 1252444C
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Abstract
A laser interference length measuring system for realizing real-time compensation of Abbe errors adopts a double-frequency laser transmitter, two beam splitters and two 90-degree beam turning mirrors to generate three paths of interference light and simultaneously measure the length, and a two-dimensional Abbe angle of a guide rail is obtained in real time, so that the real-time compensation of the Abbe errors is realized. The method has the advantages of high measurement precision, simple structure and principle and low cost, and realizes the assumption of eliminating Abbe errors suggested by Blaine on the technology and method.
Description
Affiliated technical field
The present invention relates to a kind of length measuring system that adopts the laser interference mode, particularly a kind of length measurement system of realizing the Abbe error real-Time Compensation belongs to the precise measurement technique field.
Background technology
What present length measurement system precision in the world was the highest should belong to the laser interference length-measuring system, famous product has the two-frequency laser interferometer of Hewlett-Packard Corporation, it be a kind of be the instrument that standard is measured tested length with the optical wavelength, ultimate principle is as shown in Figure 1: light source is the laser instrument that can launch two frequencies, a frequency is F1, another frequency is F2, and the frequency difference between F1, the F2 is about 1MHz, and they are the orthogonal linearly polarized lights of direction of vibration.Sub-fraction signal in the light is taken out beat frequency, form reference signal, frequency is F1-F2; Most of signal is divided into two bundles by polarizing beam splitter mirror S, and frequency is that a branch of of F1 is reflected to fixed prism M1, but frequency is a branch of index prism M2 that is transmitted to of F2.Two-beam after reflecting behind same axis process beat frequency, is received by receiver again, forms measuring-signal.When M2 was motionless, the detected signal frequency of photelectric receiver was F1-F2; When but index prism moves, comprised Doppler shift ± Δ f in the optical frequency that reflects, then the received signal frequency is F2-F1 ± Δ f.After measuring-signal and reference signal are subtracted each other, obtain ± Δ f.With counter right ± Δ f add up N, but then the movable length L of index prism is:
For the large range high precision measuring system, the influence of guide rail linearity be can not ignore.Must compensate by the Abbe error that guide rail linearity brought, could improve The measuring precision.
The method that reduces or eliminate Abbe error that is at home and abroad adopted at present has:
1. take measures on the structure.
Geometric accuracy and kinematic accuracy from technology raising guideway reduce the not straightforward angular errors that brings because of the motion guide rail pair.On structural arrangement, make measuring basis line (as grating, magnetic grid, inductosyn, laser interferometer etc.) and measured position line close as far as possible, to reduce the Abbe arm as far as possible.
In many cases, owing to be subjected to the restriction of 26S Proteasome Structure and Function, this method has significant limitation.
2. Ai Pengsitan error compensation principle.
The principle of Ai Pengsitan error compensation is to utilize various structures, and issuable error is weakened mutually, perhaps deliberately increases new error, reducing the influence of some error, as one-meter measuring machine etc.
Because Ai Pengsitan error compensation principle is to utilize specific mechanism to reach the purpose that reduces or eliminate error, so corresponding different measurement and processing unit (plant) just need the different Ai Pengsitan compensation mechanism of design, thereby this method do not have general applicability.
3 cloth come the grace suggestion.
Bu Laien advises that its content is: the distance of basis displacement measuring system working point should be positioned at the distance of tested displacement application point on the straight line; If this is impossible, so or must make the guide rail that transmits displacement not have angular motion, or the influence that is offset with the data computation of actual guide track angle motion.The Bu Laien suggestion is replenishing of Abbe's principle and expansion.
The Brian suggestion is similar fully with Abbe's principle on the narration method, but in notion and content essential difference is arranged in fact.This content is not included among the original meaning of Abbe's principle, so Bu Laien advises and Abbe's principle is listed as two basic principle of design and measure principle.According to the Brian suggestion, in order to improve accuracy of measurement, should follow Abbe's principle as far as possible, adopt coaxial series design; If do not accomplish this point, then should start with, to eliminate the influence of Abbe error: 1) improve the manufacturing process of guide rail, reduce the geometric error of guide rail, the machining precision of raising guide rail to machining precision and accuracy of measurement from following dual mode.2) actual measurement goes out the angular motion error of introducing because of inclination in the guide rail movement process, calculates actual Abbe error value.
The manufacturing process and the precision that improve guide rail itself have significant limitation, and of a high price, because technical factor, the Bu Laien suggestion is not really realized.
Summary of the invention
In order to overcome the deficiency that volume increase, complex structure, cost that existing Abbe error compensation method makes instrument increase severely, the invention provides a kind of laser interference length-measuring method that realizes the Abbe error real-Time Compensation, revise the Abbe error of guide rail horizontal direction and the Abbe error of guide rail vertical direction in real time, realized the imagination that Bu Laien advises technically with on the method.
