CN104097114B - Method for measuring and separating geometric errors of multi-axis-linkage numerical control machine tool - Google Patents

Method for measuring and separating geometric errors of multi-axis-linkage numerical control machine tool Download PDF

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CN104097114B
CN104097114B CN201410324584.8A CN201410324584A CN104097114B CN 104097114 B CN104097114 B CN 104097114B CN 201410324584 A CN201410324584 A CN 201410324584A CN 104097114 B CN104097114 B CN 104097114B
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CN104097114A (en
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刘阔
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General Technology Group Shenyang Machine Tool Co Ltd
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SHENYAN MACHINE TOOL (GROUP) CO Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/248—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods
    • B23Q17/2495—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods using interferometers

Abstract

The invention relates to the field of geometric error testing of machine tools, in particular to a method for measuring and separating geometric errors of a multi-axis-linkage numerical control machine tool. The method includes creating a testing space for the multi-axis-linkage numerical control machine tool; adopting a laser interferometer to test positioning errors of three feeding axes X, Y and Z of the machine tool, and testing three straight lines on each feeding axis; building a separation model of machine tool error elements, acquiring an angle error of each axis through two positioning error data of the corresponding axis, and acquiring linearity errors of each axis by calculating jolt-swinging and yawing errors. By the method, one positioning error, one jolt-swinging error, one yawing error and two linearity errors of each feeding axis of the machine tool can be acquired, and fifteen errors in total can be acquired for the three axes. A novel method is provided to quickly test the geometric errors of the machine tool.

Description

A kind of geometric error measurement of multi-shaft linkage numerical control machine and separation method
Technical field
The present invention relates to lathe geometric error field tests, the geometric error survey of specially a kind of multi-shaft linkage numerical control machine Amount and separation method.
Background technology
The main method tested to the geometric error of machine tool feed axle at present is tested for individual error.Domestic lathe life Produce laser interferometer of the most frequently used tester of manufacturer for Reinshaw company.Although such method of testing is more accurately, It is that shortcoming is also a lot, such as testing efficiency is low, if necessary to grasp all geometric errors of lathe, needs several days even more than ten days Time.In addition, the microscope group required for test is a lot, such as linear reflective mirror, spectroscope, linearity speculum, linearity are interfered Mirror, angled mirrors, angle interference mirror, optical corner chi etc., these microscope groups limit costly, to a certain extent lathe The development of geometric error test job comprehensively.
In order to solve the above problems, API companies of the U.S. develop 6D laser interferometer, and once mounting can measure line simultaneously Six errors of property axle, improve testing efficiency, but price are costly.Some scholar's research are swashed based on Reinshaw company The novel test method of optical interferometer.Professor Liu Youwu of University Of Tianjin proposes 9 line methods of testing, using the method measurement process letter Single, measurement line number is few, data processing also easily, but must have can measurement and positioning error and two straightness errors simultaneously it is sharp Optical interferometer.It is 0 that the test of 22 collimation methods needs the algebraical sum for assuming machine tool error, and is solved for traversal, and solution procedure is complicated, test Line number is more.
The content of the invention
It is an object of the invention to provide a kind of geometric error measurement of multi-shaft linkage numerical control machine and separation method, solve The problem that lathe geometric error is quickly tested.
To achieve these goals, technical scheme is as follows：A kind of geometric error of multi-shaft linkage numerical control machine Measurement and separation method, it is characterised in that tested as follows：Determining for 9 lines of lathe is tested using laser interferometer The detailed process of position error is as follows：
(1) set up the test space of machining center：Arrange lathe coordinate system (0,0,0) be test coordinate system starting Point；
(2) as follows the position error of tri- axles of X, Y, Z is tested, the position error for obtaining 9 lines is surveyed Test result；
Line 1：Y, Z axis are maintained static, and X-axis is for linear motion, and each measurement spacing is stopped 4 seconds, and measurement 3 is back and forth；Will Speculum is installed on the table, and interference mirror is fixed on main shaft, and adjustment is made on laser head, interference mirror, speculum online 1, is protected In demonstrate,proving whole motion process, light can be back to the light entrance on laser head；
Line 2：X, Z axis are maintained static, and Y-axis is for linear motion, and each measurement spacing is stopped 4 seconds, and measurement 3 is back and forth；
Line 3：X, Y-axis are maintained static, and Z axis are for linear motion, and each measurement spacing is stopped 4 seconds, and measurement 3 is back and forth；
Line 4：Y, Z axis are maintained static, and X-axis is for linear motion, and each measurement spacing is stopped 4 seconds, and measurement 3 is back and forth；
Line 5：Y, Z axis are maintained static, and X-axis is for linear motion, and each measurement spacing is stopped 4 seconds, and measurement 3 is back and forth；
Line 6：X, Z axis are maintained static, and Y-axis is for linear motion, and each measurement spacing is stopped 4 seconds, and measurement 3 is back and forth；
Line 7：X, Z axis are maintained static, and Y-axis is for linear motion, and each measurement spacing is stopped 4 seconds, and measurement 3 is back and forth；
Line 8：X, Y-axis are maintained static, and Z axis are for linear motion, are measured spacing every one and are stopped 4 seconds, and X, Y-axis are fixed not Dynamic, measurement 3 is back and forth；
Line 9：X, Y-axis are maintained static, and Z axis are for linear motion, are measured spacing every one and are stopped 4 seconds, and X, Y-axis are fixed not Dynamic, measurement 3 is back and forth；
(3) geometric error for carrying out machine tool feed axle is separated.
