CN105390930A - Intracavity aberration compensating unstable cavity laser device and aberration compensating method thereof - Google Patents
Intracavity aberration compensating unstable cavity laser device and aberration compensating method thereof Download PDFInfo
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- CN105390930A CN105390930A CN201510696444.8A CN201510696444A CN105390930A CN 105390930 A CN105390930 A CN 105390930A CN 201510696444 A CN201510696444 A CN 201510696444A CN 105390930 A CN105390930 A CN 105390930A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/136—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity
Abstract
The invention relates to an intracavity aberration compensating unstable cavity laser device and an aberration compensating method thereof. The intracavity aberration compensating unstable cavity laser device comprises an unstable cavity mirror, a coupling output mirror, a laser gain medium, a pump device, a detection light source, a detection light leading-in mirror, a detection light leading-out mirror, a detection light wavefront detector and at least one compensation element, wherein the detection light wavefront detector detects a led-out detection light beam, corrects an optical path length modulation function of the compensation element based on the led-out detection light beam, and achieves intracavity aberration compensation of an unstable cavity. The intracavity aberration compensating unstable cavity laser device and the aberration compensating method thereof achieve the active optical compensation for the unstable cavity with high intracavity optical distortion, and obtains high-quality laser output; the compensation method has high universality; the intracavity insertion loss is small, the depolarization effect does not exist; the algorithm is simple, and the compensation solving rate is increased; and the overall structure is simple and convenient in debugging and maintenance, the adopted elements are all commercial elements and elements convenient in customized processing, and the practicability is very high.
Description
Technical field
The present invention relates to field of laser device technology, particularly a kind of in-cavity aberratio compensates unstable cavity laser and aberration compensating method thereof.
Background technology
Laser technology, from the sixties in last century high speed development so far, interpenetrates with other new and high technologies again meanwhile, has apply more and more widely in various fields such as materials processing, medical treatment, military affairs, measurement and scientific experiment researchs.In Development of Laser Technology process, the mankind constantly pursue all the time and obtain higher, the better Laser output of beam quality of power.Wherein, unsteady cavity because of its have large scale mould field, stronger pattern distinguishing ability, higher aberration tolerance, to advantages such as optical axis misalignment are not too responsive, it is one of the Major Technology realizing high power, high light beam quality Laser output, and it can obtain the Laser output of ring-shaped light spot, be suitable for Cassegrain system transmitting and realize overlength distance transmission and focus on.But, various aberrations in resonant cavity inevitably exist, especially by the solid state gain medium of high power density pumping, its optical aberration is particularly remarkable, it can affect oscillating laser feature, while the overlapping efficiency of reduction affects power output, along with aberration evolved behavior complicated in chamber, final Output of laser will produce the wavefront distortion of Medium Optics aberration several times, the beam quality of serious reduction Output of laser, and laser corrugated OPD distributes and in-cavity aberratio distribution does not have simple corresponding relation, cannot realize traditional point-to-point compensation.In addition, because the working point of unsteady cavity is close to critical zone in G parameter plane, when in chamber, element has higher order aberratons, be easy in chamber occur local aperture area without the steady cavity oscillations of coupling output, thus in this zonule, there is the local strong point higher than light intensity 1 to 2 quantity in average cavity, these strong points are easy to the damage causing element in chamber, reduce the reliability of laser.
In order to improve the adverse effect of in-cavity aberratio to unstable cavity laser, at present, research is done a lot of work in two both at home and abroad.First aspect unexpectedly may reduce tracavity optical aberration, specifically comprises and adopt swiftly flowing gas gain medium or adopt unconfinement encapsulation and the solid dielectric of Homogeneous cooling, improve pumping homogeneity etc.But limit by technical merit and embody rule demand, in a lot of situation, high power unstable cavity laser tracavity optical aberration is still stronger.Second aspect is in chamber, place special compensation arrangement, compensates in-cavity aberratio, and the present invention also belongs to this category.In disclosed unsteady cavity chamber, compensation method has following several at present:
1. the capacitance laser of U.S.'s Lao Lunsi-livermore national laboratory is based on the distorting lens compensation way of geometric approximation calculated off-line, and the distorting lens used in its system has Unit 192, and stroke reaches 10 μm.The principle of this compensation method is according to chamber parameter and distorting lens intracavitary locations, under approximation in geometric optics, calculated off-line obtains the relation of distoring mirror shape and round measuring beam corrugated variable quantity, obtain the inverse relationship matrix come and gone between test surface shape and distorting lens element displacement amount, then drive distorting lens to realize real-Time Compensation according to coming and going measuring beam corrugated.Its aberration compensation needs based on the round measurement in unsteady cavity, but which employs a kind of detection light path based on polarization state change, and complex structure, in chamber, insertion element is many, can affect Effect on Detecting when endovenous laser gain media has after thermal stress causes fevering sodium effect.The deviation of light by transmission direction after aberration element is ignored because which employs geometric approximation calculation compensation face type, can only be applicable to be similar to the lasers that aberration is less, higher order aberratons composition is less such as transmission Effects in Crystal Slab Heat Capacity Laser, not there is general applicability.
2. the Yb:YAG thin-sheet laser of Boeing Co. have employed conjugate imaging fixed compensation scheme.Have more than 10 plate sheet shape gain medias in its system, single sheet has high crudy, and Static wavefront distortion is not more than 1/10 λ, and λ equals 632.8nm, in order to avoid producing complicated dynamic aberration, it utilizes complicated how logical Pumping mechanism to achieve very high pumping homogeneity.It also needs to realize 4f conjugate imaging between thin slice in chamber on this basis, on the phase board each thin slice wavefront distortion being imaged in afford redress, and utilize zoom lens to thermic out of focus real-Time Compensation at work, this Laser beam quality control means are high to component requirements in chamber, in resonant cavity, element is many, and 4f imaging optic element focal length and system dimension relevant to gain region size, namely this mode is not suitable for the unsteady cavity solid state laser of heavy caliber gain media, has stronger limitation.
3. " Thinzag " laser of U.S. Da Xin company have employed one way detection subsection deformation mirror independent compensation scheme, in its unsteady cavity, each gain module comprises a set of independently active optics distortion compensation system, namely uses probe source and Hartmann sensor independently measure and use distorting lens independent compensation to each gain unit.In each compensating unit, it adopts 4f imaging system to be imaged on distorting lens by gain lath, and measures the realization compensation of light wave face according to single-pass.In this compensation way chamber, insertion element is more, system complex, and because gain lath has certain length, the conjugate relation can not realized ideal with distorting lens, after compensating in chamber, the beam quality that still can not reach expection promotes effect.
