CN1941523A - Wave front-distortion laser device in corrected resonance cavity - Google Patents
Wave front-distortion laser device in corrected resonance cavity Download PDFInfo
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Abstract
The invention is concerned with the high-power laser equipment that is using auto-adapted optical technology to adjust the wave-front distortion in the resonant cavity, including: at least two cavity lens, at least one distortional lens, at least one laser crystal, the pumping light, the reflecting lens, at least one splitting beam lens, the wave-front detecting analysis equipment, the driving equipment, at least one tilting lens. The invention is: adds the wave-front controller that is simple structure, low coat and higher controlling precision in the original auto-adapted optical laser system in order to equalize the more tilting aberration in the cavity; uses the distortion lens of the auto-adapted system to equalize the other aberration except the tilting aberration in order to magnify the adjusting effect and ability of the auto-adapted optical system in the laser cavity.
Description
Technical field
The present invention relates to a kind of laser device, particularly relate to a kind of device of high power laser that utilizes the interior wavefront distortion of adaptive optical technique correction resonant cavity in the resonant cavity.
Background technology
High power, high light beam quality solid state laser have application fields in industry, agricultural, scientific research and national defence field.High power solid state laser has a large amount of expense heat deposition in laser medium in operation process, when the outside of laser medium is cooled, in the inner thermal gradient that produces of laser medium.Thermal gradient in the solid laser medium makes the refraction index profile in the solid laser medium inhomogeneous, and produces thermal stress in solid laser medium, makes the solid laser medium surface that deformation take place.When laser beam passes through these laser mediums, will produce various aberrations, and cause the Beam Wave-Front distortion, the Laser Output Beam quality is descended, power output reduces.
Adaptive optical technique is the effective means of wavefront distortion in the compensation laserresonator, raising Laser Output Beam quality and power output in the laser cavity.Its basic principle is, according to wavefront distortion information in the laser cavity, and the shape of control distorting lens reflecting surface, the wavefront that the distorting lens reflecting surface is produced changes the wavefront distortion that can proofread and correct on the solid laser medium.Application No. for example: 4393303, denomination of invention is: " wavefront and power control in the chamber " (Intracavity phase front and power control), it is the shape that changes the reflecting surface of unsteady cavity internal strain mirror by the feedback control system of in-chamber adaptive optical system, the wavefront of distorting lens reflecting surface folded light beam is changed, proofread and correct the caused wavefront distortion of other optics original paper in the chamber.
But, high power solid state laser pump power height, various aberration value are bigger.When pump light when uniformity is relatively poor in laser medium, the value of various aberrations also can further increase, wherein the inclined aberration increase is more outstanding, its value can surpass 1um, and high power solid state laser is under the thermal capacitance operation mode, above-mentioned aberration in the laser operation process, various aberration dynamic changes, the inclined aberration that changes will make the resonant cavity off resonance, and laser output power and beam quality sharply descend.And the largest deformation amount of the distorting lens reflecting surface of high power, high intensity laser beam device also only is micron dimension usually, the maximum deformation quantity of distorting lens is less than the wavefront distortion value, the in-chamber adaptive system only depends on distorting lens can't fully proofread and correct wavefront distortion in the chamber, and the power output of laser and beam quality can not be improved fully.
This shows that during greater than the maximum deformation quantity of distorting lens, existing technology can't fully be proofreaied and correct wavefront distortion in the chamber in the wavefront distortion value.Therefore, people wish to have the device of high power laser of wavefront distortion in a kind of improved correction resonant cavity, can proofread and correct the big big wavefront distortion of inclined aberration in the resonant cavity.
Summary of the invention
It is less to the objective of the invention is to overcome the interior adaptive optics laser deflection of prior art lumen, inadequate shortcoming is proofreaied and correct in wavefront distortion in the chamber, thereby the laser aid of wavefront distortion in a kind of improved correction resonant cavity is provided, can proofreaies and correct the big big wavefront distortion of inclined aberration in the resonant cavity.