A kind of laser interference length-measuring system that realizes the Abbe error real-Time Compensation of the present invention, comprise a double-frequency laser transmitter, interference mirror, movable corner cube reflector, the interference signal receiver, after the double-frequency laser of double-frequency laser transmitter emission reflects to corner cube reflector by interference mirror, return interference mirror, form a light path by the reception of interference signal receiver, respectively have one by double-frequency laser at interference mirror to the vertical direction of corner cube reflector direction and the side of level, interference mirror, movable corner cube reflector, the light path system that the interference signal receiver is formed, three light path parallels.
The double-frequency laser of three light paths of the present invention can be produced by a double-frequency laser transmitter, 1/3 beam splitter, 1/2 beam splitter, two 90 ° of light beams mirror of turning back, the double-frequency laser of double-frequency laser transmitter emission passes through 1/3 two bundle double-frequency lasers beam splitter generation 1/3 and 2/3, wherein 1/3 double-frequency laser is the double-frequency laser of a light path after one 90 ° of light beams are turned back mirror, 2/3 double-frequency laser produces two bundle double-frequency lasers again through 1/2 beam splitter, a branch of is the double-frequency laser of a light path, a branch of in addition after 90 ° of light beams are turned back mirror as the double-frequency laser of a light path.Realized that one road double-frequency laser is transformed to the double-frequency laser that three road energy equate.
In order intuitively to obtain the result, system also is connected to a signal Processing and display system, is used to handle the data of three interference signal receivers and result is shown output, obtains the bidimensional ernst abbe angle of guide rail and the length data after the compensation in real time.
When linear measure longimetry, realized that (worktable) 18 of motion guide rail in the guideway arbitrary position multipath interference light on support rails 19 surveys length simultaneously, to obtain the progressive error of laser optical path on direction of motion in real time, calculate laser axis and the angle of measuring axis thus in real time, promptly measure ernst abbe angle in real time, thereby realize real-Time Compensation Abbe error.Because the influence of guide rail geometric accuracy, it is different and different because of motion guide rail position on support rails with the angle value of laser axis II to measure axis I.The geometric error of linear motion guide rail is decomposed into linearity and guide rail the linearity surface level in of guide rail in vertical plane, decomposition principle according to guide rail linearity, the angle of measuring axis and laser axis also can be divided into the angle β of horizontal axis and laser axis and the angle α of vertical axis and laser axis, sees Fig. 2.If α, β angle are known, the Abbe error of system is exactly two subitem Abbe error sums so.By above principle of design, can obtain two-way ernst abbe angle in real time.Fig. 3 is Abbe error real-Time Compensation multichannel photo structure figure, the moving direction of multi-path laser is all along X-axis, multi-path laser is from laser head 1, invest the pyramid reflecting prism mirror group 17 that is positioned at motion guide rail (worktable) 18 respectively through multipath interference and beam splitting parts 16, the structure of each pyramid reflecting prism, performance and technical indicator are all identical, and are positioned at same vertical plane YOZ plane.When motion guide rail (worktable) 18 when support rails 19 moves, each road interference light is worked simultaneously, respectively the relative distance that moves down of meter.If the axis of movement of worktable 18 (just measuring axis) parallels with the laser axis, then there is not Abbe error, the relative movement distance of every road laser all equates.In fact be subjected to the influence of guide rail geometric accuracy, the relative movement distance of each road interference light is unequal mutually.The displacement that will not change a branch of light of direction after will coming out from laser head is standard value, then can obtain Z in real time to the progressive error of two-beam and the Y progressive error to two-beam.Z to progressive error reflected the rectilinearity of guide rail horizontal operation face; Y to progressive error reflected the rectilinearity of the vertical workplace of guide rail, the stationkeeping of pyramid reflecting prism is utilized triangle relation, can obtain the ernst abbe angle of worktable on current location, can intuitively obtain the result by signal Processing and display system, real-time implementation to the compensation of Abbe error.
Abbe error real-Time Compensation accuracy height of the present invention, structure and principle are simple, and the installation site of optical element is not strict with, and it can be installed in away from the position that oil and cutting fluid are arranged, by revising the high precision that guarantees laser positioning; Revise in real time by common rail is carried out Abbe error, need not to change original guidance system, can reach higher in-process measurement precision, realize the transformation of old lathe, also extend in the on-line measurement of numerically-controlled machine and go, realize that in-process measurement is integrated.
Description of drawings
The present invention will be further described below in conjunction with drawings and Examples.
Fig. 1 is common laser interference length-measuring systematic schematic diagram
Fig. 2 is the angle decomposition principle figure that measures axis and laser axis
Fig. 3 is Abbe error real-Time Compensation multichannel photo structure figure
Fig. 4 is measuring system Abbe real-Time Compensation mathematical model figure
Fig. 5 is the composition system diagram that three road interference lights are realized the Abbe error real-Time Compensation
Among Fig. 2, I. measures axis, II. laser axis.
