CN104807417A - Rapid measurement method for parallelism error of linear guide rails - Google Patents

Rapid measurement method for parallelism error of linear guide rails Download PDF

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Publication number
CN104807417A
CN104807417A CN201510138248.9A CN201510138248A CN104807417A CN 104807417 A CN104807417 A CN 104807417A CN 201510138248 A CN201510138248 A CN 201510138248A CN 104807417 A CN104807417 A CN 104807417A
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error
measurement
measuring
line slideway
straightness error
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蔡力钢
姜鑫
刘志峰
程强
秦德霖
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Beijing University of Technology
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Beijing University of Technology
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Abstract

The invention relates to a direct measurement method, especially a rapid measurement method for the parallelism error of linear guide rails. Data points on the linear guide rails are measured and collected via a laser interferometer; linearity measurement result analysis is carried out on data of the collection points via a linearity data analysis module in an XD laser measurement system to obtain the linearity errors of the guide rails; and a parallelism error analysis module in the XD laser measurement system fits the linearity errors of the two guide rails to obtain the parallelism error of the guide rails. The method can be used to solve the problems including low efficiency, large error and complex data processing of a present measurement method.

Description

A kind of method for fast measuring about line slideway parallelism error
Technical field
The present invention relates to a kind of method for fast measuring of line slideway parallelism error, belong to machine tool accuracy design field.
Background technology
The competition of equipment manufacture in world wide, makes lathe to high precision and maximization future development.Receive much concern as there being the guide rail parallelism error of extremely important impact to machine tool capability always.Therefore, record line slideway parallelism error how accurately, fast and efficiently to improve the machining precision of lathe, have important practical significance.
Parallelism tolerance is a kind of orientation tolerance, is the variation that element to be measured relative datum allows on direction.The instruments and methods detecting machine tool guideway parallelism error conventional has: signing method, level meter and autocollimator etc.Signing method can only be used for the measurement under the less condition of two guide rail distances; Level meter and autocollimator belong to high-precision measurement mechanism, be all after advanced for the data recorded row data processing, then the mode of drawing by hand draw parallelism error value in the past.Data processing is loaded down with trivial details, loses time, and efficiency is low.In international standard (ISO230-1-1996 lathe inspection general rule), laser interferometer is unique generally acknowledged, the most frequently used at present Precision of NC Machine Tool calibrating instrument, and it is very advantageous in function, sensitivity, stability, precision.Therefore, in this invention, use laser interferometer measurement line slideway parallelism error.
Laser interferometer measurement straight line degree measurement principle: laser interferometer measurement linearity mainly utilizes laser interference principle to measure, namely utilizes two bundle laser relative optical path measure of the change linearitys.Based on double-frequency interference principle straight line degree measurement schematic diagram as shown in Figure 1.Laser interferometer is divided into the linearly polarized light of two different frequencies on the two-beam line being with certain angle theta.Wherein measure catoptron to be also made up of the double mirror of the certain angle theta of band (the two-beam wire clamp angle that this angle and spectroscope separate is equal).Move spectroscope or catoptron during measurement, the transverse direction of moving-member (be longitudinally along optical axis direction) change can make the light path of two light beams change, and this variable quantity just obtains straightness error through process.
During measurement, if measure catoptron to move to measured position 2 by initial position 1, the speed along measuring basis axis direction is V, can obtain according to Doppler effect and Fig. 1:
f 1 ′ = f 1 ( 1 ± 2 v cos θ 2 c ) - - - ( 1 )
f 2 ′ = f 2 ( 1 ± 2 v cos θ 2 c ) - - - ( 2 )
In formula: f 1, f 2for two frequencies of two-frequency laser output orthogonal linearly polarized light, f 1', f 2' two frequencies containing Doppler frequency difference, c is light speed in a vacuum, and θ holds Lars to pause the light splitting angle of prism.
When measurement catoptron and laser instrument move toward one another hourly velocity are that v just gets, it is negative that opposing motion hourly velocity is that v gets.The measuring beam f caused by Doppler effect 1and f 2frequency change be:
Δ f 1 = f 1 ′ - f 1 = ± 2 v cos θ 2 c f 1 = ± v cos θ 2 1 2 c f 1 = ± v cos θ 2 λ 1 2 - - - ( 3 )
Δ f 2 = f 2 ′ - f 2 = ± 2 v cos θ 2 c f 2 = ± v cos θ 2 1 2 c f 2 = ± v cos θ 2 λ 2 2 - - - ( 4 )
In formula: λ 1, λ 2be the optical maser wavelength of two frequencies.
Measuring catoptron displacement is s, and the time is t, and by reference signal, (frequency is f 1-f 2) and first via measuring-signal (frequency is f 1-f 2± Δ f 1) ask difference frequency can obtain Δ f 1, by reference signal, (frequency is f 1-f 2) and the second road measuring-signal (frequency is f 1-f 2± Δ f 2) ask difference frequency can obtain Δ f 2, then the light path (displacement) of two corresponding light paths is changed to:
L 1 = ∫ 0 t v cos θ 2 dt = λ 1 2 ∫ 0 t Δ f 1 dt - - - ( 5 )
L 2 = ∫ 0 t v cos θ 2 dt = λ 2 2 ∫ 0 t Δ f 2 dt - - - ( 6 )
The optical path difference of two light paths is:
ΔL＝L 2-L 1(7)
Geometric relationship according to Fig. 1, the straight line angle value can obtaining measurand is:
Δh = Δh 2 sin θ 2 = L 2 - L 1 2 sin θ 2 - - - ( 8 )
In formula: when Δ L is for time negative, measures catoptron and upwards depart from datum axis; When Δ L is timing, measure catoptron and be deflected downwardly datum axis.
Summary of the invention
The XD series laser interferometer that the present invention produces with automatic precision engineering corporation of the U.S. (API) is for measuring equipment, with the parallelism error of heavy digital control machine tool line slideway for research object, the method for fast measuring about line slideway parallelism error is proposed.
For achieving the above object, the technical solution used in the present invention is a kind of method for fast measuring about line slideway parallelism error, the method is a kind of indirect measurement method, first the straightness error of two closed slides is measured respectively, again by calculating two guide rail linearity error fit, obtain parallelism error.If two parallel lines guide rails are respectively guide rail a and guide rail b.The method for fast measuring process flow diagram of line slideway parallelism error of the present invention as shown in Figure 2
Implementation step of the present invention is as follows,
Step one directly measures the straightness error of line slideway a
1. plan N number of test sample point
2. assembly is installed and light path aligning
After having planned test sample point, complete the index path of straight line degree measurement is designed, assembly install and light path aim at.
The XD series laser interferometer straight line degree measurement system that automatic precision engineering corporation of the U.S. (API) produces comprises laser head (being made up of laser main frame and front end interference mirror), pentaprism (spectroscope), 6-D sensing unit (catoptron), multiaxis alignment jig.Its measurement components installation diagram as shown in Figure 3.In measure field, laser head and pentaprism are fixed on system body, and 6-D sensing unit is fixed on alignment jig.
3. data acquisition and data analysis
After all components installs, carry out the installation of assembly alignment and XD sensor wireless transceivers.After completing XD system parameter setting, just data acquisition can be carried out.After data acquisition process, the collection of prompting user data has completed and has preserved by program, and data analysis function at this moment can be utilized to obtain measuring straightness error result.
Step 2 measures the straightness error of line slideway b
The measuring straightness error of line slideway b is similar to step one, unlike measurement components mounting portion.Line slideway b measuring straightness error assembly installation diagram as shown in Figure 4.The step repeating step one measures the straightness error of line slideway b.
Step 3 two parallel lines guide rail parallelism error indirect inspection
The laser interferometer measurement machine tool guideway depth of parallelism realizes based on the function of laser interferometer measurement linearity: measure the straightness error that two guide rails are respective under the same reference line angular bisector of double mirror (in the laser interferometer measurement linearity annex) condition, after two guide rail linearity measurements complete, in XD system, carry out depth of parallelism analysis, the parallelism error of guide rail can be calculated through data fitting analysis.
When measuring two the horizontal guide rail linearitys in x-axis direction, its measuring basis is the angular bisector of double mirror in laser interferometer measurement linearity annex, these two angular bisectors are positioned at same plane, and be parallel to each other, therefore can think that two guide rails are with the measuring straightness error carried out under same reference line condition.
Accompanying drawing explanation
Fig. 1 is the straight line degree measurement schematic diagram based on double-frequency interference principle.
Fig. 2 is the method for fast measuring process flow diagram of line slideway parallelism error of the present invention.
Fig. 3 is the measuring straightness error assembly installation diagram of line slideway a.
