CN102623882A - Batten laser beam purification system based on double-piezoelectric-patch distortion mirror - Google Patents
Batten laser beam purification system based on double-piezoelectric-patch distortion mirror Download PDFInfo
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- CN102623882A CN102623882A CN2012100881698A CN201210088169A CN102623882A CN 102623882 A CN102623882 A CN 102623882A CN 2012100881698 A CN2012100881698 A CN 2012100881698A CN 201210088169 A CN201210088169 A CN 201210088169A CN 102623882 A CN102623882 A CN 102623882A
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Abstract
The invention provides a batten laser beam purification system based on a double-piezoelectric-patch distortion mirror, which is composed of a beam reshaping unit, a double-piezoelectric-patch distortion mirror, a tilting mirror, spectroscope, a focal unit, a polarizer, an analyzer, a two-dimensional imaging device, a high pressure amplifying device, a control computer and a batten laser device. A light beam reshaping unit reshapes a long-strip-shaped light beam output by batten laser into a collimation square light beam; the tilting mirror and the double-piezoelectric-patch distortion mirror sequentially reflect the collimation square light beam into the spectroscope; the light beam reflected by the spectroscope serves as output of the laser device, the light beam penetrating through the spectroscope is received by the two-dimensional imaging device; and the control computer controls the correcting value of the distortion mirror and the tilting mirror according to a signal received by the two-dimensional imaging device, corrects the wavefront distortion of the batten laser device in real time, and improves the quality of the light beam of the batten laser device.
Description
Technical field
The present invention relates to a kind of slab laser light beam cleaning system, particularly, belong to the adaptive optics field based on the light beam cleaning system of bimorph deformable mirror.
Background technology
Solid State Laser has just been used because of its good monochromaticjty, coherence, directivity have obtained in fields such as industry, scientific researches widely since being born.Yet the bar-shaped gain media of conventional solid laser is under the effect of pumping and cooling system; Producing radial symmetry gradient and end face expands; Laser bar demonstrates effects such as thermal lensing effect, stress birfringence; These effects have seriously limited laser output power and beam quality, have restricted the progress in fields such as laser coherence is synthetic, laser radar.
General Electric Apparatus Co.(U.S.A.)s in 1969 have proposed the notion of slab laser; Its gain media geometry is narrow lath; Is " it " font light path through rational light path design light beam in slat; Can eliminate portion of hot lens effect, fevering sodium effect and stress birfringence effect like this, thus beam quality that acquisition will be good than bar-shaped gain media and higher energy.
Present most of slab laser is main oscillations-power amplification (MOPA) structure, in order to overcome the low shortcoming of MOPA structure energy of lasers extraction efficiency, can make full use of pump energy just need multipass to amplify usually, improves the amplifier extraction efficiency.MOPA structure slab laser comprises a plurality of picture transmission systems and a plurality of speculum, because various optical element mismachining tolerances, lens, mirror tilt, distance adjustment error between lens and the speculum, system inevitably introduces aberration.Under the high power pump condition, the slab laser medium still has thermal lensing effect to exist, and causes multipass to amplify the back output beam quality and is difficult to reach perfect condition.
In order to eliminate of the influence of these aberrations to laser output; People utilize the light beam of generation of stimulated Brillouin scattering (SBS) effect and incident laser conjugation; The conjugation light beam returns along the incident beam path, offsets various aberrations acquisition high light beam quality laser outputs (U.S. Pat Patient 4725787) in the MOPA structure light path.Domestic existing research to phase-conjugate mirror, the phase-conjugate mirror that is applied to solid batten laser of Beijing University of Technology's development for example, one Chinese patent application number: 201020110890.Main oscillations-power amplifier technology (MOPA), slab laser gain media cooperate the SBS phase conjugation to obtain the nearly diffraction limit output of multikilowatt in the nineties in 20th century.But the SBS technology only is applicable to pulse laser; Problems (referring to Yao Jianquan, firm total solids laser of Xu De and nonlinear optical frequency conversion technology P293 Science Press 2007) such as the inverting of the solution stimulated Brillouin scattering of still needing wavefront, time waveform fidelity and the puncture of SBS medium optical path.
