CN104097114A - Method for measuring and separating geometric errors of multi-axis-linkage numerical control machine tool - Google Patents

Abstract

The invention relates to the field of geometric error testing of machine tools, in particular to a method for measuring and separating geometric errors of a multi-axis-linkage numerical control machine tool. The method includes creating a testing space for the multi-axis-linkage numerical control machine tool; adopting a laser interferometer to test positioning errors of three feeding axes X, Y and Z of the machine tool, and testing three straight lines on each feeding axis; building a separation model of machine tool error elements, acquiring an angle error of each axis through two positioning error data of the corresponding axis, and acquiring linearity errors of each axis by calculating jolt-swinging and yawing errors. By the method, one positioning error, one jolt-swinging error, one yawing error and two linearity errors of each feeding axis of the machine tool can be acquired, and fifteen errors in total can be acquired for the three axes. A novel method is provided to quickly test the geometric errors of the machine tool.

Description

A kind of geometric error of multi-shaft linkage numerical control machine is measured and separation method

Technical field

The present invention relates to lathe geometric error field tests, the geometric error that is specially a kind of multi-shaft linkage numerical control machine is measured and separation method.

Background technology

The main method of at present geometric error of machine tool feed axle being tested is individual error test.The most frequently used tester of domestic lathe production firm is the laser interferometer of Reinshaw company.Although such method of testing is comparatively accurate, shortcoming is also a lot, as low in testing efficiency, if need to be grasped all geometric errors of lathe, needs several days time of tens days even.In addition, test needed mirror group a lot, as linear reflective mirror, spectroscope, linearity speculum, linearity interference mirror, angled mirrors, angle interference mirror, optics square etc., these mirror groups are comparatively expensive, limited to a certain extent carrying out of the comprehensive geometric error test job of lathe.

In order to address the above problem, API company of the U.S. has developed 6D laser interferometer, and once mounting is six errors of measure linear axle simultaneously, have improved testing efficiency, but price is comparatively expensive.Some scholar's research the novel test method based on Reinshaw company laser interferometer.Professor Liu Youwu of University Of Tianjin has proposed 9 line methods of testing, utilizes this method measuring process simple, and slotted line number is few, and data processing is also easy, but must have the laser interferometer of energy while measurement and positioning error and two straightness errors.22 collimation method tests need to suppose that the algebraical sum of machine tool error is 0, and for traversal solves, solution procedure complexity, p-wire number is more.

Summary of the invention

The object of the present invention is to provide a kind of geometric error of multi-shaft linkage numerical control machine to measure and separation method, solve the lathe geometric error problem of test fast.

To achieve these goals, technical scheme of the present invention is as follows: a kind of geometric error of multi-shaft linkage numerical control machine is measured and separation method, it is characterized in that, test as follows: the detailed process of the position error of 9 lines of employing laser interferometer test lathe is as follows:

(1) set up the test space of machining center: (0,0,0) of lathe coordinate system is set for the starting point of test coordinate system;

(2) in the following manner the position error of X, Y, tri-axles of Z is tested, obtain the position error test result of 9 lines;

Line 1:Y, Z axis maintain static, X-axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth; Speculum is arranged on workbench, and interference mirror is fixed on main shaft, adjusts and makes, on laser head, interference mirror, speculum online 1, to ensure that in whole motion process, light all can be back to the light entrance on laser head;

Line 2:X, Z axis maintain static, Y-axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth;

Line 3:X, Y-axis maintain static, Z axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth;

Line 4:Y, Z axis maintain static, X-axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth;

Line 5:Y, Z axis maintain static, X-axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth;

Line 6:X, Z axis maintain static, Y-axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth;

Line 7:X, Z axis maintain static, Y-axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth;

Line 8:X, Y-axis maintain static, and Z axis moving linearly is measured spacing every one and stopped 4 seconds, and X, Y-axis maintain static, and measure 3 back and forth;

Line 9:X, Y-axis maintain static, and Z axis moving linearly is measured spacing every one and stopped 4 seconds, and X, Y-axis maintain static, and measure 3 back and forth;

(3) separate for the geometric error of carrying out machine tool feed axle.