Among Fig. 3,1. laser head, 16. multi-passs are interfered and the beam splitting parts, 17. corner cube reflector mirror groups, 18. motion guide rails (worktable), 19. support rails.
Among Fig. 4, i. surface level rectilinearity, ii. vertical plane rectilinearity.
Among Fig. 5,1.HP5527 laser head, 2.1/3 beam splitter, 3, the 7.90 degree light beams mirrors of turning back, 4,8,10. interference mirror, 5,9,11. corner cube reflectors, 6.1/2 beam splitter, 12,13,14. interference signal receivers.15. laser instrument, 16. interfere and the beam splitting parts 17. interferometer prism of corner cube groups.20. signal Processing and display system.
Embodiment
Fig. 5 is the composition system diagram that three road interference lights are realized the Abbe error real-Time Compensation.The moving direction of three road light is all along X-axis, laser is HP5527 laser head 1 from laser instrument 15, by 1/3 beam splitter 2 laser is divided into two bundles, a branch of light that accounts for gross energy 1/3 is invested and is positioned at prism of corner cube 5 on the worktable (this Lu Guangwei Z to) by turn back mirror (3) and interference mirror (4) of 90 ° of light beams.Another Shu Guang (account for gross energy 2/3) is through being divided into two bundles behind 1/2 beam splitter 6, wherein a branch of light is directly invested through interference mirror 10 backs and is positioned at prism of corner cube 11 on the worktable (this Lu Guangwei X to), remaining a branch of light is positioned at prism of corner cube 9 on the motion platform (this Lu Guangwei Y to) through 90 degree light beams mirror 7 and the interference mirror 8 back trend of purchasing of turning back, the structure of these three prism of corner cubes, performance and technical indicator are all identical, and are positioned at same vertical plane (YOZ plane).Three prism of corner cubes 17 are with worktable 18 motions, and X, Y, Z three road light are worked simultaneously during worktable 18 motions, and interference signal receiver 14,13,12 receives measuring-signal simultaneously, respectively the mobile down relative distance of meter.If the axis of movement of motion platform 18 (just measuring axis) parallels with the laser axis, then there is not Abbe error, the relative movement distance of three road light all equates.In fact be subjected to the influence of guide rail linearity, the relative movement distance of three road light is unequal mutually.The displacement that will not change a branch of light of direction after will coming out from laser head is standard value, then can obtain in real time Z to X to the progressive error of two-beam, Y to the progressive error of X to two-beam.Z to X to progressive error reflected the rectilinearity of guide rail horizontal operation face; Y to X to progressive error reflected the rectilinearity of the vertical workplace of guide rail because the stationkeeping of three-beam is utilized simple triangle relation, just can obtain the ernst abbe angle of worktable on current location.
As shown in Figure 4, establishing OX is the standard light beam, and light beam OY and OX are on same surface level, and light beam OZ and OX are on same vertical plane; I is the surface level rectilinearity, and ii is the vertical plane rectilinearity; The spacing of OX and OY is H
Y, the spacing of OX and OZ is H
ZWhen worktable was walked a certain position, if the progressive error of light beam OY and OX is Δ Y, the progressive error of light beam OZ and OX was Δ Z, then has:
According to the ernst abbe angle of being obtained, just can carry out the Abbe compensation to whole measuring system.If given measured target is at the P point, the P point is z for y, P point with respect to the perpendicular positioning of Standard shafts OX poor (being vertical direction Abbe arm) with respect to the horizontal location of Standard shafts OX poor (being horizontal direction Abbe arm), when the length of stroke of standard light beam is L
XThe time, compensate the length of stroke L that back P is ordered through Abbe
PFor:
Above-mentioned operational method and some data input signal are handled and display system 20, and like this, when working table movement 18, output L can be calculated and show to signal Processing and display system 20 in real time
X, L
Y, L
Z, α, β, L
PDeng, the Abbe error real-Time Compensation of growth process is surveyed in realization.
Verify the ability of the present invention with the accurate two-frequency laser interferometer of a station symbol to measuring system Abbe error real-Time Compensation.The catoptron of standard double frequency is placed in the main optical path (y apart from system, z) on the position, y is that the catoptron of standard double frequency is poor apart from the horizontal level of main optical path OX, z is that the catoptron of standard double frequency is poor apart from the upright position of main optical path OX, when worktable when guide rail upper edge directions X moves, the reading that is subjected to the main optical path of bucking-out system is L
X, then be positioned at (y, z) the locational reading L that is subjected to bucking-out system
PCan be represented by the formula:
L
P＝L
X-K
y·y-K
z·z
K
yFor y to Abbe penalty coefficient, K
zFor z to the Abbe penalty coefficient.With L
PSurvey long reading with the standard two-frequency laser interferometer and compare,, illustrate that then the Abbe error compensation is correct if be subjected to the reading of bucking-out system consistent with the reading of standard two-frequency laser interferometer.During concrete matching measurement, measure and be about 1000mm at interval, after repeatedly measuring, get maximum comparison difference as the error of indication.