The light beam purification techniques is to utilize active minute surface real-Time Compensation laser beam-wave front-distortion, improves the technology of laser beam quality.Be suitable at present distorting lens that the slab laser light beam purifies according to type of drive can be divided into conventional piezoelectric distorting lens based on longitudinal piezoelectric effect, based on the distorting lens of micro-electromechanical technology with based on the bimorph deformable mirror of piezo-electric traverse effect etc.Micromechanics deformation of thin membrane mirror is the small-sized distorting lens that utilizes micromechanics and micro-optic processing technology to make; Be fit to the slab laser of cavity resonator structure is purified (Walter Lubeigt etc.; Enhancement of laserperformance using an intracavity deformable membrane mirror, OpticsExpress 2008Vol.16, No.15); But the anti-damage threshold of micromechanics distorting lens is low, and the light beam of seldom using high-power strip laser purifies.People such as Ping Yang had introduced slab laser light beam cleaning system (the Ping Yang based on traditional distorting lens in 2010; " Enhancementof the beam quality of non-uniform output slab laser amplifier with a 39actuator rectangular piezoelectric deformable mirror " Optics ExpressVol.18No.7), light beam BQ value rises to 1.7 from 4.1 after the work of light beam cleaning system closed loop.The industry scientific research field requires to improve constantly to laser output power; The gain media thermal effect that is caused by high power pump sharply increases; The Laser Output Beam wavefront distortion deteriorates into the compensation range that surpasses common traditional distorting lens, but the big vertical piezoelectric deforming mirror of path increment development and production difficulty, behind existing distorting lens light beam cleaning system compensation laser wave front-distortion; Light beam still has a large amount of residual aberrations, is difficult to obtain the beam quality of diffraction limit.
Summary of the invention
In order to solve prior art problems, the objective of the invention is to overcome based on longitudinal piezoelectric effect distorting lens path increment little, the deficiency that cost is high proposes based on the light beam cleaning system of bimorph deformable mirror as slab laser Beam Wave-Front distortion compensation apparatus.This system has good reliability and advantage of wide range of application, is applicable to that the continuous or pulse lath laser beam from milliwatt to thousands of watts purifies.
For realizing said purpose, the slab laser light beam cleaning system of bimorph deformable mirror provided by the invention, the technical scheme that the technical solution problem adopts comprises:
One slab laser sends the strip light beam; On the strip beam path, place beam shaping unit, tilting mirror, bimorph deformable mirror, spectroscope, focusing unit, the polarizer, analyzer and two-dimensional imaging device successively;
One beam shaping unit becomes the strip beam shaping square beam of light of collimation;
One tilting mirror and a bimorph distorting lens, the square beam of light with collimation reflects successively, the square beam of light that obtains reflecting;
One spectroscope is divided into two bundles with the square beam of light that reflects, and wherein exports a branch of folded light beam as the slab laser light beam that purifies, and exports another bundle and is transmitted light beam;
One focusing unit focuses on spectroscopical transmitted light beam, and the non-linear polarization light beam of output focusing;
One polarizer and an analyzer constitute the light intensity attenuation system between focusing unit and two-dimensional imaging device, the non-linear polarization light beam after the polarizer focuses on focusing unit rises to be biased into and is linearly polarized light beam; To be positioned at the direction rotation of the analyzer light beam incident along the line on the support, through the angle of rotation analyzer, in order to the energy of adjustment outgoing light beam;
One two-dimensional imaging device is positioned on the focal plane of focusing unit, and is positioned at after the analyzer, and the two-dimensional imaging device is used for the transmitted light far-field intensity distribution is measured and obtained to the Energy distribution of linearly polarized light;
One control computer links to each other with the two-dimensional imaging device with data wire through data collecting card, and the transmitted light far-field intensity distribution that receives and in real time the two-dimensional imaging device is measured is calculated, and obtains beam quality; The control computer utilizes the random optimization control algolithm beam quality to be calculated and the digital voltage signal of controlled bimorph deformable mirror and tilting mirror; And after by the D/A card of control on the computer this digital voltage signal being carried out digital-to-analogue conversion, obtain analog voltage signal;
One high-voltage amplifier; Its input is connected with the output of control computer; The output of high-voltage amplifier is connected to tilting mirror and bimorph deformable mirror through data wire; Receive and analog voltage signal is amplified, and the analog voltage signal that will obtain amplifying sends into the driver of tilting mirror and bimorph deformable mirror, be used to control the angle of inclination of tilting mirror and the minute surface face shape of bimorph deformable mirror; Completion reaches the purpose that improves the slab laser Gaussian beam quality that purifies to the compensation of slab laser output beam wavefront distortion.
