CN104121994A - Transient grating effect based femtosecond laser pulse measuring device - Google Patents
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Abstract
一种基于瞬态光栅效应的飞秒激光脉冲测量装置,其实质是将入射的待测激光脉冲分成四束,其中的三束通过三阶非线性介质的瞬态光栅效应产生自参考光,并与一定延迟衰减了的第四束即待测光在空间上重合并聚焦入光谱仪获得自参考干涉光谱,通过测量干涉光谱、利用自参考光谱相干方法来计算飞秒激光脉冲形状,激光光谱和光谱相位;本发明中采用凹面反射镜和凸面反射镜组成一个聚焦系统或者平面反射镜和凹面反射镜组成一个聚焦系统,这使装置结构更加紧凑、稳定,整个装置更微型化;不需光学偏振元件,可适用于光谱、脉宽分别在200-3000nm内和10-300fs内的飞秒激光光学系统。
A femtosecond laser pulse measurement device based on transient grating effect, which essentially divides the incident laser pulse to be measured into four beams, three of which pass through the transient grating effect of the third-order nonlinear medium to generate self-reference light, and The fourth beam attenuated with a certain delay, that is, the light to be measured, is spatially coincident and focused into the spectrometer to obtain a self-reference interference spectrum. By measuring the interference spectrum and using the self-reference spectrum coherence method to calculate the femtosecond laser pulse shape, laser spectrum and spectrum Phase; adopt concave reflector and convex reflector to form a focus system or planar reflector and concave reflector to form a focus system in the present invention, this makes device structure more compact, stable, and whole device is miniaturized; No need for optical polarization element , can be applied to the femtosecond laser optical system with spectrum and pulse width within 200-3000nm and 10-300fs respectively.
Description
技术领域technical field
本发明涉及飞秒激光脉冲测量,特别是一种基于瞬态光栅效应的飞秒激光脉冲测量装置。The invention relates to femtosecond laser pulse measurement, in particular to a femtosecond laser pulse measurement device based on transient grating effect.
背景技术Background technique
飞秒激光随着其在科研、生物、医疗、加工、通信、国防等领域的需要,得到了极其迅速的发展。而飞秒激光脉冲形状与脉冲宽度作为飞秒激光脉冲的重要光学参量,对它们的测量或实时监测显得十分必要。因此,寻找一种简单、方便、快速、有效的测量与实时监测的方法与装置,对于推动飞秒激光自身发展和拓展其在各个领域的应用有着极重大的作用。Femtosecond laser has been developed extremely rapidly due to its needs in scientific research, biology, medical treatment, processing, communication, national defense and other fields. As the important optical parameters of femtosecond laser pulses, the shape and pulse width of femtosecond laser pulses are very necessary for their measurement or real-time monitoring. Therefore, finding a simple, convenient, fast and effective method and device for measurement and real-time monitoring plays a very important role in promoting the development of femtosecond laser itself and expanding its application in various fields.
