CN101975564B - Temperature error compensation method based on three-section measurement - Google Patents
Temperature error compensation method based on three-section measurement Download PDFInfo
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- CN101975564B CN101975564B CN2010102921417A CN201010292141A CN101975564B CN 101975564 B CN101975564 B CN 101975564B CN 2010102921417 A CN2010102921417 A CN 2010102921417A CN 201010292141 A CN201010292141 A CN 201010292141A CN 101975564 B CN101975564 B CN 101975564B
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Abstract
The invention relates to measuring techniques and instruments and provides a temperature error compensation method based on three-section measurement so as to improve the measuring stability of a cylindrical coordinate measuring machine. The technical scheme of the invention comprises the following steps: 1, using a measure gauge of which the diameter is subjected to calibration and traceability to calibrate the zero position and axis direction of each measuring bench; 2, establishing a mathematical model for the temperature error compensation; 3, compiling an error compensation program based on the mathematical model for the temperature error compensation and adding the program to a data processing program of workpiece measurement results; 4, adding sections needing to be measured for the temperature error compensation to the measuring program, and additionally measuring the sections needing to be measured for the temperature error compensation in the process of measuring the workpieces; and 5, performing data processing on the measuring results to realize the temperature error compensation. The method of the invention is mainly applied to the processing measurement of revolving members.
Description
Technical field
The present invention relates to measuring technology and instrument, specifically relate to method for compensating temperature errors based on three section gauges.
Background technology
Revolving parts occupies very big proportion especially in war production in industrial various parts.They are widely used in the fields such as industry, Aeronautics and Astronautics, national defence as the vital part of machine.The bus of rotary type workpiece can be straight-line segment or arc section, and the shape on surface can be the face of cylinder, circular conical surface, sphere, anchor ring, plane etc.Although the structure of rotary part is different and different with its purposes with size, one all has following characteristics its structure: the circularity to each cross section has higher requirements, and has a plurality of inside and outside round surfaces of revolution to need to detect, and their right alignment is had relatively high expectations.These parts are the key component of machine, equipment often, and are big in batches, need 100% to detect.The high precision of revolving parts, high-level efficiency have become the active demand of many departments in national economy and the national defence.
Three-coordinate measuring machine with cylindrical-coordinate system is particularly suitable for the detection of revolving parts.The overall formation and the principle of work of three-coordinate measuring machine with cylindrical-coordinate system are as shown in Figure 1.Measuring machine is made up of rotary table and several measurement bays.Workpiece is installed on the rotary table and is felt relieved by clamp, and drives rotation continuously by rotary table.Various gauge heads are housed respectively on the measurement bay, with the inside and outside surface of measuring workpieces axially and radial dimension, shape and site error.
Three-coordinate measuring machine with cylindrical-coordinate system has following advantage.
Workpiece rotates continuously during the efficiency of measurement high measurement, gauge head is fixed, and workpiece rotates 1 circle, just accomplishes the measurement to a cross section.And in conventional orthogonal formula three coordinate measuring machine, need pointwise to measure, very time-consuming.
Morpheme measuring accuracy height is employed in the turning course to be measured; Have only the uncertainty of measurement influence of kinematic error and the gauge head of rotary table to measure the precision of morpheme errors such as circularity, circle are beated, right alignment; And the kinematic error of each parts on each measurement bay does not have influence basically for these morpheme measuring accuracy, because they are motionless when measuring a cross section.
The gauge head motion is simple, anticollision problem ratio is easier to solve.
But the circular cylindrical coordinate measuring machine also has its problem.This mainly is that the size of measured workpiece can not directly be read from the scale of each measurement bay.The just relative displacement of each movable stand of from scale, reading; In order to confirm the absolute dimension of measured workpiece; Need know the position of the true origin of each measurement bay with respect to the rotary table coordinate origin; And the direction relations between the coordinate axis, promptly realize the unification of each measurement bay and rotary table coordinate system.Usually realize the unification of this coordinate system through demarcation to standard.