In order to achieve the above object, the technical scheme taked of the present invention is as follows:
A kind of laser aid of proofreading and correct wavefront distortion in the resonant cavity, as shown in Figure 1, this device comprises:
At least two chamber mirrors, the first chamber mirror 1 and the second chamber mirror 7 form a resonant cavity;
At least one distorting lens 2 is in the light path of described resonant cavity, is used to change the wavefront shape of laser;
At least one laser crystal 4 is in the described resonant cavity, is used to produce laser;
One speculum 6 is placed in the described intra resonant cavity light path, is used for incident and outgoing exploring laser light bundle;
At least one beam splitter 8, the exploring laser light bundle incides described speculum 6 by this beam splitter 8, and the light that speculum 6 reflects enters a Wavefront detecting analytical equipment 100 by this beam splitter 8;
Described Wavefront detecting analytical equipment 100 is connected with a drive unit 200;
Described drive unit 200 is connected with described distorting lens 2, and described distorting lens 2 is out of shape according to the drive signal to distorting lens 2 of described drive unit 200 outputs;
It is characterized in that, comprise that also at least one tilting mirror 3 is arranged on the light path in the resonant cavity, is used for tilting to proofread and correct the inclination of wave front aberration by minute surface; Described tilting mirror 3 is connected with described drive unit 200, according to the drive signal run-off the straight to tilting mirror 3 of described drive unit 200 outputs.
In technique scheme, described distorting lens 2 and tilting mirror 3 are piezoelectric type or electromagnetic type, and wherein described tilting mirror 3 or distorting lens 2 can be used as an end mirror of described resonant cavity.
In technique scheme, the wavelength of described exploring laser light bundle is the laser beam of 632.8nm, 650nm or 1064nm, and the number of times by laser crystal is at least once.
In technique scheme, described chamber mirror is flat mirror, plano-concave mirror, planoconvex lens, grating or Fabry-Perot etalon tool.
In technique scheme, described pump light 5 is that semiconductor laser or photoflash lamp produce, and is profile pump or end pumping to the pump mode of laser crystal 4.
In technique scheme, also comprise two chamber mirrors that are arranged in the resonant cavity, the 3rd chamber mirror 10, the 4th chamber mirror 11, the three chamber mirrors 10, the 4th chamber mirror 11 are selected the plano-concave speculum for use.
In technique scheme, also comprise the Q switching of settling in the resonant cavity 12, to produce the output of quasi-continuous lasing light, described Q switching 12 adopts electro-optical Q-switch, acoustooptic Q-switching or acousto-optic mode-locking device.
In technique scheme, described laser crystal 4 is neodymium-doped yttrium-aluminum garnet (Nd:YAG), Nd-Gd-Ga garnet (Nd:GGG), Nd-doped yttrium vanadate (Nd:YVO
4) or mix ytterbium yttrium-aluminium-garnet (Yb:YAG); It is the fluorescence of 946nm, 1064nm, 1319nm, 1061.54nm, 1030nm or 1050nm that the pumping laser crystal 4 produces wavelength.
The wavefront distortion signal that the exploring laser light bundle that laser aid of the present invention utilizes Wavefront detecting analytical equipment 100 to be obtained is produced when passing through by the laser crystal 4 of pumping, and output a control signal to drive unit 200, drive distorting lens 2 and tilting mirror 3 by drive unit 200, to adjust the inclination angle of tilting mirror, the big inclined aberration that is produced during laser beams process laser crystal, change shape correction other aberration except that inclined aberration of distorting lens reflecting surface simultaneously, with the power output of raising laser and the beam quality of output beam.
Compared with prior art, superiority of the present invention is:
The wavefront distortion system organically combines distorting lens and self adaptation mirror in the in-chamber adaptive optical correction laser chamber provided by the invention; That this device uses is simple in structure, cost is relatively low, the higher tilting mirror of control precision is as the wavefront controller, proofreaies and correct bigger inclined aberration in the chamber; Use in-chamber adaptive system variant mirror correction other aberration except that inclined aberration, improved the ability of wavefront distortion in the in-chamber adaptive optical system correction chamber, improved calibration result.
Description of drawings
The index path of the laser aid of wavefront distortion in Fig. 1 correction resonant cavity of the present invention;
The index path of the laser aid of wavefront distortion wherein adopts two distorting lens 2,9 in the correction resonant cavity of Fig. 2 embodiment of the invention 3;
The index path of the laser aid of wavefront distortion in the correction resonant cavity of Fig. 3 embodiment of the invention 4 is comprising the 3rd chamber mirror 10, the 4th chamber mirror 11 of two plano-concave speculums formation;
The index path of the laser aid of wavefront distortion in the correction resonant cavity of Fig. 4 embodiment of the invention 5 wherein increases electro-optical Q-switch 12 in resonant cavity;
Embodiment
That the present invention adds in original in-chamber adaptive optical laser system is simple in structure, cost is relatively low, the higher tilting mirror of control precision is as the wavefront controller, bigger inclined aberration in the compensated cavity; Use the original distorting lens compensation of in-chamber adaptive system other aberration except that inclined aberration, increase the calibration result and the ability of ADAPTIVE OPTICS SYSTEMS in the laser chamber.