In described step (3), can position error identification, concrete steps are: along the 1st, 2,3 articles of straight line test position fix errors, initial point is (0,0,0) respectively, terminal be respectively (x, 0,0), (0, _y, 0) and (0,0, z).The position error disjunctive model of X, Y, tri-feed shafts of Z is as follows:

$\left\{\begin{array}{c}\mathrm{\Δx}=\mathrm{\ΔL}(x,\mathrm{0,0})\\ \mathrm{\Δy}=\mathrm{\ΔL}(0,y,0)\\ \mathrm{\Δz}=\mathrm{\ΔL}(\mathrm{0,0},z)\end{array}\right.$

Wherein, Δ L is the poor of actual range and ideal distance, Δ L=L'-L=[Δ L _xΔ L _yΔ L _z1].

In described step (3), can run and put and Run-out error identification, concrete steps are: along 4th～9 articles of straight line test position fix errors, and utilize following formula to calculate top pendulum and Run-out error:

$\left\{\begin{array}{c}\mathrm{\Δ}{\mathrm{\β}}_x=[\mathrm{\ΔL}(x,0,z_0)-\mathrm{\ΔL}(x,\mathrm{0,0})]/z_0\\ {\mathrm{\Δ\γ}}_x=[\mathrm{\ΔL}(x,\mathrm{0,0})-\mathrm{\ΔL}(x,y_0,0)]/y_0\\ {\mathrm{\Δ\α}}_y=[\mathrm{\ΔL}(0,y,0)-\mathrm{\ΔL}(0,y,z_0)]/z_0\\ {\mathrm{\Δ\γ}}_y=[\mathrm{\ΔL}{(x}_0,y,0)-\mathrm{\ΔL}(0,y,0)]/x_0\\ {\mathrm{\Δ\α}}_z=[\mathrm{\ΔL}(0,y_0,z)-\mathrm{\ΔL}(\mathrm{0,0},z)]/y_0\\ {\mathrm{\Δ\β}}_z=[\mathrm{\ΔL}(\mathrm{0,0},z)-\mathrm{\ΔL}(x_0,0,z)]/x_0\end{array}\right..$

In described step (3), can carry out linearity identification, adopt following formula to calculate:

$\left\{\begin{array}{c}{\mathrm{\Δy}}_x=\∫\mathrm{\Δ}{\mathrm{\γ}}_x\mathrm{dx}-L_{\mathrm{yx}}=P_{\mathrm{yx}}-L_{\mathrm{yx}}\\ {\mathrm{\Δz}}_x=\∫\mathrm{\Δ}{\mathrm{\β}}_x\mathrm{dx}-L_{\mathrm{zx}}=P_{\mathrm{zx}}-L_{\mathrm{zx}}\\ {\mathrm{\Δx}}_y=\∫\mathrm{\Δ}{\mathrm{\γ}}_y\mathrm{dy}-L_{\mathrm{xy}}=P_{\mathrm{xy}}-L_{\mathrm{xy}}\\ {\mathrm{\Δz}}_y=\∫\mathrm{\Δ}{\mathrm{\α}}_y\mathrm{dy}-L_{\mathrm{zy}}=P_{\mathrm{zy}}-L_{\mathrm{zy}}\\ {\mathrm{\Δx}}_z=\∫\mathrm{\Δ}{\mathrm{\β}}_z\mathrm{dz}-L_{\mathrm{xz}}=P_{\mathrm{xz}}-L_{\mathrm{xz}}\\ {\mathrm{\Δy}}_z=\∫\mathrm{\Δ}{\mathrm{\α}}_z\mathrm{dz}-L_{\mathrm{yz}}=P_{\mathrm{yz}}-L_{\mathrm{yz}}\end{array}\right.$

L in above formula _uv(Z and u ≠ v) are best fit integration P for u, v=X, Y _uvstraight line;

Wherein:

L _uv＝av+b

$a=\frac{1}{n\underset{i=1}{\overset{n}{\mathrm{\Σ}}}{v_i}^2-{\left(\underset{i=1}{\overset{n}{\mathrm{\Σ}}}{v}_i\right)}^2}[n\underset{i=1}{\overset{n}{\mathrm{\Σ}}}\left(v_i{P}_{\mathrm{uvi}}\right)-\underset{i=1}{\overset{n}{\mathrm{\Σ}}}{v}_i\underset{i=1}{\overset{n}{\mathrm{\Σ}}}{P}_{\mathrm{uvi}}]$

$b=\frac{1}{n}\underset{i=1}{\overset{n}{\mathrm{\Σ}}}{P}_{\mathrm{uvi}}-\frac{a}{n}\underset{i=1}{\overset{n}{\mathrm{\Σ}}}{v}_i.$

The invention has the beneficial effects as follows:

1, the present invention has set up the geometric error disjunctive model of multi-shaft linkage numerical control machine, can realize the separation to 9 p-wires.