Yet, as shown in Figure 1, because temperature variation can make each measurement bay change with respect to the position of rotary table and the direction of coordinate axis, cause measuring error.The measuring error that causes for the circular cylindrical coordinate measuring machine temperature variation of using in the workshop especially can be very big, often reaches tens to hundreds of microns.The most frequently used method of temperature error compensation is to set up temperature field and thermal deformation model.This method is not only complicated, and the effect that is difficult to obtain.Particularly under shop condition, temperature variation is complicated, the effect that adopts the method for setting up models for temperature field and thermal deformation model to be difficult to obtain.
Find that in practice some revolving parts need be connected with associated part through screw thread; And guarantee that the associated part that is connected has position and direction accurately; Need pass through some sleeves for this reason; As the associated part of simulation, measure its jerk value at the extending part that leaves part certain position place.Can utilize it to realize temperature error compensation with sleeve as standard in this case.But workpiece is not threaded under more situation, does not perhaps have the jerk value of extending part to need to measure.At this moment for temperature error compensation, it is just inconvenient to introduce special-purpose sleeve.
Can adopt the method for bidirectional measurement for the measurement of internal diameter, promptly adopt a kind of gauge head that can carry out bidirectional measurement, successively Zuo Bi and the You Bi to workpiece hole surveys.Owing to survey the skew of axle in the measuring machine that causes of thermal deformation with respect to the rotary table axis, for a left side survey with right influence of surveying be opposite, measure the influence that mean value just can be eliminated thermal deformation so survey with right through a left side.Survey the difference of surveying the result with the right side through asking for a left side, just can obtain the interior survey main shaft skew that produces by thermal deformation.
But for outside diameter measuring, the method for bidirectional measurement is inapplicable, can not forward the rotary table left side to and goes to measure because measure the gauge head 9 of external diameter among Fig. 1.The external diameter of two external pelivimetry framves 3 and 7 measuring workpieces can not be eliminated the influence of measuring machine thermal deformation about utilizing simultaneously because about two external pelivimetry framves 3 and 7 deflection be different.
Summary of the invention
For overcoming the deficiency of prior art; A kind of temperature error compensation technology based on three section gauges is provided, improves circular cylindrical coordinate measuring machine measurement stability, the technical scheme that the present invention takes is; Method for compensating temperature errors based on three section gauges comprises the following steps:
1. utilize that a diameter all passes through demarcation, the gauge that can trace to the source is demarcated zero-bit, the axis direction of each measurement bay of measuring machine;
2. set up the mathematical model of temperature error compensation;
3. on the mathematical model basis of the temperature error compensation of setting up, write the error compensation program, and it is joined in workpiece calibration result's the data processor;
4. will join for the cross section of carrying out the required measurement of temperature error compensation in the process of measurement, and in the measuring workpieces process, add and survey the cross section that is used for the required measurement of error compensation;
5. carry out the measurement result data processing, realize temperature error compensation.
The said mathematical model of setting up temperature error compensation is, thermal deformation makes right measurement bay with respect to the rotary table δ that moves to right
1, the axis of movement direction of right measurement bay is with respect to the clockwise deflection β of axis of rotation
1, measure at height z1 place, make the external diameter value that measures reduce 2 (δ
1+ z
1β
1); And from the left side during measuring workpieces external diameter, if because thermal deformation makes left measurement bay with respect to the rotary table δ that moves to right
2, the axis of movement direction of measurement bay is β with respect to the deflection angle of axis of rotation
2, measuring height also is z1, will make the external diameter value that measures increase 2 (δ
2+ z
1β
2);
In order to realize error compensation; Two measurement bays are measured two cross sections again about needing to utilize; And then measurement can or be carried out with the measurement rotary table diameter while; The translation of two measurement bays and deflection with before identical, be to measure at height z2 place, two measurement bay deflection becomes respectively-2z the influence of diameter measurement
2β
1And 2z
2β
2, the diameter D of workpiece
2Be unknown, if diameter of work has deviation delta D
2So the diameter value deviation that measures from the right and the left side is respectively Δ D
2-2 (δ
1+ z
2β
1) and Δ D
2+ 2 (δ
2+ z
2β
2).