Position error identification can be carried out in described step (3), concretely comprised the following steps：Survey along the 1st, 2,3 articles of straight lines respectively Examination position error, initial point be (0,0,0), terminal be respectively (x, 0,0), (0,y, 0) and (0,0, z).Tri- feedings of X, Y, Z The position error disjunctive model of axle is as follows：
Wherein, Δ L is actual range and the difference of ideal distance, Δ L=L'-L=[Δ Lx ΔLy ΔLz 1]。
Top pendulum and Run-out error identification can be carried out in described step (3), concretely comprised the following steps：Survey along the 4th～9 article of straight line Examination position error, and top pendulum and Run-out error is calculated using following formula：
Linearity identification can be carried out in described step (3), calculated using equation below：
L in above formulauv(u, v=X, Y, Z and u ≠ v) is that best fit integrates PuvStraight line；
Wherein：
Luv=av+b
The invention has the beneficial effects as follows：
1st, the present invention establishes the geometric error disjunctive model of multi-shaft linkage numerical control machine, it is possible to achieve to 9 p-wires Separation.
2nd, the present invention proposes a kind of geometric error test and the separation method of multi-shaft linkage numerical control machine of system, is given Complete testing process and disjunctive model, by the method can obtain the position error of lathe each feed shaft, top pendulum and Run-out error, 2 straightness errors, three axles amount to 15 errors.Quick test for the multinomial geometric error of lathe is provided New method.
Description of the drawings
Fig. 1 is the position error test schematic diagram of the present invention.
Specific embodiment
Further the present invention is illustrated with the example of vertical machining centre below in conjunction with the accompanying drawings.
The inventive method is tested using Renishaw Laser Interferometer conventional at present.
As shown in Figure 1：A kind of geometric error measurement of multi-shaft linkage numerical control machine and separation method, enter in accordance with the following steps OK：
(1) set up the test space of machining center.Arrange lathe coordinate system (0,0,0) be test coordinate system starting Point, the test stroke of X-direction is -840mm, the test stroke -480mm of Y direction, the test stroke of Z-direction for - 530mm。
(2) as follows the position error of tri- axles of X, Y, Z is tested.
Line 1：Y, Z axis are maintained static, and X-axis is for linear motion, and each measurement spacing is stopped 4 seconds, and measurement 3 is back and forth.Will Speculum is installed on the table, and interference mirror is fixed on main shaft somewhere, and adjustment is made on laser head, interference mirror, speculum online 1, In ensureing whole motion process, light can be back to the light entrance on laser head.Line 2：X, Z axis are maintained static, and Y-axis is made straight Line is moved, and each measurement spacing is stopped 4 seconds, and measurement 3 is back and forth.Line 3：X, Y-axis are maintained static, and Z axis are for linear motion, each Individual measurement spacing is stopped 4 seconds, and measurement 3 is back and forth.Line 4：Y, Z axis are maintained static, and X-axis is for linear motion, each measurement spacing Stop 4 seconds, measurement 3 is back and forth.Line 5：Y, Z axis are maintained static, and X-axis is for linear motion, and each measurement spacing is stopped 4 seconds, is surveyed Amount 3 is back and forth.Line 6：X, Z axis are maintained static, and Y-axis is for linear motion, and each measurement spacing is stopped 4 seconds, and measurement 3 is back and forth. Line 7：X, Z axis are maintained static, and Y-axis is for linear motion, and each measurement spacing is stopped 4 seconds, and measurement 3 is back and forth.Line 8：X, Y-axis are solid Fixed motionless, Z axis are for linear motion, measure spacing every one and stop 4 seconds, and X, Y-axis are maintained static, and measurement 3 is back and forth.Line 9：X、 Y-axis is maintained static, and Z axis are for linear motion, is measured spacing every one and is stopped 4 seconds, and X, Y-axis are maintained static, and measurement 3 is back and forth.