2, the present invention proposes a kind of geometric error test and separation method of multi-shaft linkage numerical control machine of system, complete testing process and disjunctive model are provided, can obtain position error, top pendulum and the Run-out error of the each feed shaft of lathe, 2 straightness errors by the method, three axles amount to 15 errors.For the quick test of the multinomial geometric error of lathe provides new method.

Brief description of the drawings

Fig. 1 is position error test schematic diagram of the present invention.

Detailed description of the invention

Example below in conjunction with accompanying drawing and vertical machining centre is further illustrated the present invention.

The inventive method is to utilize conventional Renishaw Laser Interferometer at present to test.

As shown in Figure 1: a kind of geometric error of multi-shaft linkage numerical control machine is measured and separation method, carries out in accordance with the following steps:

(1) set up the test space of machining center.(0,0,0) that lathe coordinate system is set for the starting point of test coordinate system, the test stroke of X-direction is-840mm, the test stroke-480mm of Y direction, and the test stroke of Z-direction is-530mm.

(2) in the following manner the position error of X, Y, tri-axles of Z is tested.

Line 1:Y, Z axis maintain static, X-axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth.Speculum is arranged on workbench, and interference mirror is fixed on main shaft somewhere, adjusts and makes, on laser head, interference mirror, speculum online 1, to ensure that in whole motion process, light all can be back to the light entrance on laser head.Line 2:X, Z axis maintain static, Y-axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth.Line 3:X, Y-axis maintain static, Z axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth.Line 4:Y, Z axis maintain static, X-axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth.Line 5:Y, Z axis maintain static, X-axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth.Line 6:X, Z axis maintain static, Y-axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth.Line 7:X, Z axis maintain static, Y-axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth.Line 8:X, Y-axis maintain static, and Z axis moving linearly is measured spacing every one and stopped 4 seconds, and X, Y-axis maintain static, and measure 3 back and forth.Line 9:X, Y-axis maintain static, and Z axis moving linearly is measured spacing every one and stopped 4 seconds, and X, Y-axis maintain static, and measure 3 back and forth.

Article 9, the position error test result of line is respectively:

Line_1＝[-2.07?-5.05?-8.68?-11.70?-15.53?-20.57?-25.52?-31.22?-35.68-40.27?-41.65?-44.48?-47.92?-50.37?-53.37?-57.73?-62.02?-65.35?-70.42-72.82?-76.03]

Line_2＝[-2.67?-7.10?-7.68?-12.95?-14.65?-18.38?-20.15?-22.97?-27.53-29.52?-33.53?-34.05?-38.48?-39.98?-44.35?-45.65?-46.83?-49.83?-50.67-54.33?-55.60]

Line_3＝[-0.33?-1.07?-6.18?-6.80?-11.40?-13.22?-14.80?-19.50?-23.77-26.85?-30.38?-29.53?-32.28?-29.28?-31.00?-31.62?-35.02?-36.07?-38.97-40.87?-42.32]

Line_4＝[-2.28?-6.03?-10.25?-14.32?-18.73?-24.67?-30.43?-37.02?-42.27-45.43?-49.13?-52.85?-56.85?-59.53?-62.75?-68.63?-73.92?-77.85?-83.78-86.88?-90.80]

Line_5＝[-0.98?-3.95?-7.75?-10.40?-13.35?-17.80?-20.83?-25.12?-28.17-30.17?-33.22?-37.00?-40.40?-42.73?-45.38?-49.23?-53.05?-55.32?-60.40-62.48?-64.95]

Line_6＝[-8.47?-6.62?-10.60?-13.90?-14.32?-19.47?-21.00?-25.37?-25.85-29.88?-33.67?-35.30?-37.88?-39.27?-44.73?-48.17?-52.57?-55.58?-58.57-61.63?-61.62]

Line_7＝[-0.52?1.08?-2.93?-5.68?-6.40?-11.43?-13.10?-17.53?-18.23-22.40?-26.05?-27.28?-29.67?-31.50?-37.18?-40.57?-45.75?-49.27?-51.83-54.80?-55.98]