Measure at height z3 place, the influence that main shaft surface position measurement is internally surveyed in two measurement bay deflection becomes respectively-z
3β
1With-z
3β
2, also to consider here under thermal deformation influence in the position of measurement bay main shaft also have skew, be made as δ
3, the interior survey main shaft surface change in location that measures from the right and the left side like this is respectively δ
3-δ
1-z
3β
1And δ
3-δ
2-z
3β
2
From the measurement of carrying out, can obtain 6 deviates :-2 (δ
1+ z
1β
1), 2 (δ
2+ z
1β
2), Δ D
2-2 (δ
1+ z
2β
1), Δ D
2+ 2 (δ
2+ z
2β
2), δ
3-δ
1-z
3β
1And δ
3-δ
2-z
3β
2, can be from these 6 groups of measurement results in the hope of 6 unknown quantity: δ
1, δ
2, δ
3, β
1, β
2, Δ D
2Thereby the external diameter in each cross section carries out temperature error compensation.
The present invention possesses following technique effect:
1, the present invention proposes a kind of technology that three section gauges are realized temperature error compensation of passing through, make the measurement result of measuring machine receive the influence of environment temperature hardly, improved the long-time stability of measuring machine measurement result significantly.Obtain good result in practice.
2, applicability is strong, suitable applying.
Description of drawings
Fig. 1 is a circular cylindrical coordinate measuring machine fundamental diagram.Among the figure, the 1-rotary table, 2-anchor clamps, 3-are surveyed frame 1 outward, and the outer gauge head 1 of 4-is surveyed main shaft in the 5-workpiece, 6-, and 7-surveys frame 2 outward, gauge head in the 8-, the outer gauge head 2 of 9-.
Fig. 2 is an outside diameter measuring error compensation measuring position synoptic diagram.Among the figure, a) part is to measure the rotary table diameter, and b) part is the measuring workpieces diameter, and c) part is to survey the main shaft width in measuring.
Embodiment
The object of the present invention is to provide a kind of temperature error compensation technology, improve circular cylindrical coordinate measuring machine outside diameter measuring stability based on three section gauges.
The temperature error of measuring workpieces size is mainly caused by the factor aspect following three on the circular cylindrical coordinate measuring machine.
Measurement bay produces translation with respect to rotary table.
The axis of movement direction of measurement bay deflects with respect to axis of rotation.
The thermal expansion of workpiece itself.
The present invention proposes the technology that a kind of method of passing through three section gauges realizes temperature error compensation.Its principle of work is as shown in Figure 2.
On the circular cylindrical coordinate measuring machine during measuring workpieces diameter; The just relative displacement of each movable stand of from scale, reading; In order to confirm the absolute dimension of measured workpiece; Need know the relative position of the true origin of each measurement bay with respect to the rotary table coordinate origin, the true origin that makes measurement bay owing to reasons such as thermal deformations changes with respect to the position of rotary table coordinate origin, will bring measuring error.Shown in Fig. 2 a under the measuring workpieces external diameter situation of right side, if because thermal deformation makes right measurement bay with respect to the rotary table δ that moves to right
1, the axis of movement direction of right measurement bay is with respect to the clockwise deflection β of axis of rotation
1,, will make the external diameter value that measures reduce 2 (δ owing to be to measure at height z1 place
1+ z
1β
1).And from the left side during measuring workpieces external diameter, if because thermal deformation makes left measurement bay with respect to the rotary table δ that moves to right
2, the axis of movement direction of measurement bay is β with respect to the deflection angle of axis of rotation
2, measuring height also is z1, will make the external diameter value that measures increase 2 (δ
2+ z
1β
2).Since about two measurement bays be mutually independently, one does not have δ
1=δ
2Or δ
1=-δ
2, β
1=β
2Or β
1=-β
2, only be difficult to measure the diameter result of rotary tables according to these two gauge heads, try to achieve measurement bay translation and deflection that thermal deformation causes, carry out error compensation.