The position error test result of 9 lines is respectively：
Line_1=[- 2.07-5.05-8.68-11.70-15.53-20.57-25.52-31.22-35.68- 40.27 -41.65 -44.48 -47.92 -50.37 -53.37 -57.73 -62.02 -65.35 -70.42-72.82 - 76.03]
Line_2=[- 2.67-7.10-7.68-12.95-14.65-18.38-20.15-22.97-27.53- 29.52 -33.53 -34.05 -38.48 -39.98 -44.35 -45.65 -46.83 -49.83 -50.67-54.33 - 55.60]
Line_3=[- 0.33-1.07-6.18-6.80-11.40-13.22-14.80-19.50-23.77- 26.85 -30.38 -29.53 -32.28 -29.28 -31.00 -31.62 -35.02 -36.07 -38.97-40.87 - 42.32]
Line_4=[- 2.28-6.03-10.25-14.32-18.73-24.67-30.43-37.02- 42.27-45.43 -49.13 -52.85 -56.85 -59.53 -62.75 -68.63 -73.92 -77.85 -83.78- 86.88 -90.80]
Line_5=[- 0.98-3.95-7.75-10.40-13.35-17.80-20.83-25.12-28.17- 30.17 -33.22 -37.00 -40.40 -42.73 -45.38 -49.23 -53.05 -55.32 -60.40-62.48 - 64.95]
Line_6=[- 8.47-6.62-10.60-13.90-14.32-19.47-21.00-25.37- 25.85-29.88 -33.67 -35.30 -37.88 -39.27 -44.73 -48.17 -52.57 -55.58 -58.57- 61.63 -61.62]
Line_7=[- 0.52 1.08-2.93-5.68-6.40-11.43-13.10-17.53-18.23- 22.40 -26.05 -27.28 -29.67 -31.50 -37.18 -40.57 -45.75 -49.27 -51.83-54.80 - 55.98]
Line_8=[- 0.25-1.33-5.32-6.83-10.33-13.20-14.10-18.73-19.93- 25.02 -27.55 -29.55 -31.35 -28.38 -27.10 -30.82 -32.18 -33.20 -34.15-34.98 - 39.47]
Line_9=[- 0.62-1.55-5.57-7.10-10.45-13.47-14.22-18.97-20.07- 25.13 -27.80 -29.77 -31.40 -28.57 -27.38 -30.82 -32.28 -33.32 -34.23-35.07 - 39.48]
On the basis of testing more than, the position error of lathe each feed shaft, top pendulum and Run-out error, 2 linearitys The separation method of error is as follows：
1) respectively along the 1st, 2,3 articles of straight line test position fix errors when position error is recognized, initial point be (0,0,0), eventually Point be respectively (x, 0,0), (0, y, 0) and (0,0, z).The position error disjunctive model of tri- feed shafts of X, Y, Z is as follows：
Wherein, Δ L is actual range and the difference of ideal distance, Δ L=L'-L=[Δ Lx ΔLy ΔLz 1]。
2) top pendulum and Run-out error recognize when along the 4th～9 article of straight line test position fix error, and using following formula calculate top pendulum and Run-out error.
3) linearity identification is calculated using equation below.
L in above formulauv(u, v=X, Y, Z and u ≠ v) is that best fit integrates PuvStraight line.