Fig. 4 is the measuring straightness error assembly installation diagram of line slideway b.
Fig. 5 is planer-type five-axis robot machine tool structure sketch.
Embodiment
For planer-type five-axis robot lathe, set up lathe cartesian coordinate system, as shown in Figure 5.The XD series laser interferometer that the present invention adopts automatic precision engineering corporation of the U.S. (API) to produce, measures planer-type five-axis robot lathe x direction guiding rail straightness error.The device that the method relates to comprises laser head (being made up of interferometer main frame and front end interference mirror), 6-D sensing unit (catoptron), pentaprism, alignment jig, tested x to line slideway.
Step one directly measures the straightness error of line slideway a
1. plan N number of test sample point
According at equal intervals, on line slideway 5, plan N number of test sample point at tested x.
2. assembly is installed and light path aligning
After having planned test sample point, the assembly of accomplish linear degree error measuring means has been needed to install and light path aligning.
Assembly is installed: laser head is fixedly mounted by magnetic base, and 6-D sensing unit is fixed on alignment jig, along x direction guiding rail moving linearly.
Light path aim at: when laser head and sensing unit nearest time, by adjustment sensing unit position adjust the lateral attitude of sensing unit relative to laser head; When laser head and sensing unit farthest time, change beam direction by the adjustment nail on adjustment laser head rapid alignment fixture.Thus make laser datum axis parallel with x direction guiding rail axis of movement.
3. data acquisition and data analysis
Before the start of the measurement, must system parameter setting be carried out, define the parameters such as some measuring units, sensitivity and sensor accuracy, complete the setting of XD measuring system.
Data acquisition: after XD measuring system optimum configurations completes, just can carry out the measurement of x direction guiding rail straightness error.6-D sensor is moved to first measurement point, press " Enter " key and start data acquisition, after gathering the data of first point, move to next measurement point, then press " Enter " key and gather second measurement point.So repeat, measure each measurement point.
Data analysis: after data acquisition process, the collection of prompting user data has completed and has preserved by program, and data analysis function at this moment can be utilized to calculate straightness error.Click " Open " option under master menu " DataAnalysis ", will open the open file dialogs of a standard, select straightness error data file, analytical calculation obtains straightness error.
Step 2 measures the straightness error of line slideway b
The measuring straightness error of line slideway b is similar to step one, unlike measurement components mounting portion.Line slideway b measuring straightness error assembly installation diagram as shown in Figure 4.The step repeating step one measures the straightness error of line slideway b.
It is to be noted that XD measuring system optimum configurations is consistent with the optimum configurations of step one; When measuring guide rail b straightness error, reading and the sensing unit angle of pitch B reading of level meter will be consistent with during the first orbit measurement.
Step 3 two parallel lines guide rail parallelism error indirect inspection
After two guide rail linearity error measures complete, choice menus " DataAnalysis/Open (opening) " option, by " File Open " dialog box of an ejection standard.Select the depth of parallelism at " File ofType (file type) " place, calculated the parallelism error that just can obtain two closed slides by data fitting.
The XD series laser interferometer that this invention is produced with automatic precision engineering corporation of the U.S. (API) is for measuring equipment, with the parallelism error of heavy digital control machine tool line slideway for research object, the method for fast measuring about line slideway parallelism error is proposed.Laser interferometer is high-precision surveying instrument, has been widely used in various precision measurement, not only sensitivity and accuracy higher, and the acquisition and processing of measurement data completes by computing machine, convenient and swift.The XD series laser interferometer that the automatic precision engineering corporation of the U.S. (API) used in this invention produces can measure lathe 21 geometric errors, in conjunction with laser interferometry and photoelectric auto-collimation technology, not only can be used for the final evaluation of precision, also can be used for the mounting and adjusting of lathe.Its highest measurement precision is: 0.5ppm (standard form), 0.2ppm (accurate).
The present invention is based on the XD series laser interferometer that automatic precision engineering corporation of the U.S. (API) produces, propose a kind of method for fast measuring about parallel lines guide rail parallelism error.Through examples prove, the method has efficient, quick, high-precision advantage for solution parallel lines guide rail parallelism error measure problem.