目前,最广泛使用的飞秒激光脉冲测量技术有:1.频率分辨光栅法(FrequencyResolved Optical Gating,FROG);2.光谱相位相干直接电场重建法(Spectral PhaseInterferometry for Direct Electric-field Reconstruction,SPIDER)。该两种技术都是基于自参考,并且通过非共线谐波产生方法,来实现对飞秒激光脉冲的单发测量。然而,该两种技术对于重建飞秒激光脉冲的算法并不直接,需要较长的时间。在SPIDER技术中,通常需要非线性晶体来转换产生测量信号,由于非线性光学晶体的相位匹配条件,这使得每台测量仪器只能适应于特定的光谱范围,从而限制了这些方法在宽光谱范围内的应用,并且这些系统与测量过程都较为复杂。基于交叉偏振波(cross-polarized wave,XPW)的自参考光谱干涉方法(self-referencedspectral interferometry,SRSI)最近也被用来测量激光脉冲。在该方法中,仅需3次简单迭代计算就可以很快获得待测激光的光谱和相位,这是目前为止最为简单方便,并可进行脉冲宽度单发测量的方法。然而该方法需要光学偏振元件。由于光学偏振元件只对特定激光波长有效,并且有一定的光谱宽度,这样也就限制了这一方法和仪器只能在特定光谱范围内应用。偏振光学元件的色散也使其对10fs以下短脉冲测量受到限制。在类似的SRSI方法上,我们最近也提出了两种分别基于自衍射效应[参见文献1:J.Liu,Y.L.Jiang,T.Kobayashi,R.X.Li,and Z.Z.Xu,“Self-referenced spectral interferometry based on self-diffractioneffect,”J.Opt.Soc.Am.B29(1):29-34(2012);参见专利:申请号:201210267065.3]和瞬态光栅效应[参见文献2:J.Liu,F.J.Li,Y.L.Jiang,C.Li,Y.X.Leng,T.Kobayashi,R.X.Li,and Z.Z.Xu,“Transient-gratingself-referenced spectral interferometry for infrared femtosecond pulsecharacterization,”Opt.Lett.37,4829(2012);参见专利:申请号:201210079324.X]的飞秒激光脉冲测量方法,该两种方法不受色散的限制,但是此二者在结构上仍较为复杂。At present, the most widely used femtosecond laser pulse measurement techniques are: 1. Frequency Resolved Optical Gating (FROG); 2. Spectral Phase Interferometry for Direct Electric-field Reconstruction (SPIDER). Both techniques are based on self-referencing and achieve single-shot measurements of femtosecond laser pulses through non-collinear harmonic generation methods. However, these two techniques are not straightforward for reconstructing the algorithm of femtosecond laser pulses and require a long time. In SPIDER technology, nonlinear crystals are usually required to convert and generate measurement signals. Due to the phase matching conditions of nonlinear optical crystals, each measuring instrument can only be adapted to a specific spectral range, which limits the use of these methods in a wide spectral range. Applications within the system, and these systems and measurement processes are relatively complex. Self-referenced spectral interferometry (SRSI) based on cross-polarized waves (XPW) has also been recently used to measure laser pulses. In this method, the spectrum and phase of the laser to be measured can be quickly obtained with only 3 simple iterative calculations. This is the most simple and convenient method so far, and can be used for single-shot measurement of pulse width. However, this method requires optical polarizing elements. Since the optical polarization element is only effective for a specific laser wavelength and has a certain spectral width, this limits the application of this method and instrument to a specific spectral range. The dispersion of polarized optical components also limits the measurement of short pulses below 10 fs. On a similar SRSI method, we have recently proposed two methods based on the self-diffraction effect [see literature 1: J.Liu, Y.L.Jiang, T.Kobayashi, R.X.Li, and Z.Z.Xu, "Self-referenced spectral interferometry based on self-diffraction effect," J.Opt.Soc.Am.B29(1):29-34(2012); see patent: application number: 201210267065.3] and transient grating effect [see Document 2: J.Liu, F.J.Li, Y.L.Jiang, C.Li, Y.X.Leng, T.Kobayashi, R.X.Li, and Z.Z.Xu, “Transient-grating self-referenced spectral interferometry for infrared femtosecond pulsecharacterization,” Opt. Lett. 37, 4829 (2012); see Patent: Application No.: 201210079324.X] femtosecond laser pulse measurement method, the two methods are not limited by dispersion, but the two methods are still relatively complex in structure.