Although above-mentioned several method is compared with the beam quality improving Output of laser before aberration compensation, they all have very strong limitation, cannot be effective to have strong aberration, especially comprise the heavy caliber gain media unstable cavity laser of more higher order aberratons.Meanwhile, these methods or require very high to optical element crudy, or in resonant cavity, insertion element is a lot, or need use multiple compensating element, with high costs and cannot promote the use of.
In addition, outside chamber in the work such as laser beam purification, shaping, in order to avoid the compensating element, face type analytical Calculation of complexity, the global optimization approach such as genetic algorithm, simulated annealing can be adopted by repeatedly compensating trial, detect beam state after compensating, find relatively optimum complementary area type.But, because come and go laser in high power unsteady cavity there is different size, the non-homogeneous extraction of laser also exists significant thermo-optical coupled problem, namely in the non-homogeneous heat-dissipating of gain medium, thermic aberration, chamber, oscillating laser intensity distributions influences each other, when introducing random aberration compensation in chamber, oscillating laser intensity acute variation can be caused, thus produce the change of the distribution of medium heat-dissipating and aberration, make Global Algorithm iteration be difficult to convergence.In superpower laser, even oscillating laser intensity may be caused acutely to reduce or cannot starting of oscillation because introduce random aberration, gain medium heat generation rate sharp increase and cause component wear.Therefore this method cannot be used for unsteady cavity in-cavity aberratio Active Compensation.
As mentioned above, at present, in unsteady cavity, this technology short slab of aberration compensation is applied to unsteady cavity and is brought difficulty and restriction in superlaser.
Summary of the invention
Technical problem solved by the invention is to provide a kind of in-cavity aberratio and compensates unstable cavity laser and aberration compensating method thereof, and it can be utilized to realize in-cavity aberratio compensation to the optical aberration of all kinds gain media and working system gain media; Without the need to placing imaging optic element in chamber, element in chamber is in picture, also without the need to carrying out the complicated direct Analytical Solution of complementary area type.
The technical scheme that the present invention solves the problems of the technologies described above is as follows:
A kind of in-cavity aberratio compensates unstable cavity laser, comprises unstable cavity mirror, output coupling mirror, gain medium, pump arrangement, probe source, detection light importing mirror, the appearance of detection photoconduction, detection light wave front detector and at least one compensating element;
Described probe source, it is for providing detecting light beam, wherein said detecting light beam is transferred to detection light and imports Jing Chu and have identical corrugated with the desirable unsteady cavity eigenmodes light beam of symport herein, and the beam sizes at described detecting light beam each aberration element place in chamber is mated with the desirable unsteady cavity eigenmodes beam sizes of symport herein;
Described detection light imports mirror and the appearance of detection photoconduction is level crossing, its placement location realizes described detecting light beam, and to import Jing Chu at detection light coaxially concentric with the desirable unsteady cavity eigenmodes light beam of symport herein, along laser beam axis after intracavity round trip transmission primaries outside export cavity, and detection light imports between mirror and the appearance of detection photoconduction and there is not the optical element producing aberration;
Described detection light wave front detector, its detecting light beam of deriving for the appearance of detection photoconduction;
Described compensating element, it is for compensating unsteady cavity in-cavity aberratio.
The invention has the beneficial effects as follows: the detecting light beam that the appearance of detection light wave front detector detection detection photoconduction is derived, based on the detecting light beam that the appearance of detection photoconduction is derived, the optical path modulation function of correction-compensation element, realizes unsteady cavity in-cavity aberratio and compensates; Active optics compensation can be carried out to the unsteady cavity in chamber with stronger optical distortion, obtain high-quality Laser output; The factors such as compensation method and unsteady cavity structure, booster element feature, compensating element, kind have nothing to do, and have very strong universality; Adopt the detecting light beam of nature polarization or random polarization, without the need to inserting bit phase delay element or the polarization selectors of polarizability in chamber, insertion loss is little, and affects without depolarization; Use the corrugated based on round detecting light beam, Approach by inchmeal compensates and obtains optimum optical path modulation function, avoid oppositely solving in in-cavity aberratio, chamber by laser corrugated the complex mathematical compensating light path distribution to solve, while reducing algorithm complexity, improve compensation velocities solved, to time dependent in-cavity aberratio, there is stronger compensation ability; Can place multiple compensating element, in chamber, the optimum optical path modulation function of each compensating element, does not need to solve respectively; Overall structure of the present invention is simple, be convenient to debugging, safeguard, wherein uses element to be commercial component and is convenient to customize the element of processing, having very strong exploitativeness.
On the basis of technique scheme, the present invention can also do following improvement.
Further, the described one side of detection light importing mirror importing detecting light beam and the one side of described detection photoconduction appearance derivation detecting light beam are coated with the anti-reflection film for laser and the part reflectance coating for detecting light beam; The described detection light importing another side of mirror and the another side of described detection photoconduction appearance are coated with the anti-reflection film for laser and detecting light beam.
The beneficial effect of above-mentioned further scheme is adopted to be, while reducing detection light importing mirror and affecting oscillating laser in chamber with the appearance of detection photoconduction, strengthen the detecting light beam of derivation, be beneficial to the corrugated distributed intelligence of the detecting light beam that acquisition is derived, raising compensation effect.
Further, described compensating element, is fixed compensation element or variable backoff element; When described compensating element, is variable backoff element, also comprise the control and drive system for driving the optical path modulation function of described variable backoff element to change.
The beneficial effect of above-mentioned further scheme is adopted to be that when compensating element, is fixed compensation element, then preparation has the new fixed compensation element of target correction optical path modulation function, and described new fixed compensation element is replaced original fixed compensation element; When compensating element, is variable backoff element, then the optical path modulation function of described variable backoff element is driven to be target correction optical path modulation function by control and drive system; Aforesaid way all easily realizes technically.
Further, described laser also comprises monitoring light source and monitoring light wave front detector, and it is for monitoring the optical path modulation function of compensating element; When containing control and drive system in described laser, described monitoring light wave front detector is connected with described control and drive system, composition closed-loop feedback control system.
The beneficial effect of above-mentioned further scheme is adopted to be reduce optical path modulation function as far as possible and form residual error.