The present invention for the wavefront correction device improves the slab laser output beam quality, compared with prior art has following advantage with the bimorph deformable mirror:
(1) the present invention adopts bimorph deformable mirror as the wavefront compensation device; There is not nonlinear optical element in the whole system; There are not the problems such as pulse breakdown that run in the non-linear conjugated compensation; Compare cheap, path increment big (path increment can reach positive and negative 15 microns) with the conventional piezoelectric distorting lens, and driver density, resonance frequency satisfy the slab laser light beam and purify demand.
(2) crosslinked value of bimorph deformable mirror and path increment are fit to big amplitude low order aberration is compensated greatly very much.MOPA structure lath Laser Output Beam aberration is main with low order aberrations such as out of focus and astigmatisms, and the present invention compensates Beam Wave-Front with bimorph deformable mirror, and is good to MOPA structure lath Laser Output Beam calibration result; Along with the increase of driver density, bimorph deformable mirror can promote the compensation ability of higher order aberratons gradually, and after the compensation of MOPA structure lath Laser Output Beam, the Beam Wave-Front residual error can reduce gradually.
(3) the present invention uses spectroscope that light beam is carried out beam split, and the two-beam phase information after the beam split is identical, beam quality is consistent; Spectroscopical front surface is coated with high-reflecting film, and back surface is coated with anti-reflection film, effectively reduces the come back reflective of light beam in front and rear surfaces, has improved the certainty of measurement of beam quality.
(4) between two-dimensional imaging device and spectroscope, placed the light intensity attenuation system that the polarizer and analyzer constitute; Analyzer can rotate freely along optical axis; Can regulate the light intensity that focuses on the two-dimensional imaging device through rotation analyzer angle, compare the continuous modulation that can realize light intensity with traditional neutral-density filter.Need to regulate when inciding the light energy on the camera, only need rotatory polarization sheet angle to get final product, need not change optical attenuator element.
Description of drawings
Fig. 1 is the slab laser light beam cleaning system sketch map that the present invention is based on bimorph deformable mirror;
Fig. 2 is the bimorph deformable mirror drive electrode arrangement mode that 37 unit of the present invention are formed;
Fig. 3 a and Fig. 3 b are far-field spot comparison diagrams before and after the light beam cleaning system work of the present invention;
Fig. 4 is a camera target surface maximum gradation value change curve before and after the light beam cleaning system work of the present invention.
Embodiment
For making the object of the invention, technical scheme and advantage clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, to further explain of the present invention.
The present invention adopts path increment big, and cheap bimorph deformable mirror improves the slab laser beam quality as the wavefront compensation element.Bimorph deformable mirror is cheap, path increment is fit to greatly big amplitude low order aberration is compensated, and driver density, resonance frequency can satisfy the purification demand of slab laser.Different with the conventional piezoelectric distorting lens; The bimorph deformable mirror driver has higher crosslinked value; Its compensation ability is relevant with the effective aperture of distorting lens, thus the beam shaping that the beam shaping system sends slab laser to the best correcting area of bimorph deformable mirror in.Light beam is divided into two bundles by spectroscope after bimorph deformable mirror, tilting mirror reflection, and high power portion is exported as laser; A branch of in addition process focusing system focuses on the two-dimensional imaging device; The control computer is to real-time monitoring beam quality; Generate the bimorph deformable mirror drive control signal according to the random optimization control algolithm; Control bimorph deformable mirror face type, the distortion of compensation Beam Wave-Front improves the far field beam encircled energy.