Below in conjunction with the drawings and specific embodiments the present invention is described in further detail:
Light path according to Fig. 1 is made a solid state laser that utilizes wavefront distortion in the in-chamber adaptive system compensation chamber.Laser crystal 4 adopts Nd:YAG, by pump light 5 profile pumps, and this laser aid output 1064nm laser.Wavelength is that the exploring laser light bundle of 632.8nm is reflected and enters laserresonator after mirror 6 reflection, and the light beam that vibrates in exploring laser light bundle and the chamber is coaxial, and two beam diameters are identical.The exploring laser light bundle sees through by the laser crystal 4 of pumping, is tilted mirror 2, distorting lens 3 reflection arrival chamber mirrors 1; The exploring laser light bundle that arrives chamber mirror 1 is reflected by it, returns along former road through laser crystal 4, surveys light and passes through laser crystal 4 twice.When the detecting light beam that returns passed through beam splitter 8, a part was surveyed light and is entered Wavefront detecting analytical equipment 100, to analyze laser crystal 4 caused various aberrations, for wavefront correction provides information.In the present embodiment, when Wavefront detecting analytical equipment 100 at first utilizes Hartmann's Laser Measurement crystal 1 not by pumping, return the wavefront of detecting light beam, and demarcate the reference wavefront that this wavefront is a Hartmann sensor.When the Laser Measurement crystal 4 is by pumping then, Returning beam is with respect to the wavefront distortion and the aberration of reference wavefront, according to the size of measuring the inclined aberration that is obtained, Wavefront detecting analytical equipment 100 outputs a control signal to drive unit 200, the inclination angle of control tilting mirror 3, the caused inclined aberration of calibration of laser crystal 4 thermal effect; According to the type and size of measuring other aberration that is obtained, Wavefront detecting analytical equipment 100 outputs a control signal to drive unit 200, change the reflector shape of distorting lens 2, other aberration in the calibration of laser crystal 4 except that inclined aberration, increase the calibration capability of in-chamber adaptive optical system, thereby the beam quality of laser and power output are improved fully.Chamber mirror 1 is selected flat mirror for use, and one side is plated the high-reflecting film of 1064nm, 632.8nm; Chamber mirror 7 is selected the plano-concave mirror for use, and one side is plated 1064nm and partly seen through film nm, and transmitance is 20%, and one side is plated the anti-reflection film of 1064nm in addition; The high-reflecting film of tilting mirror 3 and distorting lens 2 reflecting surface plating 1064nm, the 632.8nm in resonant cavity; The one side of the close laser crystal 4 of speculum 6 plating 1064nm anti-reflection film and the 632.8nm film that is all-trans, one side is plated the 1064nm anti-reflection film in addition; Beam splitter 8 is near the one side plating 632.8nm anti-reflection film of exploring laser light, and one side is plated 632.8nm partial reflection film in addition, and reflectivity is 50%.
Regulate chamber mirror 1,7 and make resonant cavity output 1064nm laser, aberration-types and the size of utilizing Wavefront detecting analytical equipment 100 to be obtained, Wavefront detecting analytical equipment 100 outputs a control signal to drive unit 200, rotate tilting mirror 3, with the inclined aberration in the calibration of laser crystal, change the reflector shape of distorting lens 2, other aberration in the calibration of laser crystal except that inclined aberration is to improve the beam quality and the power output of laser output laser.
Light path according to Fig. 1 is made a solid state laser that utilizes wavefront distortion in the in-chamber adaptive system compensation chamber.Its index path and each device are identical with embodiment 1, and just pump mode is an end pumping.
Regulate chamber mirror 1,7 and make resonant cavity output 1064nm laser, aberration-types and the size of utilizing Wavefront detecting analytical equipment 100 to be obtained, Wavefront detecting analytical equipment 100 outputs a control signal to drive unit 200, thereby rotate tilting mirror 3, inclined aberration in the calibration of laser crystal, change the reflector shape of distorting lens 2, other aberration in the calibration of laser crystal except that inclined aberration is to improve the beam quality and the power output of laser output laser.