发明内容Contents of the invention
本发明给出一种基于瞬态光栅效应的飞秒激光脉冲测量装置。本发明采用望远镜或显微物镜光路结构,装置结构简单、小巧,调节简易,数据采集与数据处理迅速,并且可以适用于不同脉冲宽度和不同波长范围的飞秒激光脉冲宽度与脉冲形状的测量与实时监测,获得的光谱相位可以反馈到相关的相位补偿装置,优化飞秒激光脉冲的输出。The invention provides a femtosecond laser pulse measurement device based on the transient grating effect. The invention adopts the optical path structure of telescope or microscope objective lens, the device structure is simple, small and exquisite, easy to adjust, data acquisition and data processing are fast, and can be applied to the measurement and measurement of femtosecond laser pulse width and pulse shape in different pulse widths and different wavelength ranges. Real-time monitoring, the obtained spectral phase can be fed back to the relevant phase compensation device to optimize the output of femtosecond laser pulses.
本发明的技术解决方案如下:Technical solution of the present invention is as follows:
一种基于瞬态光栅效应的飞秒激光脉冲测量装置,特点在于其构成包括:第一凹面反射镜、凸面反射镜、四小孔光阑板、可变中性衰减延时片、三阶非线性光学介质、小孔光阑板、第二凹面反射镜和高光谱精度的光谱仪。所述元部件位置关系如下:A femtosecond laser pulse measurement device based on the transient grating effect, characterized in that its composition includes: a first concave reflector, a convex reflector, a four-hole aperture plate, a variable neutral attenuation delay film, a third-order Linear optical medium, aperture plate, second concave mirror and spectrometer with high spectral accuracy. The positional relationship of the components is as follows:
所述的第一凹面反射镜中心具有一个小孔,所述的四小孔光阑板具有呈正方形分布的四个小孔,所述第一凹面反射镜和所述凸面反射镜组成一个聚焦系统。待测飞秒激光光束经所述第一凹面反射镜的小孔,并经所述聚焦系统聚焦,在所述凸面反射镜和所述聚焦系统的焦点之间适当位置放置所述四小孔光阑板,将所述聚焦光束分成四束分别称为第一光束、第二光束、第三光束和第四光束,在所述的四小孔光阑板和所述的焦平面之间放置所述的可变中性衰减延时片并对所述的第四光束进行衰减并引入延时作为待测光,所述的第一光束、第二光束和第三光束在空气中自由传播,并在所述焦平面处的所述三阶非线性光学介质中,产生瞬态光栅效应形成瞬态光栅信号光波作为参考光,所述待测光经过所述的三阶非线性光学介质后与所述的参考光在空间重合,两束重合的激光脉冲一起依次经过所述的小孔光阑板和所述的第二凹面反射镜反射后进入所述的高光谱精度的光谱仪进行测量,获得待测飞秒激光的自参考干涉光谱。The center of the first concave reflector has a small hole, and the four-hole aperture plate has four small holes distributed in a square, and the first concave reflector and the convex reflector form a focusing system . The femtosecond laser beam to be measured passes through the small hole of the first concave reflector and is focused by the focusing system, and the four small hole light beams are placed at an appropriate position between the convex reflector and the focal point of the focusing system The aperture plate divides the focused light beam into four beams called the first beam, the second beam, the third beam and the fourth beam, and the four-hole aperture plate and the focal plane are placed between the The above-mentioned variable neutral attenuation delay film and attenuating the fourth light beam and introducing a delay as the light to be measured, the first light beam, the second light beam and the third light beam are freely propagating in the air, and In the third-order nonlinear optical medium at the focal plane, a transient grating effect is generated to form a transient grating signal light wave as a reference light, and the light to be measured is combined with the third-order nonlinear optical medium after passing through the third-order nonlinear optical medium The above-mentioned reference light overlaps in space, and the two overlapped laser pulses pass through the aperture diaphragm plate and the second concave mirror in turn and then enter the spectrometer with high spectral precision for measurement, and obtain the Measurement of self-referencing interference spectra of femtosecond lasers.