Wherein：
Luv=av+b
According to model above, the error separate result of machining center is respectively：
1) the position error separating resulting of tri- feed shafts of X, Y, Z is：
P_x=[- 2.07-5.05-8.68-11.70-15.53-20.57-25.52-31.22-35.68- 40.27 -41.65 -44.48 -47.92 -50.37 -53.37 -57.73 -62.02 -65.35 -70.42-72.82 - 76.03]
P_y=[- 2.67-7.10-7.68-12.95-14.65-18.38-20.15-22.97-27.53- 29.52 -33.53 -34.05 -38.48 -39.98 -44.35 -45.65 -46.83 -49.83 -50.67-54.33 - 55.60]
P_z=[- 0.33-1.07-6.18-6.80-11.40-13.22-14.80-19.50-23.77- 26.85 -30.38 -29.53 -32.28 -29.28 -31.00 -31.62 -35.02 -36.07 -38.97-40.87 - 42.32]
2) the top pendulum error separate result of tri- feed shafts of X, Y, Z is：
Beta_x=[- 5.68E-07-2.59E-06-4.12E-06-6.89E-06-8.42E-06-1.08E-05- 1.29E-05 -1.53E-05 -1.73E-05 -1.36E-05 -1.97E-05 -2.20E-05 -2.35E-05-2.41E-05 -2.47E-05 -2.87E-05 -3.13E-05 -3.29E-05 -3.52E-05 -3.70E-05-3.89E-05]
Gama_y=[2.76E-06 1.05E-05 6.09E-06 9.32E-06 1.06E-05 8.91E-069.04E- 06 6.97E-06 1.19E-05 9.12E-06 9.59E-06 8.68E-06 1.13E-051.09E-05 9.19E-06 6.52E-06 1.39E-06 7.26E-07 -1.49E-06 -5.99E-07-4.91E-07]
Beta_z=[3.64E-07 6.19E-07-7.90E-07 3.85E-07-1.22E-06 3.21E-07- 7.47E-07 -6.83E-07 -4.74E-06 -2.20E-06 -3.31E-06 3.00E-07 -1.13E-06-9.18E-07 -4.64E-06 -1.03E-06 -3.51E-06 -3.53E-06 -6.07E-06 -7.44E-06-3.63E-06]
3) the Run-out error separating resulting of tri- feed shafts of X, Y, Z is：
Gama_x=[- 2.36E-06-2.39E-06-2.03E-06-2.83E-06-4.75E-06-6.02E-06- 1.02E-05 -1.33E-05 -1.63E-05 -2.20E-05 -1.83E-05 -1.63E-05 -1.63E-05-1.66E-05 -1.74E-05 -1.85E-05 -1.95E-05 -2.18E-05 -2.18E-05 -2.25E-05-2.41E-05]
Alfa_y=[1.53E-05-1.27E-06 7.68E-06 2.50E-06-8.76E-07 2.85E- 062.24E-06 6.32E-06 -4.43E-06 9.63E-07 3.53E-07 3.29E-06 -1.58E-06-1.88E-06 1.01E-06 6.62E-06 1.51E-05 1.51E-05 2.08E-05 1.92E-051.58E-05]
Alfa_z=[1.80E-07-5.78E-07 1.88E-06-7.17E-08 2.32E-06 3.70E- 081.52E-06 1.67E-06 8.33E-06 3.98E-06 6.16E-06 -3.70E-08 2.03E-061.96E-06 8.48E-06 1.74E-06 6.16E-06 6.23E-06 1.05E-05 1.28E-056.20E-06]
4) 2 straightness error separating resultings of tri- feed shafts of X, Y, Z are：
Y_x=[0.42 0.30 0.16 0.04-0.07-0.16-0.21-0.23-0.22-0.16-0.13- 0.12 -0.11 -0.09 -0.07 -0.04 0.00 0.07 0.130.20 0.29]
Z_x=[0.58 0.40 0.24 0.11-0.01-0.11-0.18-0.23-0.27-0.33-0.34- 0.32 -0.29 -0.26 -0.21 -0.13 -0.02 0.10 0.250.42 0.60]
X_y=[0.08 0.05 0.07 0.05 0.03 0.01 0.00 0.01-0.03-0.04-0.06-0.07 -0.11 -0.14 -0.15 -0.14 -0.07 0.00 0.090.17 0.26]
Z_y=[- 0.12-0.07-0.11-0.09-0.04-0.03-0.02-0.04 0.050.08 0.11 0.12 0.18 0.23 0.26 0.24 0.13 0.02 -0.15-0.30 -0.42]
X_z=[0.08 0.05 0.04 0.01 0.00-0.02-0.03-0.05-0.02-0.02-0.01- 0.03 -0.04 -0.05 -0.03 -0.04 -0.02 -0.01 0.030.08 0.10]
Y_z=[- 0.12-0.08-0.06-0.02 0.00 0.03 0.06 0.08 0.040.03 0.01 0.05 0.07 0.09 0.04 0.06 0.04 0.02 -0.05-0.14 -0.16]
By above error testing and separation method, the quick test of the main geometric error of machining center is capable of achieving.