Operation principle of the present invention: beam quality can improve the far field beam quality through the modulated beam of light Wave-front phase by light distribution and phase information decision.Low order aberration amounts such as the inclination of slab laser output beam, out of focus, astigmatism are big.The bimorph deformable mirror path increment is big, and the crosslinked value of driver is bigger, is fit to very much big amplitude low order aberration is proofreaied and correct.MOPA structure slab laser is output as bar shaped light beam, and beam area is little, covers more bimorph deformable mirror minute surface in order to make light beam, improves the light beam clean-up effect, need expand bundle to the bar shaped light beam shaping.Expand the light beam process optical splitter beam split after restrainting, high power is a branch of to be exported as laser; Have with another bundle of the consistent wavefront information of high power-beam and focus on the two-dimensional imaging device through focusing system, measure as beam quality, light spot energy convection light quality more is high more, otherwise hot spot is got over disperse, and beam quality is poor more.Control system is utilized the angle of inclination of random optimization algorithm controls bimorph deformable mirror face shape and tilting mirror according to beam quality, and far field beam encircled energy and optical axis stable degree are improved in the wavefront distortion and the angle of inclination of compensation light beam.
Like accompanying drawing 1 the slab laser light beam cleaning system based on bimorph deformable mirror is shown, the attenuating device that mainly is made up of slab laser 100, beam shaping unit 200, tilting mirror 301, bimorph deformable mirror 302, spectroscope 401, focusing unit 402, two-dimensional imaging device 403, control computer 404, high-voltage amplifier 405, the polarizer 407 and analyzer 408 is formed;
On the strip light beam that slab laser 100 sends, settle beam shaping unit 200, tilting mirror 301, bimorph deformable mirror 302, spectroscope 401, focusing unit 402, the polarizer 407, analyzer 408, two-dimensional imaging device 403 successively;
One slab laser 100 sends the strip light beam; On the strip beam path, place beam shaping unit 200, tilting mirror 301, bimorph deformable mirror 302, spectroscope 401, focusing unit 402, the polarizer 407, analyzer 408 and two-dimensional imaging device 403 successively;
One beam shaping unit 200 becomes the strip beam shaping square beam of light of collimation;
One tilting mirror 301 and a bimorph distorting lens 302, the square beam of light with collimation reflects successively, the square beam of light that obtains reflecting;
One spectroscope 401 is divided into two bundles with the square beam of light that reflects, and wherein exports a branch of folded light beam as the slab laser light beam 406 that purifies, and exports another bundle and is transmitted light beam;
One focusing unit 402 focuses on the transmitted light beam of spectroscope 401, and the non-linear polarization light beam that focuses on of output;
One polarizer 407 and an analyzer 408 constitute the light intensity attenuation system between focusing unit 402 and two-dimensional imaging device 403, the non-linear polarization light beam after the polarizer 407 focuses on focusing unit 402 rises to be biased into and is linearly polarized light beam; To be positioned at the direction rotation of the analyzer 408 light beam incidents along the line on the support, through the angle of rotation analyzer 408, in order to the energy of adjustment outgoing light beam;
One two-dimensional imaging device 403 is positioned on the focal plane of focusing unit 402, and is positioned at after the analyzer 408, and two-dimensional imaging device 403 is used for the transmitted light far-field intensity distribution is measured and obtained to the Energy distribution of linearly polarized light;
One control computer 404 links to each other with two-dimensional imaging device 403 with data wire through data collecting card, and the transmitted light far-field intensity distribution that receives and in real time two-dimensional imaging device 403 is measured is calculated, and obtains beam quality; According to beam quality; Control computer 404 utilizes the random optimization control algolithm beam quality to be calculated the digital voltage signal of also controlled bimorph deformable mirror 302 and tilting mirror 301; And after by the D/A card of control on the computer 404 this digital voltage signal being carried out digital-to-analogue conversion, obtain analog voltage signal;
One high-voltage amplifier 405; Its input is connected with the output of control computer 404; The output of high-voltage amplifier 405 is connected to tilting mirror 301 and bimorph deformable mirror 302 through data wire; Receive and analog voltage signal is amplified, and the analog voltage signal that will obtain amplifying sends into the driver of tilting mirror 301 and bimorph deformable mirror 302, be used to control the angle of inclination of tilting mirror 301 and the minute surface face shape of bimorph deformable mirror 302; Completion reaches the purpose that improves slab laser light beam 406 beam qualities that purify to the compensation of slab laser 100 output beam wavefront distortions.