一种基于瞬态光栅效应的飞秒激光脉冲测量装置,特点在于其构成包括:四小孔光阑板、可变中性衰减延时片、平面反射镜,第一凹面反射镜、三阶非线性光学介质、小孔光阑板、第二凹面反射镜和高光谱精度的光谱仪。所述元部件位置关系如下:A femtosecond laser pulse measurement device based on the transient grating effect, characterized in that its composition includes: four small aperture diaphragm plates, variable neutral attenuation delay film, plane reflector, first concave reflector, third-order non-conductor Linear optical medium, aperture plate, second concave mirror and spectrometer with high spectral accuracy. The positional relationship of the components is as follows:
所述的四小孔光阑板具有呈正方形分布的四个小孔,所述的第一凹面反射镜中心带一个小孔,所述的平面反射镜和第一凹面反射镜组成一个聚焦系统。待测飞秒激光光束经所述四小孔光阑板后分成四束,分别称为第一光束、第二光束、第三光束和第四光束,所述的第一光束、第二光束和第三光束所述聚焦系统,聚焦入所述聚焦系统的焦平面处放置的所述的三阶非线性光学介质,并在所述的三阶非线性光学介质中产生瞬态光栅效应形成瞬态光栅信号光波作为参考光,所述的第四光束经所述的可变中性衰减延时片衰减并引入延时后作为待测光,经过所述聚焦系统,然后经过所述的三阶非线性光学介质与所述参考光在空间重合。两束重合的激光脉冲一起依次经过所述的小孔光阑板和所述的第二凹面反射镜反射后进入所述的高光谱精度的光谱仪进行测量,获得待测飞秒激光的自参考干涉光谱。The four-aperture aperture plate has four small holes distributed in a square shape, the first concave reflector has a small hole in the center, and the plane reflector and the first concave reflector form a focusing system. The femtosecond laser beam to be measured is divided into four beams after passing through the four-hole aperture plate, which are respectively called the first beam, the second beam, the third beam and the fourth beam. The first beam, the second beam and the The third light beam is focused by the focusing system into the third-order nonlinear optical medium placed at the focal plane of the focusing system, and a transient grating effect is generated in the third-order nonlinear optical medium to form a transient state The light wave of the grating signal is used as the reference light, and the fourth light beam is attenuated by the variable neutral attenuation delay film and introduced into the delay as the light to be measured, passes through the focusing system, and then passes through the third-order non- The linear optical medium is spatially coincident with the reference light. The two overlapping laser pulses pass through the small hole aperture plate and the second concave mirror in sequence and then enter the spectrometer with high spectral precision for measurement, so as to obtain the self-referencing interference of the femtosecond laser to be measured spectrum.
本发明具有如下的显著特点:The present invention has following salient features:
1、本发明在第一种典型装置中用了第一凹面反射镜和凸面反射镜组成一个聚焦系统,在第二种典型装置中用了平面反射镜和第一凹面反射镜组成一个聚焦系统,这使装置结构更加紧凑、稳定,整个装置更微型化;1, the present invention has used the first concave reflector and the convex reflector to form a focus system in the first kind of typical device, has used the plane reflector and the first concave reflector to form a focus system in the second typical device, This makes the structure of the device more compact and stable, and the whole device is more miniaturized;
2、本发明中所使用的可变中性衰减延时片,在对待测光引入延时的同时,并对其进行强度衰减,用以实时调节所得参考光与延迟的待测光之间的能量比,从而区分参考光与待测光和保证干涉光谱的调制精确。2. The variable neutral attenuation time delay film used in the present invention introduces time delay to the light to be measured, and attenuates its intensity, so as to adjust the distance between the obtained reference light and the delayed light to be measured in real time. Energy ratio, so as to distinguish the reference light from the light to be measured and ensure the modulation of the interference spectrum is accurate.
3、本发明适用于光谱、脉宽分别在200-3000nm内和10-300fs内的飞秒激光光学系统。另外,本发明同时适用于重复频率为兆赫兹和单发飞秒激光脉冲的脉冲宽度与脉冲形状的测量,并可用于飞秒激光脉冲的实时监控,获得的光谱相位可以反馈到相关的相位补偿装置,优化飞秒激光脉冲的输出。3. The present invention is applicable to femtosecond laser optical systems with spectra and pulse widths within 200-3000nm and 10-300fs respectively. In addition, the present invention is applicable to the measurement of the pulse width and pulse shape of the megahertz and single femtosecond laser pulses at the same time, and can be used for real-time monitoring of the femtosecond laser pulses, and the obtained spectral phase can be fed back to the relevant phase compensation device to optimize the output of femtosecond laser pulses.