In order to realize error compensation, two measurement bays are measured two cross sections again about needing to utilize.Fig. 2 b is the situation of a certain diameter of section of measuring workpieces.Can or and then carry out with the measurement rotary table diameter while owing to measure; Can think in the measurement of Fig. 2 b; The translation of two measurement bays is identical with Fig. 2 a with deflection, and just they are to measure at height z2 place, and two measurement bay deflection becomes respectively-2z the influence of diameter measurement
2β
1And 2z
2β
2But the diameter D of workpiece
2Be unknown, if diameter of work has deviation delta D
2So the diameter value deviation that measures from the right and the left side is respectively Δ D
2-2 (δ
1+ z
2β
1) and Δ D
2+ 2 (δ
2+ z
2β
2).
Fig. 2 c is a situation of surveying main spindle's in measuring with two measurement bays.Can or and then carry out with the measurement rotary table diameter while owing to measure; Can think in the measurement of Fig. 2 c; The translation of two measurement bays is identical with Fig. 2 a with deflection; Just they are to measure at height z3 place, and the influence that the surperficial position measurement of main shaft is internally surveyed in two measurement bay deflection becomes respectively-z
3β
1With-z
3β
2Here the position of measurement bay main shaft also has skew in also will considering under the thermal deformation influence, is made as δ
3The interior survey main shaft surface change in location that measures from the right and the left side like this is respectively δ
3-δ
1-z
3β
1And δ
3-δ
2-z
3β
2
From the measurement that Fig. 2 a, 2b, 2c carry out, can obtain 6 deviates :-2 (δ
1+ z
1β
1), 2 (δ
2+ z
1β
2), Δ D
2-2 (δ
1+ z
2β
1), Δ D
2+ 2 (δ
2+ z
2β
2), δ
3-δ
1-z
3β
1And δ
3-δ
2-z
3β
2Can be from these 6 groups of measurement results in the hope of 6 unknown quantity: δ
1, δ
2, δ
3, β
1, β
2, Δ D
2Thereby the external diameter in each cross section carries out temperature error compensation.
Do not consider the thermal expansion of workpiece and rotary table itself in the superincumbent discussion.One says that the distance between the zero-bit of measurement bay scale and rotary table axis is more many greatly than the diameter of workpiece, can think that temperature error mainly produces translation by two measurement bays with respect to the rotary table axis and axis direction deflection causes.Consider at needs under the situation of workpiece and the thermal expansion of rotary table itself, as long as know their linear expansion coefficient, and on them the certain temperature element of installation, just can calculate their thermal deformation based on the temperature that measures.Workpiece is much simpler than the temperature model of measuring machine with the thermal deformation model of rotary table itself; Because measuring machine is made up of a large amount of members; Not only temperature, linear expansion coefficient all maybe be different for they, and it is also different influence the mode of measuring junction displacement, temperature and thermal deformation model ten minutes complicacy.
Be summarised as by last example:
1. utilize a diameter zero-bit, the axis direction of each measurement bay of measuring machine to be demarcated through the gauge of demarcating, can tracing to the source.
2. set up the mathematical model of temperature error compensation.
3. on the mathematical model basis of the temperature error compensation of setting up, write the error compensation program, and it is joined in workpiece calibration result's the data processor.
4. will join for the cross section of carrying out the required measurement of temperature error compensation in the process of measurement, in the measuring workpieces process, add the cross section that is used for the required measurement of error compensation shown in the mapping 2.Cross section shown in Fig. 2 b can be the cross section that workpiece need be measured.
5. carry out the measurement result data processing, realize temperature error compensation.
