GR1005258B - Laser interferometer system that applies a method of evaluation and compensation of deviations, which cause misalignment - Google Patents

Laser interferometer system that applies a method of evaluation and compensation of deviations, which cause misalignment

Info

Publication number
GR1005258B
GR1005258B GR20050100273A GR20050100273A GR1005258B GR 1005258 B GR1005258 B GR 1005258B GR 20050100273 A GR20050100273 A GR 20050100273A GR 20050100273 A GR20050100273 A GR 20050100273A GR 1005258 B GR1005258 B GR 1005258B
Authority
GR
Greece
Prior art keywords
measurement
laser
moving
reflector
variation
Prior art date
Application number
GR20050100273A
Other languages
Greek (el)
Inventor
Πασχαλης Τσιμητρας
Original Assignee
Τζημήτρας Ιωάννης
Τζημήτρα Κυράνθη
Τζημήτρα Ζωή
Τζημήτρας Γεώργιος
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Τζημήτρας Ιωάννης, Τζημήτρα Κυράνθη, Τζημήτρα Ζωή, Τζημήτρας Γεώργιος filed Critical Τζημήτρας Ιωάννης
Priority to GR20050100273A priority Critical patent/GR1005258B/en
Publication of GR1005258B publication Critical patent/GR1005258B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers

Abstract

The outgoing Laser beam from the Laser source of an interferometer impacts on the beam splitter and is separated into a reference beam and a measurement beam. The reference beam is reflected on the stationary reference reflector, while the measurement beam is reflected on the moving measurement reflector. The two beams, reference beam and measurement beam, interfere on the interference signal detector and so determine the variation of the optical path of the Laser measurement beam, hence also the displacement of the moving measurement reflector and consequently also of the machine. In reality however, the moving measurement reflector is not moving in parallel with respect to the Laser beam. Because of this non-alignment between the moving axis of the machine and the Laser measurement beam as well as the potential coexistence of Abbe error, a variation of the optical path of the Laser measurement beam inside the moving measurement reflector occurs. The analysis, the calculation and the compensation of this optical variation of the Laser measurement beam are issues addressed by the present invention, in order to achieve more correct, more objective and complete measurement results.
GR20050100273A 2005-06-02 2005-06-02 Laser interferometer system that applies a method of evaluation and compensation of deviations, which cause misalignment GR1005258B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GR20050100273A GR1005258B (en) 2005-06-02 2005-06-02 Laser interferometer system that applies a method of evaluation and compensation of deviations, which cause misalignment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GR20050100273A GR1005258B (en) 2005-06-02 2005-06-02 Laser interferometer system that applies a method of evaluation and compensation of deviations, which cause misalignment

Publications (1)

Publication Number Publication Date
GR1005258B true GR1005258B (en) 2006-07-12

Family

ID=38109838

Family Applications (1)

Application Number Title Priority Date Filing Date
GR20050100273A GR1005258B (en) 2005-06-02 2005-06-02 Laser interferometer system that applies a method of evaluation and compensation of deviations, which cause misalignment

Country Status (1)

Country Link
GR (1) GR1005258B (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07181006A (en) * 1993-12-24 1995-07-18 Olympus Optical Co Ltd Laser length measuring equipment
US20040027576A1 (en) * 2002-06-17 2004-02-12 De Groot Peter J. Interferometric optical systems having simultaneously scanned optical path length and focus
CN1510390A (en) * 2002-12-24 2004-07-07 中国航空工业总公司第三○四研究所 Laser interfere length measuring system with real time compensation for Abbe error

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07181006A (en) * 1993-12-24 1995-07-18 Olympus Optical Co Ltd Laser length measuring equipment
US20040027576A1 (en) * 2002-06-17 2004-02-12 De Groot Peter J. Interferometric optical systems having simultaneously scanned optical path length and focus
CN1510390A (en) * 2002-12-24 2004-07-07 中国航空工业总公司第三○四研究所 Laser interfere length measuring system with real time compensation for Abbe error

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1995, no. 10 30 November 1995 (1995-11-30) *

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Effective date: 20110104