Further, described laser also comprises contracting beam optics system, and its size for the detecting light beam of deriving the appearance of detection photoconduction reduces, and makes it mate with the size of the test surface of detection light wave front detector.
The beneficial effect of above-mentioned further scheme is adopted to be that the size of detecting light beam is mated with the size of the test surface of detection light wave front detector, improves compensation effect.
Another technical scheme of the present invention is as follows:
A kind of in-cavity aberratio compensates unstable cavity laser aberration compensating method, comprises the steps:
Step 1, probe source emission detection light beam, wherein, described detecting light beam is transferred to detection light and imports Jing Chu and have identical corrugated with the desirable unsteady cavity eigenmodes light beam of symport herein, and the beam sizes at described detecting light beam each aberration element place in chamber is mated with the desirable unsteady cavity eigenmodes beam sizes of symport herein;
Step 2, detection light imports mirror and detection photoconduction appearance, and to make described detecting light beam import Jing Chu at detection light coaxially concentric with the desirable unsteady cavity eigenmodes light beam of symport herein, along laser beam axis after intracavity round trip transmission primaries outside export cavity, and detection light imports between mirror and the appearance of detection photoconduction and does not produce aberration;
Step 3, the detecting light beam that the appearance of detection light wave front detector detection detection photoconduction is derived, based on the detecting light beam that the appearance of detection photoconduction is derived, the optical path modulation function of correction-compensation element, realizes unsteady cavity in-cavity aberratio and compensates.
On the basis of technique scheme, the present invention can also do following improvement.
Further, described step 3 specific implementation comprises the steps:
Step 31, the detecting light beam that the appearance of detection detection photoconduction is derived, obtains the corrugated of detecting light beam, is designated as
i=1;
Step 32, reverse after Mathematical treatment is carried out to the corrugated of detecting light beam, and it can be used as the correction optical path modulation amount of compensating element, superpose with original optical path modulation function of compensating element, obtain the target correction optical path modulation function of compensating element; Wherein, described Mathematical treatment comprises space filtering, edge-smoothing and amplitude attenuation;
The target correction optical path modulation function of described compensating element, is as follows:
Wherein, described in
for original optical path modulation function of compensating element, described in
for the correction optical path modulation amount of compensating element, described in
for the target correction optical path modulation function of compensating element;
Step 33, correction-compensation element, makes its optical path modulation function be target correction optical path modulation function;
Step 34, the detecting light beam of detection detection photoconduction appearance derivation again, obtains the corrugated of detecting light beam, is designated as
Step 35, compares the root-mean-square value on the corrugated of twice detecting light beam in front and back, and the relation of detection times and default detection times; When meeting following formula, making i=i+1, returning and performing step 32; Otherwise, end operation;
Described formula is as follows:
Wherein, described p is for presetting detection times.
Further, the specific implementation of described step 33 comprises:
When described compensating element, is fixed compensation element, then preparation has the new fixed compensation element of target correction optical path modulation function, and described new fixed compensation element is replaced original fixed compensation element;
When described compensating element, is variable backoff element, then the optical path modulation function of described variable backoff element is driven to be target correction optical path modulation function by control and drive system.
Further, between described step 33 and step 34, also comprise step 3334,
Described step 3334, adopt monitoring light source and monitoring light wave front detector, obtain compensating element, revised actual correction optical path modulation function, and described actual correction optical path modulation function and target correction optical path modulation function are contrasted, examination and correction accuracy rate; When actual correction optical path modulation function and target correction optical path modulation function contrast inconsistent, return and perform step 33; Otherwise, perform step 34.
Further, the number of described compensating element, is multiple, the optical path modulation function of described correction-compensation element, and what realize the compensation of unsteady cavity in-cavity aberratio is implemented as the optical path modulation function revising any compensating element, realizes unsteady cavity in-cavity aberratio and compensates.
Accompanying drawing explanation
Fig. 1 is the schematic diagram that a kind of in-cavity aberratio of the present invention compensates the embodiment 1 of unstable cavity laser;
Fig. 2 is the schematic diagram that a kind of in-cavity aberratio of the present invention compensates the embodiment 2 of unstable cavity laser;
Fig. 3 is the method flow diagram that a kind of in-cavity aberratio of the present invention compensates unstable cavity laser aberration compensating method.
Embodiment
Be described principle of the present invention and feature below in conjunction with accompanying drawing, example, only for explaining the present invention, is not intended to limit scope of the present invention.
As depicted in figs. 1 and 2, a kind of in-cavity aberratio compensates unstable cavity laser, comprises unstable cavity mirror, output coupling mirror, gain medium, pump arrangement, probe source, detection light importing mirror, the appearance of detection photoconduction, detection light wave front detector and at least one compensating element.
Described unstable cavity mirror has two panels usually, itself and laser transmission direction, and namely optical axis is vertical, and its minute surface is coated with high-reflecting film for optical maser wavelength or part reflectance coating, laser between the mirror of two panels chamber, i.e. intracavity round trip transmission vibration.Chamber mirror also can exceed two panels, can be curved mirror, also can be made up of curved mirror and combination plane mirrow, and its minute surface is coated with high-reflecting film for optical maser wavelength or part reflectance coating, wherein two panels chamber mirror is vertical with optical axis, laser is between this two panels chamber mirror, and namely intracavity round trip transmission is vibrated, and its wave-front curvature may be transformed, other chamber mirrors and optical axis have certain angle, as reflection folding mirror in chamber, laser may be changed by its reflection postwave face curvature, also may not change.
The partial coupling that described output coupling mirror can realize oscillating laser in chamber exports, and namely outside fraction of laser light output cavity, it can be a slice independently annular mirror reflecting optics, and its central aperture region can make laser light; Also can realize its function by a slice chamber mirror, this sheet chamber mirror can realize coupling output by outside its high anti-aperture area, also can plate part reflectance coating or gradual change reflectivity film and realize transmission enhancement and export on its minute surface.
Described gain medium and pump arrangement in chamber for oscillating laser provides gain.Wherein gain medium can be solid material or gas material, and when it is solid material, it can be transmissive element or reflecting element, and it can be naturally cooled or be forced cooling simultaneously.Pump arrangement provides excitation to make gain medium live in concentrated communities population upset, for stimulated radiation provides condition.This energisation mode can be light stimulus, electric excitation or chemical reaction excitation, and meanwhile, this excitation can be continuous print, or pulse.