Line_8＝[-0.25?-1.33?-5.32?-6.83?-10.33?-13.20?-14.10?-18.73?-19.93-25.02?-27.55?-29.55?-31.35?-28.38?-27.10?-30.82?-32.18?-33.20?-34.15-34.98?-39.47]

Line_9＝[-0.62?-1.55?-5.57?-7.10?-10.45?-13.47?-14.22?-18.97?-20.07-25.13?-27.80?-29.77?-31.40?-28.57?-27.38?-30.82?-32.28?-33.32?-34.23-35.07?-39.48]

On the basis of above test, the separation method of the position error of the each feed shaft of lathe, top pendulum and Run-out error, 2 straightness errors is as follows:

1) when position error identification respectively along the 1st, 2,3 articles of straight line test position fix errors, initial point is (0,0,0), terminal be respectively (x, 0,0), (0, y, 0) and (0,0, z).The position error disjunctive model of X, Y, tri-feed shafts of Z is as follows:

$\left\{\begin{array}{c}\mathrm{\Δx}=\mathrm{\ΔL}(x,\mathrm{0,0})\\ \mathrm{\Δy}=\mathrm{\ΔL}(0,y,0)\\ \mathrm{\Δz}=\mathrm{\ΔL}(\mathrm{0,0},z)\end{array}\right.$

Wherein, Δ L is the poor of actual range and ideal distance, Δ L=L'-L=[Δ L _xΔ L _yΔ L _z1].

2) when top pendulum and Run-out error identification along 4th～9 articles of straight line test position fix errors, and utilize following formula to calculate top and put and Run-out error.

$\left\{\begin{array}{c}\mathrm{\Δ}{\mathrm{\β}}_x=[\mathrm{\ΔL}(x,0,z_0)-\mathrm{\ΔL}(x,\mathrm{0,0})]/z_0\\ {\mathrm{\Δ\γ}}_x=[\mathrm{\ΔL}(x,\mathrm{0,0})-\mathrm{\ΔL}(x,y_0,0)]/y_0\\ {\mathrm{\Δ\α}}_y=[\mathrm{\ΔL}(0,y,0)-\mathrm{\ΔL}(0,y,z_0)]/z_0\\ {\mathrm{\Δ\γ}}_y=[\mathrm{\ΔL}{(x}_0,y,0)-\mathrm{\ΔL}(0,y,0)]/x_0\\ {\mathrm{\Δ\α}}_z=[\mathrm{\ΔL}(0,y_0,z)-\mathrm{\ΔL}(\mathrm{0,0},z)]/y_0\\ {\mathrm{\Δ\β}}_z=[\mathrm{\ΔL}(\mathrm{0,0},z)-\mathrm{\ΔL}(x_0,0,z)]/x_0\end{array}\right..$

3) linearity identification adopts following formula to calculate.

$\left\{\begin{array}{c}{\mathrm{\Δy}}_x=\∫\mathrm{\Δ}{\mathrm{\γ}}_x\mathrm{dx}-L_{\mathrm{yx}}=P_{\mathrm{yx}}-L_{\mathrm{yx}}\\ {\mathrm{\Δz}}_x=\∫\mathrm{\Δ}{\mathrm{\β}}_x\mathrm{dx}-L_{\mathrm{zx}}=P_{\mathrm{zx}}-L_{\mathrm{zx}}\\ {\mathrm{\Δx}}_y=\∫\mathrm{\Δ}{\mathrm{\γ}}_y\mathrm{dy}-L_{\mathrm{xy}}=P_{\mathrm{xy}}-L_{\mathrm{xy}}\\ {\mathrm{\Δz}}_y=\∫\mathrm{\Δ}{\mathrm{\α}}_y\mathrm{dy}-L_{\mathrm{zy}}=P_{\mathrm{zy}}-L_{\mathrm{zy}}\\ {\mathrm{\Δx}}_z=\∫\mathrm{\Δ}{\mathrm{\β}}_z\mathrm{dz}-L_{\mathrm{xz}}=P_{\mathrm{xz}}-L_{\mathrm{xz}}\\ {\mathrm{\Δy}}_z=\∫\mathrm{\Δ}{\mathrm{\α}}_z\mathrm{dz}-L_{\mathrm{yz}}=P_{\mathrm{yz}}-L_{\mathrm{yz}}\end{array}\right.$

L in above formula _uv(Z and u ≠ v) are best fit integration P for u, v=X, Y _uvstraight line.