Claims (2)

1. the method for fast measuring about line slideway parallelism error, it is characterized in that: the method is a kind of indirect measurement method, first measure respectively the straightness error of two closed slides, then by calculating two guide rail linearity error fit, obtain parallelism error; If two parallel lines guide rails are respectively guide rail a and guide rail b;
Implementation step of the present invention is as follows,
Step one directly measures the straightness error of line slideway a
S1.1 plans N number of test sample point
S1.2 assembly is installed and light path is aimed at
After having planned test sample point, complete the index path of straight line degree measurement is designed, assembly install and light path aim at;
Laser interferometer straight line degree measurement system comprises laser head, pentaprism, 6-D sensing unit, multiaxis alignment jig; In measure field, laser head and pentaprism are fixed on system body, and 6-D sensing unit is fixed on alignment jig;
S1.3 data acquisition and data analysis
After all components installs, carry out the installation of assembly alignment and XD sensor wireless transceivers; After completing XD system parameter setting, just data acquisition can be carried out; After data acquisition process, the collection of prompting user data has completed and has preserved by program, and data analysis function at this moment can be utilized to obtain measuring straightness error result;
Step 2 measures the straightness error of line slideway b
The measuring straightness error of line slideway b is similar to step one, unlike measurement components mounting portion; The step repeating step one measures the straightness error of line slideway b;
Step 3 two parallel lines guide rail parallelism error indirect inspection
The laser interferometer measurement machine tool guideway depth of parallelism realizes based on the function of laser interferometer measurement linearity: measure the straightness error that two guide rails are respective under same reference line condition, after two guide rail linearity measurements complete, in XD system, carry out depth of parallelism analysis, the parallelism error of guide rail can be calculated through data fitting analysis;
When measuring two the horizontal guide rail linearitys in x-axis direction, its measuring basis is the angular bisector of double mirror in laser interferometer measurement linearity annex, these two angular bisectors are positioned at same plane, and be parallel to each other, therefore can think that two guide rails are with the measuring straightness error carried out under same reference line condition.
2. a kind of method for fast measuring about line slideway parallelism error according to claim 1, is characterized in that: for planer-type five-axis robot lathe, set up lathe cartesian coordinate system; Planer-type five-axis robot lathe x direction guiding rail straightness error; The device that the method relates to comprises laser head, 6-D sensing unit, pentaprism, alignment jig, tested x to line slideway;
Step one directly measures the straightness error of line slideway a
S1.1 plans N number of test sample point
According at equal intervals, on line slideway 5, plan N number of test sample point at tested x;
S1.2 assembly is installed and light path is aimed at
After having planned test sample point, the assembly of accomplish linear degree error measuring means has been needed to install and light path aligning;
Assembly is installed: laser head is fixedly mounted by magnetic base, and 6-D sensing unit is fixed on alignment jig, along x direction guiding rail moving linearly;
Light path aim at: when laser head and sensing unit nearest time, by adjustment sensing unit position adjust the lateral attitude of sensing unit relative to laser head; When laser head and sensing unit farthest time, change beam direction by the adjustment nail on adjustment laser head rapid alignment fixture; Thus make laser datum axis parallel with x direction guiding rail axis of movement;
S1.3 data acquisition and data analysis
Before the start of the measurement, must system parameter setting be carried out, define the parameters such as some measuring units, sensitivity and sensor accuracy, complete the setting of XD measuring system;
Data acquisition: after XD measuring system optimum configurations completes, just can carry out the measurement of x direction guiding rail straightness error; 6-D sensor is moved to first measurement point, press " Enter " key and start data acquisition, after gathering the data of first point, move to next measurement point, then press " Enter " key and gather second measurement point; So repeat, measure each measurement point;
Data analysis: after data acquisition process, the collection of prompting user data has completed and has preserved by program, and data analysis function at this moment can be utilized to calculate straightness error; Click " Open " option under master menu " DataAnalysis ", will open the open file dialogs of a standard, select straightness error data file, analytical calculation obtains straightness error; Step 2 measures the straightness error of line slideway b
The measuring straightness error of line slideway b is similar to step one, unlike measurement components mounting portion; The step repeating step one measures the straightness error of line slideway b;
It is to be noted that XD measuring system optimum configurations is consistent with the optimum configurations of step one; When measuring guide rail b straightness error, reading and the sensing unit angle of pitch B reading of level meter will be consistent with during the first orbit measurement;
Step 3 two parallel lines guide rail parallelism error indirect inspection
After two guide rail linearity error measures complete, choice menus " DataAnalysis/Open " option, by " File Open " dialog box of an ejection standard; Select the depth of parallelism at " File ofType " place, calculated the parallelism error that just can obtain two closed slides by data fitting.
CN201510138248.9A 2015-03-26 2015-03-26 Rapid measurement method for parallelism error of linear guide rails Pending CN104807417A (en)