Under normal circumstances, chamber mirror and gain medium form resonant cavity jointly.The minute surface parameter of chamber mirror and position relationship need and gain medium optical characteristics considers.Namely following condition should be met: it can not realize the constraint of beam sizes to any zlasing mode or certainly reproduce, namely any light beam beam sizes in reciprocating vibration process can successively increase, until overflow resonant cavity behind the effective output aperture reaching output coupling mirror or the reflection aperture exceeding certain chamber mirror.In such non-stable resonant cavity, always there is a kind of laser beam can realize certainly reproducing of its corrugated curvature, this light beam is exactly the eigen mode of resonant cavity.In such resonant cavity, the distance that laser is transferred to other end chamber mirror from chamber, one end mirror is that chamber is long, and in the present invention, the long not restriction in chamber, aperture size and the pump arrangement area size of each chamber mirror, gain medium also do not limit.When each reflection, the transmissive element that comprise gain medium in chamber are desirable geometric optics element, namely level crossing, can the spherical mirror and/or paraboloidal mirror etc. of holography, and each curved surface elements is strictly to when neutralizing aligning, be called desirable unsteady cavity in the present invention, corresponding desirable unsteady cavity eigenmodes light beam, the light beam namely meeting the existing condition of desirable unsteady cavity leisure is plane wave or spherical wave.Well-known, in chamber, the corrugated radius of curvature of each position eigenmodes can solve acquisition according to resonant cavity from reproducing principle.
Described probe source, it is for providing the detecting light beam of certain wave EDS maps, wherein said detecting light beam is transferred to detection light and imports Jing Chu and have identical corrugated with the desirable unsteady cavity eigenmodes light beam of symport herein, and the beam sizes at described detecting light beam each aberration element place in chamber is mated with the desirable unsteady cavity eigenmodes beam sizes of symport herein.The corrugated radius of curvature that described detecting light beam is transferred on detection light importing mirror should be consistent as far as possible away from the wave-front curvature radius detecting the desirable unsteady cavity eigenmodes light beam that photoconduction appearance direction is transmitted with this position, and namely it is also plane wave or spherical wave.Such detecting light beam just can in chamber identical or close with laser to disperse, convergence feature at intracavity round trip transmission primaries, deriving aberration that detecting light beam comprises is that it passes twice through each aberration element with different beam sizes and obtains.For the ease of detection, the wavelength, breadth of spectrum line etc. of the detecting light beam that this probe source exports should mates with detection light wave front detector, can by Laser Output Beam by the acquisition of optical transform means such as expanding.The current industrial technology level of this probe source is easy to realize.When resonant cavity is desirable unsteady cavity, the corrugated of deriving detecting light beam should be consistent with the desirable unsteady cavity eigenmodes corrugated that light beam is deriving Jing Chu, be plane wave or spherical wave, when having aberration in chamber, the corrugated of deriving detecting light beam can bend, the information that such corrugated carries in-cavity aberratio distribution and develops.
Described detection light imports mirror and the appearance of detection photoconduction is level crossing, its placement location realizes described detecting light beam, and to import Jing Chu at detection light coaxially concentric with the desirable unsteady cavity eigenmodes light beam of symport herein, along laser beam axis after intracavity round trip transmission primaries outside export cavity, and detection light imports mirror and the appearance of detection photoconduction should as far as possible near placing, detection light imports between mirror and the appearance of detection photoconduction does not exist the optical element producing aberration.
The one side that described detection light imports the one side and described detection photoconduction appearance derivation detecting light beam that mirror imports detecting light beam is coated with the anti-reflection film for laser and the part reflectance coating for detecting light beam; The described detection light importing another side of mirror and the another side of described detection photoconduction appearance are coated with the anti-reflection film for laser and detecting light beam.Laser beam axis imports mirror and the appearance of detection photoconduction through detection light, and has certain angle between optical axis and minute surface, and oscillating laser is not changed by these two eyeglass transmission directions.Detecting light beam and the detection light angle imported between mirror normal equal optical axis and detection light and import angle between mirror normal, and detecting light beam, detection light importing mirror normal, laser beam axis are positioned in same plane.The part that detecting light beam is detected light importing lens reflecting is transmitted along optical axis direction away from the direction detecting photoconduction appearance, it once can import mirror and the appearance of detection photoconduction by detection light after being returned by the mirror reflection Hou Yuan road, chamber of one end, its transmissive portions branch is along the chamber mirror of the optical axis directive other end, by chamber mirror reflection after again transmit along optical axis, its can be detected photoconduction appearance part reflection and directive chamber outside.
Described detection light wave front detector, its detecting light beam of deriving for the appearance of detection photoconduction.Described detection light wave front detector can but be not limited to Hartmann detector and interferometer type detector.
Described compensating element, it can be positioned over any position in resonant cavity for compensating unsteady cavity in-cavity aberratio, but when it is near the region that the beam sizes that desirable unsteady cavity eigenmodes both direction is transmitted is more close, compensation effect is better.It is characterized by light beam pass through or by its reflection process, specifically can modulate corrugated.Its modulation principle is that oscillating laser is had different light paths by by compensating element, or by different pore size region in aberration element reflects process.
Described compensating element, is fixed compensation element, as phase board etc.; Or variable backoff element, as piezoelectric type distorting lens, mechanical type distorting lens etc.; It has identical reflection to laser and detecting light beam in resonant cavity, or transmissison characteristic.When described compensating element, is variable backoff element, also comprise the control and drive system for driving the optical path modulation function of described variable backoff element to change.
Described laser also comprises monitoring light source and monitoring light wave front detector, and it is for monitoring the optical path modulation function of compensating element; When containing control and drive system in described laser, described monitoring light wave front detector is connected with described control and drive system, composition closed-loop feedback control system.
Described laser also comprises contracting beam optics system, and as optical systems such as telescopic systems, its size for the detecting light beam of deriving the appearance of detection photoconduction reduces, and makes it mate with the size of the test surface of detection light wave front detector.
As shown in Figure 3, a kind of in-cavity aberratio compensates unstable cavity laser aberration compensating method, comprises the steps:
Step 1, probe source emission detection light beam, wherein, described detecting light beam is transferred to detection light and imports Jing Chu and have identical corrugated with the desirable unsteady cavity eigenmodes light beam of symport herein, and the beam sizes at described detecting light beam each aberration element place in chamber is mated with the desirable unsteady cavity eigenmodes beam sizes of symport herein.