Claims (3)

1. a kind of geometric error of multi-shaft linkage numerical control machine is measured and separation method, it is characterised in that carried out as follows Test：The detailed process for testing the position error of 9 lines of lathe using laser interferometer is as follows：
(1) set up the test space of machining center：Arrange lathe coordinate system (0,0,0) be test coordinate system starting point；
(2) as follows the position error of tri- axles of X, Y, Z is tested, obtains the position error test knot of 9 lines Really；
Line 1：Y, Z axis are maintained static, and X-axis is for linear motion, and each measurement spacing is stopped 4 seconds, and measurement 3 is back and forth；Will reflection Mirror is installed on the table, and interference mirror is fixed on main shaft, and adjustment is made on laser head, interference mirror, speculum online 1, it is ensured that whole In individual motion process, light can be back to the light entrance on laser head；
Line 2：X, Z axis are maintained static, and Y-axis is for linear motion, and each measurement spacing is stopped 4 seconds, and measurement 3 is back and forth；
Line 3：X, Y-axis are maintained static, and Z axis are for linear motion, and each measurement spacing is stopped 4 seconds, and measurement 3 is back and forth；
Line 4：Y, Z axis are maintained static, and X-axis is for linear motion, and each measurement spacing is stopped 4 seconds, and measurement 3 is back and forth；
Line 5：Y, Z axis are maintained static, and X-axis is for linear motion, and each measurement spacing is stopped 4 seconds, and measurement 3 is back and forth；
Line 6：X, Z axis are maintained static, and Y-axis is for linear motion, and each measurement spacing is stopped 4 seconds, and measurement 3 is back and forth；
Line 7：X, Z axis are maintained static, and Y-axis is for linear motion, and each measurement spacing is stopped 4 seconds, and measurement 3 is back and forth；
Line 8：X, Y-axis are maintained static, and Z axis are for linear motion, are measured spacing every one and are stopped 4 seconds, and X, Y-axis are maintained static, and are surveyed Amount 3 is back and forth；
Line 9：X, Y-axis are maintained static, and Z axis are for linear motion, are measured spacing every one and are stopped 4 seconds, and X, Y-axis are maintained static, and are surveyed Amount 3 is back and forth；
(3) the position error test result obtained for step (2), the geometric error for carrying out machine tool feed axle are separated；
Position error identification can be carried out in described step (3), concretely comprised the following steps：It is fixed along the 1st, 2,3 articles of straight line tests respectively Position error, initial point be (0,0,0), terminal be respectively (x, 0,0), (0, y, 0) and (0,0, z)；Tri- feed shafts of X, Y, Z Position error disjunctive model is as follows：
Δ x = Δ L ( x , 0 , 0 ) Δ y = Δ L ( 0 , y , 0 ) Δ z = Δ L ( 0 , 0 , z )
Wherein, Δ L is actual range and the difference of ideal distance, Δ L=L'-L=[Δ Lx ΔLy ΔLz 1]。
2. a kind of geometric error of multi-shaft linkage numerical control machine according to claim 1 is measured and separation method, its feature It is,
Top pendulum and Run-out error identification can be carried out in described step (3), concretely comprised the following steps：It is fixed along the 4th～9 article of straight line test Position error, and top pendulum and Run-out error is calculated using following formula：
Δβ x = [ Δ L ( x , 0 , z 0 ) - Δ L ( x , 0 , 0 ) ] / z 0 Δγ x = [ Δ L ( x , 0 , 0 ) - Δ L ( x , y 0 , 0 ) ] / y 0 Δα y = [ Δ L ( 0 , y , 0 ) - Δ L ( 0 , y , z 0 ) ] / z 0 Δγ y = [ Δ L ( x 0 , y , 0 ) - Δ L ( 0 , y , 0 ) ] / x 0 Δα z = [ Δ L ( 0 , y 0 , z ) - Δ L ( 0 , 0 , z ) ] / y 0 Δβ z = [ Δ L ( 0 , 0 , z ) - Δ L ( x 0 , 0 , z ) ] / x 0 .
3. a kind of geometric error of multi-shaft linkage numerical control machine according to claim 1 is measured and separation method, its feature It is,
Linearity identification can be carried out in described step (3), calculated using equation below：
Δy x = ∫ Δγ x d x - L y x = P y x - L y x Δz x = ∫ Δβ x d x - L z x = P z x - L z x Δx y = ∫ Δγ y d y - L x y = P x y - L x y Δz y = ∫ Δα y d y - L z y = P z y - L z y Δx z = ∫ Δβ z d z - L x z = P x z - L x z Δy z = ∫ Δα z d z - L y z = P y z - L y z
L in above formulauv(u, v=X, Y, Z and u ≠ v) is that best fit integrates PuvStraight line；Wherein：
Luv=av+b
a = 1 n Σ i = 1 n v i 2 - ( Σ i = 1 n v i ) 2 [ n Σ i = 1 n ( v i P u v i ) - Σ i = 1 n v i Σ i = 1 n P u v i ]
b = 1 n Σ i = 1 n P u v i - a n Σ i = 1 n v i .
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