Light path according to Fig. 2 is made a solid state laser that utilizes wavefront distortion in the in-chamber adaptive system compensation chamber.Wherein,, remove chamber mirror 1, substitute with second distorting lens 9 that increases according to embodiment 1; Tilting mirror 3 all is connected with drive unit 200 with two distorting lens 2,9; Laser crystal 4 adopts Nd:YVO
4, by pump light 5 profile pumps, this laser aid output 1342nm laser.Chamber mirror 7 selects for use flat minute surface plating 1342nm partly to see through film, and transmitance is 10%, and one side is plated the anti-reflection film of 1064nm in addition; The high-reflecting film of tilting mirror 3 and two reflecting surface plating 1342nm, the 632.8nms of distorting lens 2,9 in resonant cavity; Beam splitter 8 is near the one side plating 1342nm anti-reflection film of laser crystals 4 and the 632.8nm film that is all-trans, and one side is plated the 1342nm anti-reflection film in addition.
Regulate chamber mirror 7 and make resonant cavity output 1342nm laser, aberration-types and the size of utilizing Wavefront detecting analytical equipment 100 to be obtained, Wavefront detecting analytical equipment 100 outputs a control signal to drive unit 200, drive unit 200 sends drive signal, rotate tilting mirror 3, the inclined aberration in the calibration of laser crystal; Change the reflector shape of distorting lens 2,9, other aberration in the calibration of laser crystal except that inclined aberration is to improve the beam quality and the power output of laser output laser.
Light path according to Fig. 3 is made a solid state laser that utilizes wavefront distortion in the in-chamber adaptive system compensation chamber.Wherein, according to light path and the device of embodiment 1, increase by two chamber mirrors: the 3rd chamber mirror 10, the 4th chamber mirror 11 are all selected the plano-concave speculum for use, the high-reflecting film of its reflecting surface plating 1064nm, 650nm in resonant cavity; Laser crystal 4 adopts Nd:YAG, by pump light 5 profile pumps, and this laser output 1064nm laser.Chamber mirror 1 is selected flat mirror for use, the high-reflecting film of the plating of resonant cavity interior reflective surface 1064nm, 650nm; Chamber mirror 7 is selected the plano-concave mirror for use, and resonant cavity interior reflective surface plating 1064nm partly sees through film nm, and transmitance is 20%, and one side is plated the anti-reflection film of 1064nm in addition; The high-reflecting film of tilting mirror 3 and distorting lens 2 reflecting surface plating 1064nm, the 650nm in resonant cavity; The one side of the close laser crystal 4 of beam splitter 8 plating 1064nm anti-reflection film and the 650nm film that is all-trans, one side is plated the 1064nm anti-reflection film in addition.
Regulate chamber mirror 1,7,10,11 and make resonant cavity output 1064nm laser, aberration-types and the size of utilizing Wavefront detecting analytical equipment 100 to be obtained, and output a control signal to drive unit 200, drive tilting mirror 3, inclined aberration in the calibration of laser crystal, change the reflector shape of distorting lens 2, other aberration in the calibration of laser crystal except that inclined aberration is to improve the beam quality and the power output of laser output laser.
Light path according to Fig. 4 is made a solid state laser that utilizes wavefront distortion in the in-chamber adaptive system compensation chamber.Wherein, according to embodiment 1, in resonant cavity, increase electro-optical Q-switch 12 and be placed between laser crystal 4 and the output cavity mirror 7.Chamber mirror 1 is selected flat mirror for use, and one side is plated the high-reflecting film of 1064nm, 632.8nm; Chamber mirror 7 is selected the plano-concave mirror for use, and one side is plated 1064nm and partly seen through film nm, and transmitance is 20%, and one side is plated the anti-reflection film of 1064nm in addition; The high-reflecting film of tilting mirror and distorting lens reflecting surface plating 1064nm, the 632.8nm in resonant cavity; The one side of the close laser crystal 4 of beam splitter 8 plating 1064nm anti-reflection film and the 632.8nm film that is all-trans, one side is plated the 1064nm anti-reflection film in addition.
Regulating chamber mirror 1,7 makes resonant cavity export the laser of quasi-continuous 1064nm, aberration-types and the size of utilizing Wavefront detecting analytical equipment 100 to be obtained, Wavefront detecting analytical equipment 100 outputs a control signal to drive unit 200, drive unit 200 output drive signals, rotate tilting mirror 3, inclined aberration in the calibration of laser crystal, change the reflector shape of distorting lens 2, other aberration in the calibration of laser crystal except that inclined aberration is to improve the beam quality and the power output of laser output laser.