Focusing unit 402 will focus on from the light beam of spectroscope 401 transmissions on the two-dimensional imaging device 403; Analyzer 408 is transmission-type linear polarizer, through the angle of rotation analyzer 408, can adjust the light energy that incides on the two-dimensional imaging device 403.
The gain medium that described slab laser 100 uses is the laser crystal or the laser glass of battened construction.Described beam shaping unit 200 is shaped as slab laser 100 output beams the square beam of light that can cover the best correcting area of bimorph deformable mirror 302 minute surfaces.Described bimorph deformable mirror 302 minute surfaces are coated with the highly reflecting films system to outgoing laser beam.Described beam shaping unit 200 is by one or more combination in cylindrical mirror, spherical mirror, prism, cylindrical mirror, the spherical reflector.Said spectroscopical front surface is coated with high-reflecting film, the surface, back is coated with anti-reflection film, and the beam quality of spectroscopical folded light beam is consistent with the beam quality of transmitted light beam.Said focusing unit 402 plays the effect of focused beam, is lens, or a plurality of lens, or the combination of a plurality of speculums.Said two-dimensional imaging device is CCD camera or CMOS camera.A kind of as in genetic algorithm, ant group algorithm or the random paralleling gradient descent algorithm of the random optimization algorithm that said control computer 404 uses.Said analyzer 408 is transmission-type linear polarizer.
Bimorph deformable mirror 302 is the core devices of laser beam wavefront distortion by way of compensation in the present invention.The bimorph deformable mirror 302 that uses in the present embodiment is developed voluntarily; Have 37 drivers; Effective clear aperture of bimorph deformable mirror is 40 millimeters; Positive and negative 15 microns of center range amount, the minute surface of bimorph deformable mirror are coated with the highly reflecting films system to the 1064nm laser beam, and light beam is spent the incident specular reflectivitys greater than 99.5% less than 5.Be illustrated in figure 2 as the driver arrangement mode of the bimorph deformable mirror of forming 1 to 37 unit 302.
Tilting mirror 301 is control beam tilt quantity, the device of stabilized lasers bundle optical axis.Spectroscope 401 is divided into two bundles with light beam, and high-power a branch of as output, ingoing power is accomplished the real-time measurement of luminous power; The phase effect of 401 pairs of reverberation of spectroscope and transmitted light is very little, the low power optical beam wavefront of transmission and strength distributing information and folded light beam basically identical, and the two-beam beam quality is consistent.Testing used two-dimensional imaging device 403 is the high-speed cmos camera, and effectively optical region is 10.9 millimeters * 10.9 millimeters, resolution 1024 * 1024, and pixel size is 10.6 microns * 10.6 microns.The evaluation index of the beam quality that control computer 404 is measured can be power ratio (NPIB) in the normalization bucket, and Si Telieer is than (SR), beam quality factor parameters such as (β).Wherein commonly used with power ratio (NPIB) in the normalization bucket, it requires hot spot to have single intensity peak, and comprises energy as much as possible with the bucket inside at this peak position center.Energy/gross energy in the NPIB=bucket=E
PIB/ E.The gray value I that far field beam light intensity and CMOS camera are measured (x, y) corresponding, x is the coordinate figure of horizontal direction X, y is the vertical square of coordinate figure to Y.Coordinate (the x of intensity peak
Max, y
Max) be I (x, the y) coordinate of gray value maximum point, the bucket radius be r=3 pixel, light beam gross energy E is:
E＝∑∑I(x，y)
Energy E in the bucket
PIBComputing formula be the beam quality computing formula:
E
PIB＝∑∑I(x，y)，(x-x
max)
2+(y-y
max)
2＜r
2；
Position of optical element is put by shown in Figure 1 in the slab laser light beam cleaning system of the present invention; Open the Nd:YAG single frequency laser of MOPA structure slab laser 100; Light according to the Nd:YAG single frequency laser sends is accurately adjusted the light beam cleaning system, guarantees beam optical axis and optical element optical axis coincidence.Open the power supply of slab laser 100, the enlargement ratio of adjustment beam shaping unit 200, make expand the bundle shaping after beam size be about 30 millimeters.Light beam after the shaping is tilted mirror 301 and 37 unit bimorph deformable mirrors 302 reflex on the spectroscope 401, and the light beam that sees through spectroscope 401 focuses on the target surface of high-speed cmos camera through condenser lens.