Revolving parts occupies very big proportion especially in war production in industrial various parts.They are widely used in the fields such as industry, Aeronautics and Astronautics, national defence as the vital part of machine.These parts are the key component of machine, equipment often, and are big in batches, need 100% to detect.The high precision of revolving parts, high-level efficiency are measured the active demand that has become many departments in national economy and the national defence.
Position and the change in coordinate axis direction that temperature variation can make each measurement bay changes with respect to rotary table, causes measuring error, and becoming influences measurement result stability and accuracy factors.For the circular cylindrical coordinate measuring machine that uses in the workshop, the measuring error that temperature variation causes can be very big especially, often reaches tens to hundreds of microns.The workshop temperature conditions changes complicacy in addition, adopts the method for setting up models for temperature field to carry out the effect that temperature error compensation is difficult to obtain.The present invention proposes a kind of technology that three section gauges are realized temperature error compensation of passing through, make the measurement result of measuring machine receive the influence of environment temperature hardly, improved the long-time stability of measuring machine measurement result significantly.Obtain good result in practice.Its applicability is strong, and war industry group company prepares large tracts of land and promotes.The present invention also is expected to be used for the solid of revolution machining tool.
Claims (1)
1. the method for compensating temperature errors based on three section gauges is characterized in that, comprises the following steps:
1. utilize that a diameter all passes through demarcation, the gauge that can trace to the source is demarcated zero-bit, the axis direction of each measurement bay of measuring machine;
2. set up the mathematical model of temperature error compensation;
3. on the mathematical model basis of the temperature error compensation of setting up, write the error compensation program, and it is joined in workpiece calibration result's the data processor;
4. will join for the cross section of carrying out the required measurement of temperature error compensation in the process of measurement, and in the measuring workpieces process, add and survey the cross section that is used for the required measurement of error compensation;
5. carry out the measurement result data processing, realize temperature error compensation;
Wherein, the said mathematical model of setting up temperature error compensation is, thermal deformation makes right measurement bay with respect to the rotary table δ that moves to right
1, the axis of movement direction of right measurement bay is with respect to the clockwise deflection β of axis of rotation
1, measure at height z1 place, make the external diameter value that measures reduce 2 (δ
1+ z
1β
1); And from the left side during measuring workpieces external diameter, if because thermal deformation makes left measurement bay with respect to the rotary table δ that moves to right
2, the axis of movement direction of measurement bay is β with respect to the clockwise deflection angle of axis of rotation
2, measuring height also is z1, will make the external diameter value that measures increase 2 (δ
2+ z
1β
2);
In order to realize error compensation; Two measurement bays are measured two cross sections again about needing to utilize; Measure and measure the rotary table diameter simultaneously or and then carry out, the translation of two measurement bays and deflection with before identical, measure at height z2 and z3 place respectively; When height z2 place was measured, two measurement bay deflection became respectively-2z the influence of diameter measurement
2β
1And 2z
2β
2, the diameter D of workpiece
2Be unknown, if diameter of work has deviation delta D
2So the diameter value deviation that measures from the right and the left side is respectively Δ D
2-2 (δ
1+ z
2β
1) and Δ D
2+ 2 (δ
2+ z
2β
2);
Measure at height z3 place, the influence that main shaft surface position measurement is internally surveyed in two measurement bay deflection becomes respectively-z
3β
1With-z
3β
2, also to consider here under thermal deformation influence in the position of measurement bay main shaft also have skew, be made as δ
3, the interior survey main shaft surface change in location that measures from the right and the left side like this is respectively δ
3-δ
1-z
3β
1And δ
3-δ
2-z
3β
2
From the measurement of carrying out, obtain 6 deviates :-2 (δ
1+ z
1β
1), 2 (δ
2+ z
1β
2), Δ D
2-2 (δ
1+ z
2β
1), Δ D
2+ 2 (δ
2+ z
2β
2), δ
3-δ
1-z
3β
1And δ
3-δ
2-z
3β
2, from these 6 groups of measurement results, try to achieve 6 unknown quantity: δ
1, δ
2, δ
3, β
1, β
2, Δ D
2Thereby, the external diameter in each cross section is carried out temperature error compensation.