Claims (9)
1, a kind of laser aid of proofreading and correct wavefront distortion in the resonant cavity, this device comprises:
At least two chamber mirrors, the first chamber mirror (1) and the second chamber mirror (7) form a resonant cavity;
At least one laser crystal (4) is in the described resonant cavity;
Pump light (5) incides described laser crystal (4) and goes up with this laser crystal of pumping;
It is characterized in that, also comprise:
At least one distorting lens (2) is in the light path of described resonant cavity;
One speculum (6) is placed in the described intra resonant cavity light path;
At least one beam splitter (8), the exploring laser light bundle incides described speculum (6) by this beam splitter (8), and the light that speculum (6) reflects enters a Wavefront detecting analytical equipment (100) by this beam splitter (8);
Described Wavefront detecting analytical equipment (100) is connected with a drive unit (200);
Described drive unit (200) is connected with described distorting lens (2), and described distorting lens (2) is out of shape according to the drive signal to distorting lens (2) of described drive unit (200) output;
At least one tilting mirror (3) is arranged on the light path in the resonant cavity; Described tilting mirror (3) is connected with described drive unit (200), according to the drive signal run-off the straight to tilting mirror (3) of described drive unit (200) output.
According to the laser aid of wavefront distortion in the described correction resonant cavity of claim 1, it is characterized in that 2, also be included in the Q switching of settling in the described resonant cavity (12), described Q switching (12) adopts electro-optical Q-switch, acoustooptic Q-switching or acousto-optic mode-locking device.
3, according to the laser aid of wavefront distortion in the described correction resonant cavity of claim 1, it is characterized in that, also comprise being arranged on the 3rd chamber mirror (10) on the light path and the 4th chamber mirror (11) in the resonant cavity, all select the plano-concave speculum for use.
4, according to the laser aid of wavefront distortion in each described correction resonant cavity in the claim 1,2 or 3, it is characterized in that, described distorting lens (2) and tilting mirror (3) are piezoelectric type or electromagnetic type, and wherein a described tilting mirror (3) or distorting lens (2) are as an end mirror of described resonant cavity.
According to the laser aid of wavefront distortion in each described correction resonant cavity in the claim 1,2 or 3, it is characterized in that 5, the wavelength of described exploring laser light bundle is the laser beam of 632.8nm, 650nm or 1064nm, the number of times by laser crystal is at least once.
According to the laser aid of wavefront distortion in each described correction resonant cavity in the claim 1,2 or 3, it is characterized in that 6, described chamber mirror is flat mirror, plano-concave mirror, planoconvex lens, grating or Fabry-Perot etalon.
7, according to the laser aid of wavefront distortion in each described correction resonant cavity in the claim 1,2 or 3, it is characterized in that, described pump light (5) is that semiconductor laser or photoflash lamp produce, and is profile pump or end pumping to the pump mode of laser crystal (4).
According to the laser aid of wavefront distortion in the described correction resonant cavity of claim 1, it is characterized in that 8, described laser crystal (4) is neodymium-doped yttrium-aluminum garnet, Nd-Gd-Ga garnet, Nd-doped yttrium vanadate or mixes the ytterbium yttrium-aluminium-garnet; It is the fluorescence of 946nm, 1064nm, 1319nm, 1061.54nm, 1030nm or 1050nm that described laser crystal (4) pumping produces wavelength.
According to the laser aid of wavefront distortion in the described correction resonant cavity of claim 1, it is characterized in that 9, also be included in second distorting lens (9) in the described resonant cavity light path, this distorting lens (9) is connected with described drive unit (200).