The above; Be merely the embodiment among the present invention, but protection scope of the present invention is not limited thereto, anyly is familiar with this technological people in the technical scope that the present invention disclosed; Conversion or the replacement expected can be understood, all of the present invention comprising within the scope should be encompassed in.
Claims (10)
1. based on the slab laser light beam cleaning system of bimorph deformable mirror, it is characterized in that be, said system comprises:
One slab laser sends the strip light beam; On the strip beam path, place beam shaping unit, tilting mirror, bimorph deformable mirror, spectroscope, focusing unit, the polarizer, analyzer and two-dimensional imaging device successively;
One beam shaping unit becomes the strip beam shaping square beam of light of collimation;
One tilting mirror and a bimorph distorting lens, the square beam of light with collimation reflects successively, the square beam of light that obtains reflecting;
One spectroscope is divided into two bundles with the square beam of light that reflects, and wherein exports a branch of folded light beam as the slab laser light beam that purifies, and exports another bundle and is transmitted light beam;
One focusing unit focuses on spectroscopical transmitted light beam, and the non-linear polarization light beam of output focusing;
One polarizer and an analyzer constitute the light intensity attenuation system between focusing unit and two-dimensional imaging device, the non-linear polarization light beam after the polarizer focuses on focusing unit rises to be biased into and is linearly polarized light beam; To be positioned at the direction rotation of the analyzer light beam incident along the line on the support, through the angle of rotation analyzer, in order to the energy of adjustment outgoing light beam;
One two-dimensional imaging device is positioned on the focal plane of focusing unit, and is positioned at after the analyzer, and the two-dimensional imaging device is used for the transmitted light far-field intensity distribution is measured and obtained to the Energy distribution of linearly polarized light;
One control computer links to each other with the two-dimensional imaging device with data wire through data collecting card, and the transmitted light far-field intensity distribution that receives and in real time the two-dimensional imaging device is measured is calculated, and obtains beam quality; The control computer utilizes the random optimization control algolithm beam quality to be calculated and the digital voltage signal of controlled bimorph deformable mirror and tilting mirror; And after by the D/A card of control on the computer this digital voltage signal being carried out digital-to-analogue conversion, obtain analog voltage signal;
One high-voltage amplifier; Its input is connected with the output of control computer; The output of high-voltage amplifier is connected to tilting mirror and bimorph deformable mirror through data wire; Receive and analog voltage signal is amplified, and the analog voltage signal that will obtain amplifying sends into the driver of tilting mirror and bimorph deformable mirror, be used to control the angle of inclination of tilting mirror and the minute surface face shape of bimorph deformable mirror; Completion reaches the purpose that improves the slab laser Gaussian beam quality that purifies to the compensation of slab laser output beam wavefront distortion.
2. the slab laser light beam cleaning system based on bimorph deformable mirror according to claim 1 is characterized in that, the gain medium that described slab laser uses is the laser crystal or the laser glass of battened construction.
3. the slab laser light beam cleaning system based on bimorph deformable mirror according to claim 1; It is characterized in that described beam shaping unit is shaped as the slab laser output beam square beam of light that can cover the best correcting area of bimorph deformable mirror minute surface.
4. the slab laser light beam cleaning system based on bimorph deformable mirror according to claim 1 is characterized in that, the minute surface of said bimorph deformable mirror is coated with the highly reflecting films system to outgoing laser beam.
5. the slab laser light beam cleaning system based on bimorph deformable mirror according to claim 1 is characterized in that, described beam shaping unit is by one or more combination in cylindrical mirror, spherical mirror, prism, cylindrical mirror or the spherical reflector.
6. the slab laser light beam cleaning system based on bimorph deformable mirror according to claim 1; It is characterized in that; Said spectroscopical front surface is coated with high-reflecting film, the surface, back is coated with anti-reflection film, and the beam quality of spectroscopical folded light beam is consistent with the beam quality of transmitted light beam.
7. the slab laser light beam cleaning system based on bimorph deformable mirror according to claim 1 is characterized in that said focusing unit plays the effect of focused beam; Be lens; Or a speculum, or a plurality of combination of lenses, or a plurality of arrangement of mirrors.