Step 2, detection light imports mirror and detection photoconduction appearance, and to make described detecting light beam import Jing Chu at detection light coaxially concentric with the desirable unsteady cavity eigenmodes light beam of symport herein, along laser beam axis after intracavity round trip transmission primaries outside export cavity, and detection light imports between mirror and the appearance of detection photoconduction and does not produce aberration.
Step 3, the detecting light beam that the appearance of detection light wave front detector detection detection photoconduction is derived, based on the detecting light beam that the appearance of detection photoconduction is derived, the optical path modulation function of correction-compensation element, realizes unsteady cavity in-cavity aberratio and compensates.
When the number of compensating element, is multiple, the optical path modulation function of described correction-compensation element, what realize the compensation of unsteady cavity in-cavity aberratio is implemented as the optical path modulation function revising any compensating element, realizes unsteady cavity in-cavity aberratio and compensates.
Described step 3 is implemented as and comprises the steps:
Step 31, the detecting light beam that the appearance of detection detection photoconduction is derived, obtains the corrugated of detecting light beam, is designated as
i=1.
When having aberration in chamber, deriving in detecting light beam corrugated and desirable unsteady cavity to derive between detecting light beam corrugated and there is difference, this difference is the optical path modulation function about two-dimensional space distribution
now start first round compensation, described i is the wheel number that mark compensates, therefore, now i=1.
Step 32, reverse after Mathematical treatment is carried out to the corrugated of detecting light beam, and it can be used as the correction optical path modulation amount of compensating element, superpose with original optical path modulation function of compensating element, obtain the target correction optical path modulation function of compensating element; Wherein, described Mathematical treatment comprises space filtering, edge-smoothing and amplitude attenuation.
The target correction optical path modulation function of described compensating element, is as follows:
Wherein, described in
for original optical path modulation function of compensating element, described in
for the correction optical path modulation amount of compensating element, described in
for the target correction optical path modulation function of compensating element.
When the number of compensating element, is multiple, in each compensation round, correction optical path modulation amount can be distributed and different compensating element,s, also can compensate in round in difference and give different compensating element,s by correction optical path modulation amount.
Step 33, correction-compensation element, makes its optical path modulation function be target correction optical path modulation function.
The specific implementation of described step 33 comprises:
When described compensating element, is fixed compensation element, then preparation has the new fixed compensation element of target correction optical path modulation function, and described new fixed compensation element is replaced original fixed compensation element.When described compensating element, is variable backoff element, then the optical path modulation function of described variable backoff element is driven to be target correction optical path modulation function by control and drive system.
If use fixed compensation (transmission or reflection) element, before compensation, at compensating element, position holding plane (transmission or reflection) mirror, its optical path modulation function
or place fixed compensation (transmission or the reflection) element with any optical path modulation function.If use variable backoff (transmission or reflection) element, before compensation, its optical path modulation function also can be arbitrary.
Step 34, the detecting light beam of detection detection photoconduction appearance derivation again, obtains the corrugated of detecting light beam, is designated as
the corrugated of the detecting light beam of deriving
changing Pattern is
if adopt transmission-type compensating element, then m=1; If adopt reflective compensating element, then m=2.Wherein o
(i)compensate the evolution introduced in a small amount for non-conjugated, its concrete numerical value distributes with in-cavity aberratio, cavity configuration, compensating element, position, that decay factor and optical path modulation function form the factors such as residual error is relevant, be indifferent to it in actual applications and specifically distribute.
No matter be prepare fixed compensation element, or drived control variable backoff element, can difference be there is between actual correction optical path modulation function and target correction optical path modulation function, be referred to as optical path modulation function and form residual error.Therefore, between described step 33 and step 34, also step 3334 is comprised.
Described step 3334, adopt monitoring light source and monitoring light wave front detector, obtain compensating element, revised actual correction optical path modulation function, and described actual correction optical path modulation function and target correction optical path modulation function are contrasted, examination and correction accuracy rate; When actual correction optical path modulation function and target correction optical path modulation function contrast inconsistent, return and perform step 33, when containing control and drive system in described laser, light wave front detector will be monitored be connected with control and drive system, composition closed-loop feedback control system, makes compensating element, reduce optical path modulation function as far as possible and forms residual error; Otherwise, perform step 34.
Step 35, compares the root-mean-square value on the corrugated of twice detecting light beam in front and back, and the relation of detection times and default detection times; When meeting following formula, making i=i+1, returning and performing step 32; Otherwise, end operation.
Described formula is as follows:
Wherein, described p is for presetting detection times.
Finally, the target correction optical path modulation function that has of compensating element,
Because round detecting light beam may be spherical wave, in another chamber, detect light wave front detector and contracting bundle and/or beam expander optical system before monitoring light wave front detector, may be placed, therefore, for situation therewith, the space coordinates of above-mentioned corrugated function all needs first to be normalized according to respective hot spot bore, and then carries out relevant Mathematical treatment and calculating.It is relevant to the size of eigenmodes light beam on compensating element, position in desirable unsteady cavity that compensating element, effectively modulates aperture.
Utilize said method, each target correction optical path modulation function of taking turns compensating element, in compensation process can be obtained.No matter be adopt fixed compensation element successively to process, prepare position as used magnetic converting technique and shield mutually; Or adopt variable backoff element to convert online, as the distorting lens of Piezoelectric Ceramic, all there is not technical problem.
Place after said method determines the compensating element, of face type in unsteady cavity, be imported into the detecting light beam with desirable unsteady cavity eigenmodes light beam equidirectional transmitting beam in chamber with identical wave-front curvature, the wave-front curvature after intracavity round trip transmits a week is still identical with desirable unsteady cavity eigenmodes light beam equidirectional transmitting beam.Therefore, the actual unsteady cavity eigenmodes of corresponding this desirable unsteady cavity eigenmodes meets the corrugated curvature after intracavity round trip vibration from reproducing condition, therefore, can realize the lifting to unstable cavity laser beam quality.
In concrete enforcement, unsteady cavity can be and just props up or a negative unsteady cavity, can be confocal or non-confocal unsteady cavity; The state of matter of the gain medium in unsteady cavity, shape, quantity do not limit, but and gain medium reflection-type or transmission-type; Resonant cavity ideally eigenmodes beam sizes can be coupled outgoing mirror restriction, limited by gain media aperture, by pump arrangement, area size limits, or limited by the aperture diaphragm placed in chamber, only need compensating element, aperture size and optical path modulation area size thereof to equal aberration element place beam sizes 1 ~ 1.3 times in eigenmodes.