Wherein:

L _uv＝av+b

$a=\frac{1}{n\underset{i=1}{\overset{n}{\mathrm{\Σ}}}{v_i}^2-{\left(\underset{i=1}{\overset{n}{\mathrm{\Σ}}}{v}_i\right)}^2}[n\underset{i=1}{\overset{n}{\mathrm{\Σ}}}\left(v_i{P}_{\mathrm{uvi}}\right)-\underset{i=1}{\overset{n}{\mathrm{\Σ}}}{v}_i\underset{i=1}{\overset{n}{\mathrm{\Σ}}}{P}_{\mathrm{uvi}}]$

$b=\frac{1}{n}\underset{i=1}{\overset{n}{\mathrm{\Σ}}}{P}_{\mathrm{uvi}}-\frac{a}{n}\underset{i=1}{\overset{n}{\mathrm{\Σ}}}{v}_i.$

According to above model, the error separating resulting of machining center is respectively:

1) the position error separating resulting of X, Y, tri-feed shafts of Z is:

p_x＝[-2.07?-5.05?-8.68?-11.70?-15.53?-20.57?-25.52?-31.22?-35.68-40.27?-41.65?-44.48?-47.92?-50.37?-53.37?-57.73?-62.02?-65.35?-70.42-72.82?-76.03]

p_y＝[-2.67?-7.10?-7.68?-12.95?-14.65?-18.38?-20.15?-22.97?-27.53-29.52?-33.53?-34.05?-38.48?-39.98?-44.35?-45.65?-46.83?-49.83?-50.67-54.33?-55.60]

p_z＝[-0.33?-1.07?-6.18?-6.80?-11.40?-13.22?-14.80?-19.50?-23.77-26.85?-30.38?-29.53?-32.28?-29.28?-31.00?-31.62?-35.02?-36.07?-38.97-40.87?-42.32]

2) top of X, Y, tri-feed shafts of Z pendulum error separating resulting is:

beta_x＝[-5.68E-07?-2.59E-06?-4.12E-06?-6.89E-06?-8.42E-06?-1.08E-05-1.29E-05?-1.53E-05?-1.73E-05?-1.36E-05?-1.97E-05?-2.20E-05?-2.35E-05-2.41E-05?-2.47E-05?-2.87E-05?-3.13E-05?-3.29E-05?-3.52E-05?-3.70E-05-3.89E-05]

gama_y＝[2.76E-06?1.05E-05?6.09E-06?9.32E-06?1.06E-05?8.91E-069.04E-06?6.97E-06?1.19E-05?9.12E-06?9.59E-06?8.68E-06?1.13E-051.09E-05?9.19E-06?6.52E-06?1.39E-06?7.26E-07?-1.49E-06?-5.99E-07-4.91E-07]

beta_z＝[3.64E-07?6.19E-07?-7.90E-07?3.85E-07?-1.22E-06?3.21E-07-7.47E-07?-6.83E-07?-4.74E-06?-2.20E-06?-3.31E-06?3.00E-07?-1.13E-06-9.18E-07?-4.64E-06?-1.03E-06?-3.51E-06?-3.53E-06?-6.07E-06?-7.44E-06-3.63E-06]

3) the Run-out error separating resulting of X, Y, tri-feed shafts of Z is:

gama_x＝[-2.36E-06?-2.39E-06?-2.03E-06?-2.83E-06?-4.75E-06?-6.02E-06-1.02E-05?-1.33E-05?-1.63E-05?-2.20E-05?-1.83E-05?-1.63E-05?-1.63E-05-1.66E-05?-1.74E-05?-1.85E-05?-1.95E-05?-2.18E-05?-2.18E-05?-2.25E-05-2.41E-05]

alfa_y＝[1.53E-05?-1.27E-06?7.68E-06?2.50E-06?-8.76E-07?2.85E-062.24E-06?6.32E-06?-4.43E-06?9.63E-07?3.53E-07?3.29E-06?-1.58E-06-1.88E-06?1.01E-06?6.62E-06?1.51E-05?1.51E-05?2.08E-05?1.92E-051.58E-05]

alfa_z＝[1.80E-07?-5.78E-07?1.88E-06?-7.17E-08?2.32E-06?3.70E-081.52E-06?1.67E-06?8.33E-06?3.98E-06?6.16E-06?-3.70E-08?2.03E-061.96E-06?8.48E-06?1.74E-06?6.16E-06?6.23E-06?1.05E-05?1.28E-056.20E-06]