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| CN 200510107832 CN1941523A (en) | 2005-09-30 | 2005-09-30 | Wave front-distortion laser device in corrected resonance cavity |
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| CN 200510107832 CN1941523A (en) | 2005-09-30 | 2005-09-30 | Wave front-distortion laser device in corrected resonance cavity |
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| CN101349809B (en) * | 2008-08-29 | 2010-09-29 | 北京理工大学 | System for zooming and focusing based on MOEMS |
| CN102052278A (en) * | 2010-11-09 | 2011-05-11 | 杭州电子科技大学 | Micropump driving device based on photonic crystal fiber |
| CN101162294B (en) * | 2007-11-06 | 2011-06-15 | 中国科学院光电技术研究所 | Measurement and correction method for inertia confinement complete light path aberration of fusion device |
| CN103887701A (en) * | 2014-03-19 | 2014-06-25 | 浙江大学 | Device and method for controlling light beam quality in laser amplifier through self-reappearing of wavefront outside cavity |
| CN104993370A (en) * | 2015-07-30 | 2015-10-21 | 中国工程物理研究院应用电子学研究所 | Intra-cavity tilt aberration active compensation apparatus based on reciprocating detection |
| CN105390930A (en) * | 2015-10-23 | 2016-03-09 | 北京应用物理与计算数学研究所 | Intracavity aberration compensating unstable cavity laser device and aberration compensating method thereof |
| CN105514765A (en) * | 2014-10-10 | 2016-04-20 | 波音公司 | Laser system and method for controlling wave front of laser beam |
| CN106129781A (en) * | 2016-06-16 | 2016-11-16 | 中国工程物理研究院激光聚变研究中心 | A kind of super multi-pass amplifier laser beam quality control method |
| CN105390930B (en) * | 2015-10-23 | 2018-08-31 | 北京应用物理与计算数学研究所 | A kind of in-cavity aberratio compensation unstable cavity laser and its aberration compensating method |
| WO2019019425A1 (en) * | 2017-07-27 | 2019-01-31 | 英诺激光科技股份有限公司 | Method for correcting wavefront distribution of optical system using laser |
| CN110649454A (en) * | 2019-09-12 | 2020-01-03 | 四川大学 | Active compensation method and device for quality of thin tube laser beam |
| CN111929891A (en) * | 2020-08-17 | 2020-11-13 | 中国科学院光电技术研究所 | Adaptive optical system wave-front tilt composite correction device and control method |
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| CN101162294B (en) * | 2007-11-06 | 2011-06-15 | 中国科学院光电技术研究所 | Measurement and correction method for inertia confinement complete light path aberration of fusion device |
| CN101349809B (en) * | 2008-08-29 | 2010-09-29 | 北京理工大学 | System for zooming and focusing based on MOEMS |
| CN102052278A (en) * | 2010-11-09 | 2011-05-11 | 杭州电子科技大学 | Micropump driving device based on photonic crystal fiber |
| CN102052278B (en) * | 2010-11-09 | 2013-03-13 | 杭州电子科技大学 | Micropump driving device based on photonic crystal fiber |
| CN103887701A (en) * | 2014-03-19 | 2014-06-25 | 浙江大学 | Device and method for controlling light beam quality in laser amplifier through self-reappearing of wavefront outside cavity |
| CN105514765B (en) * | 2014-10-10 | 2019-07-09 | 波音公司 | For controlling the laser system and method for the wavefront of laser beam |
| CN105514765A (en) * | 2014-10-10 | 2016-04-20 | 波音公司 | Laser system and method for controlling wave front of laser beam |
| CN104993370A (en) * | 2015-07-30 | 2015-10-21 | 中国工程物理研究院应用电子学研究所 | Intra-cavity tilt aberration active compensation apparatus based on reciprocating detection |
| CN105390930A (en) * | 2015-10-23 | 2016-03-09 | 北京应用物理与计算数学研究所 | Intracavity aberration compensating unstable cavity laser device and aberration compensating method thereof |
| CN105390930B (en) * | 2015-10-23 | 2018-08-31 | 北京应用物理与计算数学研究所 | A kind of in-cavity aberratio compensation unstable cavity laser and its aberration compensating method |
| CN106129781A (en) * | 2016-06-16 | 2016-11-16 | 中国工程物理研究院激光聚变研究中心 | A kind of super multi-pass amplifier laser beam quality control method |
| CN106129781B (en) * | 2016-06-16 | 2018-10-23 | 中国工程物理研究院激光聚变研究中心 | A kind of super multi-pass amplifier laser beam quality control method |
| WO2019019425A1 (en) * | 2017-07-27 | 2019-01-31 | 英诺激光科技股份有限公司 | Method for correcting wavefront distribution of optical system using laser |
| CN110649454A (en) * | 2019-09-12 | 2020-01-03 | 四川大学 | Active compensation method and device for quality of thin tube laser beam |
| CN110649454B (en) * | 2019-09-12 | 2021-10-08 | 四川大学 | Active compensation method for quality of thin tube laser beam |
| CN111929891A (en) * | 2020-08-17 | 2020-11-13 | 中国科学院光电技术研究所 | Adaptive optical system wave-front tilt composite correction device and control method |
| CN111929891B (en) * | 2020-08-17 | 2022-08-02 | 中国科学院光电技术研究所 | Adaptive optical system wave-front tilt composite correction device and control method |
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