Embodiment 1, as shown in Figure 1, comprise unstable cavity mirror 111, unstable cavity mirror 112, output coupling mirror 12, gain medium 13, detection light imports mirror 14, detection photoconduction appearance 15, probe source 16, detection light wave front detector 17 and compensating element, 18, the oscillating laser 102 in the detecting light beam 101 sent by probe source 16 and chamber transmits in resonant cavity.In this implementation, unstable cavity mirror 111 and unstable cavity mirror 112, and in above-mentioned various chamber, element forms a negative unsteady cavity; Wherein, unstable cavity mirror 111 and unstable cavity mirror 112 are all with one heart coaxial to oscillating laser 102, and are coated with the high-reflecting film for oscillating laser 102 and detecting light beam 101, change the wave-front curvature of light beam in reflection process.In such unsteady cavity, as in fruit caving, element does not all have aberration, i.e. ideally oscillating laser eigenmodes light beam reciprocating vibration between the mirror of chamber.In FIG, two kinds of different hacures directions represent the transmission direction different in chamber of eigen mode pattern light beam.Unstable cavity mirror 112 is also as the output coupling mirror 12 of unsteady cavity, because, unstable cavity mirror 112 mirror surface aperture size is less than the eigenmodes beam sizes transmitted to unstable cavity mirror 112 by unstable cavity mirror 111 at this place, reflect outside aperture at unstable cavity mirror 112, part oscillating laser will overflow resonant cavity, no longer continue vibration, this part laser and coupling output laser 1021.Place gain medium 13 in chamber and provide gain for oscillating laser 102.Wherein the state of matter of gain medium 13, size, shape and optical property etc. are not specifically limited, and it also can be diversified by pumping mechanism, does not therefore draw pump arrangement in FIG.In resonant cavity, gain medium 13 may be fixed because many reasons produces, or the optical aberration of change, and makes laser beam quality deterioration.In order to avoid resonant cavity enters stable cavity, the all optical elements comprising gain medium 13 in unstable cavity mirror 111, unstable cavity mirror 112 and chamber except level crossing are represented by optical matrix, and by any one element in chamber, in a two-way process of resonant cavity, by said elements optical matrix, and transmission optics matrix is multiplied successively between them, obtain the round-trip transmission matrix M=[A, B of resonant cavity; C, D], curvature mirror radius and the chamber that reasonably must design unstable cavity mirror 111 and unstable cavity mirror 112 are long, ensure-1 < (A+D)/2 > 1.It is a level crossing that detection light imports mirror 14, makes its minute surface normal and laser generation optical axis have certain angle α and inserts in resonant cavity, and surface of its importing detecting light beam is coated with the anti-reflection film to optical maser wavelength and the part reflectance coating to detecting light beam under α angle; The reflectivity of this part reflectance coating can be 1% ~ 99%, and obtains best effects when it is 50% to the transmissivity of detecting light beam; Its another surface is coated with the anti-reflection film to laser and detection optical wavelength under α angle.The detecting light beam 101 sent by probe source 16 is detected light and imports the reflection of mirror 14 part, and reflecting part is transmitted to unstable cavity mirror 112.Distinguish detecting light beam 101 and oscillating laser 102 to import on mirror 14 at detection light, the wavelength of detecting light beam 101 that probe source 16 exports and the wavelength difference of oscillating laser 102 are greater than 5nm.The intrinsic laser pattern light beam transmitted to unstable cavity mirror 112 under the detecting light beam 101 that probe source 16 is launched and ideal conditions imports because of having identical wave-front curvature on mirror 14 at detection light, and coaxially concentric, corrugated coincidence.Specific requirement is that both root-mean-square values of corrugated difference are not more than 3 μm.Detecting light beam 101 is imported into after in chamber, its corrugated curvature of rear change is reflected successively by unstable cavity mirror 111, detecting light beam 101 is with round form, element in various chamber successively, after comprising gain medium 13 and compensating element, 18 etc., reflected by unstable cavity mirror 112, after again changing its radius of curvature, oppositely successively by element in above-mentioned each chamber.Namely, on each optical element, detecting light beam passes through with different beam sizes for twice.To probe source 16 especially requirement be, after in its detecting light beam 101 introduction chamber launched, need to have enough beam sizes, specific requirement is that detecting light beam 101 size should match with the size of this place ideally eigen mode laser beam, namely should not be less than 90% of this place's laser size.After the detecting light beam 101 arrival detection photoconduction appearance 15 of unstable cavity mirror 112 direction transmission, part is reflected, outside export cavity.Here detection photoconduction appearance 15 and detection light import mirror 14 optical texture, plated film requires similar, its surface coating of deriving detecting light beam can be 1% ~ 99% to the reflectivity of the wavelength of detecting light beam, obtains best effects equally when it is 50% to detecting light beam transmissivity.Detecting light beam 101 directive detection light wave front detector 17 outside export cavity, in specific implementation, in order to mate the target surface region of detection light wave front detector 17, can use contracting beam optics system 171 pairs of detecting light beams 101 to carry out size change over.Detection light wave front detector 17 can obtain the corrugated distributed intelligence of its incident beam, and its particular type does not specially require in the present invention.
In embodiment 1, compensating element, 18 can shield mutually for position, and laser and detecting light beam are by after compensating element, 18, and corrugated can be shielded according to position the specially designed light field modulating function had mutually and be changed.When compensating element, 18 ascend the throne mutually screen for transmissive element time, it is its face type function to the corrugated knots modification of the light beam that one way is passed through.Utilize detection light wave front detector 17 to measure to the detecting light beam 101 of deriving the corrugated information obtained, according to above-mentioned aberration compensating method, determine the best and the final goal correction optical path modulation function of compensating element, 18.Wherein, space filtering can adopt frequency spectrum low-pass filtering, as FFT etc.; Series expansion, as Ze Nike series expansion, Legnedre series expansion etc.; Or spatial domain smothing filtering etc.These means are all very ripe in Digital Image Processing; Wherein, edge-smoothing can adopt the method such as to take advantage of with corresponding stencil function number, and stencil function is as Gaussian function, super-Gaussian function etc.; Wherein, amplitude attenuation allows the corrugated function of detecting light beam be multiplied by a decay factor, the span of described decay factor be (0,1], it can make fixed value in different iterative compensation rounds, also can make change.Step 32, reverse after carrying out Mathematical treatment to the corrugated of detecting light beam, wherein, the corrugated function oppositely by the detecting light beam after Mathematical treatment is multiplied by-1.