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|---|---|---|---|
| CN2010102921417A CN101975564B (en) | 2010-09-26 | 2010-09-26 | Temperature error compensation method based on three-section measurement |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102921417A CN101975564B (en) | 2010-09-26 | 2010-09-26 | Temperature error compensation method based on three-section measurement |
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| CN101975564A CN101975564A (en) | 2011-02-16 |
| CN101975564B true CN101975564B (en) | 2012-09-05 |
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| CN104105944B (en) * | 2012-03-02 | 2016-11-09 | 海克斯康测量技术有限公司 | There is the coordinate measuring machine of the support beam of band spring |
| CN102671816B (en) * | 2012-05-16 | 2015-02-25 | 北京昌益和自动化设备制造有限公司 | Full-automatic double-hollow glass gluing machine |
| EP2899500B1 (en) * | 2014-01-27 | 2016-09-07 | Hexagon Metrology S.p.A. | Method for compensating measurement errors due to thermally induced structural deformations in a coordinate measurement machine |
| JP6743404B2 (en) * | 2016-02-17 | 2020-08-19 | 株式会社ジェイテクト | Measuring device and measuring method |
| JP2018155533A (en) * | 2017-03-16 | 2018-10-04 | 株式会社ミツトヨ | Shape measurement device |
| CN109282777B (en) * | 2018-10-25 | 2019-08-20 | 大连理工大学 | A kind of two-way gauge head unit for the conversion of micro-displacement direction |
| CN111060010A (en) * | 2019-12-16 | 2020-04-24 | 天津大学 | Parallel plane parameter on-machine measurement system and measurement method |
| CN113375596A (en) * | 2021-06-25 | 2021-09-10 | 山东省科学院激光研究所 | Measuring mechanism for detecting surface appearance of large-scale structural part |
| CN114646284B (en) * | 2022-03-16 | 2023-08-11 | 重庆邮电大学 | Temperature compensation method for geometric parameters of precise gear |
| CN115325984B (en) * | 2022-07-21 | 2023-09-15 | 中国航发航空科技股份有限公司 | Universal simulation measuring device and method for measuring sizes of casings with different linear expansion coefficients |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10233253A1 (en) * | 2002-07-23 | 2004-02-12 | Kocks Technik Gmbh & Co | Machine spindle drives, have bearings set in carrier that has inset bar type elements that expand to compensate axial changes due to temperature |
| CN101825453A (en) * | 2010-05-13 | 2010-09-08 | 天津大学 | Temperature error compensation method for three-coordinate measuring machine with cylindrical-coordinate system |
| CN101825454A (en) * | 2010-05-13 | 2010-09-08 | 天津大学 | Method for compensating temperature errors based on bidirectional measurement |
-
2010
- 2010-09-26 CN CN2010102921417A patent/CN101975564B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10233253A1 (en) * | 2002-07-23 | 2004-02-12 | Kocks Technik Gmbh & Co | Machine spindle drives, have bearings set in carrier that has inset bar type elements that expand to compensate axial changes due to temperature |
| CN101825453A (en) * | 2010-05-13 | 2010-09-08 | 天津大学 | Temperature error compensation method for three-coordinate measuring machine with cylindrical-coordinate system |
| CN101825454A (en) * | 2010-05-13 | 2010-09-08 | 天津大学 | Method for compensating temperature errors based on bidirectional measurement |
Non-Patent Citations (2)
| Title |
|---|
| 杨庆东等.三坐标测量机的热变形和神经网络误差补偿.《计量学报》.2000,第21卷(第2期),113-118. * |
| 林述温等.基于热变形反馈信息的三坐标测量机误差建模与补偿.《机械工程学报》.2001,第37卷(第12期),70-74,78. * |
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