4) 2 straightness error separating resultings of X, Y, tri-feed shafts of Z are:

y_x＝[0.42?0.30?0.16?0.04?-0.07?-0.16?-0.21?-0.23?-0.22-0.16?-0.13?-0.12?-0.11?-0.09?-0.07?-0.04?0.00?0.07?0.130.20?0.29]

z_x＝[0.58?0.40?0.24?0.11?-0.01?-0.11?-0.18?-0.23?-0.27-0.33?-0.34?-0.32?-0.29?-0.26?-0.21?-0.13?-0.02?0.10?0.250.42?0.60]

x_y＝[0.08?0.05?0.07?0.05?0.03?0.01?0.00?0.01?-0.03-0.04?-0.06?-0.07?-0.11?-0.14?-0.15?-0.14?-0.07?0.00?0.090.17?0.26]

z_y＝[-0.12?-0.07?-0.11?-0.09?-0.04?-0.03?-0.02?-0.04?0.050.08?0.11?0.12?0.18?0.23?0.26?0.24?0.13?0.02?-0.15-0.30?-0.42]

x_z＝[0.08?0.05?0.04?0.01?0.00?-0.02?-0.03?-0.05?-0.02-0.02?-0.01?-0.03?-0.04?-0.05?-0.03?-0.04?-0.02?-0.01?0.030.08?0.10]

y_z＝[-0.12?-0.08?-0.06?-0.02?0.00?0.03?0.06?0.08?0.040.03?0.01?0.05?0.07?0.09?0.04?0.06?0.04?0.02?-0.05-0.14?-0.16]

By above error testing and separation method, can realize the quick test of the main geometric error of machining center.

Claims (4)

1. the geometric error of multi-shaft linkage numerical control machine is measured and a separation method, it is characterized in that, tests as follows: the detailed process of the position error of 9 lines of employing laser interferometer test lathe is as follows:

(1) set up the test space of machining center: (0,0,0) of lathe coordinate system is set for the starting point of test coordinate system;

(2) in the following manner the position error of X, Y, tri-axles of Z is tested, obtain the position error test result of 9 lines;

Line 1:Y, Z axis maintain static, X-axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth; Speculum is arranged on workbench, and interference mirror is fixed on main shaft, adjusts and makes, on laser head, interference mirror, speculum online 1, to ensure that in whole motion process, light all can be back to the light entrance on laser head;

Line 2:X, Z axis maintain static, Y-axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth;

Line 3:X, Y-axis maintain static, Z axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth;

Line 4:Y, Z axis maintain static, X-axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth;

Line 5:Y, Z axis maintain static, X-axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth;

Line 6:X, Z axis maintain static, Y-axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth;

Line 7:X, Z axis maintain static, Y-axis moving linearly, and each is measured spacing and stops 4 seconds, measures 3 back and forth;

Line 8:X, Y-axis maintain static, and Z axis moving linearly is measured spacing every one and stopped 4 seconds, and X, Y-axis maintain static, and measure 3 back and forth;

Line 9:X, Y-axis maintain static, and Z axis moving linearly is measured spacing every one and stopped 4 seconds, and X, Y-axis maintain static, and measure 3 back and forth;

(3) separate for the geometric error of carrying out machine tool feed axle.

2. the geometric error of a kind of multi-shaft linkage numerical control machine according to claim 1 is measured and separation method, it is characterized in that,

In described step (3), can position error identification, concrete steps are: along the 1st, 2,3 articles of straight line test position fix errors, initial point is (0,0 respectively, 0), terminal is respectively (x, 0,0), (0, y, 0) and (0,0, z).The position error disjunctive model of X, Y, tri-feed shafts of Z is as follows:

$\left\{\begin{array}{c}\mathrm{\Δx}=\mathrm{\ΔL}(x,\mathrm{0,0})\\ \mathrm{\Δy}=\mathrm{\ΔL}(0,y,0)\\ \mathrm{\Δz}=\mathrm{\ΔL}(\mathrm{0,0},z)\end{array}\right.$

Wherein, Δ L is the poor of actual range and ideal distance, Δ L=L'-L=[Δ L _xΔ L _yΔ L _z1].