附图说明Description of drawings
图1,图2分别为本发明的两个典型实例装置光路图。Fig. 1 and Fig. 2 are respectively the optical path diagrams of two typical examples of the present invention.
图3是利用本发明实例装置图1测量800nm中心波长40fs激光脉冲实验结果图,分别给出了待测脉冲的光谱(虚线)、产生的瞬态光栅信号光谱(短划线)、入射脉冲与瞬态光栅信号的相干光谱(实线)。Fig. 3 is to utilize the example device of the present invention Fig. 1 to measure 800nm central wavelength 40fs laser pulse experimental result figure, have provided respectively the spectrum (dotted line) of pulse to be measured, the transient grating signal spectrum (dash line) that produces, incident pulse and Coherence spectrum of the transient grating signal (solid line).
具体实施方式Detailed ways
首先,利用基于透明介质瞬态光栅效应的光学模块和高光谱精度的光谱仪获得干涉光谱信号。First, the interference spectrum signal is obtained by using the optical module based on the transient grating effect of the transparent medium and the spectrometer with high spectral precision.
本发明的一个实施例装置如图1所示。光路主要包括:1为入射飞秒激光光束;2为第一凹面反射镜;3为凸面反射镜;4为四小孔光阑板;5为可变中性衰减延时片;6为三阶非线性光学介质,用以产生瞬态光栅效应;7为小孔光阑板,用来透过信号光和挡住杂散光;8为第二凹面反射镜;9为高光谱精度的光谱仪,用来测量激光光谱与干涉光谱。An embodiment device of the present invention is shown in FIG. 1 . The optical path mainly includes: 1 is the incident femtosecond laser beam; 2 is the first concave mirror; 3 is the convex mirror; 4 is the four-hole aperture plate; 5 is the variable neutral attenuation delay film; 6 is the third order Non-linear optical medium, used to generate transient grating effect; 7 is a small hole diaphragm plate, used to transmit signal light and block stray light; 8 is a second concave mirror; 9 is a spectrometer with high spectral accuracy, used to Measure laser spectra and interference spectra.
在图1所示的光路中,所述的第一凹面反射镜2和所述的凸面反射镜3组成一个聚焦系统;所述的四小孔光阑板4有四个中心成正方形排列的口径相等的小孔,用来选取入射激光光斑上四个部分,形成相等口径的四束激光。In the optical path shown in Fig. 1, the first concave reflector 2 and the convex reflector 3 form a focusing system; the four-aperture diaphragm plate 4 has four apertures arranged in a square at the center The equal small holes are used to select four parts on the incident laser spot to form four laser beams with equal apertures.