Embodiment 2, as shown in Figure 2, comprise unstable cavity mirror 211, unstable cavity mirror 212, output coupling mirror 22, gain medium 231, gain medium 232, gain medium 233, gain medium 234, detection light importing mirror 24, detection photoconduction appearance 25, probe source 26, detection light wave front detector 27, compensating element, 281, compensating element, 282 and control and drive system 29, oscillating laser 202 in the detecting light beam 201 sent by probe source 26 and chamber transmits in resonant cavity, finally utilizes output coupling mirror 22 to obtain coupling output laser 2021.In this implementation, unstable cavity mirror 211 and unstable cavity mirror 212, and in above-mentioned various chamber, element formation just props up unsteady cavity; Output coupling mirror 22 is the speculum of annular aperture, and its central area can make laser freely pass through, and marginal annular region is coated with the high-reflecting film to laser, the laser coupled exposing to this region is exported; In order to improve laser gain, multi-disc reflection-type gain medium is placed in chamber, comprise gain medium 231, gain medium 232, gain medium 233 and gain medium 234, usually, reflection type medium is easier introduces significant aberration in unsteady cavity; Compensating element, 281 and compensating element, 282 can be reflective Piezoelectric distorting lens, and it can produce specific face type under the driving of control and drive system 29, thus carries out optical path modulation to the light beam reflected by it; The corrugated of the detecting light beam 101 of the derivation that control and drive system 29 is measured according to detection light wave front detector 27, adopt above-mentioned aberration compensating method, online resolution compensating element, 281 and/or compensating element, 282 the best and final goal correction optical path modulation function, and drive the face type change of compensating element, 281 and/or compensating element, 282, realizing its optical path modulation function is target correction optical path modulation function.
As different from Example 1, in the implementation of embodiment 2, compensating element, 281 and compensating element, 282 are reflection-type, the span of decay factor be (0,1/2]; In addition, compensating element, 281 and compensating element, 282 are variable backoff element, can the different face type of real-time implementation, in each iterative compensation round, do not need again to prepare new compensating element.In implementation, in order to increase compensation ability, using compensation element 281 and compensating element, 282 two compensating element,s.In a particular application, the number of compensating element, does not limit, in each compensation round, the compensating element, correction optical path modulation amount obtained, can distribute as the case may be and different compensating element,s, e.g., can on average, with certain proportion or random be allocated in each compensating element; Also can according to the feature of each compensating element, as, partial-compensation element has larger stroke, partial-compensation element has the face type Forming ability of higher spatial resolution, or different compensating element,s has the features such as stronger compensation ability to specific several order, is allocated in different compensating element, after correction optical path modulation amount being decomposed targetedly.
In specific embodiment of the invention scheme, the gain medium placed in chamber, detection light import mirror, the appearance of detection photoconduction, compensating element, and other optical elements and put in order, only need to ensure that between detection light importing mirror and the appearance of detection photoconduction, placement can not produce the optical element of aberration, and there is no other particular requirements, even, multi-disc gain medium and multiple compensating element, can be alternately arranged and put.The design of these changes all falls into the scope of protection of the invention.
In specific embodiment of the invention scheme, can to compensating element, particularly variable backoff element adopts monitoring system to carry out face type monitoring, namely monitoring light source is used to send collimated light beam, and the direction directive compensating element, close with detecting light beam, after its single optical path modulation, before using monitoring light wave, detector measurement derives monitoring beam wave surface, compensating element, revised actual correction optical path modulation function is obtained according to monitoring beam wave surface, and described actual correction optical path modulation function and target correction optical path modulation function are contrasted, examination and correction accuracy rate.And monitoring light wave front detector and control and drive system can be connected to form closed-loop feedback control system.Above-mentioned monitoring system independently can be monitored for each compensating element, plane also can be utilized to roll over the optical elements such as mirror and coupled together multiple by compensating element, monitor simultaneously to multiple compensating element.The design of these changes all falls into the scope of protection of the invention.
In specific embodiment of the invention scheme, can in unsteady cavity the folding mirror of holding plane, sphere and/or cylinder and/or lens, the optical elements such as prism, wedge mirror and/or aspherical mirror can be placed, various polarizability optical element can be placed, also can place various nonlinear optical element.The design of these changes all falls into the scope of protection of the invention.
In specific embodiment of the invention scheme, desirable unsteady cavity eigenmodes beam cross section, gain medium aperture area, pump arrangement pumped region and region, compensating element, effective aperture can be circle, ellipse, rectangle or other abnormity.The design of these changes all falls into the scope of protection of the invention.
In specific embodiment of the invention scheme, be not limited to two-dimentional unsteady cavity, also can build one dimension unsteady cavity, namely dimension is steady chamber, another dimension is unsteady cavity, and in this case, the present invention can apply in unsteady cavity dimension.The design of this change all falls into the scope of protection of the invention.
In specific embodiment of the invention scheme, unsteady cavity type, between gain medium type and compensating element, type, there is no corresponding relation, can according to actual conditions flexibly, combination in any.The design of this change all falls into the scope of protection of the invention.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. an in-cavity aberratio compensates unstable cavity laser, it is characterized in that, comprise unstable cavity mirror (111,112,211,212), output coupling mirror (12,22), gain medium (13,231,232,233,234), pump arrangement, probe source (16,26), detect light and import mirror (14,24), photoconduction appearance (15 is detected, 25), light wave front detector (17 is detected, 27) and at least one compensating element, (18,281,282);
Described probe source (16,26), it is for providing detecting light beam (101,201), wherein said detecting light beam (101,201) is transferred to detection light and imports mirror (14,24) place and have identical corrugated with the desirable unsteady cavity eigenmodes light beam of symport herein, and the beam sizes at described detecting light beam (101,201) each aberration element place in chamber is mated with the desirable unsteady cavity eigenmodes beam sizes of symport herein;
Described detection light imports mirror (14,24) and detection photoconduction appearance (15,25) be level crossing, its placement location realizes described detecting light beam (101,201) mirror (14 is imported at detection light, 24) place is coaxially concentric with the desirable unsteady cavity eigenmodes light beam of symport herein, along laser beam axis after intracavity round trip transmission primaries outside export cavity, and detection light imports mirror (14,24) and between detection photoconduction appearance (15,25), there is not the optical element producing aberration;
Described detection light wave front detector (17,27), its detecting light beam (101,201) of deriving for detection photoconduction appearance (15,25);
Described compensating element, (18,281,282), it is for compensating unsteady cavity in-cavity aberratio.