3. the geometric error of a kind of multi-shaft linkage numerical control machine according to claim 1 is measured and separation method, it is characterized in that,

In described step (3), can run and put and Run-out error identification, concrete steps are: along 4th～9 articles of straight line test position fix errors, and utilize following formula to calculate top pendulum and Run-out error:

$\left\{\begin{array}{c}\mathrm{\Δ}{\mathrm{\β}}_x=[\mathrm{\ΔL}(x,0,z_0)-\mathrm{\ΔL}(x,\mathrm{0,0})]/z_0\\ {\mathrm{\Δ\γ}}_x=[\mathrm{\ΔL}(x,\mathrm{0,0})-\mathrm{\ΔL}(x,y_0,0)]/y_0\\ {\mathrm{\Δ\α}}_y=[\mathrm{\ΔL}(0,y,0)-\mathrm{\ΔL}(0,y,z_0)]/z_0\\ {\mathrm{\Δ\γ}}_y=[\mathrm{\ΔL}{(x}_0,y,0)-\mathrm{\ΔL}(0,y,0)]/x_0\\ {\mathrm{\Δ\α}}_z=[\mathrm{\ΔL}(0,y_0,z)-\mathrm{\ΔL}(\mathrm{0,0},z)]/y_0\\ {\mathrm{\Δ\β}}_z=[\mathrm{\ΔL}(\mathrm{0,0},z)-\mathrm{\ΔL}(x_0,0,z)]/x_0\end{array}\right..$

4. the geometric error of a kind of multi-shaft linkage numerical control machine according to claim 1 is measured and separation method, it is characterized in that,

In described step (3), can carry out linearity identification, adopt following formula to calculate:

$\left\{\begin{array}{c}{\mathrm{\Δy}}_x=\∫\mathrm{\Δ}{\mathrm{\γ}}_x\mathrm{dx}-L_{\mathrm{yx}}=P_{\mathrm{yx}}-L_{\mathrm{yx}}\\ {\mathrm{\Δz}}_x=\∫\mathrm{\Δ}{\mathrm{\β}}_x\mathrm{dx}-L_{\mathrm{zx}}=P_{\mathrm{zx}}-L_{\mathrm{zx}}\\ {\mathrm{\Δx}}_y=\∫\mathrm{\Δ}{\mathrm{\γ}}_y\mathrm{dy}-L_{\mathrm{xy}}=P_{\mathrm{xy}}-L_{\mathrm{xy}}\\ {\mathrm{\Δz}}_y=\∫\mathrm{\Δ}{\mathrm{\α}}_y\mathrm{dy}-L_{\mathrm{zy}}=P_{\mathrm{zy}}-L_{\mathrm{zy}}\\ {\mathrm{\Δx}}_z=\∫\mathrm{\Δ}{\mathrm{\β}}_z\mathrm{dz}-L_{\mathrm{xz}}=P_{\mathrm{xz}}-L_{\mathrm{xz}}\\ {\mathrm{\Δy}}_z=\∫\mathrm{\Δ}{\mathrm{\α}}_z\mathrm{dz}-L_{\mathrm{yz}}=P_{\mathrm{yz}}-L_{\mathrm{yz}}\end{array}\right.$

L in above formula _uv(Z and u ≠ v) are best fit integration P for u, v=X, Y _uvstraight line; Wherein:

L _uv＝av+b

$a=\frac{1}{n\underset{i=1}{\overset{n}{\mathrm{\Σ}}}{v_i}^2-{\left(\underset{i=1}{\overset{n}{\mathrm{\Σ}}}{v}_i\right)}^2}[n\underset{i=1}{\overset{n}{\mathrm{\Σ}}}\left(v_i{P}_{\mathrm{uvi}}\right)-\underset{i=1}{\overset{n}{\mathrm{\Σ}}}{v}_i\underset{i=1}{\overset{n}{\mathrm{\Σ}}}{P}_{\mathrm{uvi}}]$

$b=\frac{1}{n}\underset{i=1}{\overset{n}{\mathrm{\Σ}}}{P}_{\mathrm{uvi}}-\frac{a}{n}\underset{i=1}{\overset{n}{\mathrm{\Σ}}}{v}_i.$