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CN105403189A (en) * 2015-12-18 2016-03-16 华中科技大学 Guide rail parallelism measurement method and apparatus
CN105783790A (en) * 2016-05-09 2016-07-20 常州机电职业技术学院 Tool and method for measuring verticality between guide rails
CN106610271A (en) * 2015-10-22 2017-05-03 冯黎 Dynamic correction system for inertia error of large-gantry measuring machine
CN106767395A (en) * 2016-11-09 2017-05-31 北京工业大学 One kind is used for six efficient measuring systems of geometric error high resolution of line slideway and method
CN106989661A (en) * 2017-03-10 2017-07-28 天津大学 A kind of method for testing lathe hydrostatic slideway surface shape error
CN108226758A (en) * 2018-03-09 2018-06-29 京东方科技集团股份有限公司 A kind of detection device and its control method
CN108759763A (en) * 2018-09-04 2018-11-06 上海宝冶建筑工程有限公司 A kind of long range parallel track degree measurement method and system
CN109489589A (en) * 2018-11-07 2019-03-19 昌河飞机工业（集团）有限责任公司 A kind of detection of Longmen machine tool guide rail parallelism and bearing calibration
CN110186397A (en) * 2019-04-12 2019-08-30 华中科技大学 A kind of guide rail parallelism measuring device and method
CN111457847A (en) * 2020-06-11 2020-07-28 吉林大学 Large-scale cylinder part overall quality check out test set
CN112621387A (en) * 2020-12-28 2021-04-09 齐重数控装备股份有限公司 Method for detecting parallelism of vertical tool rest moving on working table of heavy vertical lathe
CN113188479A (en) * 2021-03-31 2021-07-30 成都飞机工业（集团）有限责任公司 Large-span guide rail parallelism detection method
CN113551635A (en) * 2021-06-29 2021-10-26 浙江威肯特智能机械有限公司 Guide rail parallelism detection mechanism
CN113772513A (en) * 2021-10-15 2021-12-10 广州塞维拉电梯轨道系统有限公司 Elevator guide rail detection method and system

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CN106610271B (en) * 2015-10-22 2019-03-26 冯黎 Big gantry measuring machine inertial error dynamic correction system
CN106610271A (en) * 2015-10-22 2017-05-03 冯黎 Dynamic correction system for inertia error of large-gantry measuring machine
CN105403189A (en) * 2015-12-18 2016-03-16 华中科技大学 Guide rail parallelism measurement method and apparatus
CN105783790A (en) * 2016-05-09 2016-07-20 常州机电职业技术学院 Tool and method for measuring verticality between guide rails
CN106767395A (en) * 2016-11-09 2017-05-31 北京工业大学 One kind is used for six efficient measuring systems of geometric error high resolution of line slideway and method
CN106767395B (en) * 2016-11-09 2019-06-07 北京工业大学 One kind being used for the efficient measuring system of six geometric error high resolution of linear guide and method
CN106989661A (en) * 2017-03-10 2017-07-28 天津大学 A kind of method for testing lathe hydrostatic slideway surface shape error
CN106989661B (en) * 2017-03-10 2019-05-17 天津大学 A method of test lathe hydrostatic slideway surface shape error
CN108226758A (en) * 2018-03-09 2018-06-29 京东方科技集团股份有限公司 A kind of detection device and its control method
CN108759763A (en) * 2018-09-04 2018-11-06 上海宝冶建筑工程有限公司 A kind of long range parallel track degree measurement method and system
CN109489589A (en) * 2018-11-07 2019-03-19 昌河飞机工业（集团）有限责任公司 A kind of detection of Longmen machine tool guide rail parallelism and bearing calibration
CN110186397A (en) * 2019-04-12 2019-08-30 华中科技大学 A kind of guide rail parallelism measuring device and method
CN111457847A (en) * 2020-06-11 2020-07-28 吉林大学 Large-scale cylinder part overall quality check out test set
CN112621387A (en) * 2020-12-28 2021-04-09 齐重数控装备股份有限公司 Method for detecting parallelism of vertical tool rest moving on working table of heavy vertical lathe
CN113188479A (en) * 2021-03-31 2021-07-30 成都飞机工业（集团）有限责任公司 Large-span guide rail parallelism detection method
CN113551635A (en) * 2021-06-29 2021-10-26 浙江威肯特智能机械有限公司 Guide rail parallelism detection mechanism
CN113772513A (en) * 2021-10-15 2021-12-10 广州塞维拉电梯轨道系统有限公司 Elevator guide rail detection method and system

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