2. a kind of in-cavity aberratio compensates unstable cavity laser according to claim 1, it is characterized in that, described detection light imports mirror (14,24) one side and the described detection photoconduction appearance (15 of detecting light beam is imported, 25) detecting light beam (101 is derived, 201) one side is coated with for the anti-reflection film of laser (102,202) and the part reflectance coating for detecting light beam (101,201); The another side of another side and described detection photoconduction appearance (15,25) that described detection light imports mirror (14,24) is coated with the anti-reflection film for laser (102,202) and detecting light beam (101,201).
3. a kind of in-cavity aberratio compensates unstable cavity laser according to claim 1, and it is characterized in that, described compensating element, (18,281,282) is fixed compensation element or variable backoff element; When described compensating element, (18,281,282) for variable backoff element time, also comprise the control and drive system (29) for driving the optical path modulation function of described variable backoff element to change.
4. a kind of in-cavity aberratio compensates unstable cavity laser according to claim 3, it is characterized in that, also comprise monitoring light source and monitoring light wave front detector, it is for monitoring the optical path modulation function of compensating element, (18,281,282); When containing control and drive system (29) in described laser, described monitoring light wave front detector is connected with described control and drive system (29), composition closed-loop feedback control system.
5. compensate unstable cavity laser according to the arbitrary described a kind of in-cavity aberratio of Claims 1-4, it is characterized in that, also comprise contracting beam optics system (171), it is for detection photoconduction appearance (15,25) detecting light beam (101 of deriving, 201) size reduces, and makes it mate with the size of the test surface of detection light wave front detector (17,27).
6. in-cavity aberratio compensates a unstable cavity laser aberration compensating method, it is characterized in that, comprises the steps:
Step 1, probe source (16,26) emission detection light beam (101,201), wherein, described detecting light beam (101,201) be transferred to detection light and import mirror (14,24) place has identical corrugated with the desirable unsteady cavity eigenmodes light beam of symport herein, and the beam sizes at described detecting light beam (101,201) each aberration element place in chamber is mated with the desirable unsteady cavity eigenmodes beam sizes of symport herein;
Step 2, detection light imports mirror (14,24) and detection photoconduction appearance (15,25) described detecting light beam (101,201) is made to import mirror (14,24) place at detection light coaxially concentric with the desirable unsteady cavity eigenmodes light beam of symport herein, along laser beam axis after intracavity round trip transmission primaries outside export cavity, and do not produce aberration between detection light importing mirror (14,24) and detection photoconduction appearance (15,25);
Step 3, detection light wave front detector (17,27) detection detects the detecting light beam (101,201) that photoconduction appearance (15,25) is derived, based on detection photoconduction appearance (15,25) detecting light beam (101,201) of deriving, correction-compensation element (18,281,282) optical path modulation function, realizes unsteady cavity in-cavity aberratio and compensates.
7. a kind of in-cavity aberratio compensates unstable cavity laser aberration compensating method according to claim 6, and it is characterized in that, described step 3 specific implementation comprises the steps:
Step 31, the detecting light beam (101,201) that detection detection photoconduction appearance (15,25) is derived, obtains the corrugated of detecting light beam (101,201), is designated as φ
1 (i-1), i=1;
Step 32, to detecting light beam (101,201) corrugated is reverse after carrying out Mathematical treatment, and it can be used as compensating element, (18,281,282) correction optical path modulation amount, superposes with original optical path modulation function of compensating element, (18,281,282), obtain the target correction optical path modulation function of compensating element, (18,281,282); Wherein, described Mathematical treatment comprises space filtering, edge-smoothing and amplitude attenuation;
The target correction optical path modulation function of described compensating element, (18,281,282) is as follows:
φ
2 (i)＝φ
2 (i-1)+Δφ
2 (i)
Wherein, described φ
2 (i-1)for original optical path modulation function of compensating element, (18,281,282), described Δ φ
2 (i)for the correction optical path modulation amount of compensating element, (18,281,282), described φ
2 (i)for the target correction optical path modulation function of compensating element, (18,281,282);
Step 33, correction-compensation element (18,281,282), makes its optical path modulation function be target correction optical path modulation function;
Step 34, detection detects the detecting light beam (101,201) that photoconduction appearance (15,25) is derived again, obtains the corrugated of detecting light beam (101,201), is designated as φ
1 (i);
Step 35, compares the root-mean-square value on the corrugated of twice, front and back detecting light beam (101,201), and the relation of detection times and default detection times; When meeting following formula, making i=i+1, returning and performing step 32; Otherwise, end operation;
Described formula is as follows:
RMS (φ
1 (i))≤RMS (φ
1 (i-1)), and i < p
Wherein, described p is for presetting detection times.
8. a kind of in-cavity aberratio compensates unstable cavity laser aberration compensating method according to claim 7, and it is characterized in that, the specific implementation of described step 33 comprises:
When described compensating element, (18,281,282) for fixed compensation element time, then preparation has the new fixed compensation element of target correction optical path modulation function, and described new fixed compensation element is replaced original fixed compensation element;
When described compensating element, (18,281,282) for variable backoff element time, then drive the optical path modulation function of described variable backoff element to be target correction optical path modulation function by control and drive system (29).
9. a kind of in-cavity aberratio compensates unstable cavity laser aberration compensating method according to claim 8, it is characterized in that, between described step 33 and step 34, also comprises step 3334,
Described step 3334, adopt monitoring light source and monitoring light wave front detector, obtain compensating element, (18,281,282) revised actual correction optical path modulation function, and described actual correction optical path modulation function and target correction optical path modulation function are contrasted, examination and correction accuracy rate; When actual correction optical path modulation function and target correction optical path modulation function contrast inconsistent, return and perform step 33; Otherwise, perform step 34.
10. compensate unstable cavity laser aberration compensating method according to the arbitrary described a kind of in-cavity aberratio of claim 6 to 9, it is characterized in that, described compensating element, (18,281,282) number is multiple, the optical path modulation function of described correction-compensation element (18,281,282), realizes being implemented as of unsteady cavity in-cavity aberratio compensation and revises any compensating element, (18,281,282) optical path modulation function, realizes unsteady cavity in-cavity aberratio and compensates.
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