8. the slab laser light beam cleaning system based on bimorph deformable mirror according to claim 1 is characterized in that said two-dimensional imaging device is the CCD camera, or the CMOS camera.
9. the slab laser light beam cleaning system based on bimorph deformable mirror according to claim 1; It is characterized in that a kind of as in genetic algorithm, ant group algorithm, simulated annealing or the random paralleling gradient descent algorithm of the random optimization algorithm that uses of control computer.
10. the slab laser light beam cleaning system based on bimorph deformable mirror according to claim 1 is characterized in that analyzer is a transmission-type linear polarizer.
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| CN103887689A (en) * | 2014-03-28 | 2014-06-25 | 中国科学院光电技术研究所 | Axial-symmetric polarization solid laser with self-adaptive optical system |
| CN104914584A (en) * | 2015-07-02 | 2015-09-16 | 中国科学院光电技术研究所 | Three-dimension laser beam shaping system based on wave-front corrector |
| CN106569325A (en) * | 2016-10-27 | 2017-04-19 | 中国科学院光电技术研究所 | Aberration-eliminating film telescopic system based on movable optical element |
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| CN113311580A (en) * | 2021-05-21 | 2021-08-27 | 中国人民解放军国防科技大学 | Method for preparing differential array beam wavefront corrector based on aberration measurement |
| CN113706508A (en) * | 2021-08-27 | 2021-11-26 | 歌尔科技有限公司 | Method and apparatus for analyzing beam quality, beam analyzing system, and storage medium |
| CN114326093A (en) * | 2021-12-17 | 2022-04-12 | 中国科学院光电技术研究所 | Dynamic wavefront simulation device based on fast tilting mirror and high-density deformable mirror |
| CN113706508B (en) * | 2021-08-27 | 2024-05-03 | 歌尔科技有限公司 | Beam quality analysis method, apparatus, beam analysis system, and storage medium |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103887689A (en) * | 2014-03-28 | 2014-06-25 | 中国科学院光电技术研究所 | Axial-symmetric polarization solid laser with self-adaptive optical system |
| CN104914584A (en) * | 2015-07-02 | 2015-09-16 | 中国科学院光电技术研究所 | Three-dimension laser beam shaping system based on wave-front corrector |
| CN106569325B (en) * | 2016-10-27 | 2020-01-07 | 中国科学院光电技术研究所 | Aberration-eliminating film telescopic system based on movable optical element |
| CN106569325A (en) * | 2016-10-27 | 2017-04-19 | 中国科学院光电技术研究所 | Aberration-eliminating film telescopic system based on movable optical element |
| CN111383916A (en) * | 2018-12-28 | 2020-07-07 | 上海微电子装备（集团）股份有限公司 | Laser annealing device for SiC substrate |
| CN109633891A (en) * | 2019-01-16 | 2019-04-16 | 中国工程物理研究院激光聚变研究中心 | A kind of wavefront control method |
| CN109633891B (en) * | 2019-01-16 | 2020-11-13 | 中国工程物理研究院激光聚变研究中心 | Wavefront control method |
| CN109683306A (en) * | 2019-01-31 | 2019-04-26 | 中国工程物理研究院激光聚变研究中心 | It is a kind of for overcoming the wavefront control method of thermal lensing effect |
| CN113311580A (en) * | 2021-05-21 | 2021-08-27 | 中国人民解放军国防科技大学 | Method for preparing differential array beam wavefront corrector based on aberration measurement |
| CN113311580B (en) * | 2021-05-21 | 2022-12-30 | 中国人民解放军国防科技大学 | Method for preparing differential array beam wavefront corrector based on aberration measurement |
| CN113706508A (en) * | 2021-08-27 | 2021-11-26 | 歌尔科技有限公司 | Method and apparatus for analyzing beam quality, beam analyzing system, and storage medium |
| CN113706508B (en) * | 2021-08-27 | 2024-05-03 | 歌尔科技有限公司 | Beam quality analysis method, apparatus, beam analysis system, and storage medium |
| CN114326093A (en) * | 2021-12-17 | 2022-04-12 | 中国科学院光电技术研究所 | Dynamic wavefront simulation device based on fast tilting mirror and high-density deformable mirror |
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