Empirical tests as can be known, positive stroke ratio is 0.9 μ m to the maximum error of indication in 35 meters scopes.It is 0.5 μ m that revesal is compared the maximum error of indication.
Therefore can proof system Abbe error real-Time Compensation correct.
Claims (3)
1. laser interference length-measuring system that realizes the Abbe error real-Time Compensation, the laser head that comprises a double frequency, interference mirror, movable corner cube reflector, the interference signal receiver, after the double-frequency laser of laser head emission reflects to prism of corner cube by interference mirror, return interference mirror, produce and interfere, form a light path by the reception of interference signal receiver, it is characterized in that: respectively have one by double-frequency laser to the vertical direction of prism of corner cube direction and the side of level at interference mirror, interference mirror, movable prism of corner cube, the light path system that the interference signal receiver is formed, three light path parallels.
2. a kind of laser interference length-measuring system that realizes the Abbe error real-Time Compensation according to claim 1, the double-frequency laser that it is characterized in that described three light paths is by a laser head, 1/3 beam splitter, 1/2 beam splitter, two 90 ° of light beams mirror of turning back produces, the double-frequency laser of double-frequency laser transmitter emission passes through 1/3 two bundle double-frequency lasers beam splitter generation 1/3 and 2/3, wherein 1/3 double-frequency laser is the double-frequency laser of a light path after one 90 ° of light beams are turned back mirror, 2/3 double-frequency laser produces two bundle double-frequency lasers again through 1/2 beam splitter, a branch of is the double-frequency laser of a light path, a branch of in addition after 90 ° of light beams are turned back mirror as the double-frequency laser of a light path.
3. according to claim 1,2 described a kind of laser interference length-measuring systems that realize the Abbe error real-Time Compensation, it is characterized in that system also is connected to a signal Processing and display system, be used to handle the data of three interference signal receivers and result is shown output, obtain the bidimensional ernst abbe angle of guide rail and the length data after the compensation in real time.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02157995 CN1252444C (en) | 2002-12-24 | 2002-12-24 | Laser interference length measuring system for realizing real-time compensation of Abbe errors |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02157995 CN1252444C (en) | 2002-12-24 | 2002-12-24 | Laser interference length measuring system for realizing real-time compensation of Abbe errors |
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| CN1510390A CN1510390A (en) | 2004-07-07 |
| CN1252444C true CN1252444C (en) | 2006-04-19 |
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Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GR1005258B (en) * | 2005-06-02 | 2006-07-12 | Τζημήτρας Ιωάννης | Laser interferometer system that applies a method of evaluation and compensation of deviations, which cause misalignment |
| CN100465579C (en) * | 2006-12-19 | 2009-03-04 | 中国航空工业第一集团公司北京长城计量测试技术研究所 | Laser plane coordinate standard device |
| CN102004027B (en) * | 2009-09-15 | 2012-05-30 | 中国计量科学研究院 | Laser two-coordinate device |
| WO2012134290A1 (en) * | 2011-03-30 | 2012-10-04 | Mapper Lithography Ip B.V. | Lithography system with differential interferometer module |
| CN102288104B (en) * | 2011-07-22 | 2014-02-12 | 中国科学院上海光学精密机械研究所 | Six-axis four-splitting interferometer |
| CN102353325B (en) | 2011-07-22 | 2013-08-14 | 中国科学院上海光学精密机械研究所 | Four-axial four-subdivision interferometer |
| CN104215181B (en) * | 2014-09-04 | 2017-02-15 | 中国计量科学研究院 | Large-length laser interferometer measurement system for eliminating Abbe error |
| CN109945781B (en) * | 2019-04-01 | 2020-12-04 | 合肥工业大学 | Z-axis Abbe error correction method of parallel double-joint coordinate measuring machine |
| CN110455226B (en) * | 2019-08-29 | 2024-04-30 | 天津大学 | Calibration system and method for laser collimation transceiving integrated straightness measurement |
| CN111238337B (en) * | 2020-01-21 | 2021-11-30 | 中国计量科学研究院 | Step gauge calibration method and system capable of eliminating Abbe errors based on laser interference |
| CN111338291B (en) * | 2020-04-07 | 2023-07-14 | 湖北文理学院 | Abbe error compensation method and system based on machine tool positioning precision measurement |
| CN115014194B (en) * | 2022-07-21 | 2023-03-10 | 北京易兴元石化科技有限公司 | Optical path coaxial inspection device for eliminating Abbe errors |
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