图1实施例装置的光路走势如下:一束光斑足够大的入射激光束1穿过所述的聚焦系统(光路在所述聚焦系统的走势为:所述的入射激光束1穿过所述的第一凹面反射镜2的中心小孔后,经所述的凸面反射镜3反射,再经所述的凹面反射镜2反射)后,经过所述的四小孔光阑板4,所述的四小孔光阑板4的四个小孔通过相等口径的四束激光,分别称为第一、第二、第三、第四光束,该四束激光位于正方形四个角,所述的第四光束透过一块合适厚度的所述可变中性衰减延时片5,得到衰减延时后的待测光,而所述的第一、第二、第三光束在空气中自由传播,所述的待测光与在空气中自由传播的所述第一、第二、第三光束之间具有一定的时间延迟。所述的第一、第二、第三光束在置于所述的聚焦系统焦平面处的所述的三阶非线性光学介质6中由于瞬态光栅效应,产生瞬态光栅信号光波作为参考光,所产生参考光正好跟所述的待测光在空间上重合。利用小孔光阑板7选取参考光和待测光并挡住杂散光,经过第二凹面反射镜8聚焦到高精度光谱仪9中,测得干涉光谱信号。The optical path trend of the embodiment device in Fig. 1 is as follows: a sufficiently large incident laser beam 1 passes through the focusing system (the trend of the optical path in the focusing system is: the incident laser beam 1 passes through the After the central aperture of the first concave reflector 2, after the reflection of the convex reflector 3, and then the reflection of the concave reflector 2), through the four small hole diaphragm plates 4, the The four apertures of the four-aperture diaphragm plate 4 pass through four laser beams of equal diameter, which are respectively called the first, second, third, and fourth beams. The four beams of laser light are located at the four corners of the square. The four light beams pass through the variable neutral attenuation delay film 5 with a suitable thickness to obtain the light to be measured after the attenuation delay, and the first, second, and third light beams propagate freely in the air, so There is a certain time delay between the light to be measured and the first, second and third light beams freely propagating in the air. The first, second, and third light beams generate transient grating signal light waves as reference light due to the transient grating effect in the third-order nonlinear optical medium 6 placed at the focal plane of the focusing system , the generated reference light just coincides with the light to be measured in space. The reference light and the light to be measured are selected by the aperture diaphragm plate 7 and the stray light is blocked, and focused into the high-precision spectrometer 9 by the second concave mirror 8 to measure the interference spectrum signal.
在图1实施例装置中,第一凹面反射镜2的中心小孔大小根据入射激光光斑大小来定,通常入射光斑要比该小孔稍大。四小孔光阑板4的四个小孔大小和间距根据射向它的光斑大小选取,以四个光斑互不影响,并且通过的能量最大为原则。第一凹面反射镜2、凸面反射镜3和第二凹面反射镜8的膜根据入射激光中心波长不同可以镀相应的银膜、金膜和介质高反膜。三阶非线性介质6材料的选择需要对入射激光透明,并且三阶非线性系数要高。9为高光谱精度的光谱仪,可以提高测量精度。In the embodiment device in FIG. 1 , the size of the small hole in the center of the first concave reflector 2 is determined according to the size of the incident laser spot, and usually the incident spot is slightly larger than the small hole. The size and spacing of the four apertures of the four-aperture diaphragm plate 4 are selected according to the size of the light spots that shoot to it, and the principle is that the four light spots do not affect each other and the passing energy is the largest. The films of the first concave reflector 2, the convex reflector 3 and the second concave reflector 8 can be plated with corresponding silver films, gold films and dielectric high-reflection films according to the different center wavelengths of the incident laser light. The material of the third-order nonlinear medium 6 needs to be transparent to the incident laser light, and the third-order nonlinear coefficient should be high. 9 is a spectrometer with high spectral precision, which can improve the measurement accuracy.
最后,通过将所得的干涉光谱信号进行自参考光谱相干方法计算,得到待测飞秒激光脉冲形状,激光光谱和光谱相位。Finally, the obtained femtosecond laser pulse shape, laser spectrum and spectral phase are obtained by performing self-reference spectral coherence calculation on the obtained interference spectral signal.
采用图1所示的装置,并结合上述具体实施方式,对飞秒激光脉冲进行了测量。当入射的激光脉冲1为重复频率1KHz,中心波长为800nm,脉冲能量为1.7uJ时得到了图3的结果。当然该入射激光脉冲条件不应限制本发明的保护范围。The femtosecond laser pulse was measured by using the device shown in FIG. 1 and in combination with the above-mentioned specific embodiments. When the incident laser pulse 1 has a repetition frequency of 1KHz, a center wavelength of 800nm, and a pulse energy of 1.7uJ, the results shown in Figure 3 are obtained. Of course, the incident laser pulse conditions should not limit the protection scope of the present invention.
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